CN105762166B - Light emitting diode matrix - Google Patents

Light emitting diode matrix Download PDF

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Publication number
CN105762166B
CN105762166B CN201610171733.0A CN201610171733A CN105762166B CN 105762166 B CN105762166 B CN 105762166B CN 201610171733 A CN201610171733 A CN 201610171733A CN 105762166 B CN105762166 B CN 105762166B
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China
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layer
light emitting
emitting diode
type semiconductor
conductive type
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CN201610171733.0A
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CN105762166A (en
Inventor
周理评
杨於铮
叶瑞鸿
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Epistar Corp
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Epistar Corp
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Priority to CN201610171733.0A priority Critical patent/CN105762166B/en
Priority claimed from CN201110102886.7A external-priority patent/CN102760745B/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Led Devices (AREA)

Abstract

The present invention discloses a kind of light emitting diode matrix, which is made of N number of (N≤3) light emitting diode, including:Permanent substrate;Adhesive layer is located on permanent substrate;Second conductive layer is located on adhesive layer;Second separate layer is located on the second conductive layer;Bridging metal layer is located on the second separate layer;First separate layer is located on bridging metal layer;Electric conductivity articulamentum is located on the first separate layer;Epitaxial structure is located on electric conductivity articulamentum;First electrode is located on epitaxial structure.It is electrically connected to each other between light emitting diode through bridging metal layer.

Description

Light emitting diode matrix
The application be on 04 25th, 2011 the applying date, application No. is 201110102886.7, entitled " shine The divisional application of the application for a patent for invention of diode array ".
Technical field
The present invention relates to a kind of light emitting diode matrixs, more particularly to one kind by N number of (N≤3) light emitting diode Formed light emitting diode matrix.
Background technique
In recent years, due to the progress of extension and technology, make light emitting diode (light emitting diode, letter Claim LED) become great potential one of solid-state lighting light source.Due to the limitation of physical mechanism, LED is only capable of with DC powered, Therefore, it is any using LED as the Lighting Design of light source in, require collocation rectification and decompression etc. electronic building bricks, by electric power public affairs The alternating current directly provided is provided and is converted to DC power supply workable for LED.However increase the electronic building bricks such as rectification and decompression, except making Outside at the increase of illumination cost, the low AC DC transfer efficiency of electronic building bricks such as rectification and decompression, volume bigger than normal etc. can Influence the reliability and service life when LED is used in normal lighting application.
Summary of the invention
Light emitting diode matrix includes:Permanent substrate;Adhesive layer is located on permanent substrate;Second conductive layer is located at bonding On layer;Second separate layer is located on the second conductive layer;Bridging metal layer is located on the second separate layer;First separate layer position On bridging metal layer;Electric conductivity articulamentum is located on the first separate layer;Epitaxial structure is located on electric conductivity articulamentum; And first electrode is located on epitaxial structure.
Light emitting diode matrix includes:Permanent substrate;Adhesive layer is located on permanent substrate;First conductive layer is located at bonding On layer;Second separate layer is located on the first conductive layer;Bridging metal layer is located on the second separate layer;First separate layer position On bridging metal layer;Electric conductivity articulamentum is located on the first separate layer;And epitaxial structure be located at electric conductivity articulamentum it On.
Light emitting diode matrix, including N number of light emitting diode (N≤3), and through bridging gold between light emitting diode Belong to layer to be electrically connected to each other.
Detailed description of the invention
Figure 1A -1I is the structural profile illustration of disclosed light emitting diode matrix 1.
Figure 1A ' -1G ' is the structure schematic top plan view of disclosed light emitting diode matrix 1.
Fig. 2A -2I is the structural profile illustration of disclosed light emitting diode matrix 2.
Fig. 2A ' -2G ' is the structure schematic top plan view of disclosed light emitting diode matrix 2.
Description of symbols
1,2:Light emitting diode matrix
11:Growth substrate
12:The first conductive type semiconductor layer
13:Active layer
14:The second conductive type semiconductor layer
15:Groove
16:Platform
17:Electric conductivity articulamentum
18:Aisle
19:First separate layer
20:Conduction region
21:Bridge metal layer
22:Second separate layer
23:Second conductive layer
24:Adhesive layer
25:Permanent substrate
26:First conductive layer
27:First electrode
28:Second electrode
Ⅰ:First area
Ⅱ:Second area
Ⅲ:Third region
A, b:Electrical shallow trench isolation
Specific embodiment
The present invention discloses the light emitting diode matrix as composed by N (N≤3) a light emitting diode, including the One light emitting diode, the second light emitting diode ... sequentially shine to (N-1) light emitting diode and N Diode.Light emitting diode matrix has first area (I), third region (III) again, and wherein first area (I) includes the One light emitting diode, third region (III) include N light emitting diode;And second area (II) is located at first area (I) between third region (III), and including the second light emitting diode ... sequentially to (N-1) light emitting diode list Member.
Embodiment one is disclosed to be formed light emitting diode matrix 1 by 3 light emitting diodes.Its structural profile shows It is intended to as shown in Figure 1A -1I, shown in structure schematic top plan view such as Figure 1A ' -1G '.The manufacturing method of light emitting diode matrix 1, packet Include following steps:
1. providing growth substrate 11, and epitaxial structure is formed on growth substrate 11, epitaxial structures include first Conductive-type semiconductor layer 12, active layer 13 and the second conductive type semiconductor layer 14, as shown in Figure 1A and Figure 1A '.
2. then etch first area (I), second area (II) portion of epi structure to form multiple grooves 15, wherein It is not etched epitaxial structure and then forms multiple platforms 16;And the epitaxial structure of third region (III) is not etched, such as Figure 1B and Shown in Figure 1B '.
3. electric conductivity articulamentum 17 is formed on the partial region of multiple platforms 16, wherein not by electric conductivity articulamentum The land regions of 17 coverings then form multiple aisle 18;As shown in Fig. 1 C and Fig. 1 C '.
4. on partially electronically conductive property articulamentum 17, on multiple aisle 18 and the side wall of multiple grooves 15 formed first Separate layer 19, but on the partially electronically conductive property articulamentum 17 of first area (I) and whole electric conductivity of third region (III) connect It connects and is not covered by the first separate layer 19 on layer 17.Conduction region 20 be second area (II) electric conductivity articulamentum 17 on not The region covered by the first separate layer 19.As shown in Fig. 1 D and Fig. 1 D '.
5. on the first separate layer 19, within conduction region 20, multiple grooves 15 and third region (III) it is all conductive Property articulamentum 17 on form bridging metal layer 21, but will be used as in the partially electronically conductive property articulamentum 17 of first area (I) subsequent The electric connection of second conductive layer and the second conductive type semiconductor layer, so side is not covered by bridging metal layer 21 thereon. And the region a for being located at second area (II) neighbouring conduction region 20 is not also covered by bridging metal layer 21, can be used as electrical isolation It is used;As shown in Fig. 1 E and Fig. 1 E '.Positioned at the part of first area (I), bridging metal layer 21 is extended within multiple grooves 15 And it is electrically connected with the first conductive type semiconductor layer 12;Bridging metal layer 21 on multiple platforms 16 and aisle 18 passes through First separate layer 19 electrically completely cuts off with the second conductive type semiconductor layer 14.On conduction region 20 in second area (II) across It connects metal layer 21 to be electrically connected by electric conductivity articulamentum 17 and the second conductive type semiconductor layer 14, part bridges metal layer 21 then It extends within multiple grooves 15 and is electrically connected with the first conductive type semiconductor layer 12;Positioned at multiple platforms 16 and aisle 18 it On bridging metal layer 21 electrically completely cut off by the first separate layer 19 with the second conductive type semiconductor layer 14.Positioned at third region (III) bridging metal layer 21 is electrically connected by electric conductivity articulamentum 17 and the second conductive type semiconductor layer 14.
6. forming the second separate layer 22, but second on bridging metal layer 21 and on the region a of second area (II) Separate layer 22 does not cover the partially electronically conductive property articulamentum 17 of first area (I);As shown in Fig. 1 F and Fig. 1 F '.
7. forming second on the second separate layer 22 and on the partially electronically conductive property articulamentum 17 of first area (I) to lead Electric layer 23;As shown in Fig. 1 G and Fig. 1 G '.
8. forming adhesive layer 24 on the second conductive layer 23;Permanent substrate 25 is provided;And by adhesive layer 24 and permanently Substrate 25 bonds, as shown in fig. 1H.
9. removing growth substrate 11 to expose the first conductive type semiconductor layer 12 and be roughened its surface.Then, multiple It is etched down in aisle 18 from the first conductive type semiconductor layer 12 and exposes the first separate layer 19, to form N number of light-emitting diodes Pipe unit.Wherein the first light emitting diode is located at first area (I), the second light emitting diode ... sequentially to (N-1) light emitting diode is located at second area (II) and N light emitting diode is located at third region (III).Finally, First electrode 27 is formed on 12 coarse surface of the first conductive type semiconductor layer of N light emitting diode, that is, forms warp The light emitting diode matrix 1 of the N number of light emitting diode of 21 electrical series of metal layer is bridged, as shown in Figure 1 I.
Embodiment two is disclosed to be formed light emitting diode matrix 2 by 3 light emitting diodes.Its structural profile shows It is intended to as shown in Fig. 2A -2I, shown in structure schematic top plan view such as Fig. 2A ' -2G '.The production method of light emitting diode matrix 2, packet Include following steps:
1. providing growth substrate 11, and epitaxial structure is formed on growth substrate 11, epitaxial structures include first Conductive-type semiconductor layer 12, active layer 13 and the second conductive type semiconductor layer 14, as shown in Fig. 2A and Fig. 2A '.
2. then etching part epitaxial structure to be to form multiple grooves 15, wherein be not etched epitaxial structure then formed it is more A platform 16, as shown in Fig. 2 B and Fig. 2 B '.
3. electric conductivity articulamentum 17 is formed on the partial region of multiple platforms 16, wherein not by electric conductivity articulamentum The land regions of 17 coverings then form multiple aisle 18;As shown in Fig. 2 C and Fig. 2 C '.
4. on partially electronically conductive property articulamentum 17, on multiple aisle 18 and the side wall of multiple grooves 15 formed first Separate layer 19.Second area (II), third region (III) the region that is not covered by the first separate layer 19 of electric conductivity articulamentum 17 Then it is defined as conduction region 20;As shown in Fig. 2 D and Fig. 2 D '.
5. on the first separate layer of part 19, conduction region 20 and multiple grooves 15 in addition to third region (III) it Interior formation bridges metal layer 21.But it will be as subsequent second conductive layer and the in first separate layer of part 19 of first area (I) Electrically isolation is used one conductive-type semiconductor layer, therefore side's covering does not bridge metal layer 21 thereon.In the more of third region (III) Within a groove 15 and the first separate layer 19 of multiple platforms will be as subsequent first conductive layer and the second conductive type semiconductor layer Electrically isolation is used, therefore not rectangular thereon at covering bridging metal layer 21, as shown in Fig. 2 E and Fig. 2 E '.Positioned at first area (I) part bridging metal layer 21 is extended within multiple grooves 15 and is electrically connected with the first conductive type semiconductor layer 12, position Bridging metal layer 21 on multiple platforms 16 and aisle 18 passes through the first separate layer 19 and the second conductive type semiconductor layer 14 Electrically isolation.It is located at the bridging metal layer 21 on conduction region 20 in second area (II) and passes through electric conductivity articulamentum 17 and the Two conductive semiconductor layer 14 is electrically connected;Part bridging metal layer 21 extends within multiple grooves 15 and and the first conductive type Semiconductor layer 12 is electrically connected;Bridging metal layer 21 on multiple platforms 16 and aisle 18 by the first separate layer 19 with The electrically isolation of the second conductive type semiconductor layer 14.The bridging metal layer 21 being located on conduction region 20 in third region (III) is logical It crosses electric conductivity articulamentum 17 and the second conductive type semiconductor layer 14 is electrically connected.In addition, being located at second area (II), third region (III) region b of neighbouring conduction region 20 is not that bridging metal layer 21 is completely covered in, can be used as electrically isolation and is used.
6. on bridging metal layer 21, on first separate layer of part 19 of first area (I) and second area (II) In do not formed the second separate layer 22 on the completely covered region b of bridging metal layer 21, but the second separate layer 22 does not cover Within multiple grooves 15 in third region (III), on the first separate layer 19 of multiple platforms and in third region (III) not by Bridge the completely covered region b of metal layer 21;As shown in Fig. 2 F and Fig. 2 F '.
7. on the second separate layer 22, within multiple grooves 15 of third region (III), multiple platforms first separate The first conductive layer 26 is not formed by the completely covered region b of bridging metal layer 21 on layer 19 and in third region (III);Such as Shown in Fig. 2 G and Fig. 2 G '.
8. forming adhesive layer 24 on the first conductive layer 26;Permanent substrate 25 is provided, and by adhesive layer 24 and permanently Substrate 25 bonds, as illustrated in figure 2h.
9. removing growth substrate 11 to expose the first conductive type semiconductor layer 12 and be roughened its surface.Then, multiple It is etched down among aisle 18 from the first conductive type semiconductor layer 12 and exposes the first separate layer 19, to form N number of luminous two Pole pipe unit.Wherein the first light emitting diode is located at first area (I), and the second light emitting diode to (N-1) is sent out Optical diode unit is located at second area (II) and N light emitting diode is located at third region (III).Then at first area (I) the first conductive type semiconductor layer 12 of not formed bridging 21 part of metal layer, which is etched down to, exposes electric conductivity articulamentum 17, and second electrode 28 is formed on electric conductivity articulamentum 17, that is, it is formed through bridging 21 electrical series of metal layer N number of luminous two The light emitting diode matrix 2 of pole pipe unit, as shown in figure 2i.
In above-described embodiment one and embodiment two, the material of growth substrate 11 includes an at least material, selected from GaAs, Material group composed by gallium phosphide, sapphire, silicon carbide, gallium nitride or aluminium nitride.Epitaxial structure is by a kind of iii-v Semiconductor material is formed, this III-V group semi-conductor material is AlGaInP series compound or aluminum indium gallium nitride seriation Close object.Electric conductivity articulamentum 17 includes one or more kinds of material, selected from tin indium oxide, cadmium tin, antimony tin, The group that indium zinc oxide, zinc oxide aluminum and zinc-tin oxide are constituted.First separate layer 19, the second separate layer 22 are insulation material Material can respectively include one or more kinds of materials, selected from silica, titanium oxide, titanium dioxide, titanium pentoxide, The group that titanium sesquioxide, ceria, zinc sulphide and aluminium oxide are constituted.First conductive layer 26, the second conductive layer 23 can For silver or aluminium.Adhesive layer 24 be conductive material, composition material can be metal or metal alloy, such as AuSn, PbSn, AuGe, AuBe,AuSi,Sn,In,Au,PdIn.Permanent substrate 25 is conductive material, for example including carbide, metal, metal alloy, gold Belong to the materials such as oxide or metallic composite.The material for bridging metal layer 21 includes metal, metal alloy or metal oxide.
Embodiment cited by the present invention is only to illustrate the present invention, is not used to limit the scope of the present invention.Anyone Any modification apparent easy to know or change made for the present invention all do not depart from spirit and scope of the invention.

Claims (10)

1. a kind of light emitting diode construction, includes:
Electrically conductive substrate;
The first conductive type semiconductor layer, active layer and the second conductive type semiconductor layer are sequentially stacked on the electrically conductive substrate;
Metal layer is set between the electrically conductive substrate and the first conductive type semiconductor layer, and the metal layer includes multiple first Part and the second part for connecting these first parts, wherein respectively the first part passes through the first conductive type semiconductor layer and should Active layer and connect with the second conductive type semiconductor layer, which is located at the first conductive type semiconductor layer can lead with this Between electric substrate, and the metal layer is electrically insulated with the first conductive type semiconductor layer and the active layer respectively;
Electric conductivity articulamentum, between the first conductive type semiconductor layer and the electrically conductive substrate, and the electric conductivity articulamentum It is electrically connected with the first conductive type semiconductor layer;
Adhesive layer is set between the electrically conductive substrate and the first conductive type semiconductor layer, which penetrates the bonding Layer is electrically connected with the metal layer;
Electrode connects on the surface of the electric conductivity articulamentum towards the first conductive type semiconductor layer, and through the electric conductivity Layer is electrically connected with the first conductive type semiconductor layer;And
First separate layer is set between the electric conductivity articulamentum and the second part.
2. light emitting diode construction as described in claim 1, wherein the adhesive layer be set to metal layer second part with can lead Between electric substrate.
3. light emitting diode construction as described in claim 1, wherein metal layer and adhesive layer have different materials.
4. light emitting diode construction as described in claim 1, wherein the first part of metal layer has identical with second part Material.
5. light emitting diode construction as described in claim 1, wherein also include the second separate layer, be set to the adhesive layer and be somebody's turn to do Between metal layer.
6. light emitting diode construction as claimed in claim 1 or 2, wherein the electrode and the electric conductivity articulamentum are physically contacted.
7. light emitting diode construction as claimed in claim 1 or 2, wherein the electric conductivity articulamentum surrounds these first parts, And the electric conductivity articulamentum between adjacent first part is continuous unbroken.
8. light emitting diode construction as claimed in claim 1 or 2, wherein a part of the adhesive layer covers the metal layer The second part.
9. light emitting diode construction as claimed in claim 1 or 2, wherein the adhesive layer includes gold, tin or gold-tin alloy.
10. light emitting diode construction as claimed in claim 1 or 2, wherein the electrically conductive substrate includes metal, carbide, gold Belong to alloy, metal oxide or metallic composite.
CN201610171733.0A 2011-04-25 2011-04-25 Light emitting diode matrix Active CN105762166B (en)

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CN201110102886.7A CN102760745B (en) 2011-04-25 2011-04-25 Light emitting diode matrix
CN201610171733.0A CN105762166B (en) 2011-04-25 2011-04-25 Light emitting diode matrix

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TWI676285B (en) 2017-05-04 2019-11-01 國立交通大學 Electrodeless light-shielding of light-emitting diode display structure and process thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101960602A (en) * 2008-02-29 2011-01-26 欧司朗光电半导体有限公司 Optoelectronic semi-conductor body and method for the production thereof

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WO2007018360A1 (en) * 2005-08-09 2007-02-15 Seoul Opto Device Co., Ltd. Ac light emitting diode and method for fabricating the same
TWI341039B (en) * 2007-03-30 2011-04-21 Delta Electronics Inc Light emitting diode apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101960602A (en) * 2008-02-29 2011-01-26 欧司朗光电半导体有限公司 Optoelectronic semi-conductor body and method for the production thereof

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