CN105703041A - Artificial surface plasmon-based miniaturized low-pass filter - Google Patents
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Abstract
本发明公开一种基于人工表面等离激元的小型化低通滤波器,其特征在于主要由共面波导构成,共面波导的两个接地带上分别设置有沿共面波导长度方向周期性分布的槽单元阵列,两个槽单元阵列之间关于中心导体带上下对称,槽单元深度在共面波导长度方向由两侧向中部均匀递增,中部的槽单元深度不变。本发明是在共面波导的基础上,利用共面波导在接地带上刻蚀周期性槽单元构造人工表面等离子结构以实现滤波功能。引入T型槽,增加槽在宽度方向的等效深度,实现了器件小型化。该发明具有结构简单、尺寸紧凑、滤波性能好,易加工,尤其适合与传统微波传输线与器件匹配使用等一系列优点。
The invention discloses a miniaturized low-pass filter based on artificial surface plasmons, which is characterized in that it is mainly composed of a coplanar waveguide, and two grounding strips of the coplanar waveguide are respectively provided with periodic Distributed slot unit arrays, the two slot unit arrays are symmetrical up and down with respect to the central conductor strip, the depth of the slot units increases uniformly from both sides to the middle in the length direction of the coplanar waveguide, and the depth of the slot units in the middle remains unchanged. Based on the coplanar waveguide, the present invention uses the coplanar waveguide to etch periodic groove units on the grounding strip to construct an artificial surface plasma structure to realize the filter function. The T-shaped groove is introduced to increase the equivalent depth of the groove in the width direction, thereby realizing the miniaturization of the device. The invention has a series of advantages such as simple structure, compact size, good filtering performance, easy processing, and especially suitable for matching with traditional microwave transmission lines and devices.
Description
技术领域technical field
本发明涉及一种滤波器,尤其涉及一种基于人工表面等离激元的小型化低通滤波器。The invention relates to a filter, in particular to a miniaturized low-pass filter based on artificial surface plasmons.
背景技术Background technique
表面等离激元(SurfacePlasmonPolaritons,简称SPPs),是一种光频率内在金属与介质(通常是空气)界面上传输的的一种特殊的电磁波。SPPs是一种表面波,具有两种鲜明的特征:其一,沿着垂直于交界面是一种消逝波,波的强度呈指数减小,因此波被束缚在交界面附近;其次,SPPs的传输波长更短,因此它可以突破衍射极限。对于SPPs的研究曾一度被局限于光波段或是更高的频率上。金属的等离子频率一般都处于紫外波段,金属在低频段的介电常数很大,使得电磁波的趋肤深度很小,所以,在低频段,金属近似于理想导体(PerfectElectricConductor,简称PEC)。从而使得SPPs在金属表面的场约束很差,无法在金属表面上实现有效传播,大大限制了SPPs在低频段的应用。由于SPPs的优良特性,若将表面等离子激元的概念推广到低频段(微波或太赫兹波段),有助于获得高约束性的微波或太赫兹信号的导波技术,并将低频段的器件尺寸减小到亚波长量级以实现高度集成。为了实现在低频段对波的高效约束,一种在金属上刻蚀槽或者挖孔的方法被提出,由于它继承了SPPs的相关性质,被称为人工表面等离激元(SpoofSurfacePlasmonPolaritons,简称SSPPs)。其基本思想是在金属表面挖周期分布的孔洞,孔洞的尺寸和间隔都远小于波长,以增强电磁波的渗透作用,从而通过等效媒质的手段降低了金属表层的等离子频率。这种方法可以通过结构的几何尺寸控制波的传输,在微波太赫兹设计中有很大的潜力。2005年,Hibbins等人在微波段证实了SSPPs现象,随后,Williams等人也在太赫兹波段验证了SSPPs的存在,为低频SPPs的发展和应用揭开了新的一页。自此SSPPs引起了研究者的极大兴趣。Surface Plasmon Polaritons (SPPs for short) are special electromagnetic waves transmitted at the interface between metal and medium (usually air) at a light frequency. SPPs are a kind of surface wave with two distinctive features: first, along the perpendicular to the interface, it is an evanescent wave, and the intensity of the wave decreases exponentially, so the wave is bound near the interface; second, the SPPs The transmission wavelength is shorter, so it can break the diffraction limit. The research on SPPs was once limited to the optical band or higher frequencies. The plasma frequency of metals is generally in the ultraviolet band, and the dielectric constant of metals in the low frequency band is very large, making the skin depth of electromagnetic waves very small. Therefore, in the low frequency band, metals are close to ideal conductors (Perfect Electric Conductor, PEC for short). As a result, the field confinement of SPPs on the metal surface is poor, and effective propagation on the metal surface cannot be achieved, which greatly limits the application of SPPs in the low frequency band. Due to the excellent characteristics of SPPs, if the concept of surface plasmons is extended to the low frequency band (microwave or terahertz band), it will help to obtain highly constrained microwave or terahertz signal waveguide technology, and the device of low frequency band Dimensions are reduced to sub-wavelength levels for high integration. In order to realize the efficient confinement of waves in the low frequency band, a method of etching grooves or digging holes in metals is proposed, because it inherits the related properties of SPPs, it is called artificial surface plasmon polaritons (SpoofSurfacePlasmonPolaritons, referred to as SSPPs) ). The basic idea is to dig periodically distributed holes on the metal surface. The size and interval of the holes are much smaller than the wavelength to enhance the penetration of electromagnetic waves, thereby reducing the plasma frequency of the metal surface by means of an equivalent medium. This approach, which can control the wave transmission through the geometry of the structure, has great potential in microwave terahertz design. In 2005, Hibbins et al. confirmed the phenomenon of SSPPs in the microwave band. Subsequently, Williams et al. also verified the existence of SSPPs in the terahertz band, which opened a new page for the development and application of low-frequency SPPs. Since then, SSPPs have aroused great interest of researchers.
近来,一些对于SpoofSPPs的传输的研究有许多成果见于各大期刊。在这些研究中,大部分都是无源的结构或是器件,这些器件不可能单独完成工作,因为这对馈电效率以及信号的传输有一定的困难。通常,这些设计需要和微波太赫兹电路或者器件相结合。因此,导行波和spp波的转换传输效率显得尤为重要。致力于传输转化的效率,对于棱镜,光栅,多米诺阵列等的研究陆续获得了一些成果。但是波矢的不匹配导致了传输转换效率不能达到理想要求。鉴于此,一种渐变式的结构被提出以解决波矢与阻抗不相匹配的问题。其次,微波器件的小型化是一个不可绕过的课题,在微波电路系统设计中扮演着重要作用。英国学者提出一种通过正方形弯曲回旋金属条带的结构实现金属枝节等效长度的增加,后上海大学周永金将小型化做了进一步应用。Recently, some studies on the transmission of SpoofSPPs have been published in major journals. In these studies, most of them are passive structures or devices, and these devices cannot complete the work alone, because it has certain difficulties in feeding efficiency and signal transmission. Usually, these designs need to be combined with microwave terahertz circuits or devices. Therefore, the conversion and transmission efficiency of guided wave and spp wave is particularly important. Committed to the efficiency of transmission and conversion, the research on prisms, gratings, domino arrays, etc. has successively obtained some results. However, the mismatch of the wave vector leads to the failure of the transmission conversion efficiency to meet the ideal requirements. In view of this, a tapered structure is proposed to solve the problem of mismatch between wave vector and impedance. Secondly, the miniaturization of microwave devices is an unavoidable topic and plays an important role in the design of microwave circuit systems. British scholars proposed a structure of square curved convoluted metal strips to increase the equivalent length of metal branches. Later, Zhou Yongjin of Shanghai University further applied miniaturization.
共面波导作为一种性能优越、加工方便的微波平面传输线,在单片微波集成电路中正发挥越来越大的作用,尤其到了毫米波频段,共面波导更拥有微带线所不可比拟的性能优势。与常规的微带传输线相比,共面波导具有容易制作,容易实现无源、有源器件在微波电路中的串联和并联(不需要在基片上穿孔),容易提高电路密度等优点。As a microwave planar transmission line with superior performance and convenient processing, coplanar waveguide is playing an increasingly important role in monolithic microwave integrated circuits. Especially in the millimeter wave frequency band, coplanar waveguide has incomparable performance compared to microstrip lines. Advantage. Compared with conventional microstrip transmission lines, coplanar waveguides have the advantages of easy fabrication, easy realization of serial and parallel connections of passive and active devices in microwave circuits (no need to perforate the substrate), and easy increase of circuit density.
发明内容Contents of the invention
本发明的目的在于将支持SSPPs的人工表面等离子波导与支持空间波的共面波导结合,设计出一种基于人工表面等离激元的小型化低通滤波器。The purpose of the present invention is to combine the artificial surface plasmon waveguide supporting SSPPs with the coplanar waveguide supporting space wave, and design a miniaturized low-pass filter based on artificial surface plasmon polaritons.
本发明的技术方案是这样实现的:Technical scheme of the present invention is realized like this:
一种基于人工表面等离激元的小型化低通滤波器,其特征在于主要由共面波导构成,共面波导的两个接地带上分别设置有沿共面波导长度方向周期性分布的槽单元阵列,两个槽单元阵列之间关于中心导体带上下对称,槽单元深度在共面波导长度方向由两侧向中部均匀递增,中部的槽单元深度不变。A miniaturized low-pass filter based on artificial surface plasmons, which is characterized in that it is mainly composed of a coplanar waveguide, and the two grounding strips of the coplanar waveguide are respectively provided with grooves periodically distributed along the length direction of the coplanar waveguide In the unit array, the two slot unit arrays are symmetrical up and down with respect to the central conductor strip. The depth of the slot unit increases uniformly from both sides to the middle in the length direction of the coplanar waveguide, and the depth of the slot unit in the middle remains unchanged.
本发明是在共面波导的基础上,利用共面波导在接地带上刻蚀周期性槽单元构造人工表面等离子结构以实现滤波功能。Based on the coplanar waveguide, the invention uses the coplanar waveguide to etch periodic groove units on the grounding strip to construct an artificial surface plasma structure to realize the filtering function.
进一步地,本发明还设计了T形结构的槽单元,用来增加槽单元在共面波导宽度方向的等效深度,从而进一步实现器件的小型化。Furthermore, the present invention also designs a T-shaped groove unit, which is used to increase the equivalent depth of the groove unit in the width direction of the coplanar waveguide, thereby further realizing the miniaturization of the device.
对于在有周期性亚波长矩形凹槽阵列的共面波导上传播的SSPPs,不同的槽深度有着不同的色散曲线,不同的深度槽的波矢不同,通过槽深的渐变可以实现波矢与阻抗的匹配;再者,由于SSPPs的等离子体频率受表面几何结构控制,所以人工表面等离子波导有可调谐色散特性;本发明可以通过槽单元阵列的中部深度不变部分的若干单元控制最终的截止频率,实现了可控滤波的功能。T形槽的设计增加了槽单元在共面波导宽度方向的等效深度,实现了滤波器几何尺寸的更小型化。For SSPPs propagating on coplanar waveguides with periodic sub-wavelength rectangular groove arrays, different groove depths have different dispersion curves, and the wave vectors of grooves with different depths are different. The wave vector and impedance can be realized through the gradual change of groove depth Furthermore, since the plasma frequency of SSPPs is controlled by the surface geometry, the artificial surface plasmon waveguide has tunable dispersion characteristics; the present invention can control the final cut-off frequency by several units in the constant depth part of the slot unit array , realizing the function of controllable filtering. The design of the T-shaped slot increases the equivalent depth of the slot unit in the width direction of the coplanar waveguide, and realizes a smaller size of the filter geometry.
本发明适合与传统微波传输线匹配使用,为滤波器件设计及应用提供一种全新的思路和方案。The invention is suitable for matching with traditional microwave transmission lines, and provides a brand-new idea and solution for the design and application of filter devices.
本发明具有如下有益效果:The present invention has following beneficial effect:
1.本发明主要提出一种基于人工表面等离激元的小型化低通滤波器,一方面利用共面波导的优越传输性能,另一方面利用人工表面等离子波导的可调谐色散特性,实现了信号传输的低通滤波效果。这种结构可以和微波器件或是电路匹配连接,进而在微波器件和集成电路结构的设计中具有更大的灵活性,1. The present invention mainly proposes a miniaturized low-pass filter based on artificial surface plasmons. On the one hand, it utilizes the superior transmission performance of the coplanar waveguide, and on the other hand, utilizes the tunable dispersion characteristics of the artificial surface plasmon waveguide to realize Low-pass filtering effect for signal transmission. This structure can be matched with microwave devices or circuits, and thus has greater flexibility in the design of microwave devices and integrated circuit structures.
2.结构简单:结构源于共面波导,波矢与阻抗匹配段以及SSPPs传输由共面波导在地上刻蚀周期性槽阵列构成,构造简单紧凑,方便加工。2. Simple structure: The structure is derived from the coplanar waveguide. The wave vector and impedance matching section and the transmission of SSPPs are formed by etching periodic slot arrays on the ground with the coplanar waveguide. The structure is simple and compact, and it is easy to process.
3.创新性强,技术前瞻性好:本发明在微波频段利用人工表面等离子波导和共面波导的结合,实现了低通滤波特性,创新性强;其可很好的与传统微波传输线配合使用,便于集成到微波电路中,拓展了人工表面等离子器件的应用范围,具有很好的技术前瞻性。3. Strong innovation and good technical foresight: the present invention uses the combination of artificial surface plasmon waveguide and coplanar waveguide in the microwave frequency band to realize low-pass filtering characteristics and strong innovation; it can be well used in conjunction with traditional microwave transmission lines , easy to integrate into microwave circuits, expand the application range of artificial surface plasmon devices, and have good technical foresight.
4.滤波性能强:滤波性能源于人工表面等离子的传输特性,带外抑制显著,带内传输性能良好。4. Strong filtering performance: The filtering performance is derived from the transmission characteristics of artificial surface plasmons, with significant out-of-band suppression and good in-band transmission performance.
5.实现了器件的小型化设计:通过引入T形结构槽,增加槽的等效深度,实现在垂直于传输方向上的长度的小型化。5. The miniaturization design of the device is realized: the equivalent depth of the slot is increased by introducing a T-shaped structural slot, and the miniaturization of the length perpendicular to the transmission direction is realized.
附图说明:Description of drawings:
图1是实施例一的色散单元结构三维示意图;Fig. 1 is a three-dimensional schematic diagram of the dispersion unit structure of Embodiment 1;
图2是图1所示色散单元结构不同槽深的色散曲线图;Fig. 2 is a dispersion curve diagram of different groove depths of the dispersion unit structure shown in Fig. 1;
图3是实施例一的整体结构三维示意图;Fig. 3 is a three-dimensional schematic diagram of the overall structure of Embodiment 1;
图4是实施例一的槽阵列细节结构图;Fig. 4 is a detailed structure diagram of the slot array of Embodiment 1;
图5是实施例一对应的S参数;Fig. 5 is the S parameter corresponding to embodiment one;
图6是实施例二的整体结构三维示意图;6 is a three-dimensional schematic diagram of the overall structure of Embodiment 2;
图7是实施例二的槽阵列细节结构图;Fig. 7 is a detailed structure diagram of the groove array of the second embodiment;
图8是实施例二对应的S参数。Fig. 8 is the S parameter corresponding to the second embodiment.
具体实施方式:detailed description:
下面结合附图对技术方案的实施作进一步的详细描述:Below in conjunction with accompanying drawing, the implementation of technical scheme is described in further detail:
实施例一Embodiment one
如图3所示,本发明结构以共面波导为基础,其两个金属接地带上刻蚀有沿共面波导长度方向(x方向)周期性分布的矩形结构槽单元阵列,槽单元阵列关于共面波导宽度方向(y方向)左右对称,两个槽单元阵列之间关于中心导体带上下对称。槽单元深度(即y方向的高度)在x方向由两侧向中部均匀递增构成模式匹配段,中部的槽单元深度不变构成SSPPs传输段,两侧深度渐变的槽单元数量以及中部深度不变的槽单元数量根据导波信号传输要求设定。As shown in Figure 3, the structure of the present invention is based on the coplanar waveguide, and its two metal grounding strips are etched with a rectangular structure slot unit array periodically distributed along the coplanar waveguide length direction (x direction), and the slot unit array is about The width direction of the coplanar waveguide (y direction) is left-right symmetrical, and the two groove unit arrays are vertically symmetrical with respect to the central conductor strip. The depth of the slot unit (that is, the height in the y direction) increases uniformly from both sides to the middle in the x direction to form a pattern matching section, and the depth of the slot unit in the middle remains unchanged to form the SSPPs transmission section, and the number of slot units with gradually changing depths on both sides and the depth in the middle remain unchanged The number of slot units is set according to the transmission requirements of the guided wave signal.
滤波器的介质基板为罗杰斯6010(介电常数为10.2),图1为实施例一中包含矩形槽单元的周期色散单元结构,长度(即槽单元分布周期)为p=4mm,宽度为W=20mm,介质基板厚度a=1.0mm,金属层厚度t=0.018mm,矩形槽的宽度b=0.5mm,深度变量为h。利用电磁仿真软件对图1的周期色散单元结构进行仿真,可得到变量h从1.0mm到5.0mm均匀增加下的色散结果如图2所示。由曲线的分布可知渐近频率和槽的深度相关联,且随着槽深的增加渐近频率降低。The dielectric substrate of filter is Rogers 6010 (dielectric constant is 10.2), and Fig. 1 is the periodic dispersion unit structure that comprises rectangular groove unit among the embodiment one, and length (being groove unit distribution period) is p=4mm, and width is W= 20mm, the thickness of the dielectric substrate a=1.0mm, the thickness of the metal layer t=0.018mm, the width of the rectangular groove b=0.5mm, and the depth variable is h. Using electromagnetic simulation software to simulate the periodic dispersion unit structure in Figure 1, the dispersion results can be obtained when the variable h increases uniformly from 1.0mm to 5.0mm, as shown in Figure 2. It can be seen from the distribution of the curve that the asymptotic frequency is related to the depth of the groove, and the asymptotic frequency decreases with the increase of the groove depth.
低通滤波器的整体结构示意如图3所示,结构的长度为L=100mm,宽度为W=20mm,介质基板厚度a=1.0mm,金属层厚度t=0.018mm。The overall structure of the low-pass filter is shown in Figure 3. The length of the structure is L=100mm, the width is W=20mm, the thickness of the dielectric substrate is a=1.0mm, and the thickness of the metal layer is t=0.018mm.
如图4所示,共面波导信号线宽度w1=3mm,信号线与地之间间隔g=0.8mm,用以构建端口50ohm的阻抗。本实施例矩形槽单元的宽度为b=0.5mm,沿着x方向按周期p=4mm分布。槽深从两端向中部深度从h1=0.8mm到h6=4.8mm均匀增加,中间7个槽单元的深度为4.8mm。As shown in Fig. 4, the coplanar waveguide signal line width w1=3mm, and the distance between the signal line and the ground g=0.8mm is used to construct the port impedance of 50ohm. In this embodiment, the width of the rectangular slot units is b=0.5 mm, and they are distributed along the x direction at a period of p=4 mm. The groove depth increases uniformly from both ends to the middle from h1=0.8mm to h6=4.8mm, and the depth of the middle 7 groove units is 4.8mm.
根据实施例一,利用电磁仿真软件可得到如图5所示的S参数结果。在0到5.5GHz左右电磁波可以高效传输,在5.5GHz处形成有效的截止,带外S21在-40dB以下,带内S11基本在-10dB以下。According to Embodiment 1, the S-parameter results shown in FIG. 5 can be obtained by using electromagnetic simulation software. Electromagnetic waves can be efficiently transmitted around 0 to 5.5GHz, and an effective cutoff is formed at 5.5GHz. The out-of-band S21 is below -40dB, and the in-band S11 is basically below -10dB.
实施例二Embodiment two
如图6所示,与实施例一基本结构一致,区别在于本实施例的槽单元采用T型结构,整体结构的长度为L=100mm,宽度为W=20mm,介质基板厚度a=1.0mm,金属层厚度t=0.018mm。As shown in Figure 6, it is consistent with the basic structure of Embodiment 1, the difference is that the groove unit of this embodiment adopts a T-shaped structure, the length of the overall structure is L=100mm, the width is W=20mm, and the thickness of the dielectric substrate a=1.0mm, Metal layer thickness t=0.018mm.
如图7所示,共面波导信号线宽度w1=3mm,信号线与地之间间隔g=0.8mm,用以构建端口50ohm的阻抗。本实施例T形槽单元的横向枝节和竖向枝节宽度相等为b=0.5mm,横向枝节和竖向枝节宽度也可以不相等,根据导波信号传输要求设置,沿着x方向按周期p=4mm分布。T形槽单元在x方向的枝节长度不变恒为q=2.5mm,深度从h1=0.5mm到h6=3.0mm均匀增加,中间7个槽单元的深度为3.0mm。As shown in FIG. 7 , the coplanar waveguide signal line width w1 = 3 mm, and the distance between the signal line and the ground g = 0.8 mm is used to construct an impedance of 50 ohm at the port. In this embodiment, the width of the transverse branch and the vertical branch of the T-shaped slot unit is equal to b=0.5mm, and the width of the transverse branch and the vertical branch can also be unequal. It is set according to the transmission requirements of the guided wave signal, and the period along the x direction is p= 4mm distribution. The length of the branches of the T-shaped groove unit in the x direction remains constant at q=2.5mm, the depth increases uniformly from h1=0.5mm to h6=3.0mm, and the depth of the middle 7 groove units is 3.0mm.
根据实施例二,利用电磁仿真软件可得到如图8所示的S参数结果。在0到5.5GHz左右电磁波可以高效传输,在5.5GHz处形成有效的截止,带外S21在-35dB以下,带内S11在-15dB以下。According to the second embodiment, the S-parameter results shown in FIG. 8 can be obtained by using electromagnetic simulation software. Electromagnetic waves can be efficiently transmitted around 0 to 5.5GHz, and an effective cutoff is formed at 5.5GHz. The out-of-band S21 is below -35dB, and the in-band S11 is below -15dB.
上述实施例中,槽单元阵列是左右对称的,在实际应用中,也可以设置为不对称的情况。上述实施例中,滤波器的任意一端均可作为导波信号的输入端,另一端相应地作为输出端。In the above embodiments, the slot unit array is left-right symmetric, but in practical applications, it can also be set to be asymmetrical. In the above embodiments, any one end of the filter can be used as an input end of the guided wave signal, and the other end can be correspondingly used as an output end.
本发明所设计的T形槽结构的滤波器,达到结果中的5.5GH截止需要T形槽的y方向枝节长度为3mm,通带内的传输满足高效率的要求。而由图2的色散曲线可知要达到同样的截止频率(约为色散曲线的渐近频率)将T形槽换为矩形其槽的深度要达到约4.8mm。其原因在于T形槽的横向结构相当于增加了槽在y方向的等效深度,而SSPP结构的色散曲线渐近频率受槽的深度控制,槽越深渐近频率越小。故此实现了y方向的小型化。For the T-slot structure filter designed in the present invention, to achieve the 5.5GH cut-off in the result, the y-direction branch length of the T-slot needs to be 3 mm, and the transmission in the passband meets the requirement of high efficiency. From the dispersion curve in Figure 2, it can be seen that to achieve the same cutoff frequency (about the asymptotic frequency of the dispersion curve), the depth of the T-shaped groove must be about 4.8 mm if it is replaced by a rectangle. The reason is that the transverse structure of the T-shaped groove is equivalent to increasing the equivalent depth of the groove in the y direction, and the asymptotic frequency of the dispersion curve of the SSPP structure is controlled by the depth of the groove, and the deeper the groove, the smaller the asymptotic frequency. Therefore, miniaturization in the y direction is realized.
当介质板材料变化时,如若介电常数变小,则介质板对电磁能量的约束性能减弱,导致滤波器的截止频率增大。这种情况采用T形槽结构,同样可以达到降低频率和器件小型化的目的。When the material of the dielectric plate changes, if the dielectric constant becomes smaller, the confinement performance of the dielectric plate to electromagnetic energy is weakened, resulting in an increase in the cut-off frequency of the filter. In this case, the T-shaped groove structure is adopted, which can also achieve the purpose of reducing the frequency and miniaturizing the device.
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