CN105714254A - Target material assembly and preparation method thereof - Google Patents
Target material assembly and preparation method thereof Download PDFInfo
- Publication number
- CN105714254A CN105714254A CN201610257409.0A CN201610257409A CN105714254A CN 105714254 A CN105714254 A CN 105714254A CN 201610257409 A CN201610257409 A CN 201610257409A CN 105714254 A CN105714254 A CN 105714254A
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- Prior art keywords
- target material
- target
- base tube
- spraying
- assembly according
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
- C23C4/08—Metallic material containing only metal elements
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
The invention relates to a material plating technology of international patent classification C23C metallic materials, particularly to a target material assembly and a preparation method thereof. The target material assembly comprises a base tube and a target material body, wherein the base tube is coated with a target material composite layer which forms transition with the target material body. The preparation method of the target material assembly comprises the steps of removing impurities on the surface of the base tube; carrying out spraying on the base tube to form the target material composite layer; and combining the target material body with the target material composite layer into an integral body. Through the adoption of the target material assembly and the preparation method thereof of the technical scheme, the target material body is firmly combined with the base tube, and the target material is not liable to deform, move and fall of a target, and is convenient to manufacture.
Description
Technical field
The present invention relates to the International Classification of Patents C23C metal material coating technology to material, be specifically related to a kind of target material assembly and preparation method thereof.
Background technology
It is known that the technology trends of target material is closely bound up with the thin film technique development trend of downstream application industry.
At present, adopt spraying method to manufacture target and need to spray prime coat on base tube, prime coat common materials is chosen as the material of the fusing points more than 500 DEG C such as indium, albronze, nickel alumin(i)um alloy, nichrome aluminum alloy, and requires that this material can good combination with base tube and target.Additionally, for the combination being conducive to follow-up base tube and target, target base tube also can through pre-treatment steps such as surface degreasing, surface coarsening and surface peenings.Surface degreasing commonly uses thermokalite method, organic solvent method and surfactant method, ultrasonic waves for cleaning etc., surface coarsening conventional electricity plucking, machining, spraying transition zone and blasting treatment etc..
Prior art has close combination to be able to allow between base tube and target material, have and inventor has devised a kind of hollow columnar target material that target material and backing pipe are combined closely, referring to the Chinese patent document that Authorization Notice No. is " CN101994088B ", this patent is by the heterogeneity of target material and the material of backing pipe, adjust the external diameter of interior pipe and the internal diameter of outer tube, its difference is made to be multiplied by the internal diameter of outer tube be multiplied by a coefficient N again equal to the strain of subduing of target material, and control N value between 1 to 10, so that outer tube and interior pipe fluid-tight engagement.It addition, the combination of current target and base tube has: interference fit, threaded engagement, use conducting resinl bonding etc..
But, the associated methods of existing target material structure and target and base tube yet suffers from following shortcoming: one is owing to target base tube needs through pre-treatment steps such as surface degreasing, surface coarsening and surface peenings so that target manufacturing process bothers；Two is that target is in the process used, as when magnetron sputtering, target can produce localized hyperthermia, because target material and base tube material different heat expansion coefficient are different, thermal stress can be produced, cause target deformation, displacement, even miss the target, affect client's coating quality and even force client to stop production line.
Summary of the invention
It is an object of the invention to provide a kind of target material assembly and preparation method thereof, to overcome the target of prior art to be in use easily deformed, shift, to miss the target and the troublesome problem of target manufacturing process.
In order to solve above-mentioned technical problem, the present invention provides a kind of target material assembly, including base tube and target material body, is coated with and the target composite bed of described target material body formation transition on described base tube.
Preferably, in order to contribute to target material body and base tube strong bonded, adopting granularity during spraying is the dusty material of 50-100 μm.
Preferably, in order to form the target composite bed of densification on base tube, described spraying method adopts supersonic spray coating method or plasma spraying method.
Preferably, on base tube, target composite bed is formed in order to convenient so that base tube and target material body strong bonded, described base tube is rustless steel base tube.
Preferably, for the convenient oxide-film removed on base tube and impurity, and being easy to impinge onto the inside of base tube, described sprayed on material is the powder of the powder identical with the material of described target material body.
The present invention provides a kind of target material assembly, comprises the following steps:
S1, remove described base tube surface impurity；
S2, on base tube spraying formed target composite bed；
S3, described target material body are combined as a whole with the spraying of target composite bed.
Preferably, for the ease of forming target composite bed on base tube, in step s 2, the supersonic spray coating method spraying of employing forms target composite bed.
Preferably, in order to ensure spraying effect, target is made to have more well trickle granularity and the target density height produced by supersonic speed zinc-aluminium powder particle spraying technology, target quality is significantly promoted, in step s 2, during spraying, adopts the powder particle flux identical with the material of described target material body to spray, base tube is stainless steel tube, the purity > 99.9% of spray powders material, granularity: 50-70 μm, working gas is noble gas.
Preferably, in order to ensure to be formed the target composite bed of " target-base material " while convenient spraying, it is simple to eliminate thermal stress, when described spraying forms target composite bed, adopting spray gun to spray, during spraying, the flow of working gas is set to 20-60m3/ h, operating air pressure is 5-10 times of atmospheric pressure, and work gas is heated to 200 DEG C-600 DEG C.
Preferably, in order to further facilitate the inside impinging onto base tube during spraying, being conducive to removing base tube oxide-film and impurity, in step s 2, the speed of injection is 400-600m/s, and injector stroke is set to 2-5 time.
A kind of target material assembly provided by the present invention and preparation method thereof, it is had following technical effect that 1, is formed the target composite bed of transition by setting and described target material body, under the high temperature conditions, target material body is identical with the thermal coefficient of expansion of base tube, can eliminating the thermal stress issues between foreign material, base tube and target material body strong bonded can not have displacement and miss the target；2, by arranging target composite bed, eliminating target base tube needs, through pre-treatment steps such as surface degreasing, surface coarsening and surface peenings, to enormously simplify target manufacturing process, and subsequent production can direct spraying.
Accompanying drawing explanation
Fig. 1 is the structural representation of the target material assembly of embodiments of the invention.
In figure: 1-target material body, 2-target composite bed, 3-base tube.
Detailed description of the invention
Below in conjunction with drawings and Examples, technical solution of the present invention is further illustrated:
As shown in Figure 1: the present invention provides a kind of target material assembly, including base tube 3 and target material body 1, base tube 3 is coated with and forms the target composite bed 2 of transition with target material body 1, the target composite bed 2 of transition is formed by setting and target material body 1, under the high temperature conditions, target material body 1 is identical with the thermal coefficient of expansion of base tube 3, it is possible to eliminating the thermal stress issues between foreign material, base tube 3 and target material body 1 strong bonded can not have displacement and miss the target；Additionally, by arranging target composite bed 2, also eliminating target base tube 3 needs, through pre-treatment steps such as surface degreasing, surface coarsening and surface peenings, to enormously simplify target manufacturing process, and subsequent production can direct spraying.
Specifically, micron powder material can be adopted during spraying, it is possible to select the dusty material of 50-100 μm, it is preferred to use the dusty material of 100 μm, when spraying so that can better by target material body 1 and base tube 3 strong bonded.Additionally, spraying method can adopt supersonic spray coating method or plasma spraying method, it is simple to form the target composite bed of densification on base tube 3.
Specifically, base tube 3 is rustless steel base tube, convenient formation target composite bed 2 on base tube 3 so that base tube 3 and target material body 1 strong bonded.Sprayed on material is the powder identical with the material of target material body 1, it is preferred to use zinc-aluminium powder, further facilitates the oxide-film and impurity removed on base tube 3, and is easy to impinge onto the inside of base tube 3.
The preparation method that the present invention also provides for a kind of aforesaid target material assembly, comprises the following steps:
S1, removal base tube 3 surface impurity；
S2, on base tube 3 spraying formed target composite bed 2；
S3, target material body 1 are combined as a whole with target composite bed 2 spraying.
Specifically, in S1 step, for the convenient impurity removing base tube 3 surface, base tube 3 sprays in advance, when spraying in advance, adopt the noble gases such as He, Ar, it would however also be possible to employ base tube whole process is sprayed 2-5 time by clean air, in order to remove base tube surface impurity, additionally, noble gas after spraying can form eddy current in spray painting room, gets rid of dust and air plankton in spray painting room, discharges through aerofluxus and filtration system.
Additionally, for the ease of forming target composite bed 2 on base tube, in step s 2, the supersonic spray coating method spraying of employing forms target composite bed 2.In addition, in order to ensure spraying effect, target is made to have more well trickle granularity and the target density height produced by supersonic speed zinc-aluminium powder particle spraying technology, target quality is significantly promoted, adopting supersonic speed zinc-aluminium powder particle flow to spray during spraying, base tube is stainless steel tube, the purity > 99.9% of spray powders material, granularity: 50-70 μm, working gas is noble gas.The granularity of dusty material is preferably arranged to 50 μm, 55 μm, 60 μm, 65 μm, 70 μm, it is also possible to be set to any one value in 50-70 μm according to actual needs.Further, in order to ensure to be formed the target composite bed 2 of " zinc-aluminium-base material " while convenient spraying, it is simple to eliminate thermal stress, when spraying forms target composite bed 2, adopting spray gun to spray, during spraying, the flow of working gas is set to 20-60m3/ h, nozzle air pressure is 5-10 times of atmospheric pressure, and spray gun heats 200 DEG C-600 DEG C.Additionally, in order to conveniently impinge onto the inside of base tube 3 during spraying, be conducive to removing base tube 3 oxide-film and impurity, during spraying, the speed that supersonic speed zinc-aluminium powder particle flow carries out spraying is 400-600m/s, and the injector stroke of nozzle is set to 2-5 time.Additionally, pass through the Task-size Controlling of target composite bed 2 at 20-100 μm so that base tube 3 is high with the binding strength of target material body 1.What deserves to be explained is, the material of target material body can have a variety of, and such as sial powder, argentum powder, titanium aluminium powder, ambrose alloy powder etc., therefore, the material of sprayed on material can also select the powder identical with the material of target material body 1 according to practical situation.
For the preparation method of target material assembly, specifically: to spray zinc-aluminium target on rustless steel base tube:
First, base tube 3 sprays in advance, adopts the noble gases such as He, Ar to base tube 3 omnidistance injection 2-5 time, remove base tube 3 surface impurity, then, sprayed by spray gun, specifically, adopt supersonic speed zinc-aluminium powder particle flow to spray, nozzle stroke 2-5 time, metallic zinc aluminium powder particle flux directly removes oxide-film and the impurity of base tube 3, and part metals aluminum zinc powder particles hit enters substrate tube, forms " zinc-aluminium-base material " target composite bed 2 of mixed layer.On base tube 3, spraying forms target composite bed 2, finally, by spraying, it is possible to make target material body 1 and target composite bed 2 strong bonded.
Adopt target material assembly of technical solution of the present invention and preparation method thereof, by arranging and the target composite bed 2 of described target material body formation transition, in the process used, when target material body localized hyperthermia 500 DEG C, target material body is identical with the thermal coefficient of expansion of base tube, can eliminating the thermal stress between foreign material, base tube 3 and target material body 1 strong bonded can not have displacement and miss the target, and target production process, cool down after and use procedure in also can strong bonded；Need, through pre-treatment steps such as surface degreasing, surface coarsening and surface peenings, to enormously simplify target manufacturing process, and subsequent production can direct spraying additionally, also eliminate target base tube.
The above is only the preferred embodiment of the present invention; it should be pointed out that, for those skilled in the art, under the premise without departing from the technology of the present invention principle; can also making some improvement and replacement, these improve and replace and also should be regarded as protection scope of the present invention.
Claims (10)
1. a target material assembly, including base tube and target material body, it is characterised in that: it is coated with on described base tube and the target composite bed of described target material body formation transition.
2. target material assembly according to claim 1, it is characterised in that: adopting granularity during spraying is the dusty material of 50-100 μm.
3. target material assembly according to claim 1, it is characterised in that: described spraying method adopts supersonic spray coating method or plasma spraying method.
4. target material assembly according to claim 1, it is characterised in that: described base tube is rustless steel base tube.
5. target material assembly according to claim 2, it is characterised in that: described sprayed on material is the powder identical with the material of described target material body.
6. the preparation method of a target material assembly according to claim 1, it is characterised in that: comprise the following steps:
S1, removal base tube surface impurity；
S2, on base tube spraying formed target composite bed；
S3, described target material body are combined as a whole with the spraying of target composite bed.
7. the preparation method of target material assembly according to claim 6, it is characterised in that: in step s 2, the supersonic spray coating method spraying of employing forms target composite bed.
8. the preparation method of target material assembly according to claim 6, it is characterized in that: in step s 2, the powder particle flow identical with the material of described target material body is adopted to spray during spraying, base tube is stainless steel tube, the purity > 99.9% of spray powders material, granularity: 50-70 μm, working gas is noble gas.
9. the preparation method of target material assembly according to claim 8, it is characterised in that: during spraying, the flow of working gas is set to 20-60m3/ h, operating air pressure is 5-10 times of atmospheric pressure, and work gas is heated to 200 DEG C-600 DEG C.
10. the preparation method of target material assembly according to claim 9, it is characterised in that: in step s 2, the speed of injection is 400-600m/s, and injector stroke is set to 2-5 time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610257409.0A CN105714254A (en) | 2016-04-21 | 2016-04-21 | Target material assembly and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610257409.0A CN105714254A (en) | 2016-04-21 | 2016-04-21 | Target material assembly and preparation method thereof |
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| CN105714254A true CN105714254A (en) | 2016-06-29 |
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| CN201610257409.0A Pending CN105714254A (en) | 2016-04-21 | 2016-04-21 | Target material assembly and preparation method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105929862A (en) * | 2016-04-13 | 2016-09-07 | 广州市尤特新材料有限公司 | Impurity control method for high-purity rotary target material |
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| JP2015036431A (en) * | 2013-08-12 | 2015-02-23 | 住友金属鉱山株式会社 | Cylindrical sputtering target and manufacturing method of the same |
| CN104805406A (en) * | 2015-04-17 | 2015-07-29 | 无锡舒玛天科新能源技术有限公司 | Aluminium-scandium rotating target material and preparation method thereof |
| CN104831242A (en) * | 2015-04-08 | 2015-08-12 | 无锡舒玛天科新能源技术有限公司 | Large-size integral aluminum-neodymium rotary target material and preparation method thereof |
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2016
- 2016-04-21 CN CN201610257409.0A patent/CN105714254A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103060793A (en) * | 2013-02-01 | 2013-04-24 | 基迈克材料科技（苏州）有限公司 | Refractory metal rotary sputtering target material prepared by cold spraying method |
| JP2015036431A (en) * | 2013-08-12 | 2015-02-23 | 住友金属鉱山株式会社 | Cylindrical sputtering target and manufacturing method of the same |
| CN104831242A (en) * | 2015-04-08 | 2015-08-12 | 无锡舒玛天科新能源技术有限公司 | Large-size integral aluminum-neodymium rotary target material and preparation method thereof |
| CN104805406A (en) * | 2015-04-17 | 2015-07-29 | 无锡舒玛天科新能源技术有限公司 | Aluminium-scandium rotating target material and preparation method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105929862A (en) * | 2016-04-13 | 2016-09-07 | 广州市尤特新材料有限公司 | Impurity control method for high-purity rotary target material |
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Application publication date: 20160629 |