CN105704635A - Microphone vibration testing jig - Google Patents
Microphone vibration testing jig Download PDFInfo
- Publication number
- CN105704635A CN105704635A CN201610195947.1A CN201610195947A CN105704635A CN 105704635 A CN105704635 A CN 105704635A CN 201610195947 A CN201610195947 A CN 201610195947A CN 105704635 A CN105704635 A CN 105704635A
- Authority
- CN
- China
- Prior art keywords
- mike
- groove
- acoustic seal
- seal part
- base assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title abstract description 13
- 238000007789 sealing Methods 0.000 claims description 35
- 238000005259 measurement Methods 0.000 claims description 20
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 6
- 238000003825 pressing Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000000741 silica gel Substances 0.000 description 2
- 229910002027 silica gel Inorganic materials 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R29/00—Monitoring arrangements; Testing arrangements
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2420/00—Details of connection covered by H04R, not provided for in its groups
- H04R2420/05—Detection of connection of loudspeakers or headphones to amplifiers
Abstract
The invention discloses a microphone vibration testing jig which comprises the components of a base assembly that is provided with a microphone trough for positioning a microphone; an upper cover assembly which is arranged on the base assembly and forms an acoustically sealed microphone accommodating chamber together with the microphone trough; and a circuit assembly which comprises a circuit lead that extends into the microphone accommodating chamber. The microphone vibration testing jig settles a technical problem of testing effect of interference vibration to the microphone.
Description
Technical field
The invention belongs to electronic product technical field of measurement and test, in particular it relates to a kind of microphone diaphragms measurement jig。
Background technology
Along with the application of MEMS microphone is promoted gradually, the performance of MEMS microphone product is proposed higher requirement by the art, and MEMS microphone likely uses under various external environments。It is presently required and tests MEMS microphone THD lower than 1Pa acoustic pressure at production line, and THD when lower than 1Pa acoustic pressure, sound frequency lower than 100Hz and frequency response。But, it was found by the inventors of the present invention that owing to interference vibration most of in external environment is below 250Hz, and after acoustic pressure requires reduction, interference is vibrated the impact of frequency response and THD is bigger。So, when there is interference vibration in external environment, it is difficult to accurately test MEMS microphone THD in low frequency, low acoustic pressure situation and frequency response。
And, mike is as acoustic transducer components and parts, the energy conversion relation that the interference vibration propagated for solid at present is converted to electric energy is indefinite, even if therefore understanding the oscillation intensity of interference vibration, also cannot evaluate and test interference vibration and mike frequency response in low frequency, low acoustic pressure situation and THD are caused much impacts。
Therefore, necessary response condition MEMS microphone being subject to when external interference is vibrated is had at least to study, those skilled in the art provide a kind of equipment testing above-mentioned response condition or method, so that will appreciate that the impact that THD and the frequency response of MEMS microphone are caused by interference vibration。
Summary of the invention
It is an object of the present invention to provide a kind of new solution tested and disturb vibration to mike impact。
According to the first aspect of the invention, it is provided that a kind of microphone diaphragms measurement jig, including:
Base assembly, described base assembly has the mike groove for positioning mike to be measured；
Cover assembly, described upper cover is arranged on described base assembly, and the mike constituting acoustic seal with described mike groove holds chamber；And
Circuit unit, described circuit unit includes circuit lead, and described circuit lead stretches into described mike to be held in chamber。
Preferably, base assembly includes positioning groove plate and the first acoustic seal part, and described positioning groove plate is provided with mike groove, and described first acoustic seal part is arranged on described mike trench bottom。
More preferably, the through described positioning groove plate of described mike groove, described first acoustic seal part extends to the bottom of whole described positioning groove plate。
Alternatively, described cover assembly includes the second acoustics sealing member, and described second acoustics sealing member is corresponding with the position of described mike groove, and described second acoustics sealing member and described mike groove constitute described mike and hold chamber。
Alternatively, the bottom of described cover assembly has the 3rd acoustic seal part, and described 3rd acoustic seal part contacts with described base assembly, and described 3rd acoustic seal part and described mike groove constitute described mike and hold chamber。
More preferably, include in the scheme of the second acoustics sealing member at described cover assembly, the bottom of described cover assembly also has the 3rd acoustic seal part, described 3rd acoustic seal part contacts with described base assembly, has hollow out at the 3rd acoustic seal part described in the position corresponding with described second acoustics sealing member。
Preferably, described cover assembly includes pressure slide block and driving device, described second acoustics sealing member is arranged on described upper pressure slide block, and described upper pressure slide block is arranged on described driving device, and described driving device makes described second acoustics sealing member have the trend near described mike groove。
More preferably, described cover assembly includes upper cap body, described driving device includes fixing plate, guide pillar and spring, described fixing plate is fixing with described upper cap body to be connected, described guide pillar is fixed on fixing plate, described upper pressure slide block is configured to slide along described guide pillar, described spring housing described fixing plate and on pressure slide block between guide pillar on。
Alternatively, described circuit unit also includes circuit board, described circuit lead includes power supply lead wire and signal lead, and described circuit board is arranged in described base assembly or bottom described base assembly, and described power supply lead wire and signal lead extend to described mike groove from described circuit board。
Alternatively, described microphone diaphragms measurement jig also includes magnetic bases, and described magnetic bases are arranged on the bottom of described base assembly。
It was found by the inventors of the present invention that in the prior art, on the one hand, owing to the test link of mike generally carries out in good environment；On the other hand, interference that mike can bear vibration is limited, if vibrating excessive, mike often cannot normal operation, and under the interference vibration that can bear, those skilled in the art it has been generally acknowledged that interference vibration is only small on the impact of mike, it is possible to ignores。So, those skilled in the art also recognize interference vibration Problems existing, also without development about test, the research interference vibration technical scheme on the impact of mike。Therefore, technical assignment that the present invention to realize or that the those skilled in the art of technical problem is that to be solved never expect or it is not expected that, therefore the present invention is a kind of new technical scheme。
By referring to the accompanying drawing detailed description to the exemplary embodiment of the present invention, the further feature of the present invention and advantage thereof will be made apparent from。
Accompanying drawing explanation
Combined in the description and the accompanying drawing of the part constituting description illustrate embodiments of the invention, and be used for explaining principles of the invention together with its explanation。
Fig. 1 is the monnolithic case structure chart of microphone diaphragms measurement jig provided by the invention；
Fig. 2 is the front section view of microphone diaphragms measurement jig provided by the invention。
Detailed description of the invention
The various exemplary embodiments of the present invention are described in detail now with reference to accompanying drawing。It should also be noted that unless specifically stated otherwise, the parts otherwise set forth in these embodiments and positioned opposite, the numerical expression of step and numerical value do not limit the scope of the invention。
Description only actually at least one exemplary embodiment is illustrative below, never as any restriction to the present invention and application or use。
The known technology of person of ordinary skill in the relevant, method and apparatus are likely to be not discussed in detail, but in the appropriate case, described technology, method and apparatus should be considered a part for description。
Shown here with in all examples discussed, any occurrence should be construed as merely exemplary, not as restriction。Therefore, other example of exemplary embodiment can have different values。
It should also be noted that similar label and letter below figure represent similar terms, therefore, once a certain Xiang Yi accompanying drawing is defined, then it need not be further discussed in accompanying drawing subsequently。
The invention provides a kind of microphone diaphragms measurement jig, this tool includes base assembly 1, cover assembly 2 and circuit unit 3, as shown in Figure 1。Described base assembly 1, as the support pedestal of whole tool, wherein has the mike groove for positioning, hold mike, and mike to be tested can be placed in described mike groove and position。Described cover assembly 2 is then arranged on described base assembly 1, generally can be fastened on described mike groove。Cover assembly 2 and described mike groove constitute mike and hold chamber, and it is acoustic seal that described mike holds the inside in chamber, and namely described mike holds chamber is sound insulation chamber。Mike to be measured is placed on when described mike holds in chamber and cannot receive the sound that extraneous sound source sends。In the different embodiments of the present invention, it is possible to adopting multiple quieter material, encapsulant to form mike on mike groove and hold chamber, this is not specifically limited by the present invention。Described circuit unit 3 is for providing the circuit such as drive circuit, signal lead for mike to be measured。Described circuit unit 3 generally includes circuit lead, and described circuit lead stretches into described mike to be held in chamber, electrically connects for mike to be measured。Tool provided by the invention can make mike be in the environment not having sound to input, and so, when external environment exists interference vibration, vibration can be delivered to mike by tool and hold on chamber and mike to be measured。The response that interference vibration is produced by mike to be measured can be passed through circuit unit 3 and export on external equipment, and those skilled in the art can pass through tool provided by the invention and interfere with and vibrate impact that mike is caused and test。
Preferably, in order to provide good location, acoustic seal condition for mike 01 to be measured, in one embodiment of the invention, as shown in Figure 2, described base assembly can include positioning groove plate 11 and the first acoustic seal part 12, described positioning groove plate 11 is positioned on the end face of whole described base assembly, and positioning groove plate 11 is provided with the mike groove 111 of opening upwards。Described first acoustic seal part 12 is arranged on the bottom of described mike groove 111, forms puigging in the bottom of mike groove 111, it is prevented that sound penetrates mike and holds chamber from the bottom of mike groove 111。The hole that quiets down of mike to be measured is likely located in bottom, and in this case, the deadening of the first acoustic seal part 12 is clearly。Described positioning groove plate 11 can provide stable, good locating effect, and the mike groove 111 that positioning groove plate 11 is offered can be suitable with the size of mike 01 to be measured, makes mike 01 to be measured be embedded in wherein。When various sizes of mike to be measured is tested by needs, only the positioning groove plate with various sizes of mike groove need to be changed。
Still optionally further, described mike groove 111 can through described positioning groove plate 11, as in figure 2 it is shown, described mike groove 111 can through described positioning groove plate 11, described first acoustic seal part 12 is then set directly at the lower surface of described positioning groove plate 11。First acoustic seal part 12 extends to the bottom of whole described positioning groove plate 11, is completely covered by the lower surface of positioning groove plate 11, thus improving acoustic seal performance。In this embodiment, the location of mike 01 to be measured is more stable, and more effective acoustic seal can be provided in the bottom of mike。In other embodiments, it is also possible to adopting the modes such as locating piece combination to constitute described mike groove, this is not limited by the present invention。
Preferably, holding chamber to form the mike with good acoustic sealing property, described cover assembly can include the second acoustics sealing member 21, as shown in Figure 2。Described second acoustics sealing member 21 is corresponding with the position of described mike groove 111, and when described cover assembly is arranged on described base assembly, described second acoustics sealing member 21 is just fitted in the surface of described mike groove 111。Described second acoustics sealing member 21 constitutes mike with the combination of described mike groove 111 and holds chamber。When the bottom of mike groove 111 is provided with the first acoustic seal part 12, mike holds the upside in chamber, downside and all has good acoustic seal effect。Described second acoustics sealing member 21 can be made up of the material such as flexible glue, silica gel, and so, when the second acoustics sealing member 21 is fitted with mike 01 to be measured, compressed, it can be deformed, and the surrounding of mike 01 to be measured is also sealed, as shown in Figure 2。Described second acoustics sealing member can hold chamber with the mike of the described mike groove combination composition complete acoustic seal of all directions。
Another kind of optional embodiment is that the bottom of described cover assembly can have the 3rd acoustic seal part 22, and described 3rd acoustic seal part 22 extends to the whole lower surface of described cover assembly。When described cover assembly is fastened on described base assembly, described 3rd acoustic seal part 22 contacts with described base assembly。So, described 3rd acoustic seal part 22 can cover on described mike groove 111, forms mike with described mike groove 111 and holds chamber。When being placed with mike 01 to be measured in mike groove 111, if mike to be measured is prominent from mike groove 111, then described 3rd acoustic seal part 22 can be bent upwards deformation, covers and is close to mike to be measured。The 3rd acoustic seal part 22 in this embodiment also is able to provide good acoustic seal condition in the upside of mike to be measured and surrounding。
Preferably, as in figure 2 it is shown, in a kind of embodiment provided by the invention, described microphone diaphragms measurement jig includes the second acoustics sealing member 21 and the 3rd acoustic seal part 22 simultaneously。Wherein, described second acoustics sealing member 21 is just to described mike groove 111, and described 3rd acoustic seal part 22 covers the lower surface of described cover assembly。In the position corresponding with described second acoustics sealing member 21, described 3rd acoustic seal part 22 has hollow out, so that described second acoustics sealing member 21 can pass described 3rd acoustic seal part 22, directly fits with mike groove 111。In this embodiment, described 3rd acoustic seal part 22 is main forms acoustic seal between cover assembly and base assembly, it is prevented that sound is incoming from gap；Described second acoustics sealing member 21 is for directly constituting mike hold chamber with mike groove 111。More preferably, the bottom of described mike groove 111 is also provided with the first acoustic seal part 12, thus all directions in mike accommodation chamber provide good soundproof effect。Described first, second and the 3rd acoustic seal part 22 material that flexible glue, silica gel etc. have certain deformability all can be had to make。Make the usual Shore hardness of colloid of acoustic seal part less than 30, to maintain good sound insulation and deformability。
Further, described cover assembly can also include pressure slide block 23 and driving device, and described second acoustics sealing member 21 is arranged on described upper pressure slide block 23, and described upper pressure slide block 23 is then fixed on described driving device, as shown in Figure 2。Described driving device is used for ordering about described upper pressure slide block 23 and the second acoustics sealing member 21 near described mike groove 111。In use, when described mike groove 111 is placed with mike to be measured, described driving device orders about described second acoustics sealing member 21 and presses to mike 01 to be measured and mike groove 111, second acoustics sealing member 21 can be deformed under the effect of the pressure, thus wrapping the sidewall of mike 01 surrounding to be measured, as shown in Figure 2。Described driving device can provide driving force for the second acoustics sealing member 21, it is also possible to for regulating the pressing distance of the second acoustics sealing member 21。If the height that mike to be measured highlights from described mike groove 111 is higher, then can reduce distance and the active force of the second downward pressing of acoustics sealing member 21 by regulating driving device, it is prevented that mike pressure experienced to be measured is excessive。If the height that mike to be measured highlights from described mike groove 111 is shorter, then can increase the pressing distance that the second acoustics sealing member 21 is downward, make the second acoustics sealing member 21 be close to described mike groove 111 and mike to be measured。
The structure of described driving device is not specifically limited by the present invention, and those skilled in the art according to being embodied as situation, can adopt the various frame for movement that can reach to regulate pressing distance and pressure。In one embodiment of the invention, as shown in Figure 1, 2, described cover assembly can include upper cap body 25, and described driving device can also include fixing plate 241, guide pillar 242 and spring 243。Described fixing plate 241 is fixed on the top of described upper cap body 25, and described guide pillar 242 is fixedly installed on described fixing plate 241 along upper and lower direction。The described guide pillar 242 described upper pressure slide block 23 of traverse, so that described upper pressure slide block 23 can slide along described guide pillar 242, described spring 243 is enclosed within the guide pillar 242 between described fixing plate 241 and upper pressure slide block 23, and the elastic force of spring 243 can order about described upper pressure slide block 23 away from described fixing plate 241。When described cover assembly is fastened on described base assembly, the elastic force of described spring 243 makes pressure slide block 23 near described mike groove 111 and mike to be measured 01。
Further, described circuit unit can also include circuit board 32, and described circuit lead 31 then includes power supply lead wire and signal lead, and described circuit board 32 can be arranged in described base assembly or bottom。In the embodiment shown in figure 2, described circuit board 32 is arranged on the bottom of base assembly, described power supply lead wire and signal lead and draws from described circuit board 32 and extend in described mike groove 111。Described base assembly can include lead-in wire deck 13, and described circuit lead 31 leads into described mike groove 111 through lead-in wire deck 13。
It addition, for the ease of tool of the present invention is fixed on the device such as production line, test equipment, it is also possible to include magnetic bases 4。Described magnetic bases 4 are arranged on bottom described base assembly volume, and described circuit board 32 may be located between lead-in wire deck 13 and magnetic bases 4。Described magnetic bases 4 can pass through the mode fixed jigs such as electromagnetic action。
Especially, owing to microphone diaphragms measurement jig provided by the invention can shield external sound, mike to be measured therein have ready conditions only to external world interference vibration respond。So, when mike holds and is placed with mike to be measured in chamber, described tool entirety can also use as a kind of vibrating sensor, and this vibrating sensor is especially can play good monitoring, comparison effect to surveying with hospitality when mike carries out other performance tests。
Although some specific embodiments of the present invention being described in detail already by example, but it should be appreciated by those skilled in the art, example above is merely to illustrate, rather than in order to limit the scope of the present invention。It should be appreciated by those skilled in the art, can without departing from the scope and spirit of the present invention, above example be modified。The scope of the present invention be defined by the appended claims。
Claims (10)
1. a microphone diaphragms measurement jig, it is characterised in that including:
Base assembly (1), described base assembly (1) has the mike groove (111) for positioning mike to be measured；
Cover assembly (2), described upper cover is arranged on described base assembly (1), and the mike constituting acoustic seal with described mike groove (111) holds chamber；And
Circuit unit (3), described circuit unit (3) includes circuit lead (31), and described circuit lead (31) stretches into described mike to be held in chamber。
2. microphone diaphragms measurement jig according to claim 1, it is characterized in that, base assembly (1) includes positioning groove plate (11) and the first acoustic seal part (12), being provided with mike groove (111) on described positioning groove plate (11), described first acoustic seal part (12) is arranged on described mike groove (111) bottom。
3. microphone diaphragms measurement jig according to claim 2, it is characterized in that, the through described positioning groove plate (11) of described mike groove (111), described first acoustic seal part (12) extends to the bottom of whole described positioning groove plate (11)。
4. according to one of any described microphone diaphragms measurement jig of claim 1-3, it is characterized in that, described cover assembly (2) includes the second acoustics sealing member (21), described second acoustics sealing member (21) is corresponding with the position of described mike groove (111), and described second acoustics sealing member (21) and described mike groove (111) constitute described mike and hold chamber。
5. according to one of any described microphone diaphragms measurement jig of claim 1-3, it is characterized in that, the bottom of described cover assembly (2) has the 3rd acoustic seal part (22), described 3rd acoustic seal part (22) contacts with described base assembly (1), and described 3rd acoustic seal part (22) and described mike groove (111) constitute described mike and hold chamber。
6. microphone diaphragms measurement jig according to claim 4, it is characterized in that, the bottom of described cover assembly (2) has the 3rd acoustic seal part (22), described 3rd acoustic seal part (22) contacts with described base assembly (1), has hollow out at the 3rd acoustic seal part (22) described in the position corresponding with described second acoustics sealing member (21)。
7. microphone diaphragms measurement jig according to claim 4, it is characterized in that, described cover assembly (2) includes pressure slide block (23) and driving device, described second acoustics sealing member (21) is arranged on described upper pressure slide block (23), described upper pressure slide block (23) is arranged on described driving device, and described driving device makes described second acoustics sealing member (21) have the trend near described mike groove (111)。
8. microphone diaphragms measurement jig according to claim 7, it is characterized in that, described cover assembly (2) includes upper cap body (25), described driving device includes fixing plate (241), guide pillar (242) and spring (243), described fixing plate (241) is fixing with described upper cap body (25) to be connected, described guide pillar (242) is fixed on fixing plate (241), described upper pressure slide block (23) is configured to slide along described guide pillar (242), described spring (243) is enclosed within the guide pillar (242) between described fixing plate (241) and upper pressure slide block (23)。
9. microphone diaphragms measurement jig according to claim 1, it is characterized in that, described circuit unit (3) also includes circuit board (32), described circuit lead (31) includes power supply lead wire and signal lead, described circuit board (32) is arranged in described base assembly (1) or described base assembly (1) bottom, and described power supply lead wire and signal lead extend to described mike groove (111) from described circuit board (32)。
10. microphone diaphragms measurement jig according to claim 1, it is characterised in that also including magnetic bases (4), described magnetic bases (4) are arranged on the bottom of described base assembly (1)。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610195947.1A CN105704635B (en) | 2016-03-31 | 2016-03-31 | Microphone diaphragms test fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610195947.1A CN105704635B (en) | 2016-03-31 | 2016-03-31 | Microphone diaphragms test fixture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105704635A true CN105704635A (en) | 2016-06-22 |
| CN105704635B CN105704635B (en) | 2019-11-15 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610195947.1A Expired - Fee Related CN105704635B (en) | 2016-03-31 | 2016-03-31 | Microphone diaphragms test fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105704635B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106454663A (en) * | 2016-11-30 | 2017-02-22 | 歌尔股份有限公司 | Loudspeaker module |
| CN109672969A (en) * | 2017-10-16 | 2019-04-23 | 四方自动化机械股份有限公司 | Microphone test device |
| CN109714694A (en) * | 2018-12-27 | 2019-05-03 | 瑞声光电科技(常州)有限公司 | Acoustic performance testing device |
| CN112185349A (en) * | 2020-09-22 | 2021-01-05 | 歌尔科技有限公司 | Intelligence voice equipment awakens testing arrangement up |
| CN112326018A (en) * | 2020-10-26 | 2021-02-05 | 无锡韦尔半导体有限公司 | Vibration sensor testing method and vibration sensor |
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| CN205622879U (en) * | 2016-03-31 | 2016-10-05 | 歌尔股份有限公司 | Mike wind vibration moves test fixture |
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| CN2428764Y (en) * | 2000-07-03 | 2001-05-02 | 南京化工学校 | Mechanical sealing test apparatus with controllable spring specific-pressure and measurable vibration |
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| CN112326018A (en) * | 2020-10-26 | 2021-02-05 | 无锡韦尔半导体有限公司 | Vibration sensor testing method and vibration sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105704635B (en) | 2019-11-15 |
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Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Applicant after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Applicant before: Goertek Inc. |
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Effective date of registration: 20200731 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191115 |