CN105744658A - Ceramic heater and sensor - Google Patents
Ceramic heater and sensor Download PDFInfo
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- CN105744658A CN105744658A CN201510752165.9A CN201510752165A CN105744658A CN 105744658 A CN105744658 A CN 105744658A CN 201510752165 A CN201510752165 A CN 201510752165A CN 105744658 A CN105744658 A CN 105744658A
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- wire portion
- end side
- width
- rear end
- ceramic heater
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- 239000000919 ceramic Substances 0.000 title claims abstract description 87
- 239000002184 metal Substances 0.000 claims description 40
- 229910052751 metal Inorganic materials 0.000 claims description 39
- 238000010438 heat treatment Methods 0.000 claims description 35
- 239000004020 conductor Substances 0.000 claims description 16
- 230000005855 radiation Effects 0.000 abstract 4
- 230000001012 protector Effects 0.000 description 20
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 17
- 238000007747 plating Methods 0.000 description 17
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 15
- 229910000679 solder Inorganic materials 0.000 description 14
- 208000037656 Respiratory Sounds Diseases 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 9
- 241000278713 Theora Species 0.000 description 8
- 230000008602 contraction Effects 0.000 description 7
- 238000009413 insulation Methods 0.000 description 7
- 229910052759 nickel Inorganic materials 0.000 description 7
- 239000011651 chromium Substances 0.000 description 6
- 239000012141 concentrate Substances 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000004806 packaging method and process Methods 0.000 description 5
- 239000007784 solid electrolyte Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 239000006104 solid solution Substances 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910017944 Ag—Cu Inorganic materials 0.000 description 1
- 229910002708 Au–Cu Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910001260 Pt alloy Inorganic materials 0.000 description 1
- 238000003854 Surface Print Methods 0.000 description 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000006071 cream Substances 0.000 description 1
- 239000013536 elastomeric material Substances 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 235000012222 talc Nutrition 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Molecular Biology (AREA)
- General Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Resistance Heating (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
The invention provides a ceramic heater and a sensor which suppress the generation of ruptures and cracks in a heater main body part which is provided with a lead part and an electrode bonding pad. The ceramic heater comprises: the heater main body part (102) formed of insulating ceramic; a radiation resistor (141) which is embedded in the heater main body part; and the electrode bonding pad (121) which is disposed on an external surface of the heater main body part and is in electrical connection with the radiation resistor. The radiation resistor arranging the electrode bonding pad with a projection area (S) and is provided with: a rear end side lead part (143c) having a width smaller than a width of the electrode bonding pad with the entire area of the projection area; a front end side lead part (143a) which is disposed close to a front end side compared with the rear end side lead part and has a width greater than the width (C) of the rear end side lead part; and a radiation part (142) which is close to the front end side compared with the front end side lead part (143a) and has a width smaller than the width (B) of the front end side lead part (143a).
Description
Technical field
The present invention relates to the ceramic heater with heat generating resistor and electrode pad and the sensor possessing this ceramic heater.
Background technology
In the past, being known to a kind of ceramic heater, this ceramic heater possesses: the heater body portion formed by insulating ceramicses such as aluminium oxidies；It is embedded in the heat generating resistor in this heater body portion；The electrode pad being configured on the outer surface in heater body portion and electrically connect with heat generating resistor；And connect the conductor portion of heat generating resistor and electrode pad.
In this ceramic heater, the connection terminal being connected with external equipment via wire is connected on electrode pad by solder etc. such that it is able to be energized to heat generating resistor via external equipment.
Prior art literature
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2014-13649 publication
Summary of the invention
, as Patent Document 1, heat generating resistor has heating part in front, has couple of conductor portion in rear end side, and the width of the width ratio wire portion of the heating part of front is little.This is because, in order to concentrate heating by heating part, the resistivity making heating part is higher.That is, when being energized to heat generating resistor, owing to the resistivity ratio wire portion of heating part is high, it is thus possible to more concentrate and generate heat in heating part, and ceramic heater can be used efficiently.
On the other hand, as Patent Document 1, the width of the width ratio heating part of wire portion is big, and generally uniform along the axis direction of ceramic heater.Therefore, in the region that wire portion is relative with electrode pad, there is the situation that the width of the width ratio electrode pad of wire portion is big.Further, in this case, according to situation as follows, there is the probability producing fracture and crackle etc. near the ora terminalis on the width of the electrode pad in heater body portion.
As shown in Figure 8, the ceramic heater of pole shape generally prints formation electrode pad 1210 and heat generating resistor 1410 respectively in the upper and lower surface of the ceramic layer 1400 of tabular, hereafter, formed by this ceramic layer 1400 being wound in the insulation tube (not shown) of cylindrical shape or drum.It addition, Fig. 8 illustrates the sectional view of cutting ceramic layer 1400 in the width direction.
Now, if form the heat generating resistor 1410 with desired shape at the lower surface printing metallic conductor of paste of ceramic layer 1400 of tabular, then cause that heat generating resistor 1410 shrinks owing to heat generating resistor 1410 is dry thereafter.That is, as shown in Figure 8, heat generating resistor 1410 shrinks (reference arrow W1) inside the width of ceramic layer 1400.Further, due to the impact of the contraction of heat generating resistor 1410, thus outside width, stress (reference arrow Y1) is applied in the upper surface side of ceramic layer 1400.
Hereafter, if the upper surface at ceramic layer 1400 prints the metallic conductor of paste and forms electrode pad 1210, then identical with heat generating resistor 1410, cause that electrode pad 1210 shrinks (reference arrow Z1) inside width owing to electrode pad 1210 dries.As a result of which it is, being located remotely from each other in the opposite direction towards being produced as towards the stress (arrow Z1) when shrinking with electrode pad 1210 of the stress of the upper surface of the ceramic layer 1400 caused because of the impact of heat generating resistor 1410.
In such situation, if further ceramic layer 1400 being wound in insulation tube, then the stress of the upper surface side of ceramic layer 1400 increases further, as a result of which it is, produce the probability of fracture and crackle etc. near the ora terminalis on the width of the electrode pad existed in the heater body portion formed.
The present invention, for solving above-mentioned conventional problem, its object is to, it is suppressed that produce the situation of fracture and crackle in the heater body portion being formed with wire portion and electrode pad.
The present invention is ceramic heater, is the pole shape extended in the axial direction, and described ceramic heater possesses: heater body portion, insulating ceramics formed；Heat generating resistor, is embedded in this heater body portion；Electrode pad, is configured on the outer surface in described heater body portion, and electrically connects with this heat generating resistor；And conductor portion, connect described heat generating resistor and described electrode pad,
Described ceramic heater is characterised by, described heat generating resistor has: rear end side wire portion, it is configured in the view field that described electrode pad is projected on the direction vertical with described axis direction, and little at the width of electrode pad described in the whole region internal ratio of described view field；Front wire portion, is configured at side more forward than described rear end side wire portion, and bigger than the width of described rear end side wire portion；And heating part, it is configured at side more forward than described front wire portion, and less than the width of described front wire portion.
Ceramic heater according to the present invention, heat generating resistor is configured in the view field projected on the direction vertical with axis direction by electrode pad, and has rear end side wire portion less than the width of electrode pad in the whole region in view field.Thus, even if the stress of the contraction of the stress putting on heater body portion that generation produces due to the impact of the contraction of rear end side wire portion and electrode pad, both stress towards also for cancel out each other towards such that it is able to suppress to produce near the ora terminalis on the width of electrode pad in heater body portion fracture and crackle etc..
Further, the ceramic heater according to the present invention, described heat generating resistor also has: be configured at more forward side than rear end side wire portion, and the front wire portion bigger than the width of rear end side wire portion；And be configured at more forward side than front wire portion, and the heating part less than the width of front wire portion.So, owing to forming the front wire portion wider than heating part and rear end side wire portion, it is thus possible to concentrate and generate heat in heating part such that it is able to use ceramic heater efficiently.
Further, in the ceramic heater of the present invention, the width of described heating part is preferably less than the width of described rear end side wire portion.So, the width by the width ratio rear end side wire portion of heating part is little, it is possible to concentrates effectively and generates heat in heating part, and do not generate heat at rear end side wire portion such that it is able to uses ceramic heater efficiently.
Further, in the ceramic heater of the present invention, it is preferred to, described heat generating resistor has connection described front wire portion and described rear end side wire portion and along with the connection wire portion of width reduction towards axis direction rear end side.So, by having the connection wire portion along with the width towards axis direction rear end side reduces, will not be formed between front wire portion and rear end side wire portion and be prone to the corner that electric field is concentrated such that it is able to suppress insulating properties to reduce.
Additionally, in the ceramic heater of the present invention, described connection wire portion is characterised by being configured at side more forward than described view field.Thereby, it is possible to the width of wire portion is set to less than the width of electrode pad effectively in view field such that it is able to suppress further to produce fracture and crackle etc. near the ora terminalis on the width of the electrode pad in heater body portion.
Further, sensor of the invention possess the sensor element having bottom tube-like, ceramic heater in the main metal fixture that keeps this sensor element and the bore being configured at described sensor element.
Described sensor is characterised by, described ceramic heater is at the ceramic heater described in any one of claim 1 to claim 4.
So, the sensor of the ceramic heater possessing the sensor element having bottom tube-like, in the main metal fixture that keeps this sensor element and the bore being configured at described sensor element uses the ceramic heater of the present invention such that it is able to suppress further to produce fracture and crackle etc. near the ora terminalis on the width of the electrode pad in heater body portion.
Accompanying drawing explanation
Fig. 1 is the integrally-built sectional view of the sensor 1 that embodiment 1 is described.
Fig. 2 is the axonometric chart of the outward appearance of the ceramic heater 100 representing embodiment 1.
Fig. 3 is the exploded perspective view of the internal structure of the ceramic heater 100 representing embodiment 1.
Fig. 4 is the phantom observed from the direction of arrow near the junction surface of chain-dotted line A-A ' in the ceramic heater 100 of Fig. 2.
Fig. 5 is the explanation figure of the electrode pad 121 of the ceramic heater 100 being visually confirmed to be embodiment 1 on the direction vertical with axis direction.
Fig. 6 is the explanation figure of the invention effect of the ceramic heater 100 that embodiment 1 is described.
Fig. 7 is the explanation figure of the electrode pad of the ceramic heater being visually confirmed to be embodiment 2 on the direction vertical with axis direction.
Fig. 8 is the explanation figure that conventional ceramic heater is described.
Detailed description of the invention
Hereinafter, use accompanying drawing that application embodiments of the present invention 1 are illustrated.
It addition, the present invention is at all not limited to following embodiment, as long as belonging to the technical scope of the present invention, then can adopting various mode, this is self-evident.
Fig. 1 is the integrally-built sectional view that the sensor 1 based on embodiment 1 is described.The sensor 1 of embodiment 1 is the exhaust flow path fastening with the explosive motor carried on the vehicle of passenger car etc., and is configured with the sensor of the fore-end of self in the inside of exhaust flow path, and for measuring the oxygen sensor of the oxygen concentration in discharge gas.
It addition, in the following description, with the installation side relative to main metal fixture protector 80 (downside of figure) in the direction along the axes O shown in Fig. 1 for front, illustrate with this opposition side (upside of figure) for rear end side.
As it is shown in figure 1, mainly possess in sensor 1: sensor element 10 (detecting element 10), ceramic heater 100, separator 30, seal member 40 (elastomeric element 40), multiple connection terminal 50, wire 55 (wire guiding member 55), the main metal fixture 60 covered around them, protector 80 and urceolus 90 (outer cylinder member 90) etc..
Sensor element 10 is formed by the solid electrolyte with oxygen-ion conductive.Sensor element 10 is known structure, and is formed as the drum extended along axes O direction, and is configured to mainly to possess: the element body 12 of the end (end of the downside of Fig. 7) of closed front side；It is arranged at the lateral electrode (omitting diagram) of the outer peripheral face of element body 12；And it is arranged at the medial electrode (omitting diagram) of the inner peripheral surface of element body 12.The flange part 14 that oriented radial outside is prominent is set in the circumferential direction in the periphery of the central part of element body 12.
Solid electrolyte as composed component main body 11, for instance so that Y2O3Or the ZrO of CaO solid solution2For representing.The oxide as alkaline-earth metal or rare earth metal and ZrO can also be used beyond this solid electrolyte2The solid electrolyte of solid solution.And, it is possible to use at oxide and the ZrO of alkaline-earth metal or rare earth metal2Solid solution in possibly together with HfO2Solid electrolyte.
Lateral electrode or medial electrode be porous form the electrode of Pt or Pt alloy (following, be recited as " Pt etc. ").
Lateral electrode or medial electrode abut with multiple terminals 50 that are connected.Multiple connection terminals 50 connect terminal 51 containing inner side and outside connects terminal 52.Multiple connection terminals 50 are by nickel alloy (such as Inconel750.Inconel company of Britain system, registered trade mark) metal fittings that formed.
Inner side connects the medial electrode of terminal 51 and sensor element 10 and electrically contacts, and outside connection terminal 52 electrically connects with the lateral electrode of sensor element 10.Further, connection terminal 51 in inner side holds ceramic heater 100 described later and is pushed by the inner surface of lateral for the front end of ceramic heater 100 sensor element 10.
Multiple terminal metal accessories 50 are riveted with the heart yearn of wire 55 and are electrically connected respectively.In fig. 1 it is illustrated that there are 3 wires 55 in 4 wires 55.
As it is shown in figure 1, the parts that separator 30 is the rear end side being configured at sensor element 10, and the parts of the drum for being formed by the material such as aluminium oxide with electrical insulating property.Separator 30 is provided with the accommodation portion 31 holding multiple terminal metal accessory 50 grades.Accommodation portion 31 is through along axes O direction in separator 30 and that formed through hole, and can the space of side more forward than separator 30 and rearward side space between circulation air.
Additionally, the outer peripheral face at separator 30 arranges the flange portion 32 that oriented radial outside is prominent.The outer peripheral face of the forward side of ratio flange portion 32 in separator 30 is configured with the maintenance metal fittings 33 being shaped generally as drum.Now, separator 30 is configured to be inserted in the inside keeping metal fittings 33.
Seal member 40 is configured at the rear end side of separator 30 latch for being made up of the elastomeric material of such as fluorubber etc..Seal member 40 is for being formed as a generally cylindrical the parts of the rear end of the blocking urceolus 90 of shape.Seal member 40 is embedded in the opening of the rear end side of urceolus 90 in the way of the face with the rear end side of separator 30 abuts.
As it is shown in figure 1, main metal fixture 60 is the parts formed by stainless steel alloy (such as, the SUS310S of JIS (Japanese Industrial Standards) specification), and for being formed as the parts of general drum.Main metal fixture 60 is provided with the stage portion 61 of flange part 14 that is prominent from inner circumferential towards radially inner side and that support sensor element 10 in the circumferential direction.
The outer peripheral face of the front of main metal fixture 60 is provided with being installed on sensor 1 threaded portion 62 of the exhaust flow path (not shown) of explosive motor in the circumferential direction；And it is used in the hexagonal portion 63 of the installation tool engaging that threaded portion 62 is screwed into exhaust flow path.The packing ring 64 of ring-type it is configured with between threaded portion 62 and hexagonal portion 63.Packing ring 64 prevents the gas in the gap between sensor 1 and exhaust flow path from leaking.
Forward side, ratio threaded portion 62 in main metal fixture 60 is formed with the engagement tip 65 engaged with protector 80 described later.Engagement tip 65 is the part formed in the way of the diameter of outer peripheral face is less than threaded portion 62.Further, in main metal fixture 60 than side rearward, hexagonal portion 63 to be sequentially formed with the holding section, rear end 66 engaged with urceolus 90 and the riveted joint fixed part 67 of the fixing sensor element 10 of riveted joint from hexagonal portion towards rear end side.
In the inside of main metal fixture 60 with the metal front packaging part 71 that is arranged in order from stage portion 61 towards rear end side, the support parts 72 of tubular being made up of aluminium oxide, metal rear end side packaging part 73, the filling component 74 being made up of the powder of Talcum, aoxidize the sleeve 75 of aluminum and the ring 76 of ring-type.The inner peripheral surface supporting parts 72 is formed with stage portion, is supported the flange part 14 of element body 11 by this stage portion.It addition, be configured with rear end side packaging part 73 supporting clampingly between parts 72 and flange part 14.
Ring 76 is configured between sleeve 75 and riveted joint fixed part 67, riveted joint fixed part 67 by pass through to radially inner side and forward side deformation and the power in forward end direction that applies is delivered to filling component 74, rear end side packaging part 73, support parts 72 and front packaging part 71.By the power of this pushing, filling component 74 is filled to the compression of axes O direction and fills the gap between inner peripheral surface and the outer peripheral face of element body 11 of main metal fixture 60 airtightly.
The protector that protector 80 does not collide with the water droplet that comprises and foreign body etc. in the gas of flowing in stream to sensor element 10 prominent in stream for the protection when sensor 1 is installed on exhaust flow path.Protector 80 is the parts formed by rustless steel (such as, the SUS310S of JIS (Japanese Industrial Standards) specification), and for covering the guard block of the front end of sensor element 10.Protector 80 is the parts of the tubular extended in the axial direction, and is formed as the shape of closed front.The end edge of protector 80 is fixed by engagement tip 65 welding with main metal fixture 60.
The outside protector 81 that the circumference that is provided with being formed as having bottom tube-like and unlimited side in keeper 80 is chimeric with engagement tip 65；And it is fixed on the inner side protector 82 being formed as having bottom tube-like of the inside of outside protector 81.In other words, protector 80 has the duplex being made up of outside protector 81 and inner side protector 82.
Barrel surface at outside protector 81 and inner side protector 82 is provided with the introducing port 83 introducing gas into inside.In FIG, only illustrate the introducing port 83 of outside protector 81, and owing to the reason on configuration relation does not illustrate the introducing port 83 of inner side protector 82.Additionally, be respectively arranged with outboard row outlet 84 and the inboard row outlet 85 of water droplet and the gas exiting into inside on the bottom surface of outside protector 81 and inner side protector 82.
Urceolus 90 is the parts formed by the rustless steel (such as the SUS304L of JIS (Japanese Industrial Standards) specification) different from main metal fixture 60, be inserted with the holding section, rear end 66 of main metal fixture 60 in the inside of urceolus 90, urceolus 90 is fixed on main metal fixture 60.The rear end of sensor element 10, separator 30 and the seal member 40 that highlight from the rear end of main metal fixture 60 it is configured with in the inside of urceolus 90.
Further, in the sensor 1 of embodiment 1, the ceramic heater 100 of embodiment 1 is configured in the bore of sensor element 10 as the heater for heating sensor element 10.
Fig. 2 is the axonometric chart of the outward appearance representing ceramic heater 100.Fig. 3 is the exploded perspective view of the internal structure representing ceramic heater 100.
Additionally, in the ceramic heater 100 of present embodiment,, illustrate for " rear end side " with the end of side in contrast with the side (forming the side of heating part 142 described later) possessing heating part in the both ends in axis AX direction for " front ".
Ceramic heater mainly possesses: the heater body portion 102 with the pole shape (generally cylindrical shaped) of heat generating resistor 141, the outer surface being arranged at heater body portion 102 electrode pad 121 electrically connected with heat generating resistor 141 and the metal terminal portion 130 engaged with electrode pad 121 by the solder of electric conductivity.
Ceramic heater 100 is that the electrode pad 121 arranged via the rear end side in heater body portion 102 is energized from external device (ED) (supply unit) to heat generating resistor 141, thus the structure of heat generating resistor 141 heating.It addition, the heating part 142 (with reference to Fig. 2) in heat generating resistor 141 is configured at the front in heater body portion 102.That is, ceramic heater 100 is configured to be generated heat and heating sensor element 10 by the front in heater body portion 102.
As it is shown on figure 3, ceramic heater 100 by being wound in the periphery of the insulation tube 101 of the aluminium oxide ceramics of pole shape and it being fired and manufactures by the blank 140,146 of aluminium oxide ceramics higher for insulating properties.
Blank 140 is formed as heating pattern based on the heat generating resistor 141 of the material of tungsten system.Heat generating resistor 141 is configured to the couple of conductor portion 143 possessing the heating part 142 being formed at front and being connected with the two ends of heating part 142 respectively.Further, couple of conductor portion 143 be configured to possess the front wire portion 143a being formed at front respectively, the rear end side wire portion 143c that is formed at rear end side and the connection wire portion 143b that front wire portion 143a and rear end side wire portion 143c is attached.It addition, the width B that the width A of heating part 142 is than front wire portion 143a is little.
Further, the rear end side of blank 140 is provided with two conductor portion 144.Couple of conductor portion 143 electrically connects with two electrode pads 121 on the outer surface being formed at ceramic heater 100 via two conductor portion 144.
Further, blank 146 is the sheet material crimped with the face being formed with heat generating resistor 141 side in blank 140.
The surface of the opposite side of the electrolysis connected with blank 140 in blank 146 is coated with aluminium oxide cream, and is wound in insulation tube 101 with this coated face for inner side by blank 140,146 and presses to the inside from periphery, form ceramic heater formed body.Hereafter, ceramic heater 100 is formed by firing ceramics heater formed body.
Then, as shown in FIG. 2 and 3, in ceramic heater 100, it is formed with two electrode pads 121 becoming anode-side and cathode side.This electrode pad 121 is respectively provided with on two positions of the outer surface of the blank 140 corresponding with above-mentioned two conductor portion 144 (with reference to Fig. 3).Conducting with the wire portion 143 of heat generating resistor 141 carries out via the conductive paste filled in the inside of conductor portion 144.It addition, be formed with the metal level (the pad plating film 122 shown in Fig. 4) of plating described later on the surface of electrode pad 121.
Metal terminal portion 130 is made up of the nickel part of elongate in shape, and be configured to possess the junction surface 133 engaged by solder with electrode pad, the linking part 134 of the caulking part 135 that is cut into writing board shape and connection joining part 133 and caulking part 135.
The fore-end of linking part 134 is formed as being bent into step-like in a thickness direction and being connected with junction surface 133.Further, in metal terminal portion 130, the connecting area with caulking part 135 in linking part 134 distorts as rotating with the central shaft of the length direction of linking part 134 for center of rotation.
Further, the heart yearn of the wire 55 that metal terminal portion 130 is connected by external circuit and caulking part 135 is fixed in joint filling, thus realizing the conducting with external circuit (external electrical apparatus) via wire 55 grade.
Two the metal terminal portions 130 so constituted engage with two electrode pads 121 respectively, the function as anode-side terminal when applying voltage to ceramic heater 100 and cathode side terminal.
Fig. 4 is the phantom observed from the direction of arrow near the junction surface 133 of chain-dotted line A-A ' in the ceramic heater 100 shown in Fig. 2.Additionally, in the diagram, with from metal terminal portion 130 towards the direction of the central shaft of ceramic heater 100 (in figure direction under paper) for lower direction, and to illustrate for upper direction away from the direction of central shaft (in figure direction on paper).
As shown in Figure 4, electrode pad 121 is in the upper formation of outer surface (face of the upside in Fig. 3) of the blank 140 of the periphery being wound in insulation tube 101, and turns on via the wire portion 143 of conductor portion 144 with the heat generating resistor 141 of the inner surface (face of the downside in Fig. 3) being formed at blank 140.
This electrode pad 121 is the metal level of the bond pad shapes of material of main part constituted by the element comprised in the way of accounting for weight more than 80% more than by least one kind selected from tungsten, molybdenum.Lead and molybdenum fusing point height and excellent heat resistance, therefore suitable as the composition of electrode pad 121.
Metal terminal portion 130 is made up of the nickel part comprising nickel in the way of accounting for weight more than 90%.As shown in Figure 4, metal terminal portion 130 is engaged with the electrode pad 121 covered by pad plating film 122 by solder portion 124.Further, on the metal terminal 130 being bonded with each other by solder portion 124 and electrode pad 121, it is also formed with the nickel plating film 125 based on nickel (Ni) and the chromium plating film 126 based on chromium (Cr).It addition, be formed with chromium plating film 126 in the upside of nickel plating film 125, prevent, by possessing nickel plating film 125 and chromium plating film 126, the corrosion caused due to the oxidation in solder portion 124 and metal terminal portion 130.
Alternatively, it is also possible to form nickel plating film, platinum plating film and gold plating film to replace chromium plating film 126.
Further, the solder portion 124 electrode pad 121 and metal terminal portion 130 engaged uses Au-Cu solder and Ag-Cu solder that electrode pad 121 and metal terminal portion 130 are carried out soldering.
It addition, when soldering, the nickel composition of the pad plating film 122 arranged on electrode pad spreads to solder portion 124.
That is, as it is shown on figure 3, in the ceramic heater 100 of embodiment 1, the boundary member with solder portion 124 of the pad plating film 122 before soldering illustrates the contour shape shown in 123 in dash-dot line.Further, after brazing, a part for pad plating film 122 becomes the form spreading and being added to solder portion 124, pad plating film 122 and solder portion 124 and is formed with the state of integration.
Fig. 5 is the explanation figure of the electrode pad 121 of the ceramic heater 100 being visually confirmed to be embodiment 1 on the direction vertical with axis direction.It addition, in Figure 5, for the position relationship between clear and definite electrode pad 121 and rear end side wire portion 143c, omit solder portion 124 and metal terminal portion 130.Further, although wire portion 143 is embedded in heater body portion 102, but for ease of illustrating, it is shown in broken lines in Figure 5.
As it is shown in figure 5, rear end side wire portion 143c is arranged in in the upper view field S (oblique line portion in Fig. 5) projecting electrode pad 121 in the direction (the paper the exterior and the interior direction in Fig. 5) vertical with axis AX direction.Further, in the whole region in view field S, the width C of rear end side wire portion 143c is less than the width D of electrode pad 121.That is, two ora terminalis 143cT of rear end side wire portion 143 are configured at inside width in the way of not overlapping with the border ST on the width of view field S.Thus, even if the stress of the contraction putting on heater body portion 102 stress and electrode pad 121 producing the impact by the contraction of rear end side wire portion 143c and causing, both stress towards also become cancel out each other towards such that it is able to suppress to produce near the ora terminalis on the width of electrode pad 121 in heater body portion 102 fracture and crackle etc..
For this reason, figure 6 illustrates.Fig. 6 is the explanation figure of effect of the invention of the ceramic heater 100 that embodiment 1 is described, for being wound in the blank 140 before insulation tube 101.As shown in Figure 6, if print the metallic conductor of paste at the lower surface of blank 140 and form the heat generating resistor 141 with desired shape, then cause that heat generating resistor 141 shrinks owing to heat generating resistor 141 is dry thereafter.That is, as shown in Figure 6, heat generating resistor 141 (rear end side wire portion 143c) shrinks (reference arrow W) inside the width of blank 140.Further, due to the impact of the contraction of heat generating resistor 141, thus outside width, stress is applied in the upper surface side of blank 140.(reference arrow Y).
Hereafter, if the upper surface in blank 140 prints the metallic conductor of paste and forms electrode pad 121, then identical with heat generating resistor 141, cause that electrode pad 121 shrinks (reference arrow Z) inside width owing to electrode pad 121 dries.; in embodiment 1; owing to electrode pad being configured in view field S; and in the whole region in view field S, the width C of rear end side wire portion 143c is set to less than the width D of electrode pad 121, thus the stress (arrow Y) of the upper surface of the blank 140 produced by the impact of rear end side wire portion 143c towards the stress (arrow Z) during with the contraction of electrode pad 121 towards to produce in the way of the direction cancelled out each other.
In such situation, even if blank 140 is wound in insulation tube 101, it is also possible to suppress to produce fracture and crackle etc. near the ora terminalis on the width of the electrode pad 121 in heater body portion 102.
And, ceramic heater 100 according to embodiment 1, the width B of front wire portion 143a is set to the width C than rear end side wire portion 143c big, and the width A of heating part 142 is set to the width B than front wire portion 143a little (with reference to Fig. 3).So, big owing to forming the width B width C than the width A of heating part 142 and rear end side wire portion 143c front wire portion 143a, it is thus possible to more concentrate and generate heat in heating part 142, and ceramic heater 100 can be used efficiently.
Further, the ceramic heater 100 according to embodiment 1, by little for the width A of heating part 142 width C being set to than rear end side wire portion 143c.So, owing to the width A of heating part 142 width C than rear end side wire portion 143c is little, thus will not generate heat at rear end side wire portion 143c and can concentrate effectively and generate heat in heating part 142 such that it is able to use ceramic heater 100 efficiently.
Further, the ceramic heater 100 according to embodiment 1, it is preferred to, front wire portion 143a and rear end side wire portion 143c is attached, and there is the connection wire portion 143b along with the width towards axis AX direction rear end side reduces.So, owing to having along with the connection wire portion 143b of the taper of width reduction towards axis AX direction rear end side, because being prone to, without being formed between front wire portion and rear end side wire portion, the corner that electric field is concentrated, therefore, it is possible to suppress insulating properties to reduce.
Additionally, the ceramic heater 100 according to embodiment 1, connect wire portion 143b and be configured at more forward side than view field S.Thus, in view field S, can the width C of rear end side wire portion 143c be set to less than the width D of electrode pad 121 effectively, therefore, it is possible to suppress further to produce fracture and crackle etc. near the ora terminalis on the width of the electrode pad 121 in heater body portion 102.
Above, embodiments of the present invention 1 are illustrated, but the present invention is not limited to above-mentioned embodiment 1, without departing from the spirit and scope of the invention, it is possible to implement by various modes.
Such as, in embodiment 1, the mode that connection wire portion 143b is configured at side more forward than view field S is illustrated, but is not limited to this.Such as, as it is shown in fig. 7, the part connecting wire portion 143b can also overlap with view field S., it is preferred to, the width connecting wire portion 143b is little in the width D of view field S internal ratio electrode pad 121.
Label declaration
1 sensor
10 sensor elements
100 ceramic heaters
102 heater body portions
121 electrode pads
141 heat generating resistors
142 heating parts
143 wire portions
143a front wire portion
143b connects wire portion
143c rear end side wire portion
S view field.
Claims (5)
1. a ceramic heater, is the ceramic heater of the pole shape extended in the axial direction, and it possesses:
Heater body portion, is formed by insulating ceramics；
Heat generating resistor, is embedded in this heater body portion；
Electrode pad, is configured on the outer surface in described heater body portion, and electrically connects with this heat generating resistor；And
Conductor portion, connects described heat generating resistor and described electrode pad,
Described ceramic heater is characterised by,
Described heat generating resistor has:
Rear end side wire portion, is configured in the view field projected on the direction vertical with described axis direction by described electrode pad, and described in the width ratio of described rear end side wire portion, the width of electrode pad is little in the whole region of described view field；
Front wire portion, is configured at side more forward than described rear end side wire portion, and described in the width ratio of described front wire portion, the width of rear end side wire portion is big；And
Heating part, is configured at side more forward than described front wire portion, and described in the width ratio of described heating part, the width of front wire portion is little.
2. ceramic heater according to claim 1, it is characterised in that
Described in the width ratio of described heating part, the width of rear end side wire portion is little.
3. ceramic heater according to claim 1 and 2, it is characterised in that
Described heat generating resistor has connection described front wire portion and described rear end side wire portion and along with the connection wire portion of width reduction towards axis direction rear end side.
4. ceramic heater according to claim 3, it is characterised in that
Described connection wire portion is configured at side more forward than described view field.
5. a sensor, possesses:
There is the sensor element of bottom tube-like；
Main metal fixture, keeps this sensor element；And
Ceramic heater, is configured in the bore of described sensor element,
Described sensor is characterised by,
Described ceramic heater is the ceramic heater described in any one of Claims 1-4.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-259911 | 2014-12-24 | ||
| JP2014259911A JP6291411B2 (en) | 2014-12-24 | 2014-12-24 | Ceramic heater and sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105744658A true CN105744658A (en) | 2016-07-06 |
| CN105744658B CN105744658B (en) | 2019-12-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510752165.9A Active CN105744658B (en) | 2014-12-24 | 2015-11-06 | Ceramic heater and sensor |
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| Country | Link |
|---|---|
| JP (1) | JP6291411B2 (en) |
| CN (1) | CN105744658B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001257059A (en) * | 2000-03-13 | 2001-09-21 | Ibiden Co Ltd | Ceramic heater |
| CN1870839A (en) * | 2005-05-27 | 2006-11-29 | 京瓷株式会社 | Ceramic heater and heating iron using same |
| CN101723699A (en) * | 2008-10-24 | 2010-06-09 | 日本特殊陶业株式会社 | Ceramic junction member, ceramic heater and gas sensor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08273814A (en) * | 1995-03-29 | 1996-10-18 | Ngk Spark Plug Co Ltd | Ceramic heater |
| JP2001257062A (en) * | 2000-03-13 | 2001-09-21 | Ibiden Co Ltd | Ceramic heater |
-
2014
- 2014-12-24 JP JP2014259911A patent/JP6291411B2/en active Active
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2015
- 2015-11-06 CN CN201510752165.9A patent/CN105744658B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001257059A (en) * | 2000-03-13 | 2001-09-21 | Ibiden Co Ltd | Ceramic heater |
| CN1870839A (en) * | 2005-05-27 | 2006-11-29 | 京瓷株式会社 | Ceramic heater and heating iron using same |
| CN101723699A (en) * | 2008-10-24 | 2010-06-09 | 日本特殊陶业株式会社 | Ceramic junction member, ceramic heater and gas sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6291411B2 (en) | 2018-03-14 |
| JP2016122489A (en) | 2016-07-07 |
| CN105744658B (en) | 2019-12-03 |
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