CN105783743A - 基于红外反射法的金属薄板印涂湿膜厚度在线检测系统 - Google Patents
基于红外反射法的金属薄板印涂湿膜厚度在线检测系统 Download PDFInfo
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- CN105783743A CN105783743A CN201610192586.5A CN201610192586A CN105783743A CN 105783743 A CN105783743 A CN 105783743A CN 201610192586 A CN201610192586 A CN 201610192586A CN 105783743 A CN105783743 A CN 105783743A
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- Prior art keywords
- sensing device
- thickness
- sheet metal
- measurement
- plate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Inking, Control Or Cleaning Of Printing Machines (AREA)
Abstract
Description
Claims (4)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711398642.1A CN108168446B (zh) | 2016-03-30 | 2016-03-30 | 基于红外反射法的金属薄板印涂湿膜厚度在线检测方法 |
CN201711398641.7A CN108168445B (zh) | 2016-03-30 | 2016-03-30 | 使用方便的金属薄板印涂湿膜厚度在线检测系统 |
CN201610192586.5A CN105783743B (zh) | 2016-03-30 | 2016-03-30 | 基于红外反射法的金属薄板印涂湿膜厚度在线检测系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610192586.5A CN105783743B (zh) | 2016-03-30 | 2016-03-30 | 基于红外反射法的金属薄板印涂湿膜厚度在线检测系统 |
Related Child Applications (2)
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CN201711398642.1A Division CN108168446B (zh) | 2016-03-30 | 2016-03-30 | 基于红外反射法的金属薄板印涂湿膜厚度在线检测方法 |
CN201711398641.7A Division CN108168445B (zh) | 2016-03-30 | 2016-03-30 | 使用方便的金属薄板印涂湿膜厚度在线检测系统 |
Publications (2)
Publication Number | Publication Date |
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CN105783743A true CN105783743A (zh) | 2016-07-20 |
CN105783743B CN105783743B (zh) | 2018-03-02 |
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Family Applications (3)
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CN201610192586.5A Active CN105783743B (zh) | 2016-03-30 | 2016-03-30 | 基于红外反射法的金属薄板印涂湿膜厚度在线检测系统 |
CN201711398641.7A Active CN108168445B (zh) | 2016-03-30 | 2016-03-30 | 使用方便的金属薄板印涂湿膜厚度在线检测系统 |
CN201711398642.1A Active CN108168446B (zh) | 2016-03-30 | 2016-03-30 | 基于红外反射法的金属薄板印涂湿膜厚度在线检测方法 |
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CN201711398641.7A Active CN108168445B (zh) | 2016-03-30 | 2016-03-30 | 使用方便的金属薄板印涂湿膜厚度在线检测系统 |
CN201711398642.1A Active CN108168446B (zh) | 2016-03-30 | 2016-03-30 | 基于红外反射法的金属薄板印涂湿膜厚度在线检测方法 |
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CN (3) | CN105783743B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109405770A (zh) * | 2018-11-02 | 2019-03-01 | 上海华力微电子有限公司 | 一种通过光阻膜厚监控涂胶显影机台涂胶槽水平程度的方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108942403B (zh) * | 2018-06-26 | 2019-08-02 | 北京理工大学 | 一种精确控制透镜厚度的加工方法 |
CN115804466A (zh) * | 2022-12-02 | 2023-03-17 | 南通金源新材料有限公司 | 一种稠浆法烟草薄片厚度反馈调节方法 |
CN117739875B (zh) * | 2024-02-19 | 2024-04-23 | 湖南沃尔博精密工具有限公司 | 一种基于光电效应的刀具涂层均匀性检测系统及方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4549079A (en) * | 1981-12-29 | 1985-10-22 | Chugai Ro Kogyo Co., Ltd. | Apparatus for measuring thickness of paint coating |
CN201273814Y (zh) * | 2008-07-04 | 2009-07-15 | 上海曙光机械制造厂有限公司 | 在线铝膜测厚装置 |
CN103415757A (zh) * | 2010-12-20 | 2013-11-27 | 霍尼韦尔阿斯卡公司 | 用于测量包含反射层的产品的厚度或重量的单侧红外传感器 |
CN104613883A (zh) * | 2015-02-11 | 2015-05-13 | 南通大学 | 金属薄板印刷涂层的湿膜厚度差分测量及均匀性评估方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012115643A1 (en) * | 2011-02-24 | 2012-08-30 | Corning Incorporated | Methods and apparatus for the measurement of film thickness |
WO2013061417A1 (ja) * | 2011-10-26 | 2013-05-02 | 三菱電機株式会社 | 膜厚測定方法 |
CN102735176A (zh) * | 2012-06-25 | 2012-10-17 | 浙江大学 | 一种基于光纤光谱仪的光学薄膜厚度检测装置及方法 |
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2016
- 2016-03-30 CN CN201610192586.5A patent/CN105783743B/zh active Active
- 2016-03-30 CN CN201711398641.7A patent/CN108168445B/zh active Active
- 2016-03-30 CN CN201711398642.1A patent/CN108168446B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4549079A (en) * | 1981-12-29 | 1985-10-22 | Chugai Ro Kogyo Co., Ltd. | Apparatus for measuring thickness of paint coating |
CN201273814Y (zh) * | 2008-07-04 | 2009-07-15 | 上海曙光机械制造厂有限公司 | 在线铝膜测厚装置 |
CN103415757A (zh) * | 2010-12-20 | 2013-11-27 | 霍尼韦尔阿斯卡公司 | 用于测量包含反射层的产品的厚度或重量的单侧红外传感器 |
CN104613883A (zh) * | 2015-02-11 | 2015-05-13 | 南通大学 | 金属薄板印刷涂层的湿膜厚度差分测量及均匀性评估方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109405770A (zh) * | 2018-11-02 | 2019-03-01 | 上海华力微电子有限公司 | 一种通过光阻膜厚监控涂胶显影机台涂胶槽水平程度的方法 |
CN109405770B (zh) * | 2018-11-02 | 2020-12-25 | 上海华力微电子有限公司 | 一种通过光阻膜厚监控涂胶显影机台涂胶槽水平程度的方法 |
Also Published As
Publication number | Publication date |
---|---|
CN108168445A (zh) | 2018-06-15 |
CN108168445B (zh) | 2019-12-17 |
CN108168446A (zh) | 2018-06-15 |
CN108168446B (zh) | 2019-12-17 |
CN105783743B (zh) | 2018-03-02 |
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Inventor after: Lu Guan Inventor after: Cao Guan Inventor after: Xu Yiming Inventor after: Qiu Zixue Inventor after: Deng Yong Inventor after: Yuan Jiang Inventor after: Shao Jianxin Inventor after: Cai Ting Inventor before: Lu Guan Inventor before: Qiu Zixue Inventor before: Cao Guan Inventor before: Xu Yiming Inventor before: Deng Yong Inventor before: Yuan Jiang Inventor before: Shao Jianxin Inventor before: Cai Ting |
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