CN105732029A - Glass phase-doped barium zirconate titanate calcium-based lead-free piezoelectric ceramic material and low-temperature sintering preparation technology thereof - Google Patents
Glass phase-doped barium zirconate titanate calcium-based lead-free piezoelectric ceramic material and low-temperature sintering preparation technology thereof Download PDFInfo
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Abstract
The invention discloses a glass phase-doped barium zirconate titanate calcium-based lead-free piezoelectric ceramic material and a low-temperature sintering preparation technology thereof, and belongs to the technical field of electronic ceramic materials. The general formula of the piezoelectric ceramic material is (1-x)(Ba0.85Ca0.15)(Zr0.1Ti0.9)O3-x(CuO-B2O3-SiO2), wherein x represents the mass percent of CuO-B2O3-SiO2 in the piezoelectric ceramic material; and the value of x is 0.1% to 0.7%. By a solid-phase synthesis method, with barium zirconate titanate calcium as a matrix, a little of CuO-B2O3-SiO2 is doped; and the obtained lead-free piezoelectric ceramic is low in sintering temperature, excellent in piezoelectric performance and wide in application prospect.
Description
Technical field
The invention belongs to electron ceramic material technical field, be specifically related to for speaker piezoceramic material and
Its preparation method.
Background technology
Informationization is 21 century important characteristics of the times, and electronic ceramics, as the new information material of a class, develops fast
Speed.Piezoceramic material, as the one of electronic ceramics, has in high pressure, medical treatment, navigation, communication and intelligence system
And be widely applied.Additionally, leadless piezoelectric ceramics decreases environmental pollution, become the trend of piezoelectric ceramics development.
2009, the Ren Xiao soldier seminar of Xi'an Communications University was successfully prepared Ba (Zr0.2Ti0.8)O3-(Ba0.7Ca0.3)TiO3
The pseudobinary system solid solution leadless piezoelectric ceramics of (being called for short BZT-BCT), and its quasi-homotype phase boundary (MPB)
Place records piezoelectric coefficient d33Up to 620pC/N, its performance can be with the lead base piezoelectricity pottery such as PZT-5H, PMN-PT
Ceramic material compares favourably, and is considered to be expected to replace lead zirconate titanate (PZT) piezoelectricity being widely used for more than 50 year in the world
Ceramic material, thus avoid lead contamination.Therefore, BZT-BCT leadless piezoelectric ceramics becomes the most numerous scholar
Paying close attention to and the focus of research, a lot of researchs concentrate on 0.5BZT-0.5BCT, i.e. (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3
On the doping vario-property of ceramic material, such as (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3-BiFeO3、
(Ba0.85Ca0.15)(Zr0.1Ti0.9)O3-Pr2O3Deng.But, previous work focuses primarily upon performance study, to pottery
Low-temperature sintering research is less.Due to (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3Pottery sintering temperature high (1400~
1450 DEG C), component deviation, the excessive and wasting of resources of consuming energy may be caused.Therefore, people are changed by doping
Property reduce sintering temperature, reduce component deviation, save the energy.But, the doping of low melting point oxide does not take
Obtain significant effect.
Summary of the invention
The technical problem to be solved is to provide the glass that a kind of sintering temperature is relatively low, piezoelectric property is excellent
The barium calcium zirconate titanate lead-free piezoceramic material adulterated mutually, and sintering preparation technology.
Solve above-mentioned technical problem and be the technical scheme is that the formula of this piezoceramic material is
(1-x)(Ba0.85Ca0.15)(Zr0.1Ti0.9)O3-x(CuO-B2O3-SiO2), during wherein x represents this piezoceramic material
CuO-B2O3-SiO2Weight/mass percentage composition, the value of x is 0.1%~0.7%, and the value of preferably x is 0.3%.
The low-temperature sintering production technology of the barium calcium zirconate titanate base leadless piezoelectric ceramics material that above-mentioned glass adulterates mutually by under
State step to form:
1, ball mill mixing
According to formula (1-x) (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3-x(CuO-B2O3-SiO2) stoichiometric proportion, weigh former
Material BaCO3、CaCO3、ZrO2、TiO2、CuO、B2O3、SiO2And add in ball grinder, with zirconia ball
It is ball-milling medium for abrading-ball, dehydrated alcohol, is sufficiently mixed ball milling 12~18 hours, separate zirconia ball, by former
Material mixture is dried at 80~100 DEG C, with mortar grinder, crosses 80 mesh sieves.
2, pre-burning
Step 1 is crossed the raw mixture after 80 mesh sieves pre-burning 5~8 hours at 1000~1050 DEG C, the coldest
But to room temperature, pre-burning powder is obtained.
3, secondary ball milling
The pre-burning powder that step 2 obtained adds in ball grinder, with agate ball as abrading-ball, dehydrated alcohol as ball-milling medium,
Being sufficiently mixed ball milling 6~12 hours, 80~100 DEG C are dried, and with mortar grinder, cross 80 mesh sieves.
4, pelletize tabletting
Cross to step 3 the pre-burning powder after 80 mesh sieves adds the mass fraction of its quality 40%~50% be 5% poly-
Vinyl alcohol aqueous solution, pelletize, cross 80~120 mesh sieves, be pressed into cylindrical blank with powder compressing machine.
5, sintering
Cylindric blank is placed on zirconium oxide flat board, was warming up to 500 DEG C with 380 minutes, be incubated 1 hour, from
So it is cooled to room temperature, is then warming up to 1000 DEG C, then the intensification with 3 DEG C/min with the heating rate of 10 DEG C/min
Ramp, to 1250~1300 DEG C, is incubated 5~8 hours, is cooled to room temperature.
6, silver ink firing
Ceramic surface polishing after step 5 is sintered, polishing, it is wiped over totally with ethanol, lower surface is respectively thereon
Coating silver slurry, is placed in resistance furnace 840 DEG C and is incubated 30 minutes, naturally cool to room temperature.
7, polarization
Pottery after step 6 silver ink firing is placed in room temperature silicone oil, polarizes 10 minutes under 1kV/mm electric field,
2kV/mm electric field polarization 20 minutes, 3kV/mm electric field polarization 30 minutes, obtain the zirconium metatitanic acid that glass adulterates mutually
Barium calcio lead-free piezoceramic material.
In above-mentioned steps 2, preferably step 1 is crossed the raw mixture pre-burning 6 at 1050 DEG C after 80 mesh sieves little
Time, naturally cool to room temperature, obtain pre-burning powder..
In above-mentioned steps 5, preferably cylindric blank is placed on zirconium oxide flat board, was warming up to 500 with 380 minutes
DEG C, it is incubated 1 hour, naturally cools to room temperature, be then warming up to 1000 DEG C with the heating rate of 10 DEG C/min,
It is warming up to 1270 DEG C with the heating rate of 3 DEG C/min again, is incubated 6 hours, was then cooled to room temperature with 600 minutes.
The present invention uses solid-phase synthesis, and with barium calcium zirconate titanate as matrix, adulterate a small amount of CuO-B2O3-SiO2,
The sintering temperature of gained leadless piezoelectric ceramics is low, and ceramic dense degree is high, and piezoelectric property is excellent, has a wide range of applications
Prospect.
Accompanying drawing explanation
Fig. 1 is the barium calcium zirconate titanate base leadless piezoelectric ceramics material that glass prepared by different sintering temperature adulterates mutually
XRD figure.
Fig. 2 is Jie of the barium calcium zirconate titanate base leadless piezoelectric ceramics material that glass prepared by different sintering temperature adulterates mutually
Electricity thermogram.
Fig. 3 is the electricity of the barium calcium zirconate titanate base leadless piezoelectric ceramics material that glass prepared by different sintering temperature adulterates mutually
Hysteresis line chart.
Fig. 4 is different CuO-B2O3-SiO2The barium calcium zirconate titanate base leadless piezoelectricity that glass prepared by doping adulterates mutually
The XRD figure of ceramic material.
Fig. 5 is different CuO-B2O3-SiO2The barium calcium zirconate titanate base leadless piezoelectricity that glass prepared by doping adulterates mutually
The dielectric thermogram of ceramic material.
Fig. 6 is different CuO-B2O3-SiO2The barium calcium zirconate titanate base leadless piezoelectricity that glass prepared by doping adulterates mutually
The ferroelectric hysteresis loop figure of ceramic material.
Detailed description of the invention
The present invention is described in more detail with embodiment below in conjunction with the accompanying drawings, but protection scope of the present invention not only limits
In these embodiments.
The BaCO that example below uses3、CaCO3、ZrO2、TiO2、CuO、B2O3、SiO2Purity depend on
Secondary is 99.0%, 99.99%, 99.0%, 99.99%, 99.0%, 99.99%, 99.99%.
Embodiment 1
1, ball mill mixing
According to 99.9wt.% (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3-0.1wt.% (CuO-B2O3-SiO2) stoichiometry score
Another name takes raw material BaCO318.8932g、CaCO31.6745g、ZrO21.3882g、TiO28.0157g、CuO
0.0123g、B2O30.0097g、SiO20.0083g, adds load weighted raw material in ball grinder, with zirconia ball
Being ball-milling medium for abrading-ball, dehydrated alcohol, dehydrated alcohol is 1:1.5~1.7 with the mass ratio of raw mixture, uses
The abundant ball milling of ball mill 401 revs/min 16 hours, separates zirconia ball, raw mixture is put into drying baker
90 DEG C are dried 24 hours, with mortar grinder 30 minutes, cross 80 mesh sieves.
2, pre-burning
Raw mixture after step 1 is crossed 80 mesh sieves is placed in alumina crucible, gently smashes with pestle and makes stock chart
Face is smooth, adds a cover, and is placed in resistance furnace 1050 DEG C of pre-burnings 6 hours, naturally cools to room temperature, come out of the stove, obtain pre-
Burn powder.
3, secondary ball milling
The pre-burning powder that step 2 obtained adds in ball grinder, with zirconia ball as abrading-ball, dehydrated alcohol be that ball milling is situated between
Matter, dehydrated alcohol is 1:1.5~1.7 with the mass ratio of raw mixture, with 401 revs/min of abundant ball millings of ball mill
10 hours, separate zirconia ball, be then placed in drying baker 90 DEG C and be dried 24 hours, cross 80 mesh sieves.
4, pelletize tabletting
Pre-burning powder after step 3 crosses 80 mesh sieves adds the polyvinyl alcohol that mass fraction is 5% of its quality 50%
Aqueous solution, pelletize, cross 120 mesh sieves, be compressed into a diameter of under 100MPa pressure with powder compressing machine
15mm, thickness are the cylindrical blank of 5mm.
5, sintering
Cylindric blank is placed on zirconium oxide flat board, was warming up to 500 DEG C with 380 minutes, be incubated 1 hour, from
So it is cooled to room temperature, carries out binder removal process, then the base substrate after binder removal is warming up to the heating rate of 10 DEG C/min
1000 DEG C, then be warming up to 1270 DEG C with the heating rate of 3 DEG C/min, be incubated 6 hours, then with 600 minutes cold
But to room temperature.
6, silver ink firing
By the ceramic surface polishing after sintering, it is polished to 0.5~0.6mm thickness, is wiped over totally with ethanol, thereon
Lower surface is respectively coated with the silver slurry that thickness is 0.01~0.03mm, is placed in resistance furnace 840 DEG C and is incubated 30 minutes,
Naturally cool to room temperature.
7, polarization
Pottery after step 6 silver ink firing is placed in room temperature silicone oil, polarizes 10 minutes under 1kV/mm electric field,
2kV/mm electric field polarization 20 minutes, 3kV/mm electric field polarization 30 minutes, obtain the zirconium metatitanic acid that glass adulterates mutually
Barium calcio lead-free piezoceramic material.
Embodiment 2
In the step 5 of embodiment 1, cylindric blank is placed on zirconium oxide flat board, was warming up to 380 minutes
500 DEG C, be incubated 1 hour, naturally cool to room temperature, carry out binder removal process, then by the base substrate after binder removal with
The heating rate of 10 DEG C/min is warming up to 1000 DEG C, then is warming up to 1250 DEG C with the heating rate of 3 DEG C/min, protects
Temperature 6 hours, was then cooled to room temperature with 600 minutes.Other steps are same as in Example 1, are prepared as glass phase
The barium calcium zirconate titanate lead-free piezoceramic material of doping.
Embodiment 3
In the step 5 of embodiment 1, cylindric blank is placed on zirconium oxide flat board, was warming up to 380 minutes
500 DEG C, be incubated 1 hour, naturally cool to room temperature, carry out binder removal process, then by the base substrate after binder removal with
The heating rate of 10 DEG C/min is warming up to 1000 DEG C, then is warming up to 1300 DEG C with the heating rate of 3 DEG C/min, protects
Temperature 6 hours, was then cooled to room temperature with 600 minutes.Other steps are same as in Example 1, are prepared as glass phase
The barium calcium zirconate titanate lead-free piezoceramic material of doping.
Embodiment 4
In the step 1 of embodiment 1, according to 99.7wt.% (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3-0.3wt.% (CuO-
B2O3-SiO2) stoichiometric proportion weigh raw material BaCO respectively318.8550g、CaCO31.6715g、ZrO21.3855g、
TiO27.9998g and CuO 0.0349g, B2O30.0292g、SiO20.0252g, adds load weighted raw material
In ball grinder, with zirconia ball as abrading-ball, dehydrated alcohol as ball-milling medium, the matter of dehydrated alcohol and raw mixture
Amount, than being 1:1.5~1.7, with the abundant ball milling of ball mill 401 revs/min 16 hours, separates zirconia ball, by former
Material mixture is put into 90 DEG C of drying baker and is dried 24 hours, with mortar grinder 30 minutes, crosses 80 mesh sieves.Other
Step is same as in Example 1, is prepared as the barium calcium zirconate titanate lead-free piezoceramic material that glass adulterates mutually.
Embodiment 5
In the step 1 of embodiment 1, according to 99.5wt.% (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3-0.5wt.% (CuO-
B2O3-SiO2) stoichiometric proportion weigh raw material BaCO respectively3 18.8166g、CaCO3 1.6674g、ZrO2 1.3830g、
TiO27.9832g and CuO 0.0577g, B2O30.0493g、SiO20.0423g, adds load weighted raw material
In ball grinder, with zirconia ball as abrading-ball, dehydrated alcohol as ball-milling medium, the matter of dehydrated alcohol and raw mixture
Amount, than being 1:1.5~1.7, with the abundant ball milling of ball mill 401 revs/min 16 hours, separates zirconia ball, by former
Material mixture is put into 90 DEG C of drying baker and is dried 24 hours, with mortar grinder 30 minutes, crosses 80 mesh sieves.Other
Step is same as in Example 1, is prepared as the barium calcium zirconate titanate lead-free piezoceramic material that glass adulterates mutually.
Embodiment 6
In the step 1 of embodiment 1, according to 99.3wt.% (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3-0.7wt.% (CuO-
B2O3-SiO2) stoichiometric proportion weigh raw material BaCO respectively318.7785g、CaCO31.6648g、ZrO21.3800g、
TiO27.9668g and CuO 0.0805g, B2O30.0692g、SiO20.0609g, adds load weighted raw material
In ball grinder, with zirconia ball as abrading-ball, dehydrated alcohol as ball-milling medium, the matter of dehydrated alcohol and raw mixture
Amount, than being 1:1.5~1.7, with the abundant ball milling of ball mill 401 revs/min 16 hours, separates zirconia ball, by former
Material mixture is put into 90 DEG C of drying baker and is dried 24 hours, with mortar grinder 30 minutes, crosses 80 mesh sieves.Other
Step is same as in Example 1, is prepared as the barium calcium zirconate titanate lead-free piezoceramic material that glass adulterates mutually.
Inventor uses the zirconium that glass prepared by embodiment 1~6 is adulterated by D/max-2200X type x ray diffractometer x mutually
Calcium barium titanate lead-free piezoelectric ceramic material carries out structural characterization, and calculates DIELECTRIC CONSTANT ε by following formular:
εr=4Ct/ (π ε0d)
In formula, C is electric capacity, and t is the thickness of potsherd, ε0For permittivity of vacuum (8.85 × 10-12F/m), d is pottery
The diameter of sheet.Result is shown in Fig. 1~6.
The barium calcium zirconate titanate lead-free piezoceramic material that the glass that embodiment 1~6 is prepared by inventor adulterates mutually is carried out
Performance test, the results are shown in Table 1 and table 2.
The impact (x=0.3%) on lead-free piezoceramic material piezoelectric property of the present invention of table 1 sintering temperature
Sintering temperature | d33(pC/N) | Kp | Qm | Pr(μC/cm2) | Ec(kV/cm) | |
Embodiment 1 | 1270℃ | 521 | 0.40 | 157 | 8.63 | 1.42 |
Embodiment 2 | 1250℃ | 465 | 0.41 | 123 | 7.68 | 1..25 |
Embodiment 3 | 1300℃ | 482 | 0.43 | 141 | 7.84 | 1.40 |
The impact (sintering temperature is 1270 DEG C) on lead-free piezoceramic material piezoelectric property of the present invention of the value of table 2 x
X value | d33(pC/N) | Kp | Qm | Pr(μC/cm2) | Ec(kV/cm) | |
Embodiment 1 | 0.3% | 521 | 0.40 | 157 | 8.63 | 1.42 |
Embodiment 4 | 0.1% | 482 | 0.46 | 149 | 7.11 | 1.56 |
Embodiment 5 | 0.5% | 467 | 0.32 | 125 | 5.96 | 1.32 |
Embodiment 6 | 0.7% | 385 | 0.30 | 119 | 5.82 | 1.63 |
As seen from Figure 1, under the sintering temperature of 1250~1300 DEG C, the ceramic material of preparation is pure calcium titanium
Mineral phase structure.From Figure 2 it can be seen that along with the reduction of sintering temperature, Curie temperature offsets to low temperature, dielectric constant is first
Subtract after increasing, it can be seen that during 1270 DEG C of sintering, dielectric properties are preferable.As seen from Figure 3, along with sintering temperature
The reduction of degree, remanent polarization first increases and subtracts afterwards, and coercive field first subtracts and increases afterwards, it can be seen that during 1270 DEG C of sintering,
Ferroelectric properties is preferable.From table 1, along with the reduction of sintering temperature, piezoelectric modulus first increases and subtracts afterwards, mechanical quality
Factor first increases and subtracts afterwards, and equally, during 1270 DEG C of sintering, piezoelectric property is preferable.
From fig. 4, it can be seen that different CuO-B2O3-SiO2Ceramic material prepared by doping is pure Perovskite Phase knot
Structure.From Fig. 5~6 and table 2, along with increasing of doping, dielectric constant, remanent polarization, piezoelectricity
Coefficient, mechanical quality factor all present and first increase the trend subtracted afterwards, wherein CuO-B2O3-SiO2When doping is 0.3%,
Electrical property reaches optimal.
Claims (5)
1. the barium calcium zirconate titanate base leadless piezoelectric ceramics material that a glass adulterates mutually, it is characterised in that: the formula of this piezoceramic material is (1-x) (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3-x(CuO-B2O3-SiO2), CuO-B during wherein x represents this piezoceramic material2O3-SiO2Weight/mass percentage composition, the value of x is 0.1%~0.7%.
The barium calcium zirconate titanate base leadless piezoelectric ceramics material that glass the most according to claim 1 adulterates mutually, it is characterised in that: the value of described x is 0.3%.
3. the low-temperature sintering production technology of the barium calcium zirconate titanate base leadless piezoelectric ceramics material that the glass described in a claim 1 adulterates mutually, it is characterised in that it is made up of following step:
(1) ball mill mixing
According to formula (1-x) (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3-x(CuO-B2O3-SiO2) stoichiometric proportion, weigh raw material BaCO3、CaCO3、ZrO2、TiO2、CuO、B2O3、SiO2And add in ball grinder, with zirconia ball as abrading-ball, dehydrated alcohol as ball-milling medium, be sufficiently mixed ball milling 12~18 hours, separate zirconia ball, raw mixture is dried at 80~100 DEG C, with mortar grinder, cross 80 mesh sieves;
(2) pre-burning
Step (1) is crossed the raw mixture after 80 mesh sieves pre-burning 5~8 hours at 1000~1050 DEG C, naturally cools to room temperature, obtain pre-burning powder;
(3) secondary ball milling
The pre-burning powder that step (2) obtained adds in ball grinder, with agate ball as abrading-ball, dehydrated alcohol as ball-milling medium, be sufficiently mixed ball milling 6~12 hours, 80~100 DEG C are dried, and with mortar grinder, cross 80 mesh sieves;
(4) pelletize tabletting
Pre-burning powder after step (3) crosses 80 mesh sieves adds the polyvinyl alcohol water solution that mass fraction is 5% of its quality 40%~50%, pelletize, crosses 80~120 mesh sieves, be pressed into cylindrical blank with powder compressing machine;
(5) sintering
Cylindric blank is placed on zirconium oxide flat board, was warming up to 500 DEG C with 380 minutes, be incubated 1 hour, naturally cool to room temperature, be then warming up to 1000 DEG C with the heating rate of 10 DEG C/min, then be warming up to 1250~1300 DEG C with the heating rate of 3 DEG C/min, it is incubated 5~8 hours, is cooled to room temperature;
(6) silver ink firing
Ceramic surface polishing after step (5) is sintered, polishing, it is wiped over totally with ethanol, lower surface is respectively coated with silver slurry thereon, is placed in resistance furnace 840 DEG C of insulations 30 minutes, naturally cools to room temperature;
(7) polarization
Pottery after step (6) silver ink firing is placed in room temperature silicone oil, polarizes 10 minutes under 1kV/mm electric field, 2kV/mm electric field polarization 20 minutes, 3kV/mm electric field polarization 30 minutes, obtain the barium calcium zirconate titanate base leadless piezoelectric ceramics material that glass adulterates mutually.
The low-temperature sintering production technology of the barium calcium zirconate titanate base leadless piezoelectric ceramics material that glass the most according to claim 3 adulterates mutually, it is characterized in that: in described step (2), step (1) is crossed raw mixture pre-burning 6 hours at 1050 DEG C after 80 mesh sieves, naturally cool to room temperature, obtain pre-burning powder.
The low-temperature sintering production technology of the barium calcium zirconate titanate base leadless piezoelectric ceramics material that glass the most according to claim 3 adulterates mutually, in described step (5), cylindric blank is placed on zirconium oxide flat board, it was warming up to 500 DEG C with 380 minutes, is incubated 1 hour, naturally cools to room temperature, then it is warming up to 1000 DEG C with the heating rate of 10 DEG C/min, it is warming up to 1270 DEG C with the heating rate of 3 DEG C/min again, is incubated 6 hours, was then cooled to room temperature with 600 minutes.
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CN107500764A (en) * | 2017-08-09 | 2017-12-22 | 上海师范大学 | Lead magnesio-niobate lead titanates bismuth ferrite multiferroic ceramic material and preparation method thereof |
CN107573068A (en) * | 2017-08-28 | 2018-01-12 | 樊之雄 | A kind of piezoelectric ceramics and preparation method thereof |
CN114262222A (en) * | 2021-12-31 | 2022-04-01 | 中国科学院上海硅酸盐研究所 | Method for regulating resistivity and polarization strength of bismuth ferrite-barium titanate-based piezoelectric ceramic material |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107500764A (en) * | 2017-08-09 | 2017-12-22 | 上海师范大学 | Lead magnesio-niobate lead titanates bismuth ferrite multiferroic ceramic material and preparation method thereof |
CN107573068A (en) * | 2017-08-28 | 2018-01-12 | 樊之雄 | A kind of piezoelectric ceramics and preparation method thereof |
CN107573068B (en) * | 2017-08-28 | 2020-09-18 | 新沂市锡沂高新材料产业技术研究院有限公司 | Piezoelectric ceramic and preparation method thereof |
CN114262222A (en) * | 2021-12-31 | 2022-04-01 | 中国科学院上海硅酸盐研究所 | Method for regulating resistivity and polarization strength of bismuth ferrite-barium titanate-based piezoelectric ceramic material |
CN114262222B (en) * | 2021-12-31 | 2022-10-14 | 中国科学院上海硅酸盐研究所 | Method for regulating resistivity and polarization strength of bismuth ferrite-barium titanate-based piezoelectric ceramic material |
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