CN207602974U - A kind of chamber grows adjustable tandem type coherent X-ray device - Google Patents
A kind of chamber grows adjustable tandem type coherent X-ray device Download PDFInfo
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- CN207602974U CN207602974U CN201721562271.1U CN201721562271U CN207602974U CN 207602974 U CN207602974 U CN 207602974U CN 201721562271 U CN201721562271 U CN 201721562271U CN 207602974 U CN207602974 U CN 207602974U
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Abstract
The utility model discloses a kind of chambers to grow adjustable tandem type coherent X-ray device, suitable for fields such as the generation and applications of coherent X-ray and extreme ultraviolet ray, has the characteristics that high conversion efficiency, tunable wave length range are wide.The utility model employs tandem type double acting cavity configuration, and first acting chamber is used for the generation of X ray seed light, and second acting chamber is used for the amplification of X ray seed light, and this two-chamber setting substantially increases the generation efficiency of X ray；The action length of each acting chamber can effectively be adjusted by piston, and the relative position between each component of device is not changed in adjustment effect cavity length, this is because the compressibility of the bellows of the device realizes the buffering that distance changes, and effective phase matching relationship that can optimize when laser interacts with working gas that adjusts of acting chamber length so that the X ray of final output is best；Based on the two innovative points, the energy and efficiency of present apparatus output X ray have all reached new peak.
Description
Technical field
The utility model is related to a kind of chambers to grow adjustable tandem type coherent X-ray device, suitable for coherent X-ray and extremely purple
The fields such as the generation and application of outer ray have the characteristics that high conversion efficiency, tunable wave length range are wide.
Background technology
Laser (English：Light Amplification by Stimulated Emission of Radiation, contracting
It writes：LASER or abbreviation：Laser), Hong Kong and Macao claims " laser ", " laser ", and Taiwan claims " laser ", refers to lead to
It crosses stimulated radiation and generates, the light amplification of the light of amplification, i.e. stimulated radiation.Feature is that monochromaticjty is fabulous, and divergence is minimum, brightness
(power) can reach very high.Generating laser needs " excitation source ", " gain media ", " resonant structure " these three elements.Swash
The utility model of light device is a significant achievement of 20th century science and technology.It make people have the ability to control finally scale it is minimum,
The luminescence process of the extremely chaotic molecule of high number, movement and atom, so as to obtain generation, amplify relevant infrared ray, visible
The ability of light and ultraviolet light (so that X ray and gamma-rays).The rise of laser science technology makes understanding and profit of the mankind to light
With having reached a brand-new level.Since laser of the wavelength less than 200nm is easy to be absorbed in itself by air and material, so
It is difficult with the laser that working media directly generates extreme ultraviolet waveband and X ray wave band.In existing technology, long-wave band is commonly used
Driving laser interacts to generate the coherent X-ray of short-wave band and extreme ultraviolet ray with working gas (commonly using inert gas),
The transfer efficiency of this mode is very low.
Utility model content
In order to solve the problems of in the prior art, the utility model it is in this be designed to provide a kind of chamber length can
The chamber of change grows adjustable tandem type coherent X-ray device, and X rays, and X ray can either be directly generated using the device
Transfer efficiency it is higher.
In order to realize the purpose of this utility model, adjustable tandem type coherent X-ray device packet is grown in the chamber that this is provided
Include input window, X ray generates grade, X ray amplifying stage, filtering window, vacuum pump and X ray storage chamber, the input window, institute
It states and passes sequentially through connectedness A connections between X ray generation grade and the X ray amplifying stage respectively；The X ray generates grade and institute
It states X ray amplifying stage and respectively includes telescopic bellows A, telescopic bellows B, acting chamber and air accumulator, the acting chamber position
Between the telescopic bellows A and the telescopic bellows B, between the telescopic bellows A and the acting chamber,
And it is connected respectively by piston between the telescopic bellows B and the acting chamber；The air accumulator passes through pipeline A and institute
State acting chamber connection；Single port vacant the telescopic bellows A is input port, and the telescopic bellows B is vacant
Single port is output port；The filtering window be located at output port in the X ray amplifying stage and the X ray storage chamber it
Between；The vacuum pump is used to make the evacuating air that X ray is generated in grade and X ray amplifying stage in it in vacuum state.
The compressibility that bellows is utilized in the device that the application provides realizes the tunable of acting chamber length, can optimize
The phase matching relationship to interact between laser and inert gas so that the X ray of final output is best；The present apparatus is adopted simultaneously
With the construction of double acting chamber, being greatly improved for coherent X-ray delivery efficiency is realized.
Further, vacuum meter A, the vacuum meter A is further included to store by connectedness B and the X rays respectively
Chamber, connectedness A connections.Vacuum condition in monitoring device is conducive to by vacuum meter, is realized true in real-time ensuring device
Altitude is conducive to the generation of X ray.
Further, translation stage, the piston and the telescopic bellows A, the telescopic bellows B phases are further included
One end of connection is installed on the translation stage.One end of piston is installed on translation stage, mobile station is slided during use
The adjusting of effect cavity length is realized, operation is more simple, convenient.
Further, it is provided with needle-valve on the pipeline A.The control of gas flow in acting chamber is realized by needle-valve, and
The amount for being passed through inert gas in acting chamber can be accurately controlled very much.
Further, the extraction air pipe being mainly made of connectedness C, connectedness D, connectedness E and vent valve is further included,
Pipeline B connections are passed sequentially through between the connectedness C, connectedness D and connectedness E；The connectedness C, connectedness D and connectedness
E generates connectedness A, the connectedness A in the X rays amplifying stage and the X ray in grade with the X ray respectively and deposits
Chamber；The vent valve releases device vacuum state for discharging the air into device.
Further, the extraction air pipe further includes vacuum meter B, the vacuum meter B and passes through connectedness F and the extraction
Air pipe connects.
Further, the connectedness C generates connectedness A, the connectedness D and the X in grade with the X ray
Sealing valve is separately installed between connectedness A and the connectedness E and the X ray storage chamber in ray amplifying stage.
Further, the pipeline B is telescopic bellows.
Compared with prior art, the beneficial effects of the utility model are：(1) tandem type double acting cavity configuration is employed, the
One acting chamber is used for the generation of X ray seed light, and second acting chamber is used for the amplification of X ray seed light, and this two-chamber is set
Put the generation efficiency for substantially increasing X ray；(2) action length of each acting chamber can effectively be adjusted, and adjusting by piston
Section does not change the relative position between each component of device when acting on cavity length, this is because the compressibility of the bellows of the device
The buffering that distance changes is realized, and the effective of acting chamber length adjusts the phase that can optimize when laser interacts with working gas
Matching relationship so that the X rays of final output are best；Based on the two innovative points, the present apparatus exports the energy and effect of X ray
Rate has all reached new peak.
Description of the drawings
Fig. 1 is the structure diagram that chamber provided by the utility model grows adjustable tandem type coherent X-ray device；
Fig. 2 is the structure diagram of piston provided by the utility model；
The X-ray intensity of example and order (i.e. the intensity and wavelength of coherent X-ray) is embodied for the utility model in Fig. 3
With conventional method caused by X-ray intensity and order comparison diagram；
Fig. 4 is X-ray intensity and order comparison diagram caused by double cavity structure and single cavity structure；
In figure：1- input windows, 2- filtering windows, 3- vacuum pumps, 4-X ray storage chambers, the scalable ripples of 5- connectednesses A, 6-
Pipe A, 7- telescopic bellows B, 8- acting chamber, 9- air accumulators, 10- pistons, 11- pipelines A, 12- vacuum meter A, 13- connectedness
B, 14- translation stage, 15- needle-valves, 16- connectednesses C, 17- connectedness D, 18- connectedness E, 19- vent valve, 20- pipelines B, 21-
Vacuum meter B, 22- connectedness F, 23- sealing valve, 24-X ray spectrometers, 25- fly to move laser, 26- plus lens, 27- data
Line, 28- computers.
Specific embodiment
Technical solution to be protected needed for the utility model is further described with reference to attached drawing herein.
Embodiment one：
Referring to Figures 1 and 2, the utility model technical solution claimed is that a kind of adjustable tandem type of chamber length is concerned with
X-ray apparatus, the device include level-one X ray and generate grade and level-one X ray amplifying stage, and X ray generates grade and X ray amplification
The cavity of grade constituent apparatus.X ray generates grade and X ray amplifying stage respectively includes telescopic bellows A6, telescopic bellows
B7, acting chamber 8 and the air accumulator 9 for storing inert gas；Wherein, acting chamber 8 is a hollow seal babinet, is opened up thereon
There is through-hole；Acting chamber 8 is between telescopic bellows A6 and telescopic bellows B7, telescopic bellows A6 and acting chamber 8
Between and telescopic bellows B7 and acting chamber 8 between connected respectively by piston 10,10 one end of piston is jammed in acting chamber
In 8 through-hole, the other end is fixedly connected respectively with telescopic bellows A6, telescopic bellows B7；The structure of the piston 10 is such as
Shown in Fig. 2,101 be rectangular outer wall, is fixed for piston, and 102 be cylinder shape inner wall, and one layer of elastic tape has been wrapped up in edge
103, for acting chamber and the extraneous movement sealed and do not influence piston, 104 be cylindrical hole, and one end is equipped with stalloy
105, pin hole is equipped on steel disc, is not influenced to focus on laser simultaneously for the sealing of working gas and is passed through from pin hole that (working gas exists
Slight leakage at pin hole is negligible).
In addition, acting chamber 8 is also connected with air accumulator 9 by pipeline A11；Inert gas is stored in air accumulator 9, passes through pipe
Road A11 can will be stored in inert gas therein and be passed through in acting chamber 8, for generating X ray by laser stimulation.
And Single port vacant telescopic bellows A6 is that (it is then that X ray generates grade to be located at X ray to generate grade to input port
Input port；Positioned at X ray amplifying stage then be X ray amplifying stage input port), telescopic bellows B7 it is vacant one
Port is that (it is then the output port that X ray generates grade to be located at X ray to generate grade to output port, for rear class X ray amplifying stage
Connection；What it is positioned at X ray amplifying stage is then the input port of X ray amplifying stage, for connecting remaining equipment).
More than two parts are the chief components of whole device, in addition, the device further includes input window 1, the input window 1
For any input window that can make laser penetration may be used, used herein is ultraviolet quartzy input window, and thickness is
2mm is handled through twin polishing；Filtering window 2, vacuum pump 3 and X ray storage chamber 4, wherein filtering window are Al membrane filtration windows；It crosses
Filter window 2 is located between the output port in X ray amplifying stage and X rays storage chamber 4, for filtering out extra laser, allows X
Ray passes through, in the X ray storage and X ray storage chamber 4 after passing through；And vacuum pump 3 is used to X ray generating grade and X is penetrated
Evacuating air in line amplifying stage makes in it in vacuum state.The X ray storage chamber 4 of this place note is a seal case,
Through-hole is equipped with, through-hole is set thereon convenient for connecting remaining equipment, such as spectrometer.The X ray storage chamber 4 has can also be straight
It connects and is formed with connectedness, such as four-way pipe, three-way pipe.
Pass through respectively between recorded input window 1 and X ray generation grade, between X ray generation grade and X ray amplifying stage
Connectedness A5 is connected.The laser that laser generator is sent out enters the telescopic bellows A6 in X ray generation grade through input window 1,
Enter in acting chamber 8 through piston again, the inert gas of excitation intracavitary generates X ray；The X ray and laser of generation pass through successively
It piston, telescopic bellows B7 and is set to the connectedness A5 that X ray is generated between grade and X ray amplifying stage and enters X ray and put
Telescopic bellows A6 in big grade, then enter in acting chamber 8 through piston, generated X ray is amplified in acting chamber 8,
It is used as transit, is such as directly entered by X in piston, telescopic bellows B7 and filtering window 2 deposit X ray storage chamber 4 successively afterwards
X-ray spectrometer 24 made of the special CCD camera of ray carries out the measure of spectrum and intensity.
Change the length of the i.e. changeable acting chamber 8 of length that piston 10 is placed in acting chamber 8 in use, due to work
The other end of plug 10 is connect with telescopic bellows, and the retractility using telescopic bellows is the length of changeable acting chamber.
Connectedness A5 employed in the present embodiment can be straight pipe, KF40 standard interfaces, and clip mode is linked, is convenient for
Handling.
Embodiment two：
The present embodiment and implement one structure it is essentially identical, it is existing difference lies in：It further includes in detection device
The vacuum meter A12 of vacuum condition, vacuum meter A12 are connected respectively by connectedness B13 with X ray storage chamber 4, connectedness A5.
In present embodiment connectedness A5 be three-way pipe, KF40 standard interfaces.
It is generated positioned at input window 1 and X ray and input window 1 is installed on the Single port of the connectedness A5 between grade；Another port
The telescopic bellows A6 in grade is generated with X ray to link；Third port is connected by connectedness B13 with vacuum meter A12.
Generate the Single port of the connectedness A5 between grade and X ray amplifying stage positioned at X ray and X ray generate in grade can
Expansion corrugated pipe B7 is linked, and another port is linked with the telescopic bellows A6 in X ray amplifying stage, and third port passes through company
Parts B13 is connected with vacuum meter A12.
Recorded connectedness A5 can also use four-way pipe, connection mode and three-way pipe phase in certain the present embodiment
Together, not used port can be blocked with plug.
One vacuum meter, the vacuum condition in a vacuum meter detection device can be only set in the present embodiment；It can also
The setting vacuum meter identical with connectedness A5 quantity.
Embodiment three：
The X-ray apparatus that the present embodiment is provided is changing of being done on the architecture basics of embodiment one or embodiment two
Into the X-ray apparatus provided in the present embodiment further includes translation stage 14.Piston 10 and telescopic bellows A6 be linked one
One end that end and piston 10 and telescopic bellows B7 are linked is installed on translation stage 14.
Example IV：
The present embodiment is the improvements introduced on the basis of embodiment one, embodiment two, embodiment three, and the present embodiment is in reality
Apply example one, embodiment two, in embodiment three on the basis of increase by a needle-valve 15.The needle-valve 15 is set on pipeline A11, for controlling
The inert gas being stored in air accumulator 9 is made to be passed through in acting chamber 8.Improve whole device operability.
Embodiment five：
The present embodiment is the improvements introduced on the basis of embodiment one, embodiment two, embodiment three, example IV, this
The X-ray apparatus that embodiment is provided is further included mainly by connectedness C16,19 structure of connectedness D17, connectedness E18 and vent valve
Into extraction air pipe, passed sequentially through between connectedness C16, connectedness D17 and connectedness E18 pipeline B20 connection；Connectedness
C16, connectedness D17 and connectedness E18 generate connectedness A5, the connectedness A5 in X ray amplifying stage in grade with X ray respectively
And X ray storage chamber 4 connects；Vent valve 19 releases device vacuum state for discharging the air into device.
Vent valve 19 can be connected with connectedness C16 to be connected either with connectedness D17 or with connectedness E18.At this
In embodiment, vacuum pump 3 can be connected with connectedness C16, connectedness D17 or connectedness E18 are connected.Specially vent valve
19 connect with connectedness C16, and vacuum pump 3 is connected with connectedness D17.
Connectedness C16 and connectedness E18 in the present embodiment are three-way pipe, and connectedness D17 is four-way pipe.Threeway herein
Pipe and four-way pipe are KF40 standard interfaces.
Embodiment six：
The present embodiment is the improvements introduced on the basis of embodiment five, in the X-ray apparatus that the present embodiment is provided
Extraction air pipe further includes vacuum meter B21, and vacuum meter B21 is connected by connectedness F22 with connectedness E18.
Embodiment seven：
The present embodiment is the improvements introduced on the basis of embodiment five, embodiment six, and the X that the present embodiment is provided is penetrated
Line apparatus is respectively in connectedness C16 and connectedness A5, connectedness D17 in X ray generation grade and the company in X ray amplifying stages
A sealing valve 23 is added between parts A5 and connectedness E18 and X ray storage chamber 4 respectively.
Any pipeline may be used in recorded pipeline B20 in embodiment five, embodiment six, embodiment seven, this Shen
What please be used is then telescopic bellows.Achieve the purpose that synchronization length changes.
Pipeline A11 recorded in the application is steel pipeline, is conveyed for inert gas.
Connectedness B13, connectedness F22 recorded in the application are the reducing conversion head that stainless steel 304 makes, and are turned for KF40
KF25.And recorded needle-valve is fine tuning needle-valve, precision is stronger.Recorded translation stage 14 is armstrong's patent translation stage, is used
In the process, directly mobile translation stage is the length of changeable 8 inner space of acting chamber.Make operation using armstrong's patent translation stage 14
More convenient, operability is strong.Recorded sealing valve is plate sealing valve.
In addition, recorded vacuum pump 3 is the vacuum pump of KyKy high vacuum；Vent valve 19 is homemade rotary deflation
Valve.Recorded acting chamber 8 is cylindrical shape.
In addition, the application is sealed in X ray storage chamber 4 by plate sealing valve, generated X ray need to be utilized
When, equipment (such as spectrometer) with plate sealing valve is docked, stores X ray by controlling the unlatching of plate sealing valve, closing
X ray in chamber 4, which enters in follow-up equipment, to be used.
The operating process of X-ray apparatus provided herein is as follows：
1st, all parts of device are connected, device is made to be in sealing state, starts vacuum pump, whole device is pumped into very
Sky simultaneously maintains certain vacuum degree；It can check whether the vacuum degree of each cavity portion reaches job requirement by vacuum meter；
2nd, laser (pumping laser) is imported into vacuum cavity, is ensured that laser alignment enters and is successively entered two acting chambers
It is interior；
3rd, inert gas is passed through into acting chamber, acting chamber is made to be controlled simultaneously full of working gas and laser interaction
The air pressure of working gas in acting chamber；
4th, the piston position of adjustment effect chamber changes the effective length of acting chamber, so as to optimize the phase of interaction
With relationship so that the X ray of final output is best；
5th, after X ray generates, vacuum pump is closed, at this time because of sealing against each other between each cavity, although vacuum
Pump is closed, but inside cavity can still be maintained certain vacuum degree；To adjustment or disengaging section vacuum chamber, then open pair
The sealing valve of cavity portion is answered, then opens vent valve, when waiting for cavity recovery standard atmospheric pressure, you can begin to speak to operate.
Here, laser can be sent out with 800nm femto-second lasers 25 (2mJ/45fs/1kHz), excitation argon gas (Ar) or Krypton
(Kr) X ray is generated.In order to which laser effectively can intensively enter device, using the plus lens 26 for making pump laser beam
Laser is converged, plus lens 26 is placed between 800nm femto-second lasers and input window 1.Pumping laser and Ar gas after convergence
Body or the effect of Kr gases, the higher hamonic wave of generation, i.e. X ray.It is carried out under specific steps vacuum environment, step is generated including X ray
It is specific as follows that rapid and X ray amplification procedure, wherein X rays generate step：
SA1：Ar gases are filled in first acting chamber；
SA2:Squeeze into laser into the first acting chamber, the Ar gases or Kr gases in laser excitation acting chamber generate X and penetrates
Line；
The X ray amplification procedure is specific as follows：
SB1：The second acting chamber will be passed through simultaneously through X ray caused by step SA2 and laser, in the second acting chamber in advance
It is passed through Ar gases or Kr gases；
SB2:By X ray, laser reacted with the inert gas being placed in acting chamber, X ray is amplified；
SB3：The amplified filtered window of X ray filters out residual laser, obtains X ray deposit X ray storage chamber.
Here, the application will be passed through x-ray spectrometer 24, X ray by the X ray of device generation provided herein
Data are uploaded in computer 28 by spectrometer 24 by data line 27.The chamber for testing the utility model grows adjustable tandem type X
The test chart of the energy of X ray caused by x-ray apparatus, test result higher hamonic wave intensity as shown in Figure 4 and order is (i.e.
The intensity and wavelength of coherent X-ray), it is found that it enhances 4 times than traditional single acting chamber mode and has a surplus, as Fig. 3,
Shown in Fig. 4.Therefore, effective adjust of the double acting chamber length of the utility model can optimize when laser interacts with working gas
Phase matching relationship makes the energy of the X ray of output and efficiency reach best.
Claims (9)
1. a kind of chamber grows adjustable tandem type coherent X-ray device, it is characterised in that：The device includes input window (1), X ray
Generate grade, X ray amplifying stage, filtering window (2), vacuum pump (3) and X ray storage chamber (4), the input window (1), the X
Ray generates passes sequentially through connectedness A (5) connections respectively between grade and the X ray amplifying stage；The X ray generates grade and institute
It states X ray amplifying stage and respectively includes telescopic bellows A (6), telescopic bellows B (7), acting chamber (8) and air accumulator (9),
The acting chamber (8) is between the telescopic bellows A (6) and the telescopic bellows B (7), the scalable wave
Lead to respectively between line pipe A (6) and the acting chamber (8) and between the telescopic bellows B (7) and the acting chamber (8)
Cross piston (10) connection；The air accumulator (9) is connected by pipeline A (11) with the acting chamber (8)；The telescopic bellows
Single port vacant A (6) is input port, and the vacant Single port of the telescopic bellows B (7) is output port；The mistake
Between output port and the X ray storage chamber (4) of the filter window (2) in the X ray amplifying stage；The vacuum pump (3)
Evacuating air for generating X ray in grade and X ray amplifying stage makes in it in vacuum state.
2. a kind of chamber as described in claim 1 grows adjustable tandem type coherent X-ray device, it is characterised in that：It further includes true
Sky meter A (12), the vacuum meter A (12) by connectedness B (13) respectively with the X ray storage chamber (4) and the connectedness A
(5) it connects.
3. a kind of chamber as claimed in claim 1 or 2 grows adjustable tandem type coherent X-ray device, it is characterised in that：It further includes
Translation stage (14), the piston (10) be connected with the telescopic bellows A (6), the telescopic bellows B (7) one
End is installed on the translation stage (14).
4. a kind of chamber as claimed in claim 1 or 2 grows adjustable tandem type coherent X-ray device, it is characterised in that：The pipe
Needle-valve (15) is provided on road A (11).
5. a kind of chamber as claimed in claim 4 grows adjustable tandem type coherent X-ray device, it is characterised in that：Further include master
The extraction air pipe to be made of connectedness C (16), connectedness D (17), connectedness E (18) and vent valve (19), the connection
Pipeline B (20) connections are passed sequentially through between part C (16), connectedness D (17) and connectedness E (18)；The connectedness C (16) connects
Parts D (17) and connectedness E (18) generates connectedness A (5) in grade, in the X ray amplifying stage with the X ray respectively
Connectedness A (5) and the X ray storage chamber (4) connection；The vent valve (19) releases for discharging the air into device
Device vacuum state.
6. a kind of chamber as claimed in claim 5 grows adjustable tandem type coherent X-ray device, it is characterised in that：The extraction
Air pipe further includes vacuum meter B (21), and the vacuum meter B (21) is connected by connectedness F (22) with the extraction air pipe.
7. as a kind of chamber described in claim 5 or 6 grows adjustable tandem type coherent X-ray device, it is characterised in that：The company
Parts C (16) is generated with the X ray in connectedness A (5), the connectedness D (17) and the X ray amplifying stage in grade
Sealing valve (23) is separately installed between connectedness A (5) and the connectedness E (18) and the X ray storage chamber (4).
8. as a kind of chamber described in claim 5 or 6 grows adjustable tandem type coherent X-ray device, it is characterised in that：The pipe
Road B (20) is telescopic bellows.
9. a kind of chamber as claimed in claim 7 grows adjustable tandem type coherent X-ray device, it is characterised in that：The pipeline B
(20) it is telescopic bellows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721562271.1U CN207602974U (en) | 2017-11-21 | 2017-11-21 | A kind of chamber grows adjustable tandem type coherent X-ray device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721562271.1U CN207602974U (en) | 2017-11-21 | 2017-11-21 | A kind of chamber grows adjustable tandem type coherent X-ray device |
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| CN207602974U true CN207602974U (en) | 2018-07-10 |
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ID=62760287
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| CN201721562271.1U Expired - Fee Related CN207602974U (en) | 2017-11-21 | 2017-11-21 | A kind of chamber grows adjustable tandem type coherent X-ray device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109030121A (en) * | 2018-07-31 | 2018-12-18 | 山西中电科新能源技术有限公司 | A kind of pair of vacuum cavity gas is sampled and meets the method, apparatus and its component of positive pressure analysis |
-
2017
- 2017-11-21 CN CN201721562271.1U patent/CN207602974U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109030121A (en) * | 2018-07-31 | 2018-12-18 | 山西中电科新能源技术有限公司 | A kind of pair of vacuum cavity gas is sampled and meets the method, apparatus and its component of positive pressure analysis |
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Granted publication date: 20180710 Termination date: 20191121 |