CN105762054A - Vacuum extracavity controllable static gas target device and using method thereof - Google Patents
Vacuum extracavity controllable static gas target device and using method thereof Download PDFInfo
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- CN105762054A CN105762054A CN201610211867.0A CN201610211867A CN105762054A CN 105762054 A CN105762054 A CN 105762054A CN 201610211867 A CN201610211867 A CN 201610211867A CN 105762054 A CN105762054 A CN 105762054A
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- piston
- window
- vacuum chamber
- air cavity
- translation platform
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
Abstract
The invention relates to a vacuum extracavity controllable static gas target device, which comprises an incident window and an emergent window, wherein the incident window is connected with a first telescopic corrugated pipe via a first three-way pipe; the emergent window is connected with a second telescopic corrugated pipe via a second three-way pipe; a gas box is connected between the first telescopic corrugated pipe and the second telescopic corrugated pipe; a micro adjustable valve is connected onto the gas box; the micro adjustable valve is connected with a barometer; the first three-way pipe is connected with a changeable diameter adapter via a first external three-way pipe; the changeable diameter adapter is connected with a vacuum gauge; a second three-way pipe is connected with a baffle valve via a second external three-way pipe; the baffle valve is connected with a vacuum pump; and the first external three-way pipe and the second external three-way pipe are connected via a link corrugated pipe. The device and the method of the invention can be applied to the engineering field which requires to use light and gaseous substances to act mutually in social production or a scientific experiment, and the structure is simple, the regulation is convenient, and the cost is low.
Description
Technical field
The present invention relates to the outer controlled gas at rest target assembly of a kind of vacuum chamber and using method thereof, it is adaptable to social production or need the engineering field utilizing light to interact with gaseous material in scientific experiments.
Background technology
In some social production activity or scientific experiments research process, interference or destruction in order to avoid Atmospheric components, it is frequently necessary to the social production or the scientific experiments that complete to be correlated with in vacuum tightness environment, the such as radiation of vacuum extreme ultraviolet or even X ray wave band, the processes such as its generation, interaction and detection are required for completing under vacuum conditions, die out this is because the photon of this wave band is as easy as rolling off a log by Atmospheric Absorption, in order to avoid interference or the destruction of Atmospheric components, it is necessary to operate under vacuum conditions.It is therefore proposed that the present invention.
Summary of the invention
For above-mentioned prior art, the invention provides the outer controlled gas at rest target assembly of a kind of vacuum chamber and using method thereof, under the premise of (without opening vacuum action chamber) of exempting to begin to speak, achieve the functions such as gas target length precision is adjustable, gas target static air pressure precision is controlled, vacuum environment is operable；Make use of the combination of piston and translation stage adjustable to the precision realizing gas target length, make use of the combination of airway and reset valve controlled to the precision realizing gas target air pressure, also use the scalability of corrugated tube and the extendability of airway to realize the operable of vacuum environment.
For reaching above-mentioned purpose, the present invention is achieved by the following technical solutions:
The outer controlled gas at rest target assembly of a kind of vacuum chamber, including entrance window and exit window, described entrance window is connected to telescopic bellows one by tee T one, described exit window is connected to telescopic bellows two by tee T two, it is connected to gas box between described telescopic bellows one and telescopic bellows two, being connected to reset valve on described gas box, described reset valve is connected to barometer；Described tee T one is connected to reducing converting interface by external tee T one, and described reducing converting interface is connected to vacuometer；Described tee T two is connected to flapper valve by external tee T two, and described flapper valve is connected to vacuum pump, described external tee T one and external tee T two and connects by linking corrugated tube.
Described gas box includes rectilinear translation platform one and rectilinear translation platform two, described rectilinear translation platform one is connected with telescopic bellows one, and rectilinear translation platform one is provided with piston one, described rectilinear translation platform two is connected with telescopic bellows two, and rectilinear translation platform two is provided with piston two, described piston one and piston two are connected by air cavity, and described air cavity is connected with reset valve by airway.
Fastening support by air chamber between described piston one and piston two to be connected with air cavity, described piston one is connected by fixed support one with rectilinear translation platform one, and described piston two is connected by fixed support two with rectilinear translation platform two.
Described rectilinear translation platform one and rectilinear translation platform two be connected with base support.
It is provided with piston seal O-ring one between described piston one and air cavity, between described piston two and air cavity, is provided with piston seal O-ring two.
Described piston one is identical with the structure of piston two, including body, body is provided with sealed window, described sealed window is provided with window pressing plate, described body and window pressing plate are hollow, and body interior is provided with the cavity of cone, body exterior is provided with fixed support draw-in groove, seals O-ring draw-in groove and window aperture seal circle draw-in groove, and described window aperture seal circle draw-in groove is connected by screw between O-ring draw-in groove with sealing.
Described air cavity is the cylinder straight pipe of hollow.
Described air cavity is transparent with machine glass air cavity.
A kind of using method of the outer controlled gas at rest target assembly of vacuum chamber, comprise the following steps: use up and first pass through entrance window entrance vacuum chamber, the sealed window of through piston one, and interact with the working gas in air cavity, then pass through the sealed window of piston two, it is again introduced into the other end of vacuum chamber, exports finally by exit window.
Outside the gas target of present invention chamber under vacuum conditions, principle of adjustment and control is as follows: (1) make use of the combination of piston and translation stage adjustable to the precision realizing gas target length, namely two pistons are separately fixed on two rectilinear translation platforms, and the precision being realized gas target length by the air cavity distance between two pistons of change is adjustable；(2) make use of the combination of airway and reset valve controlled to the precision realizing gas target air pressure, namely working gas is imported air cavity by airway and forms gas at rest target, and air inflow is realized accurate controlled by reset valve；(3) make use of the extendability of the scalability of corrugated tube and airway to realize the operable of vacuum environment, namely the amount of movement of piston can be offset by the stroke of corrugated tube, and the air inflow of air cavity can be extended by airway and be accessed by reset valve.
The present invention achieves the functions such as gas target length precision is adjustable, gas target static air pressure precision is controlled, vacuum environment is operable under the premise of (without opening vacuum action chamber) of exempting to begin to speak, present configuration is simple, regulation and control are convenient, and with low cost, it is adaptable to social production or need in scientific experiments utilizes the engineering field that light interacts with gaseous material.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the air cavity tangent plane schematic diagram in the present invention；
Fig. 3 is the tangent plane schematic diagram of the piston one in the present invention and piston two；
Fig. 4 is the tangent plane structural representation of the gas box in the present invention；
Fig. 5 is the structural representation of the present embodiment 1；
nullWherein，1 is entrance window、2 is tee T one、3 is telescopic bellows one、4 is rectilinear translation platform one、5 is piston one、6 is air cavity、7 is airway、8 is reset valve、9 is barometer、10 is piston two、11 is rectilinear translation platform two、12 is telescopic bellows two、13 is tee T two、14 is exit window、15 is external tee T one、16 is reducing converting interface、17 is vacuometer、18 is link corrugated tube、19 is external tee T two、20 is flapper valve、21 is vacuum pump、22 is conical bores、23 is fixed support draw-in groove、24 for sealing O-ring draw-in groove、25 is sealed window、26 is window pressing plate、27 is window aperture seal circle draw-in groove、28 is screw、29 fasten support for air chamber、30 is piston seal O-ring one、31 is piston seal O-ring two、32 is fixed support one、33 is fixed support two、34 is base support、35 is laser system、36 is condenser lens、37 is laser ultrafast pulse、38 is noble gas Ar steel cylinder、39 is soft X-ray spectrometer、40 is X ray CCD、41 is body.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is further illustrated, but protection scope of the present invention is not limited to this.
As Figure 1-4, the outer controlled gas at rest target assembly of vacuum chamber of the present invention, including entrance window 1 and exit window 14, entrance window 1 is connected to telescopic bellows 1 by tee T 1, exit window 14 is connected to telescopic bellows 2 12 by tee T 2 13, being connected to gas box between telescopic bellows 1 and telescopic bellows 2 12, gas box is connected to reset valve 8, reset valve 8 is connected to barometer 9；Tee T 1 is connected to reducing converting interface 16 by external tee T 1, and reducing converting interface 16 is connected to vacuometer 17；Tee T 2 13 is connected to flapper valve 20 by external tee T 2 19, and flapper valve 20 is connected to vacuum pump 21, external tee T 1 and external tee T 2 19 and connects by linking corrugated tube 18.
Gas box in the present invention includes rectilinear translation platform 1 and rectilinear translation platform 2 11, rectilinear translation platform 1 is connected with telescopic bellows 1, and rectilinear translation platform 1 is provided with piston 1, rectilinear translation platform 2 11 is connected with telescopic bellows 2 12, and rectilinear translation platform 2 11 is provided with piston 2 10, piston 1 and piston 2 10 are connected by air cavity 6, for increasing sealing, it is provided with piston seal O-ring 1 between piston 1 and air cavity 6, between piston 2 10 and air cavity 6, is provided with piston seal O-ring 2 31；Air cavity 6 is the cylinder straight pipe of hollow, and its material adopts transparent with machine glass, contributes to the interaction process of direct perusal light and gas, and air cavity 6 is connected with reset valve 8 by airway 7.
Fasten support 29 by air chamber between piston 1 and piston 2 10 in the present invention to be connected with air cavity 6, piston 1 is connected by fixed support 1 with rectilinear translation platform 1, piston 2 10 and rectilinear translation platform 2 11 is connected by fixed support 2 33, and rectilinear translation platform 1 and rectilinear translation platform 2 11 be connected with base support 34.
Piston 1 in the present invention is identical with the structure of piston 2 10, including body 41, body 41 is provided with sealed window 25, sealed window 25 is provided with window pressing plate 26, body 41 and window pressing plate 26 are hollow, and the internal cavity 22 being provided with cone of body 41, body 41 is provided externally with fixed support draw-in groove 23, seals O-ring draw-in groove 24 and window aperture seal circle draw-in groove 27, and window aperture seal circle draw-in groove 27 is connected by screw 28 between O-ring draw-in groove 24 with sealing.
The using method of the outer controlled gas at rest target assembly of the vacuum chamber of the present invention, comprise the following steps: use up and first pass through entrance window 1 and enter vacuum chamber, the sealed window 25 of through piston 1 also interacts with the working gas in air cavity 6, the sealed window then passing through piston 2 10 is again introduced into the other end of vacuum chamber, exports finally by exit window 14.
The all part interfaces of the present invention all adopt KF vacuum flange standard interface, adopt sealing O-ring and clip to carry out fastening sealing between each interface.The vacuum that whole vacuum chamber forms a complete UNICOM in inside is overall, relies on vacuum pump 21 to maintain vacuum, relies on flapper valve 20 to cut off with external carrying out or be connected, and relies on vacuometer 17 to observe and measure the vacuum in vacuum chamber.Little opening in the middle of air cavity 6 is the access port of reserved airway 7, and piston 1 and piston 2 10 can be filled in the two ends of air cavity 6；Piston 1 and piston 2 10 are cylindrical shape.Working gas in gas box is imported air cavity 6 by airway 7 and forms gas at rest target, and between air cavity 6 and piston 5 and 10, adopt piston O-ring 1 and piston O-ring 2 31 to carry out sealing and realize to promote back and forth, the adjustment of gas target length can be realized by changing the distance between two pistons 1 and piston 2 10, and the rectilinear movement relying on rectilinear translation platform 1 and rectilinear translation platform 2 11 that promotes of piston 1 and piston 2 10 realizes, undertaken fastening and producing transmission by fixed support 1 and fixed support 2 33 between piston and translation stage.
Embodiment 1
As it is shown in figure 5, be applied to the experimentation of ultrafast laser and noble gas interaction generation grenz ray.Entrance window 1 adopts CaF glass material；Tee T 1 and tee T 2 13 are KF40 rustless steel tee T；Telescopic bellows 1 and telescopic bellows 2 12 are KF40 telescopic bellows；The stroke of rectilinear translation platform 1 and rectilinear translation platform 2 11 is 50mm；The sealed window 25 of piston 1 and piston 2 10 adopts the stalloy that 0.1mm is thick；Air cavity 6 is acrylic material；Airway 7 adopts the copper tube of 6mm external diameter；Reset valve 8 is needle valve structure；Barometer 9 is highly sensitive barometer；Exit window 14 is the Al film that 500nm is thick, for filtration residue 800nm laser and through grenz ray；External tee T 1 and external tee T 2 19 are the external tee T of KF40 rustless steel；Reducing converting interface 16 turns KF25 converting interface for KF40；Vacuometer 17 is KF25 vacuometer；Link corrugated tube 18 is the flexible corrugated tube of KF40；Flapper valve 20 is KF40 flapper valve；Laser system 35 is 800nm fs-laser system；Condenser lens 36 is quartz material, focal length 400mm；Laser ultrafast pulse 37 is 2mJ/45fs/1kHz femtosecond laser ultrafast pulse.
The ultrafast femtosecond laser of 800nm is entered vacuum chamber by CaF entrance window 1 and is converged on the sealed thin steel disc 25 of piston 1 after plus lens 36, interact with the working gas Ar in air cavity 6 and produce grenz ray after converging laser breakdown stalloy, then grenz ray enters spectrogrph 39 through Al film (remaining 800nm light is eliminated by this Al membrane filtration) again, and the produced soft X-ray spectroscopy of experiment is finally gathered by CCD40 and analyzes.Outside the gas target of the present embodiment 1 chamber under vacuum conditions, regulation process is as follows: (1) make use of the combination of piston and translation stage adjustable to the precision realizing gas target length, namely two pistons are separately fixed on two rectilinear translation platforms, and the precision being realized gas target length by the air cavity distance between two pistons of change is adjustable；(2) make use of the combination of airway 7 and reset valve 8 controlled to the precision realizing gas target air pressure, namely working gas is imported air cavity 6 by airway 7 and forms gas at rest target, and air inflow is realized accurate controlled by reset valve 8；(3) make use of the extendability of the scalability of corrugated tube and airway 7 to realize the operable of vacuum environment, namely the amount of movement of piston can be offset by the stroke of corrugated tube, and the air inflow of air cavity 6 can be passed through airway 7 and extend and pass through reset valve 8 and access the Ar gas 38 of steel cylinder.
Above-described embodiment is only for illustrating the inventive concept of the present invention, but not the restriction to rights protection of the present invention, all changes utilizing this design that the present invention carries out unsubstantiality, protection scope of the present invention all should be fallen into.
Claims (9)
1. the outer controlled gas at rest target assembly of vacuum chamber, it is characterized in that: include entrance window and exit window, described entrance window is connected to telescopic bellows one by tee T one, described exit window is connected to telescopic bellows two by tee T two, it is connected to gas box between described telescopic bellows one and telescopic bellows two, being connected to reset valve on described gas box, described reset valve is connected to barometer；Described tee T one is connected to reducing converting interface by external tee T one, and described reducing converting interface is connected to vacuometer；Described tee T two is connected to flapper valve by external tee T two, and described flapper valve is connected to vacuum pump, described external tee T one and external tee T two and connects by linking corrugated tube.
2. the outer controlled gas at rest target assembly of vacuum chamber as claimed in claim 1, it is characterized in that: described gas box includes rectilinear translation platform one and rectilinear translation platform two, described rectilinear translation platform one is connected with telescopic bellows one, and rectilinear translation platform one is provided with piston one, described rectilinear translation platform two is connected with telescopic bellows two, and rectilinear translation platform two is provided with piston two, described piston one and piston two are connected by air cavity, and described air cavity is connected with reset valve by airway.
3. the outer controlled gas at rest target assembly of vacuum chamber as claimed in claim 2, it is characterized in that: fasten support by air chamber between described piston one and piston two and be connected with air cavity, described piston one is connected by fixed support one with rectilinear translation platform one, and described piston two is connected by fixed support two with rectilinear translation platform two.
4. the outer controlled gas at rest target assembly of vacuum chamber as claimed in claim 3, it is characterised in that: described rectilinear translation platform one and rectilinear translation platform two be connected with base support.
5. the outer controlled gas at rest target assembly of vacuum chamber as claimed in claim 3, it is characterised in that: it is provided with piston seal O-ring one between described piston one and air cavity, between described piston two and air cavity, is provided with piston seal O-ring two.
6. the outer controlled gas at rest target assembly of vacuum chamber as claimed in claim 2, it is characterized in that: described piston one is identical with the structure of piston two, including body, body is provided with sealed window, described sealed window is provided with window pressing plate, described body and window pressing plate and is hollow, and body interior is provided with the cavity of cone, body exterior is provided with fixed support draw-in groove, seals O-ring draw-in groove and window aperture seal circle draw-in groove, and described window aperture seal circle draw-in groove is connected by screw between O-ring draw-in groove with sealing.
7. the outer controlled gas at rest target assembly of vacuum chamber as described in claim 2-6 any claim, it is characterised in that: described air cavity is the cylinder straight pipe of hollow.
8. the outer controlled gas at rest target assembly of vacuum chamber as claimed in claim 7, it is characterised in that: described air cavity is transparent with machine glass air cavity.
9. the using method of the outer controlled gas at rest target assembly of vacuum chamber, it is characterized in that comprising the following steps: use up and first pass through entrance window entrance vacuum chamber, the sealed window of through piston one, and interact with the working gas in air cavity, then pass through the sealed window of piston two, it is again introduced into the other end of vacuum chamber, exports finally by exit window.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201610211867.0A CN105762054B (en) | 2016-04-07 | 2016-04-07 | Controllable gas at rest target assembly and its application method outside a kind of vacuum chamber |
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| CN201610211867.0A CN105762054B (en) | 2016-04-07 | 2016-04-07 | Controllable gas at rest target assembly and its application method outside a kind of vacuum chamber |
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| CN105762054A true CN105762054A (en) | 2016-07-13 |
| CN105762054B CN105762054B (en) | 2017-11-28 |
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| CN201610211867.0A Expired - Fee Related CN105762054B (en) | 2016-04-07 | 2016-04-07 | Controllable gas at rest target assembly and its application method outside a kind of vacuum chamber |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106841261A (en) * | 2017-03-06 | 2017-06-13 | 温州大学 | A kind of vacuum gas target assembly controllable outside chamber |
| CN109975274A (en) * | 2019-04-16 | 2019-07-05 | 北京科技大学 | A kind of blast furnace molten iron silicon content on-line quick detection device |
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| CN101858454A (en) * | 2010-06-02 | 2010-10-13 | 中国科学院上海光学精密机械研究所 | Device for automatically adjusting pressure of flowing gas |
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| CN103427323A (en) * | 2013-08-22 | 2013-12-04 | 中国科学院上海光学精密机械研究所 | Single higher-harmonic ultraviolet monochromatic light source |
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- 2016-04-07 CN CN201610211867.0A patent/CN105762054B/en not_active Expired - Fee Related
Patent Citations (5)
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| JPH03104869A (en) * | 1989-09-18 | 1991-05-01 | Ulvac Japan Ltd | Laser cvd device |
| US20030020014A1 (en) * | 2000-03-24 | 2003-01-30 | Ralf Zimmermann | Method and device for detecting compounds in a gas stream |
| CN101858454A (en) * | 2010-06-02 | 2010-10-13 | 中国科学院上海光学精密机械研究所 | Device for automatically adjusting pressure of flowing gas |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106841261A (en) * | 2017-03-06 | 2017-06-13 | 温州大学 | A kind of vacuum gas target assembly controllable outside chamber |
| CN109975274A (en) * | 2019-04-16 | 2019-07-05 | 北京科技大学 | A kind of blast furnace molten iron silicon content on-line quick detection device |
| CN109975274B (en) * | 2019-04-16 | 2024-01-23 | 北京科技大学 | Online rapid detection device for silicon content of molten iron of blast furnace |
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| CN105762054B (en) | 2017-11-28 |
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