CN105758402B - A kind of closed loop detection system of silicon micro-gyroscope - Google Patents
A kind of closed loop detection system of silicon micro-gyroscope Download PDFInfo
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- CN105758402B CN105758402B CN201610194450.8A CN201610194450A CN105758402B CN 105758402 B CN105758402 B CN 105758402B CN 201610194450 A CN201610194450 A CN 201610194450A CN 105758402 B CN105758402 B CN 105758402B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
- G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
- G01C21/12—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
- G01C21/16—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
- G01C21/18—Stabilised platforms, e.g. by gyroscope
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
- G01C21/20—Instruments for performing navigational calculations
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Abstract
The present invention relates to a kind of closed loop detection systems of silicon micro-gyroscope, are read interface circuit, first order quantizer (ADC of more bit), the digital signal processor based on FPGA, feedback voltage generative circuit (analog switch) by silicon micro-gyroscope sensing unit, sensitive signal and are formed.Sensitive signal reads interface circuit and silicon micro-gyroscope sense mode vibration signal is converted into voltage signal, it is input in FPGA through first order quantizer sample quantization and carries out totally digitilized processing, become the data flow of 1bit through the quantization of phase compensation, loop filtering and the second level, using in feedback voltage generative circuit feedback to the feedback compensation electrode of gyro, the sigma-delta closed loop detection system of a 2+N rank is constituted, wherein N >=0 is the order of loop filter.
Description
Technical field
The present invention relates to a kind of closed loop detection system of silicon micro-gyroscope, belong to the guidance using Ke's formula effect or control device
Field.
Background technique
Silicon micro-gyroscope is a kind of micro mechanical device using Ke's formula effect measurement angular speed, since its is small in size and price
Low advantage is widely used in fields such as industry, aerospace, consumer electronics, automobiles.With optical fibre gyro, laser
Gyro etc. is that precision is relatively low compared to the main bottleneck of restriction silicon micro-gyroscope application, therefore reduces system temperature drift, improves and divides
Resolution and stability etc. become research hotspot.
The control method of closed loop feedback realizes dynamic model so that mass block returns to equilbrium position by applying feedback force
It encloses, the promotion of the performances such as the linearity, bandwidth and stability.Although having many methods for realizing detection closed loop, motor at present
It is that most attraction is capable of providing direct numeral output, does not have because it is simple enough that sigma-delta, which modulates closed loop,
The electrostatic suction phenomenon of analog force feedback closed loop, and be easy to be realized with CMOS technology.Motor sigma-delta modulator will be micro-
Machinery inertial sensor is introduced into modulator loops, while realizing Digital output, realizes sensitive detection feedback closed loop,
It is furtherd investigate in nearest 25 years and tremendous development.
Second order sigma-delta modulates closed loop since structure is simple, and performance is stablized to receive at 2000 or so grinds extensively
Study carefully, but due in second-order system quantizing noise occupy an leading position in various noise sources and cannot by improve sample rate method
Improve, is unable to satisfy performance requirement.The B.E.Boser of the V.P.Petkov and BSAC of Bosch were proposed in 2005
A kind of quadravalence sigma-delta closed-loop control circuit of MEMS gyro (its loop filter structure belongs to structure described in Fig. 5),
Quantizing noise is no longer occupied an leading position can ignore relative to electrical noise, and loop filter and phase compensator are adopted
It is realized with switched-capacitor circuit.Same time Southampton University of Southampton Dong Yun peak Michael Kraft et al. proposes MEMS gyro 6
The continuous band logical sigma-delta closed-loop control circuit of rank (its loop filter structure belongs to structure described in Fig. 6) obtain compared with
The indexs such as high signal-to-noise ratio and bandwidth stability, loop filter, phase compensator are made of analog circuit, quantizer
It is made of comparator and trigger.
Discrete time loop filter is realized using switched-capacitor integrator, needs design specialized ASIC, from design, stream
The period that piece needs to grow very much to verifying, and loop filter phase compensator coefficient modifying is not easy, design cost is big, and flexibility is not
By force.And integrator or resonator are constructed using analog circuit (amplifier) to realize continuous time loop filter, it needs additional
Logical unit come realize HRZ/RZ feed back, in addition this circuit implementing method power consumption is big, and artificial circuit part more hold
It is influenced vulnerable to temperature.The loop filter coefficients of existing silicon micro-gyroscope sigma-delta closed-loop control system are designed to structure
Parameter is more sensitive, and adaptability is not strong, and design difficulty is big, needs one kind relatively easy, to the insensitive adaptability of structural parameters
Strong design method.
Summary of the invention
In order to solve the above technical problems, the object of the present invention is to provide a kind of, the silicon micro-gyroscope based on FPGA is digitized
Sigma-delta sensitivity closed loop detection system, to overcome the flexible of switching capacity implementation and continuous time implementation
Property poor, a series of problem such as the design cycle is long, design difficulty is big, and artificial circuit part is more.
The closed loop detection system of silicon micro-gyroscope of the invention, the interface electricity including reading the silicon micro-gyroscope sensitive signal
Road, the first order quantizer being connect with the interface circuit, the number letter based on FPGA being connect with the first order quantizer
Number processor, and the feedback voltage generative circuit of the connection digital signal processor and the silicon micro-gyroscope, the number
Signal processor includes the phase compensator connecting with the first order quantizer, the loop connecting with phase compensator filter
Wave device, and the second level quantizer being connect with the loop filter, the output end of the second level quantizer and described anti-
The connection of feedthrough voltage generative circuit.
Further, the first order quantizer is multi bit quantization device, and the second level quantizer is 1bit quantizer.
Further, the first order quantizer is gradually to compare type analog-to-digital converter.
Further, monocycle series connection integrator feed forward type structure, monocycle series connection integrator can be used in the loop filter
One of distributed feedback structure, unrestrained structure.
Further, the loop filter and the second level quantizer constitute a sigma-delta modulator, institute
It states and is respectively connected with feedforward path, the amount between the input terminal of sigma-delta modulator and the input terminal of two integrators
Change and is respectively connected with feedback network between the output end and two integrators of device；The input terminal of the sigma-delta modulator
The feed forward circuit is also connected between the input terminal of the quantizer, wherein the output end and of second integrator
Also the feedback network is connected between the input terminal of one integrator.
Further, the feedforward path of each integrator is identical as the gain of the feedback network, described
The gain of the feed forward circuit also connected between the input terminal of sigma-delta modulator and the input terminal of the quantizer is
1。
According to the above aspect of the present invention, the present invention has at least the following advantages:
1, the present invention is quantified by two-stage, and phase compensation, loop filtering, the 1bit quantization of pure digi-tal are realized in FPGA,
Maximumlly digital circuit is utilized signal is handled, reduces a series of analog circuit bring drifts, noise is asked
Topic, overcoming traditional silicon micro-gyroscope sigma-delta closed loop and pure analog closed-loop circuit, structure is complicated, flexibility is poor, warm
The problems such as degree drift is big, electrostatic suction, is greatly reduced the design verification period, and improves the stability, linear of silicon micro-gyroscope
Degree and measurement accuracy；
2, phase compensator, loop filter are subjected to Digital Implementation in FPGA, change phase relation that can be convenient, flexible
Number, reduces the design verification period, and just because of being complete digital implementation, it may be convenient to verify the filter of other loops
The closed-loop system of wave device scheme and other orders, until meeting design requirement；
3, the signal for the sigma-delta modulator that loop filter of the present invention and second level quantizer are constituted, which transmits, increases
Benefit is 1, and High-order Closed Loop system is reduced to simple second order closed-loop system, as long as adjustment loop phase shift keeps second order closed-loop system steady
It is fixed, and adjustment loop gain, so that sigma-delta modulator is inputted nonoverload, so that it may so that High-order Closed Loop system is stablized, and
The factor design of sigma-delta modulator has perfect design tool case support, with the parameter of mechanical structure and insensitive, makes
The High-order Closed Loop system design of obtaining greatly simplifies.
The above description is only an overview of the technical scheme of the present invention, in order to better understand the technical means of the present invention,
And can be implemented in accordance with the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention and the accompanying drawings.
Detailed description of the invention
Fig. 1 is the closed loop detection system structure chart of silicon micro-gyroscope of the invention；
Fig. 2 is silicon micro-gyroscope structure chart in the present invention；
Fig. 3 is the phase compensator in the present invention；
Fig. 4 is monocycle series connection integrator feed forward type loop filter structure；
Fig. 5 is monocycle series connection integrator distributed feedback loop filter structure；
Fig. 6 is without constraint loop filter structure；
Fig. 7 is the sigma-delta modulator structure in the present invention；
Fig. 8 is the open-loop transfer function Bode diagram of system after compensation.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Implement below
Example is not intended to limit the scope of the invention for illustrating the present invention.
Refering to fig. 1, the closed loop detection system of silicon micro-gyroscope of the invention by silicon micro-gyroscope 1 and reads its sensitive signal
Interface circuit 2, first order quantizer (ADC of more bit) 3, the digital signal processor 4 based on FPGA, feedback voltage generate electricity
Road 8 (analog switch) composition, wherein the digital signal processor 4 based on FPGA include phase compensator 5, loop filter 6 with
And second level measuring device (1bit quantizer) 7.Silicon micro-gyroscope structure in the present invention is as shown in Fig. 2, such as Fig. 3 institute of phase compensator 5
Show.
When work, silicon micro-gyroscope sense mode vibration signal is converted into voltage signal by interface circuit, is quantified through the first order
It is input to after device sample quantization in FPGA and carries out totally digitilized processing, after the quantization of phase compensation, loop filtering and the second level
The data flow for becoming 1bit constitutes one using in feedback voltage generative circuit feedback to the feedback compensation electrode of silicon micro-gyroscope
The sigma-delta closed loop detection system of a 2+N rank, wherein N >=0 is the order of loop filter.
The quantization digit of first order quantizer is fitted simultaneously depending on the electrical noise levels and systematic sampling rate of interface circuit
When improving silicon micro-gyroscope mechanical gain, interface circuit gain, requirement of the system to first order quantizer quantization digit can be reduced.?
System provides under sample rate that the quantizing noise of first order quantizer should be less than with the equivalent electrical noise of point.Closed loop system is considered simultaneously
System stability, the delay of first order quantizer should be as small as possible.The analog-digital converter for gradually comparing type has conversion rate fast, precision
High feature is suitble to the closed loop detection system of silicon micro-gyroscope.
The present invention proposes the concept of two-stage quantization, and first order quantization carries out digital phase compensation for FPGA, loop filtering mentions
Having supplied may；Second level quantization, exports the data flow of 1bit, exports and feeds back via analog switch (i.e. feedback voltage generative circuit)
Voltage forms feedback closed loop to spinning top rake excitation electrode.
Phase compensator, loop filter in the present invention realize that coefficient adjustment is convenient in FPGA, and structure changes letter
It is single, strong flexibility.According to actual needs, monocycle series connection integrator (or resonator) as shown in Figure 4 can be used in loop filter
Feed forward type structure, monocycle series connection integrator (or resonator) distributed feedback structure or as shown in FIG. 6 without about as shown in Figure 5
Binding structure (this structure is not necessarily to phase compensation) etc..Simultaneously also can be as needed, adjustment loop filter order N (N >=0) reaches
To ideal quantized noise shaping effect.
As shown in fig. 7, the structure of loop filter 6 and second level quantizer 7 can be by the structure of sigma-delta modulator
Instead of.The sigma-delta modulator is that there are two integrators, the second-order modulator of quantizer for tool, and input terminal is to often
The input terminal of level-one integrator has feedforward path, and the input terminal that quantizer is output to every level-one integrator has feedback network,
And the input feedforward path gain of same integrator is identical as feedback network gain；Modulator input terminal is to quantizer input terminal
There are feedforward path, gain 1；The input terminal of the output end of second integrator to first integrator has feedback network, to
Form resonator.In this way, the signal transfer function of the sigma-delta modulator is 1, loop stability design process is greatly changed
Letter, it is only necessary to which adjustment phase place compensator obtains enough phase compensation, and guarantees the input of standard sigma-delta modulator not
Overload, loop is stable.The parameter selection of sigma-delta modulator can refer to MATLAB toolbox ' THE
DELTA-SIGMA TOOLBOX Version 7.3 ', it is unrelated with gyro mechanical structure, and have and other loop filters
The same quantized noise shaping ability of structure is a kind of simple Decoupling design method.Unique shortcoming is the sigma-
Delta modulator cannot provide it is additional with interior open-loop gain, gyroscope structure lower for some mechanical gains is less suitable,
Existing silicon micro-gyroscope often Q value with higher, is capable of providing open-loop gain in sufficiently high band, using such decoupling type
Design can substantially reduce design difficulty and development cycle, improve stability, the linearity and measurement accuracy.
The silicon micro-gyroscope parameter that the present invention is directed to are as follows: direct capacitance Cr=2pF, driven-mode resonant frequency fx=4900Hz,
Rotary inertia Ix=1.11e-14kgm2, Oscillation Amplitude Ax=0.025rad；Sense mode resonance frequency fy=4850Hz turns
Dynamic inertia Iy=8.86e-15kgm2, quality factor qy=5000；Corresponding feedback moment is T when feedback voltage 3Vy=
6.04e-10Nm corner capacitor conversion coefficient is 6.5e-10F/rad.
The present invention reads interface circuit composition for sensitive signal are as follows: 1 grade of C/V conversion circuit, 1 grade of high-pass filter, and 1 grade
Demodulator circuit, 1 stage gain amplifying circuit.1MHz carrier wave is wherein added on gyro centroplasm gauge block, by oscillating current signal tune
High frequency is made, the coupling crosstalk between mode is removed.Entire interface circuit gain are as follows: 10V/pF, interface circuit noise 0.1aF/ √
Hz。
The system sampling frequency F that the present invention is directed toS=1MHz, first order quantizer gradually compare pattern number using 12bit
Converter, input range -2.5V~+2.5V, 1 clock cycle, that is, 1us of delay time.The quantization of first order quantizer is made an uproar at this time
Sound is less than with point electrical noise.
Silicon micro-gyroscope sense mode is vibrated at Ke Shili and feedback force effect, and detection capacitor changes, through sensitivity
Signal reads interface circuit and is converted into voltage signal, by entering in FPGA after first order quantizer sample quantization.Due to the micro- top of silicon
The second-order characteristics and high quality factor characteristic of spiral shell sense mode, from feedback force to the signal entered in FPGA in resonance point
- 180 ° of lagging phase shifts can be nearby had more than, if system will be unstable without phase compensation.Phase compensator such as Fig. 3 institute
Show, be a kind of phase advancer, the zero point a=0.9, Fig. 8 of compensator are the open-loop transfer function bauds of system after compensation
Figure, 15.3 ° of phase margin, for a closer to 1, phase margin is bigger, but will affect noise shaping effect, this can be according to being
System needs to modify.One step gain can be added after phase compensator, to compensate the low frequency gain reduction of phase compensator, made
Its low-frequency gain can take 10 close to 1 here, and excessive gain can amplify high frequency electrical noise and first order quantizing noise,
So that loop filter overloads, too small gain can make the too small closed-loop characteristic of system open loop gain bad again, be limited here
It makes between 10-50 preferably.
The sigma-delta modulator structure that the present invention is directed to is shown in Fig. 7, wherein each coefficient can be by the tool box MATLAB
MATLAB toolbox ' THE DELTA-SIGMA TOOLBOX Version 7.3 ' is designed, here a1=0.2164, a2=
0.5585.G=(2 π fx/FS)2=9.4E-4 is used to constitute a resonator with two integrators, and resonance frequency design is driving
On modal resonance frequencies.
The structure that Fig. 7 is constituted can be written as from the transmission function for being input to output:
Wherein HaFor feedforward path, HfFor feedback network.
It can see from structure again
Ha=1+Hf
Therefore STF=1.
If regarding structure shown in Fig. 7 as an entirety, it is updated in Fig. 1, the closed-loop system of 4 ranks can regard 1 as
The closed-loop system of a 2 rank.As long as 2 levels system is stablized, and structure shown in Fig. 7 inputs nonoverload, and system is exactly stable.This sets
Meter process, little and convenient and simple with silicon micro-gyroscope design parameter relationship, the system of improving sets practicability and desin speed.
The above is only a preferred embodiment of the present invention, it is not intended to restrict the invention, it is noted that for this skill
For the those of ordinary skill in art field, without departing from the technical principles of the invention, can also make it is several improvement and
Modification, these improvements and modifications also should be regarded as protection scope of the present invention.
Claims (1)
1. a kind of closed loop detection system of silicon micro-gyroscope, it is characterised in that: the closed loop detection system includes that the reading silicon is micro-
The interface circuit of gyro sensitive signal, the first order quantizer connecting with the interface circuit connect with the first order quantizer
The digital signal processor based on FPGA connect, and the feedback electricity of the connection digital signal processor and the silicon micro-gyroscope
Generative circuit is pressed, the digital signal processor includes the phase compensator connecting with the first order quantizer and the phase
The loop filter of position compensator connection, and the second level quantizer being connect with the loop filter, the second level amount
The output end for changing device is connect with the feedback voltage generative circuit；
The first order quantizer is gradually to compare type analog-to-digital converter；
The first order quantizer is multi bit quantization device, and the second level quantizer is 1bit quantizer；
The loop filter and the second level quantizer constitute a sigma-delta modulator, the sigma-delta
Modulator is tool there are two integrator, the second-order modulator of quantizer, the input terminal of the sigma-delta modulator with
Feedforward path, the output end of the second level quantizer and two integrals are respectively connected between the input terminal of two integrators
Feedback network is respectively connected between device；The input of the input terminal of the sigma-delta modulator and the second level quantizer
Also the feedforward path is connected between end, wherein the output end of second integrator and first integrator is defeated
Enter and is also connected with the feedback network between end；
The feedforward path of each integrator is identical as the gain of the feedback network, the sigma-delta modulator
Input terminal and the second level quantizer input terminal between the gain of the feed forward circuit that also connects be 1.
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| CN106323263B (en) * | 2016-08-24 | 2019-04-16 | 南京理工大学 | Silicon micro-gyroscope electric-mechanic control system band logical sigma-delta closed-loop detection circuit |
| CN106370170A (en) * | 2016-08-29 | 2017-02-01 | 南京理工大学 | Silicon micro-machined gyroscope mechanical-electrical combined band-pass sigma-delta closed-loop detection loop parameter acquisition method |
| CN106979776B (en) * | 2017-04-26 | 2020-04-07 | 哈尔滨工程大学 | Digital closed-loop control method of fiber-optic gyroscope based on sigma-delta modulation |
| CN108255108B (en) * | 2018-01-24 | 2019-06-04 | 中国科学院地质与地球物理研究所 | A kind of MEMS sensor controller circuitry |
| CN108332733B (en) * | 2018-01-26 | 2020-05-19 | 珠海全志科技股份有限公司 | Driving and detecting device of micro-mechanical single-vibrator three-axis gyroscope |
| CN108332732B (en) * | 2018-01-26 | 2020-05-19 | 珠海全志科技股份有限公司 | Driving and detecting device of micro-mechanical single-vibrator three-axis gyroscope |
| CN109547386B (en) * | 2018-11-27 | 2020-08-14 | 海安南京大学高新技术研究院 | PD for high order Sigma-Delta modulatorλDesign method of phase compensator |
| CN109540176B (en) * | 2018-12-24 | 2022-08-05 | 中国航空工业集团公司西安飞行自动控制研究所 | Silicon micro gyroscope Sigma Delta detection closed-loop control system structure and parameter setting method |
| CN110311684B (en) * | 2019-07-10 | 2020-11-27 | 清华大学 | Automatic tuning band-pass sigma-delta interface circuit based on micro-electromechanical gyroscope |
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| US8599054B2 (en) * | 2011-03-10 | 2013-12-03 | Pgs Geophysical As | Method for using a sensor system having a single-bit quantizer and a multi-bit feedback loop |
| CN102621884B (en) * | 2012-01-12 | 2013-10-09 | 西北工业大学 | Six-order continuous band-pass sigma-delta closed-loop control circuit for MEMS (micro-electromechanical system) gyroscope |
| CN102620726B (en) * | 2012-04-04 | 2014-10-29 | 西北工业大学 | Double-closed-loop control circuit of micromechanical gyroscope |
| CN102735230B (en) * | 2012-06-08 | 2015-06-03 | 东南大学 | Circuit system of micro-electromechanical hybrid gyroscope based on FPGA |
| CN103424570A (en) * | 2013-07-12 | 2013-12-04 | 西北工业大学 | Sigma-delta closed-loop control circuit in multi-stage noise shaping (MASH) structure for micro-machined accelerometer |
| CN104567849B (en) * | 2014-12-26 | 2017-08-25 | 东南大学 | A kind of silicon micro mechanical linearly coupled formula gyro and its bandwidth broadning method |
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