CN105764584B - Degasser and degassing method - Google Patents
Degasser and degassing method Download PDFInfo
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- CN105764584B CN105764584B CN201380081167.9A CN201380081167A CN105764584B CN 105764584 B CN105764584 B CN 105764584B CN 201380081167 A CN201380081167 A CN 201380081167A CN 105764584 B CN105764584 B CN 105764584B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
- B01D19/0063—Regulation, control including valves and floats
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
- B01D19/0036—Flash degasification
Abstract
The present invention provides a kind of degasser and degassing method, and its is simple in construction, and is that gas from liquid can be deaerated with high precision regardless of be applicable device, factory.The present invention solves above-mentioned problem by above-mentioned degasser and using the degassing method of the degasser, and above-mentioned degasser has：Chamber 10, the fluid accumulation that the chamber 10 will deaerate is in inside；The top of liquid from chamber 10 is flow into chamber 10 by injection unit 20, the injection unit 20；And output mechanism 30, the output mechanism 30 will be accumulated discharges in the liquid in chamber 10 from the downside of chamber 10, in the state of the closed inside of chamber 10, discharged by the liquid more than the flow of the liquid for flowing into flow-rate ratio in chamber 10 out of chamber 10, so as to being depressurized in chamber 10.
Description
Technical field
The present invention relates to degasser and degassing method, it is more particularly to that the gas from liquid for being present in liquid will be dissolved
The degasser and degassing method of middle removal.
Background technology
Dissolve the gas being present in liquid and sometimes result in various unfavorable conditions, for example, deteriorating liquid, make
Washed electronic unit equivalent damage, etc. with liquid as cleaning solution in the case of electronic unit etc..Degasser is by inciting somebody to action
Dissolving, which is present in the gas from liquid of liquid, to be removed, so as to prevent such unfavorable condition to occur.Such degasser
Utilize various principles.What is generally known in degasser is the degasser that make use of vavuum pump.
On the degasser proposed in patent document 1~3, any one is all from the washing for washing electronic unit etc.
The degasser for the gas removal for being present in cleaning solution will be dissolved in liquid.These degassers pass through the appearance to being filled with cleaning solution
Decompression is carried out inside device to eliminate the gas that dissolving is present in cleaning solution.The decompression technology of such degasser is to pass through
The gas that the inside of container is will be present in using vavuum pump carries out the technology that suction is depressurized so as to the inside to container.
Prior art literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 9-187603 publications
Patent document 2：Japanese Unexamined Patent Publication 11-319407 publications
Patent document 3：Japanese Unexamined Patent Publication 2000-288307 publications
The content of the invention
The problem solved is wanted in invention
But, in the degasser proposed in patent document 1~3, in addition to the circulating path of cleaning solution, it is necessary to
It is provided for the vavuum pump depressurized to the inside of container.Therefore, in these degassers, the structure of degasser becomes
It is complicated.In addition, it is necessary to suitably be selected according to the species for the cleaning solution for being applicable the wash mill of degasser and/or being deaerated
Vavuum pump.
The present invention completes to solve above-mentioned problem, a kind of simple in construction its object is to provide, and no matter group enter it is de-
The system of device of air, the species of the liquid of degassing for how, the degassing that gas from liquid can be deaerated with high precision is filled
Put and degassing method.
The solution used to solve the problem
Degasser of the invention for solving above-mentioned problem is characterised by that it possesses：Chamber, the chamber has can
Closed structure, accumulates the liquid to be deaerated；Injection unit, the injection unit while keep aforementioned cavity inside air-tight state,
While aforementioned liquids are flow into aforementioned cavity from the top of aforementioned cavity；And output mechanism, the output mechanism will accumulation
Discharged in the aforementioned liquids in aforementioned cavity from the bottom of aforementioned cavity；Foregoing output mechanism is in the closed inside of aforementioned cavity
In the state of, the aforementioned liquids more than the flow for the aforementioned liquids that flow-rate ratio is flow into aforementioned cavity are arranged out of aforementioned cavity
Go out, to being depressurized in aforementioned cavity.
According to the present invention, possess and inject the injection unit of liquid from the top of the chamber into chamber and will accumulate in chamber
The output mechanism that interior liquid is discharged from the bottom of chamber, in closed chamber in the state of, flow-rate ratio is flow into chamber
Liquid more than the flow of interior liquid is discharged out of chamber, so as to being depressurized in chamber.Therefore, dissolving can be present in
The gas of liquid is produced in the way of bubble, can be de-gassed gas from liquid.Further, since by the way that flow-rate ratio is flow into
Liquid more than the flow of liquid in chamber is discharged from chamber and to being depressurized in chamber, thus need not separately set very
Empty pump.As a result, the structure of degasser can be simplified.Further, since be not provided with vavuum pump and be de-gassed, thus can not be by
The left and right of the performance of vavuum pump and dissolving is present in the gas from liquid of liquid and is de-gassed.
The degasser of the present invention is characterised by that it is further equipped with exhaust portion, and the exhaust portion will be from accumulating in foregoing
The gas exhaust taken off in liquid in chamber；Foregoing exhaust portion is opened and closed by switching mechanism, the switching mechanism；Injection rate is adjusted
Mechanism, the injection rate adjustment mechanism is adjusted to the flow for flowing into the aforementioned liquids in aforementioned cavity；And controller, should
Controller is controlled to the action of foregoing switching mechanism and the action of foregoing injection rate adjustment mechanism, aforementioned controllers according to
Such a way is controlled：What foregoing injection rate adjustment mechanism was controlled and was discharged flow-rate ratio out of aforementioned cavity
During the few aforementioned liquids of the flows of aforementioned liquids are flow into aforementioned cavity, foregoing switching mechanism is utilized to close foregoing exhaust
Portion will be set to air-tight state in aforementioned cavity, foregoing injection rate adjustment mechanism is controlled and will than out of aforementioned cavity arrange
During aforementioned liquids more than the flow of the aforementioned liquids gone out are flow into aforementioned cavity, open foregoing using foregoing switching mechanism
Exhaust portion and release the air-tight state in aforementioned cavity.
According to the present invention, because controller is controlled as follows, i.e. discharged by flow-rate ratio out of chamber
Liquid the few liquid of flow flow into chamber during close exhaust portion using switching mechanism, will be than being arranged out of chamber
Liquid more than the flow of the liquid gone out opens exhaust portion during flowing into chamber using switching mechanism, thus can be positively to chamber
Indoor depressurized and will dissolve and be present in the gas from liquid of liquid and be de-gassed, and can be by the gas deaerated from chamber
Positively discharge.
The degasser of the present invention is characterised by that foregoing output mechanism is connected to foregoing exhaust portion, foregoing opening
During switching mechanism, the gas discharged out of aforementioned cavity is aspirated.
According to the present invention, because output mechanism is taken out when opening switching mechanism to the gas discharged out of chamber
Inhale, thus the gas taken off from liquid can be forcibly exhausted out of chamber.
The degasser of the present invention is characterised by that it is further equipped with：Lower limited sensor, the lower limited sensor is to foregoing
The situation whether liquid level for the aforementioned liquids accumulated in chamber reaches the lower position of aforementioned cavity set in advance is carried out
Detection；Timer, the timer that the timer is operated based on the signal from aforementioned minimum sensor, in aforementioned minimum sensing
When device detects the situation that the liquid level of aforementioned liquids reaches aforementioned minimum position, aforementioned controllers enter as follows
Row control, which is that the action to foregoing injection rate adjustment mechanism is controlled, by flow-rate ratio before aforementioned cavity discharge
State the aforementioned liquids more than the flow of liquid and flow into aforementioned cavity；It is have passed through after the operating of foregoing timer until aforementioned liquids
Liquid level reach aforementioned cavity upper limit position set in advance untill required for stipulated time when, aforementioned controllers according to
Such a way is controlled：Action to foregoing injection rate adjustment mechanism is controlled and discharges flow-rate ratio from aforementioned cavity
The few aforementioned liquids of flow of aforementioned liquids flow into aforementioned cavity.
According to the present invention, possesses above-mentioned lower limited sensor, the liquid level for detecting liquid in lower limited sensor reaches chamber
When the situation of indoor lower position, above-mentioned controller is controlled as follows, i.e. adjust machine to injection rate
Liquid more than the flow for the liquid that the action of structure is controlled and discharges flow-rate ratio out of chamber is flow into chamber, thus can
The liquid of amount appropriate for being de-gassed in chamber is accumulated in advance.In addition, possessing based on from lower limited sensor
Signal and the timer operated, timer are started running based on the signal from lower limited sensor, have passed through until liquid level
Untill reaching the upper limit position set in advance in chamber when the required stipulated time, because controller is according to following side
Formula is controlled, i.e. the flow for the liquid that the action to injection rate adjustment mechanism is controlled and discharges flow-rate ratio from chamber
Few liquid flows into chamber, thus can be positively to being depressurized in chamber.
The degasser of the present invention is characterised by that it has cooling device, and the cooling device is to relative to aforementioned cavity
Upside for the interior assigned position preset is cooled down.
According to the present invention, due to being carried out with the upside for the assigned position preset in relative to chamber
The cooling device of cooling, thus cooled down the upside for the assigned position in chamber by making cooling device, so that
The decompression in chamber can easily be carried out.Even if in addition, liquid evaporates, also can effectively be carried out by being liquefied again
Degassing.It is explained, cooling device can be constituted by possessing such as lower member：Configuration is set in advance in relative to chamber
The pipe arrangement of upside for assigned position and make refrigerant circulation in the cooler of pipe arrangement.
Degassing method of the invention for solving above-mentioned problem is characterised by, by injection unit by liquid from the chamber
The top chamber that has flow into closed inside, meet defined condition, and inject liquid into foregoing closed
When in chamber, the aforementioned liquids more than the flow for the liquid that flow-rate ratio is flow into aforementioned cavity are arranged from the bottom of aforementioned cavity
Go out, to being depressurized in aforementioned cavity.
According to the present invention, in the state of the closed inside of chamber, the stream for the liquid that flow-rate ratio is flow into chamber
The many liquid of amount is discharged out of chamber, so as to being depressurized in chamber, thus dissolving can be made to be present in the gas of liquid with gas
The mode of bubble is produced, and will can be deaerated in gas from liquid.Further, since passing through the stream for the liquid for flowing into flow-rate ratio in chamber
The many liquid of amount are discharged out of chamber and to being depressurized in chamber, thus need not separately set vavuum pump.
The degassing method of the present invention is characterised by, is reached in the liquid level of aforementioned liquids in aforementioned cavity set in advance
Lower position when, according to the aforementioned liquids for discharging flow-rate ratio out of aforementioned cavity flow more than aforementioned liquids flow into before
The mode stated in chamber is controlled；The upper limit position set in advance in aforementioned cavity is reached in the liquid level of aforementioned liquids
When, flow into according to the few aforementioned liquids of the flow for the aforementioned liquids for discharging flow-rate ratio out of aforementioned cavity in aforementioned cavity
Mode is controlled.
According to the present invention, when the liquid level of liquid reaches the lower position in chamber set in advance, according to by flow
Than the liquid discharged out of chamber flow more than the mode that flows into chamber of liquid be controlled, it can thus be ensured that have in order to
The liquid of amount necessary to being de-gassed in chamber.On the other hand, presetting in chamber is reached in the liquid level of liquid
Upper limit position when, enter in the way of the few liquid of the flow for the liquid for discharging flow-rate ratio out of chamber is flow into chamber
Row control, thus can be positively to being depressurized in chamber.
The degassing method of the present invention is characterised by, upper for the assigned position set in advance in relative to chamber
Side is cooled down.
According to the present invention, because the upside for the assigned position set in advance in relative to chamber is cooled down,
Thus it can easily carry out the decompression in chamber.Even if, also can be by being liquefied again effectively in addition, liquid evaporates
It is de-gassed.
The effect of invention
, can simplifying the structure degasser according to the present invention.In addition, no matter be applicable the device of degasser, to take off
The species of the liquid of gas for how, gas from liquid can be deaerated with high precision.
Brief description of the drawings
Fig. 1 is the system diagram of the summary of the system for the degasser for representing an embodiment of the invention.
Fig. 2 is the phantom of the summary for the internal structure for representing the chamber that the degasser shown in Fig. 1 possesses.
Fig. 3 is the explanation figure for the effect for schematically representing degasser, and Fig. 3 (A) represents the liquid level of liquid just elevated
State, Fig. 3 (B) represents that the liquid level of liquid reaches the state of the upper end of chamber, and Fig. 3 (C) represents that the liquid level of liquid declines
State, Fig. 3 (D) represents that the liquid level of liquid reaches the state of the lower position in chamber, and Fig. 3 (E) represents the liquid level of liquid
Just in elevated state, Fig. 3 (F) represents that the liquid level of liquid reaches the state of the upper end of chamber.
Fig. 4 is the flow chart of the summary for the effect for representing degasser.
Embodiment
Hereinafter, while illustrating embodiments of the present invention referring to the drawings one side.It is explained, technical scope of the invention is not
Following record, accompanying drawing are unduly limited to, various modifications can be carried out in the range of the purport of the present invention.
[basic to constitute]
As shown in Figure 1 and Figure 2, degasser 1 of the invention has：Chamber 10, what the chamber 10 will deaerate
Liquid 100 is accumulated in inside；The top of liquid 100 from chamber 10 is injected into chamber 10 by injection unit 20, the injection unit 20；Row
Go out mechanism 30, the output mechanism 30 will be discharged in the liquid 100 of accumulation in chamber 10 from the bottom of chamber 10.On degassing dress
1 is put, in the state of the closed inside of chamber 10, more than the flow of the liquid 100 that flow-rate ratio is flow into chamber 10
Liquid 100 is discharged out of chamber 10 and depressurized to chamber 10 is interior, so as to deaerated from liquid 100.
It is explained, in this manual, the top on chamber 10, however it is not limited to constitute the lid of the top surface of chamber 10
15 position, represents the position in the region of the opposite upper of the main body 11 comprising the side for constituting chamber 10.For example, in Fig. 2
In the case of shown chamber 10, the top of chamber 10 is represented：It is lid 15, upper for the assigned position 201 of main body 11
The region of side.In addition, the bottom of chamber 10 is not limited to the minimum position of chamber 10, represent under relative comprising chamber 10
The position in the region of side.For example, in the case of the chamber 10 shown in Fig. 2, the bottom of chamber 10 is represented：Relative to lower position
The region of the downside of bottom surface 12 for 202.
The degasser 1, which is played, can simplify the structure of degasser 1 such peculiar effect.In addition, no matter being applicable de-
The device of device of air 1, the liquid of degassing species for how, can play and gas from liquid 100 is deaerated with high precision
Such effect.
It is explained, on the degasser 1 and degassing method of the present invention, can enters utilize ultrasonic washing by group
The washing system of electronic unit, wafer etc. or the impurity on stripping surface is referred to as " Surface so as to improve its effect
Ultrasonic Flat Fix System ", are briefly referred to as " Suffix System ".Also, the degasser 1 of the present invention
And degassing method can be used in the case of following：Group enters the washing dress in addition to the washing system that make use of ultrasonic wave
Put, for the cleaning solution of gas from washing electronic unit, wafer etc. to be de-gassed so as to utilize.In addition, the degassing of the present invention
Device 1 and degassing method, it may also be used for prevent liquid 100 from being deteriorated by the influence of the gas of dissolving presence, so that
Utilize.Particularly in the case where dissolving the gas existed for oxygen, occurs oxidation so as to utilize available for liquid is prevented.
[integrally-built summary]
Degasser 1 has：The liquid 100 that will be deaerated is in the chamber 10 of inside accumulation；By liquid 100 from chamber 10
The injection unit 20 that top is flow into chamber 10；As the pump 30 (hereinafter referred to as pump 30) of output mechanism, the pump 30 will be in chamber
The liquid 100 of accumulation is discharged from the bottom of chamber 10 in room 10.It is explained, the not existing degasser of pump 30 has
It is used only for the vavuum pump that the gas in chamber 10 is exhausted and set.In addition, degasser 1 has：By in chamber 10
Gas discharge exhaust portion 40；The liquid level sensor 80 of the position of the liquid level 101 of liquid 100 in detection chambers 10；Measurement
The pressure sensor 90 of the internal pressure of chamber 10.
Injection unit 20 has the structure that flows on the top of liquid 100 from chamber 10 in chamber 10, by main pipe arrangement 21 with
Secondary pipe arrangement 25 is constituted, and can change the flow of the liquid 100 flow into chamber 10.Pump 30 is connected by the bottom of chamber 10 and pipe arrangement 31
Connect, by aspirating the liquid 100 in accumulation in chamber 10 so as to the discharge out of chamber 10.Exhaust portion 40 by possess pipe arrangement 41 with
And open and close valve 42 and constitute.One end of pipe arrangement 41 is connected to chamber 10, and the other end is connected to pipe arrangement 31.In addition, open and close valve 42 is set
It is placed in the midway of pipe arrangement 41.
In addition, degasser 1 has the bypass path that is made up of pipe arrangement 35, the pipe arrangement 35 is by pipe arrangement 31 and accumulates in advance
The liquid-storing part (not shown) connection for the liquid 100 being supplied in chamber 10.The bypass path being made up of pipe arrangement 35, according to even in
Also it not may be such that the mode of the pumping liquid 100 of pump 30 is set during the pumping liquid 100 in chamber 10.
Degasser 1 further has the controller 60 that the action to degasser 1 is controlled；Flow compressed air
Pilot line 70.Controller 60 controls the action of degasser 1, and according to timer 65, the letter from liquid level sensor 80
Number, the signal from pressure sensor 90 controlled.It is explained, timer 65 is built in controller 60.Pilot line
70 are made up of pipeline for being connected to the pipeline of injection unit 20, being connected to the pipeline of exhaust portion 40 and be connected to pump 30 etc..The elder generation
Rodding 70 receives the instruction from controller 60, and compressed air is supplied to pipeline necessary to control.
It is explained, cooling device 50 has been set as desired in degasser 1.Cooling device 50 is with cooling chamber 10
Inside, reduce gas temperature be main purpose device.It is explained, cooling device 50 is the kind of the liquid according to degassing
Class and the device set, it is thus not essential to structure.
Hereinafter, suitably each composition that degasser 1 has is illustrated referring to the drawings one side on one side.
(chamber)
Chamber is constituted as shown in Figure 2.The chamber 10 is the position that liquid 100 is accumulated inside it, by main body 11
Constituted with lid 15.The top of main body 11 is opened, and bottom is closed by bottom surface 12.Lid 15 is relative to main body 11 releasably
Constitute, close the top of main body 11 according to the top for the main body 11 for being installed on open chamber 10 or beaten by taking-up
Open the mode on the top of main body 11 and constitute.Main body 11 and lid 15 are when lid 15 closes the top of main body 11 by being arranged on two
Encapsulant between person etc. and it is closed.The bottom surface 12 of main body 11 has what the liquid 100 by the accumulation in the chamber 10 was discharged
Outlet 13, in the example in the figures, the outlet 13 are arranged at the minimum position of bottom surface 12.Chamber 10 is according to by liquid
100 are injected from injection unit 20, are constituted from the mode that outlet 13 is discharged, and liquid 100 is temporarily detained.
It is explained, on the capacity of chamber 10, the liquid discharged according to the flow of the liquid 100 of injection and out of chamber 10
The flow of body 100 and suitably set.In addition, on flowing into the flow of the liquid 100 in chamber 10 and out of chamber 10
The flow of the liquid 100 of discharge, according to the species for the liquid 100 to be deaerated, is applicable the object of the degasser 1 and rightly sets
It is fixed.
(injection unit)
Injection unit 20 is the means that the liquid 100 for that will deaerate is flow into chamber 10.Shown in Fig. 1 and Fig. 2
Embodiment degasser 1 in, injection unit 20 is made up of two pipe arrangements 21,25.Two pipe arrangements 21,25 are respectively by chamber 10
The insertion of lid 15, their front is inserted in the inside of chamber 10.A pipe arrangement among two pipe arrangements 21,25 is main pipe arrangement
21, another pipe arrangement is secondary pipe arrangement 25.
Main pipe arrangement 21 is arranged at the optional position of lid 15.For example, according to the position of the substantial middle in chamber 10 by lid 15
The mode for carrying out insertion is set.Main pipe arrangement 21 has nozzle 22 in its front end, and liquid 100 is atomized and chamber 10 is flow into.Should
Main pipe arrangement 21 constantly flows into liquid 100 inside of chamber 10 during the operating operation of degasser 1.It is explained,
On nozzle 22, the filter for the inside for preventing impurity from immersing chamber 10 can be also set inside it.
Secondary pipe arrangement 25 is also disposed on the optional position of lid 15.For example, on secondary pipe arrangement 25, according to compared with main pipe arrangement 21 and
Speech is set the mode that lid 15 carries out insertion in the position in the outside of the radial direction of chamber 10.Secondary pipe arrangement 25 is to be chamber 10
Inside accumulation liquid 100 quantitative change it is few, to chamber 10 inside additive liq 100 when the pipe arrangement that uses.Secondary pipe arrangement 25 has
There is the open and close valve 27 for being opened and closed and being controlled using 70 pairs of pilot line described later.Liquid 100 is by opening open and close valve 27 and from pair
Pipe arrangement 25 is flow into chamber 10, by close open and close valve 27 and injection of the stop liquid 100 into chamber 10.Secondary pipe arrangement 25
There is nozzle 26 in its front end, liquid 100 is atomized and chamber 10 is flow into.It is explained, the secondary pipe arrangement 25 also can be in it
Portion, which is set, prevents impurity to be immersed in the filter of the inside of chamber 10.
On the secondary pipe arrangement 25 with open and close valve 27, by opening open and close valve 27, so that will be than closing during open and close valve 27
Many liquid 100 are flow into chamber 10, by closing open and close valve 27 by than opening the note of liquid 100 few during open and close valve 27
Enter in chamber 10, function is played as injection rate adjustment mechanism.
(being used as the pump of output mechanism)
Pump 30 is connected to chamber 10 by pipe arrangement 31.The pump 30 is by the liquid 100 of the accumulation in the chamber 10 out of chamber 10
Discharge.It is explained, the discharge of liquid 100 is forcibly carried out by pump 30.Pump 30 is by than the main pipe arrangement by injection unit 20
21 flow into the liquid 100 more than the flow of the liquid 100 of chamber 10 by oneself discharges out of chamber 10.On the other hand, pump 30 will
The few liquid 100 of the flow of liquid 100 than being flow into as main pipe arrangement 21 and secondary both pipe arrangements 25 in chamber 10 is from chamber
Discharged in 10.In addition, the pump 30 by pilot line 70 control operating and stopping.
(exhaust portion)
Exhaust portion 40 is the position that the gas taken off from the liquid 100 in accumulation in chamber 10 is exhausted.Exhaust
Portion 40 has：Extend and be connected to the pipe arrangement 41 of pipe arrangement 31 towards the outside of chamber 10 from lid 15；And utilize pilot line
70 are opened and closed the open and close valve 42 (hereinafter referred to as open and close valve 42) as switching mechanism of action.In the delivery flow of pump 30 than noting
During liquid 100 more than the flow of the liquid 100 entered, by making open and close valve 42 close and the inside of airtight chamber 10.It is another
Aspect, in order that liquid 100 in chamber 10 liquid level 101 reach chamber 10 upper limit position set in advance 203 and
During liquid 100 is complemented at into chamber 10, open and close valve 42 opens.During open and close valve 42 is opened, pump 30 passes through pipe arrangement
40th, 41 and the gas in suction chamber 10 so that the gas taken off from liquid 100 is discharged to outside chamber 10.Said
Bright, the gas discharged from chamber 10 by being arranged at the pipe arrangement 43 in the downstream of pump 30 is discharged into outside.
(liquid level sensor)
Liquid level sensor 80 by configured in the way of extending in the vertical direction axle 81, be separately positioned on the upper of axle 81
The float 82,83 of side and the two positions of downside is constituted.The float 82,83 for being arranged at two positions respectively can be in the certain of axle 81
Scope is movably constituted in the vertical direction, is moved using the upward side of the buoyancy of liquid 100.Constitute under liquid level sensor 80
What the float 83 of side was detected is to reach presetting for chamber 10 in the liquid level 101 of the liquid 100 of the inside accumulation of chamber 10
Position situation.It is explained, on the float 83 of downside, the explanation such as in this column of the effect of degasser 1 described later
As, also detect that liquid level 101 is raised and by the situation of lower position 202.In addition, constituting the upper of liquid level sensor 80
What the float 82 of side was detected is to pass through the set in advance of chamber 10 in the liquid level 101 of the liquid 100 of the inside accumulation of chamber 10
The situation of position.
Be arranged at downside float 83 be for detection liquid 100 liquid level 101 whether reach in chamber in advance setting
The lower limited sensor of fixed lower position 202.When the liquid level 101 of liquid 100 reaches lower position 202, liquid 100 is utilized
Buoyancy and the float 83 that has raised decline.By declining, the liquid level 101 of liquid 100 is reached according to the detection of float 83
Lower position 202.In addition, when float 83 is raised along with the rise of liquid level 101, having started the operating of timer 65.
The float 82 for being arranged at upside is in the case where being provided with cooling device 50 described later and the sensor of setting.It is floating
Son 82 is the sensing for the situation that the liquid level 101 of detection liquid 100 has passed through the assigned position set in advance 201 in chamber 10
Device, function is played as the beginning of operating and the switch of stopping that carrying out cooling device 50.The liquid level 101 of liquid 100
Rise and during by assigned position 201, float 82 is raised using the buoyancy of liquid 100.Raised according to float 82, detection
The liquid level 101 of liquid 100 is increased to assigned position 201.On the other hand, when the liquid level 101 of liquid 100 declines and by predetermined bits
When putting 201, the float 82 raised using buoyancy is declined.Declined according to float 82, the liquid level of detection liquid 100
101 drop to assigned position 201.
More than, liquid level sensor is illustrated son in case of constituting liquid level sensor by float 82,83.
However, liquid level sensor is not limited to float 82,83.The light for the position for being detected optically by liquid level 101 can be used to pass for liquid level sensor
Sensor, detected using ultrasonic wave liquid level 101 position ultrasonic sensor and detected by considering the change of electric capacity
The various sensors such as the capacitance level sensor of the position of liquid level 101.
(timer)
Timer 65 is arranged at controller 60, sets in such a way, according to from the float as lower limited sensor
83 signal and start counting up.The liquid level 101 that the timer 65 presets liquid 100 reaches chamber 10 from lower position 202
Time untill interior upper limit position set in advance 203.Preset the lower position 202 set by float 83 and chamber 10
Upper limit position 203 between volume.In addition, also presetting the flow that injection unit 20 flows into liquid 100 chamber 10.Cause
This, on the control of the position of liquid level 101, can control to close the opportunity of open and close valve 27 by using the setting time of timer 65
And carry out.
It is explained, on the upper limit position set in advance 203 in above-mentioned chamber 10, the lid of chamber 10 can be set in
The upper end of chamber 10 where 15.But, upper limit position 203 is not limited to be set in the upper end of chamber 10, can also be set in rule
The optional position between 201 and the upper end of chamber 10 is put in positioning.
(pressure sensor)
Pressure sensor 90 measures the internal pressure of chamber 10, and the signal corresponding to pressure is sent into controller 60.The pressure
Sensor 90 is applied in such a way, by measuring the internal pressure of chamber 10, so as to judge whether the internal pressure decompression of chamber 10
To the pressure for being suitable to gas from liquid 100 being de-gassed.
(pilot line)
Pilot line 70 is the pipeline for flowing compressed air, carries out the opening and closing for the open and close valve 27 that injection unit 20 has；
The beginning and stopping of the operating of pump 30；And the opening and closing of open and close valve 42 that exhaust portion 40 has.It is explained, pilot line
70 are also configured in the opening and closing of the open and close valve 54 of cooling device 50.
Symbol 27,30,42,54 shown in pilot line 70 shown in Fig. 1 correspond respectively to injection unit 20 open and close valve 27,
The open and close valve 54 of pump 30, the open and close valve 42 of exhaust portion 40 and cooling device 50.The pilot line 70 is according to from controller 60
Instruction, controlled as follows：Make compressed air be connected to the pipeline of open and close valve 27, be connected to open and close valve 42 pipeline and
The pipeline for being connected to open and close valve 54 is flowed or stopped；And make compressed air flowed in the pipeline for being connected to pump 30 or
Person causes the flowing of compressed air to stop.
For example, in the case of the open and close valve 27 of opening injection unit 20 so that compressed air is being connected to the elder generation of open and close valve 27
Rodding 70 is flowed, and the valve element (not shown) of open and close valve 27 is moved in the presence of the compressed air of flowing.On the contrary, closing
In the case of the open and close valve 27 of injection unit 20, the compressed air flowed in the pilot line 70 for be connected to open and close valve 27 is stopped at,
The valve element (not shown) of open and close valve 27 returns to original place.
It is explained, can be according to making compressed air be connected to the pipe of open and close valve 27 on the pilot line 70 shown in Fig. 1
Road, it is connected to the pipeline of open and close valve 42 and is connected in the pipeline of open and close valve 54 the mode structure that simultaneously flows or stop
Into, or also can according to make compressed air respectively from be connected to the pipeline of open and close valve 27, be connected to open and close valve 42 pipeline,
And it is connected to the tube runs arbitrarily selected out among the pipeline of open and close valve 54 or the mode of stopping is constituted.
(controller)
Controller 60 makes some tube runs of compressed air among pilot line 70 by selection, so as to carry out following
Control：(1) opening and closing for the open and close valve 27 that injection unit 20 has, the beginning of the operating of (2) pump 30 and stopping, (3) exhaust portion
The opening and closing of 40 open and close valves 42 having and the opening and closing of the open and close valve 54 of (4) cooling device 50.
Now, controller 60 selects to make pressure according to float 83 and the signal of timer 65 from liquid level sensor 80
The dynamic pilot line 70 of stream of compressed air, and stopped the compressed air flowed in the pilot line 70.
The main control content of the controller 60 is as described below.That is, detected as the float 83 of lower limited sensor
When the liquid level 101 of liquid 100 reaches the situation of lower position 202, controller 60 is according to the open and close valve 27 for opening injection unit 20
Mode send instruction, the liquid 100 than the flow more various flow of the liquid 100 of discharge out of chamber 10 is flow into chamber 10
It is interior.In addition, at this moment, the signal that float 83 is sent out make it that timer 65 is operated.As described above, the timer 65 is set
The time untill liquid 100 reaches the upper limit position set in advance 203 in chamber 10 is determined.On the other hand, in timer 65
After operating, the institute untill the liquid level 101 of liquid 100 reaches the upper limit position set in advance 203 in chamber 10 have passed through
During the stipulated time needed, controller 60 is controlled in such a way, i.e. is sent the instruction for closing open and close valve 27, will be flowed
The liquid 100 fewer than the flow of the liquid 100 of discharge out of chamber 10 is measured to flow into chamber 10.
Controller 60 also carries out following control, i.e. reset according to according to the signal for being derived from pressure sensor 90
The mode of the action of degasser 1, the action to degasser 1 is controlled.It is mixed into gas in the case of liquid 100,
The liquid level 101 of liquid 100 can also be influenceed even across the time set in timer 65 by gas so that liquid level 101 does not have
There is the upper limit position set in advance 203 reached in chamber 10.Particularly, upper limit position 203 is set in the upper end of chamber 10
In the case of, space can be formed between the upper end of liquid level 101 and chamber 10.Situation about being deaerated in such a state
Under, the internal pressure that there is chamber 10 can not be decompressed to the possibility for the pressure that can be effectively de-gassed.In order to not produce the phenomenon, control
Device 60 processed is in the way of the action according to the signal from pressure sensor 90 to reset degasser 1, control degassing
The action of device 1.
Controller 65 has storage part (not shown), and the storage part stores the highest internal pressure that can be effectively de-gassed.
The pressure signal that 65 pairs of controller is sent out from pressure sensor 90 is compared with being stored in the highest internal pressure of storage part, one
In the case of the pressure signal continuously transmitted in fixing time from pressure sensor 90 higher than highest internal pressure, above-mentioned take off is reset
The action of device of air 1.That is, it will be emptied in chamber 10, then, liquid 100 flow into chamber 10 to raise liquid level 101, made
Obtain float 83 to be operated, and make it that timer 65 is operated according to the signal from float 83.Reset degassing
The action of device 1, this may be such that the liquid level 101 of liquid 100 reaches the upper limit position set in advance 203 in chamber 10.
(cooling device)
Cooling device 50 is set as desired as described above.Cooling device 50 has：Pipe arrangement 52, the pipe arrangement 52 is configured
The upside for liquid 100 in the inside of chamber 10；And cooler 51, the cooler 51 make refrigerant in
Pipe 52 is circulated.Pipe arrangement 52 is spirally formed at the inside of chamber 10, efficiently cools down the top of chamber 10.Pipe arrangement 52 with
Cooler 51 is connected by pipe arrangement 53.
Spiral helicine pipe arrangement 52 is configured at following position, i.e. relative to the assigned position 201 for being provided with float 82
The upside of speech, and be the position separated from the side wall of chamber 10 with only a certain distance to inner side.Pipe arrangement 53, which has, to be opened
Valve closing 54.The refrigerant supplied from cooler 51 is supplied in spiral helicine pipe arrangement 52 by open and close valve 54, or stops supply.
Specifically, float 82 raises in the liquid level 101 of liquid 100 and the floating of liquid 100 is utilized during by assigned position
Power and raised.When float 82 is raised, float 82 sends signal.Controller 60 by the signal that receives to send from float 82,
Instruction is sent to pilot line 70 in the way of the compressed air for stopping being supplied in open and close valve 54.The reason pilot pipe of open and close valve 54
The compressed air that road 70 is supplied is stopped, so that valve element (not shown) movement, closing.By closing open and close valve 54 so that
Cooling device 50 stops refrigerant being supplied in spiral helicine pipe arrangement 52.
On the other hand, float 82 declines in the liquid level 101 of liquid 100 and during by assigned position 201, from because of buoyancy
Dropped in the state of having raised.When float 82 declines, the stop signal of float 82.Controller 60 stops according to the signal sent from float 82
Only, instruction is sent to pilot line 70 in the way of compressed air is supplied to open and close valve 54.Supplied using by pilot line 70
The compressed air given so that valve element (not shown) is moved, opens open and close valve 54.By opening open and close valve 54 so that cooling
Refrigerant is supplied in spiral helicine pipe arrangement 52 by device 50.
The cooling device 50 also has following function：By cooling down relative to the assigned position 201 for being provided with float 82
For chamber 10 in upside, so that the volume of the gas for the upside being stranded in chamber 10 is shunk, easily to chamber 10
It is interior to be depressurized.In the case of being depressurized in chamber 10 so that dissolving is present in the gas of liquid 100 easily with the side of bubble
Formula shows.Cooling device 50 will easily dissolve the gas from liquid 100 for being present in liquid 100 by using such principle
It is middle to remove.
In addition, by making cooling device 50 operate as described above, so that the upside in chamber 10 be cooled down.In liquid
100 occur evaporation and in the case of gasify, the operation that the upside in chamber 10 is cooled down can cause from having gasified
State again returns to the state of liquid.Make to be depressurized in chamber 10 by returning to liquid 100, thus cooling device 50 can
Effectively gas from liquid 100 is deaerated.Such cooling device 50 is special in the case where the liquid of low boiling point is de-gassed
It is ineffective.
Possess pilot line 70 for degasser 1 above, open and close valve 27,47 and pump 30 are controlled using pilot pressure
The situation of operating be illustrated.However, degasser 1 can also electromagnetic mode control open and close valve 27,42 and pump 30.
The degasser 1 of structure with the above can be only by being connected to existing wash mill etc. by the degasser 1
Pipe arrangement so that group enters in existing wash mill.
[effect of degasser]
The degasser 1 of structure with the above by by liquid 100 out of, top has flow into closed chamber 10, and
And the liquid 100 more than the flow for the liquid 100 for flowing into flow-rate ratio in chamber 10 is discharged from the bottom of chamber 10, so as to chamber
Depressurized in room 10.Concrete effect and the action according to liquid level sensor 80 on such degasser 1
And the content of the control carried out, one side reference picture 3 and Fig. 4 are while explanation.It is explained, below, liquid level 101 is reached
Upper limit position 203 be set to the upper end of the chamber 10 (position where lid 11.But, lid 11 is not illustrated in Fig. 3.) in case of,
Illustrate.
On the degasser 1, while increment and decrement is repeated in the liquid 100 in chamber 10 by accumulating, on one side
The gas from liquid 100 that dissolving is present in liquid 100 is de-gassed.That is, following process is repeated：Accumulate in chamber 10
The liquid measure increase of interior liquid 100, the process that the liquid level 101 of liquid 100 reaches the upper end of chamber 10；And accumulate in chamber 10
The liquid measure of interior liquid 100 is reduced, the process of the arrival of liquid level 101 lower position 202 of liquid 100.Dissolving is present in liquid 100
Gas be de-gassed during such process is repeated from liquid 100.
(the rise process of liquid level)
Once being powered (Fig. 4 S1) to degasser 1, then controller 60 sends instruction in such a way：Make compression empty
Gas flows in the pilot line 70 for being connected to injection unit 20 and flowed in the pilot line 70 for being connected to exhaust portion 40.Thus beat
Open the open and close valve 27 of injection unit 20.As shown in Fig. 3 (A), main pipe arrangement 21 and secondary pipe arrangement 25 of the liquid 100 from injection unit 20
Both is flow into chamber 10 (Fig. 4 S2).In addition, by being powered, so as to start the operating of pump 30.At that time, liquid 100 exists
The bypass path flowing being made up of pipe arrangement 35, pump 30 supplies the liquid 100 in the bypass path flowing being made up of pipe arrangement 35.Separately
Outside, the open and close valve 42 (Fig. 4 S3) of exhaust portion 40 is opened.Pump 30 will be trapped in chamber 10 by pipe arrangement 41 and pipe arrangement 31
Gas is aspirated, and the gas being trapped in chamber 10 is discharged to outside chamber 10.The gas outside chamber 10 is discharged to lead to
Cross pipe arrangement 41 and blast pipe 43 and be discharged to outside.
Liquid 100 is flow into chamber 10, when being raised in liquid level 101 and having passed through lower position 202 (Fig. 4 S5),
Float 83 is raised using the buoyancy of liquid 100.Raised according to float 83, so that float 83 sends signal to controller
60.When the timer 65 for being built in controller 60 receives the signal, then timer 65 is operated (Fig. 4 S6).Timer
65 set the time untill liquid level 101 reaches the upper end of chamber 10 by lower position 202；Until liquid level 101 is reached
Untill the upper end of chamber 10, controller 60 is controlled in the way of open and close valve 27 is opened in advance.
It is explained, cooling device 50 is the device being set as desired as described above.Have in degasser 1 cold
But in the case of device 50, the cooler 51 that cooling device 50 possesses causes refrigerant to exist according to the instruction from float 82
Spiral helicine pipe arrangement 52 flows, or stops refrigerant.First, when having put into power supply, cooler 51 make refrigerant circulation in
Spiral helicine pipe arrangement 52 (Fig. 4 S4).Liquid level 101 is raised, and when having passed through assigned position 201 (Fig. 4 S7), float 82 is utilized
The buoyancy of liquid 100 and raised.Raised according to float 82, signal is delivered to controller 60 by float 82.Controller 60 leads to
Cross and receive the signal from float 82, to cold in the way of making refrigerant stop at the operation flowed in spiral helicine pipe arrangement 52
But device 51 sends instruction, so as to stop cooling down (Fig. 4 S8).
(from the rise process of liquid level to the switching for declining process)
As shown in Fig. 3 (B), when have passed through the setting time of timer 65 (Fig. 4 S9), liquid level 101 reaches chamber
The upper end of room 10.Controller 60 sends to give an order when it have passed through the setting time of timer 65, i.e. so that in connection
Flowed in the pilot line 70 of the open and close valve 27 of injection unit 20 and be connected to exhaust portion 40 open and close valve 42 pilot line
The compressed air flowed in 70 stops.Its result is：The open and close valve 27 of injection unit 20 is closed, and liquid 100 is only from the main note of pipe arrangement 21
Enter in chamber 10.In addition, the open and close valve 42 (Fig. 4 S10) of exhaust portion 40 is closed, and the inside of chamber 10 is closed.
(the decline process of liquid level)
When closing the open and close valve 27 of injection unit 20, because liquid 100 is only injected into chamber from the main pipe arrangement 21 of injection unit 20
In room 10, thus, the flow of the liquid 100 only flow into from main pipe arrangement 21 in chamber 10 relative to using pump 30 out of chamber 10
The flow of the liquid 100 of discharge tails off.Therefore, as shown in Fig. 3 (C), in the liquid 100 accumulated in chamber 10 with injection rate
And the amount of the difference of discharge rate and slowly reduce (Fig. 4 S11).In addition, in the process, the open and close valve 42 of exhaust portion 40 is closed
, thus the inside of chamber 10 is closed.Therefore, using pump 30 by the liquid 100 of the accumulation in the chamber 10 forcibly
When being discharged from chamber 10, it is depressurized in chamber 10.It is present in the gas of liquid 100 on dissolving, is depressurized in chamber 10
When, displayed and removed from liquid 100 from the inside of liquid 100 in the way of bubble.Shown in the way of bubble
Gas is stranded in the top of chamber 10 in the process that liquid level declines.
Be explained, degasser 1 have cooling device 50 in the case of, cooling device 50 operate as described below and
Control is proceeded by operating.That is, liquid level declines and by (Fig. 4 S12) during assigned position 201, is pushed away using buoyancy
High float 82 declines.According to the decline of float 82 so that the stop signal of float 82.Controller 60 stops sending in float 82
During signal, cooling is issued an instruction to cooler 51 in the way of refrigerant is circulated in spiral helicine pipe arrangement 52, thus
It is controlled (Fig. 4 S13).When cooling device 50 starts running in this manner, the inside of chamber 10 relative to regulation
The region of upside for position 201 is cooled.Even if as a result, liquid evaporation and be stranded in the top of chamber 10, also by
Cool down and vaporized material is liquefied again.Cooling device 50 by the way that vaporized material is liquefied again, from
And improve the degasifying effect of liquid 100.
(from the decline process of liquid level to the switching for raising process)
Reduced accumulating in the liquid 100 in chamber 10, when liquid level 101 reaches lower position 202 (Fig. 4 S14), such as
Shown in Fig. 3 (D) like that, the float 83 raised by the effect of the buoyancy of liquid 100 declines.Once float 83 declines,
Then liquid level sensor 80 stops sending signal.When liquid level sensor 80 stops sending signal, controller 60, which is sent, makes compression empty
The instruction that gas flows in the pilot line 70 for being connected to injection unit 20.Thus the open and close valve 27 of injection unit 20 is opened.In addition, control
Device 60 processed sends the instruction for making compressed air be flowed in the pilot line 70 for being connected to exhaust portion 40.Thus, exhaust portion is opened
40 open and close valve 42 (Fig. 4 S15).
(the rise process of the 2nd time and subsequent liquid level and decline process)
When opening the open and close valve 27 of injection unit 20, liquid 100 is flow into from main pipe arrangement 21 and secondary both pipe arrangements 25
In chamber 10.The flow-rate ratio of the liquid 100 flow into from main pipe arrangement 21 and secondary both pipe arrangements 25 in chamber 10 utilizes pump 30
The flow of the liquid 100 of discharge is more in from chamber 10.Therefore, with the stream of the flow of the liquid 100 of injection and the liquid 100 of discharge
The deal of the difference of amount so that in the flow increase of the liquid 100 of accumulation in chamber 10, so that liquid level 101 rises (Fig. 4's
S16).Float 83 is raised along with the rise of liquid level 101 in the presence of the buoyancy of liquid 100.Raised in float 83
When, float 83 conveys signal to controller 60.The timer 65 of controller 60 is built in by receiving the signal from float 83
And start running (Fig. 4 S17).
Controller 60 enters in the way of the open mode that open and close valve 27 is maintained untill by the setting time of timer 65
Row control, thus as shown in Fig. 3 (E), raised in the liquid level 101 of the liquid 100 of accumulation in chamber 10.Further, since beating
Open and close valve 42 has been opened, thus pump 30 is aspirated the gas for being trapped in chamber 10 by pipe arrangement 31 and pipe arrangement 41, is discharged to
Outside chamber 10.
As shown in Fig. 3 (F), by the setting time (Fig. 4 S20) of timer 65, chamber is reached in liquid level 101
During 10 upper end, controller 60 is controlled (Fig. 4 S21) in the way of the open and close valve 42 for closing exhaust portion 40.In addition, closing
The open and close valve 27 of injection unit 20 is closed, so that the discharge out of chamber 10 of the flow-rate ratio of the liquid 100 flow into chamber 10
The flow of liquid 100 is few (Fig. 4 S22).
It is explained, in the case where degasser 1 has cooling device 50, when liquid level 101 is by assigned position 201
(Fig. 4 S18), controller 60 controls the fortune of cooling device 50 according to the signal from float 82 in the same manner as above-mentioned situation
Turn, so as to stop cooling down (Fig. 4 S19).
After the open and close valve 27 for closing injection unit 20, due to the stream discharged for the flow being injected into chamber 10
Quantitative change is more, thus declines in the liquid level 101 of the liquid 100 of accumulation in chamber 10.Decline in liquid level 101 and passed through assigned position
When 201 (Fig. 4 S23), start again at and cooled down (Fig. 4 S24).Liquid level 101 further declines, and reaches the lower limit in chamber
Position 202.
Degasser 1 is by being repeated such process (Fig. 4 S15 to S25), so that dissolving is present in into liquid
100 gas from liquid 100 is removed.During such process is repeated in degasser 1, pressure sensor 90 not between
The internal pressure of chamber 10 is measured disconnectedly.It is explained, the time of a cycle of such process is carried out on degasser 1,
The flow and pump 30 of the liquid 100 flow into according to the capacity of chamber 10 and/or injection unit 20 in chamber 10 are out of chamber 10
The flow of the liquid 100 of discharge, is suitably set.
It is explained, during degasser 1 repeatedly carries out such process, there are because gas is mixed into liquid
Body 100 and the possibility of desired pressure can not will be decompressed in chamber 10.In this case, controller 60 is according to from pressure
The pressure signal of sensor 90 is controlled in the way of resetting the action of degasser 1 to the action of degasser 1.Tool
For body, controller 65 resets the action of degasser 1 in a case where, and the situation is：65 pairs of controller is from pressure
The pressure signal that sensor 90 is sent is compared with being stored in the highest internal pressure of storage part, within a certain period of time pressure sensor
90 continuously transmit the pressure signal higher than highest internal pressure.That is, chamber 10 is emptied, then, liquid 100 is added to chamber 10 and
Liquid level 101 is raised, float 83 is operated, and timer 65 is operated according to the signal from float 83.
Be explained, for the liquid level 101 of liquid 100, the assigned position 201 that also can be provided with float 82 according to reaching with
The mode of optional position between the upper end of chamber 100 is controlled.In this case, reach desired by liquid level 101
The mode of position sets the time of timer, so as to control the operating of open and close valve 27.
Such degasser 1 and degassing method as being exemplified below as played various effects.
On degasser 1 and degassing method, can be entered by group using ultrasonic wave wash electronic unit, wafer etc.,
Or the washing system of the impurity on surface is peeled off, so as to improve its effect.Also, it can also be entered by group except make use of ultrasonic wave
Washing system beyond usually used wash mill, by gas from washing electronic unit, wafer etc. cleaning solution degassing from
And utilize.
Degasser 1 and degassing method can remove ultrasonic obstacle thing from liquid, can improve air pocket effect.
Degasser 1 and degassing method can utilize volatile solvent.For example, as stripper, NMP (N- can be used
N-methyl-2-2-pyrrolidone N), photoresist stripper etc..
Degasser 1 and degassing method can prevent liquid 100 from being deteriorated by the influence of the gas of dissolving presence.Especially
It is that, in the case where the gas that dissolving is present is oxygen, degasser 1 and degassing method can prevent liquid from aoxidizing.
Degasser 1 and degassing method can shorten the time of washing, stripping etc..
In addition, degasser 1 plays following effect, i.e. can be had only by existing wash mill etc. is connected to
Standby pipe arrangement, so that easily group enters in wash mill etc., and need not carry out periodicity maintenance.
The explanation of symbol
1 degasser
10 chambers
11 main bodys
12 bottom surfaces
13 discharge units
15 lids
20 injection units
21 main pipe arrangements
22 filters
25 secondary pipe arrangements (flow adjustment means)
26 filters
27 open and close valves (flow adjustment means)
30 pumps (output mechanism)
31 pipe arrangements
35 pipe arrangements
40 exhaust portions
41 pipe arrangements
42 open and close valves (switching mechanism)
50 cooling devices
51 coolers
52 spiral helicine pipe arrangements
53 pipe arrangements
60 controllers
65 timers
70 pilot lines
80 liquid level sensors
81 axles
82 floats
83 floats (lower limited sensor)
90 pressure sensors
100 liquid
101 liquid levels
201 assigned positions
202 lower positions
203 upper limit positions.
Claims (6)
1. a kind of degasser, it is characterised in that it possesses：
Chamber, the chamber has structure that can be closed, accumulates the liquid to be deaerated；
Injection unit, the injection unit are while keep the air-tight state of the inside of the chamber, while by the liquid from the chamber
Top flow into the chamber；And
Output mechanism, the output mechanism will be accumulated discharges in the liquid in the chamber from the bottom of the chamber,
Described in the output mechanism is flow into the chamber in the state of the closed inside of the chamber, by flow-rate ratio
The liquid more than the flow of liquid is discharged out of described chamber, to being depressurized in the chamber；Exhaust portion, the exhaust portion will
The gas exhaust taken off from the liquid accumulated in the chamber；
The exhaust portion is opened and closed by switching mechanism, the switching mechanism；
Injection rate adjustment mechanism, the injection rate adjustment mechanism is adjusted to the flow for flowing into the liquid in the chamber
It is whole；And
Controller, the controller is controlled to the action of the switching mechanism and the action of the injection rate adjustment mechanism,
The controller is controlled as follows：
In the flow for the liquid that the injection rate adjustment mechanism is controlled and is discharged flow-rate ratio out of described chamber
During few liquid is flow into the chamber, the exhaust portion is closed by the chamber using the switching mechanism
It is set to air-tight state,
The injection rate adjustment mechanism is controlled and by more than the flow for the liquid discharged out of described chamber
During the liquid is flow into the chamber, open the exhaust portion using the switching mechanism and release in the chamber
Air-tight state.
2. degasser according to claim 1, it is characterised in that the output mechanism is connected to the exhaust portion,
When opening the switching mechanism, the gas discharged out of described chamber is aspirated.
3. degasser according to claim 1 or 2, it is characterised in that
It is further equipped with：
Lower limited sensor, whether the liquid level of the liquid of the lower limited sensor to being accumulated in the chamber reaches sets in advance
The situation of the lower position of the fixed chamber is detected；
Timer, the timer is operated based on the signal from the lower limited sensor,
When the lower limited sensor detects that the liquid level of the liquid reaches the situation of the lower position, the controller
Be controlled as follows, which is that the action to the injection rate adjustment mechanism is controlled, by flow-rate ratio from
The liquid more than the flow of the liquid of the chamber discharge flows into the chamber,
It has passed through after timer operating until the liquid level of the liquid reaches the upper limit set in advance of the chamber
Untill position during the required stipulated time, the controller is controlled as follows, and which is, to the note
The action for entering amount adjustment mechanism is controlled, the few liquid of the flow of the liquid that flow-rate ratio is discharged from the chamber
Flow into the chamber.
4. degasser according to claim 1 or 2, it is characterised in that it has cooling device, the cooling device is to phase
Upside for the assigned position set in advance in the chamber is cooled down.
5. a kind of degassing method, it is characterised in that
The inside for the chamber for by injection unit liquid having been flow into closed from the top of chamber,
Meeting defined condition, and injecting liquid into when in the closed chamber, flow-rate ratio is flow into institute
State the liquid more than the flow of the liquid in chamber to discharge from the bottom of the chamber, to depressurizing in the chamber；
When the liquid level of the liquid reaches the lower position in the chamber set in advance, according to by flow-rate ratio out of described chamber
The mode that the liquid more than the flow of the liquid of discharge is flow into the chamber is controlled,
When the liquid level of the liquid reaches the upper limit position set in advance in the chamber, according to by flow-rate ratio from described
The mode that the few liquid of the flow of the liquid of discharge is flow into the chamber in chamber is controlled.
6. degassing method according to claim 5, it is characterised in that wherein, to relative to setting in advance in the chamber
Upside for fixed assigned position is cooled down.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2013/082235 WO2015079571A1 (en) | 2013-11-29 | 2013-11-29 | Degassing device and degassing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105764584A CN105764584A (en) | 2016-07-13 |
| CN105764584B true CN105764584B (en) | 2017-08-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380081167.9A Active CN105764584B (en) | 2013-11-29 | 2013-11-29 | Degasser and degassing method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6227005B2 (en) |
| KR (1) | KR102182891B1 (en) |
| CN (1) | CN105764584B (en) |
| WO (1) | WO2015079571A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018200291A1 (en) | 2018-01-10 | 2019-07-11 | Optima consumer GmbH | Device and method for degassing and gassing of containers |
| CN112312985A (en) * | 2018-06-20 | 2021-02-02 | 株式会社泉食品机械 | Extraction device and extraction method |
| GB2584869B (en) * | 2019-06-18 | 2023-11-22 | Enapter S R L | Liquid degassing means and method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0370521A1 (en) * | 1988-11-24 | 1990-05-30 | Maeda Shell Service Co., Ltd. | In-line filter device for compressed air |
| CN1186711A (en) * | 1996-06-12 | 1998-07-08 | 尚德敏 | Deoxidation method and device for boiler feeding water |
| JP2003275745A (en) * | 2002-03-26 | 2003-09-30 | Izumi Food Machinery Co Ltd | Deoxygenation method and deoxygenation device |
| JP2004330013A (en) * | 2003-05-01 | 2004-11-25 | Izumi Food Machinery Co Ltd | Method and apparatus for preparing solution containing easily oxidizable substance |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6068010A (en) * | 1983-09-22 | 1985-04-18 | Yamatake Honeywell Co Ltd | Degassing device for oil |
| JP2556771Y2 (en) * | 1993-05-18 | 1997-12-08 | 佐藤 辰彦 | Degassing device |
| JPH09187603A (en) | 1996-01-09 | 1997-07-22 | Sato Tatsuhiko | Deaerator and deaerator for ultrasonic washer |
| JP4020492B2 (en) | 1998-05-14 | 2007-12-12 | 株式会社スター・クラスター | Vacuum deaerator |
| JP2000130704A (en) * | 1998-10-22 | 2000-05-12 | Toshiba Corp | Deaerator controller |
| JP3579612B2 (en) | 1999-04-07 | 2004-10-20 | 株式会社スター・クラスター | Degassing device and ultrasonic cleaning device provided with the degassing device |
| JP3960920B2 (en) * | 2001-03-12 | 2007-08-15 | 株式会社荏原製作所 | Liquid processing method and apparatus |
| JP3144415U (en) * | 2008-06-17 | 2008-08-28 | カゴメ株式会社 | Liquid food material deaerator |
-
2013
- 2013-11-29 CN CN201380081167.9A patent/CN105764584B/en active Active
- 2013-11-29 JP JP2015550298A patent/JP6227005B2/en active Active
- 2013-11-29 KR KR1020167011303A patent/KR102182891B1/en active IP Right Grant
- 2013-11-29 WO PCT/JP2013/082235 patent/WO2015079571A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0370521A1 (en) * | 1988-11-24 | 1990-05-30 | Maeda Shell Service Co., Ltd. | In-line filter device for compressed air |
| CN1186711A (en) * | 1996-06-12 | 1998-07-08 | 尚德敏 | Deoxidation method and device for boiler feeding water |
| JP2003275745A (en) * | 2002-03-26 | 2003-09-30 | Izumi Food Machinery Co Ltd | Deoxygenation method and deoxygenation device |
| JP2004330013A (en) * | 2003-05-01 | 2004-11-25 | Izumi Food Machinery Co Ltd | Method and apparatus for preparing solution containing easily oxidizable substance |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102182891B1 (en) | 2020-11-25 |
| KR20160091317A (en) | 2016-08-02 |
| WO2015079571A1 (en) | 2015-06-04 |
| JP6227005B2 (en) | 2017-11-08 |
| JPWO2015079571A1 (en) | 2017-03-16 |
| CN105764584A (en) | 2016-07-13 |
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