CN105759077B - 一种新型高精度mems加速度计 - Google Patents
一种新型高精度mems加速度计 Download PDFInfo
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- CN105759077B CN105759077B CN201610105866.8A CN201610105866A CN105759077B CN 105759077 B CN105759077 B CN 105759077B CN 201610105866 A CN201610105866 A CN 201610105866A CN 105759077 B CN105759077 B CN 105759077B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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CN201610105866.8A CN105759077B (zh) | 2016-02-25 | 2016-02-25 | 一种新型高精度mems加速度计 |
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CN201610105866.8A CN105759077B (zh) | 2016-02-25 | 2016-02-25 | 一种新型高精度mems加速度计 |
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CN105759077A CN105759077A (zh) | 2016-07-13 |
CN105759077B true CN105759077B (zh) | 2017-12-15 |
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Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106526234B (zh) * | 2016-09-30 | 2018-12-21 | 中国科学院地质与地球物理研究所 | 一种基于sigma-delta闭环控制的惯性传感器系统 |
CN110678876B (zh) * | 2017-05-22 | 2023-10-27 | Tvs电机股份有限公司 | 速度计显示器 |
CN107478859B (zh) * | 2017-06-27 | 2019-08-20 | 浙江大学 | 一种脉宽双加矩型加速度传感器电路 |
CN112688565A (zh) * | 2019-10-18 | 2021-04-20 | 三垦电气株式会社 | 电流谐振电路的控制装置、方法以及电流谐振电源 |
US11579165B2 (en) * | 2020-01-23 | 2023-02-14 | Analog Devices, Inc. | Method and apparatus for improving MEMs accelerometer frequency response |
CN113536714B (zh) * | 2021-06-30 | 2023-08-11 | 佛山科学技术学院 | 一种优化构建调制器系统的方法 |
CN117526957B (zh) * | 2024-01-04 | 2024-03-19 | 秦玄汉(苏州)信息科技有限公司 | 一种最优量化位数的模数转换器 |
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US6101864A (en) * | 1997-12-17 | 2000-08-15 | I/O Sensors, Inc. | Method and apparatus for generation of test bitstreams and testing of close loop transducers |
ITTO20010705A1 (it) * | 2001-07-18 | 2003-01-18 | St Microelectronics Srl | Modulatore elettromeccanico a sovracampionamento autocalibrante e relativo metodo di autocalibrazione. |
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Inventor after: Xue Xu Inventor after: Hong Linfeng Inventor after: Yang Changchun Inventor after: Li Zongwei Inventor after: Xiong Xingyin Inventor after: Han Kedu Inventor before: Xue Xu Inventor before: Yang Changchun Inventor before: Li Zongwei Inventor before: Xiong Xingyin Inventor before: Han Kedu Inventor before: Cong Ning |
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