CN105702851A - 2-2 type piezoelectric composite material and preparation method thereof - Google Patents

2-2 type piezoelectric composite material and preparation method thereof Download PDF

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Publication number
CN105702851A
CN105702851A CN201410714519.6A CN201410714519A CN105702851A CN 105702851 A CN105702851 A CN 105702851A CN 201410714519 A CN201410714519 A CN 201410714519A CN 105702851 A CN105702851 A CN 105702851A
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composite material
piezo
electricity
polymer
electricity composite
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CN105702851B (en
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李永川
薛术
钱明
郑海荣
郭瑞彪
陈然然
苏敏
刘广
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Shenzhen Institute of Advanced Technology of CAS
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Shenzhen Institute of Advanced Technology of CAS
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Abstract

The invention provides a 2-2 type piezoelectric composite material and a preparation method thereof. According to the 2-2 type piezoelectric composite material and the preparation method thereof, a centrifugal machine is adopted so that a polymer is poured on one side of a piezoelectric ceramic piece/monocrystal ferroelectric piece evenly, and the thickness of the polymer can be controlled by means of the centrifugal machine; then redundant polymer and piezoelectric ceramic/monocrystal ferroelectric on piezoelectric composite material array elements are removed through grinding, so that the piezoelectric ceramic piece/monocrystal ferroelectric piece and the polymer reach respective preset thickness; and the plurality of piezoelectric composite material array elements are stacked and adhered, and then the thickness of the polymer at the joint surfaces is controlled, thereby forming the piezoelectric composite material. In the process, the thickness of the piezoelectric ceramic piece/monocrystal ferroelectric piece and the polymer is strictly controlled, thereby ensuring that the minimal total width of the piezoelectric ceramic piece/monocrystal ferroelectric piece and the polymer is 50 mu m sufficiently, satisfying high-frequency requirement of a 2-2 type high-frequency piezoelectric composite energy converter, having small machining allowance, and improving material utilization rate.

Description

2-2 type piezo-electricity composite material and preparation method thereof
Technical field
The present invention relates to piezoelectric to prepare, particularly relate to 2-2 type piezo-electricity composite material of a kind of composite transducer high-frequency parameter requirement and preparation method thereof。
Background technology
Piezo-electricity composite material be by piezoelectric and polymer by certain together with mode, certain volume (or weight) ratio is composited。Piezo-electricity composite material has much excellent performance, for instance acoustic impedance is low, and pliability is good, and the transducer burst length is short, has higher mechanical shock resistance etc.。The piezoelectric phase of 2-2 type piezo-electricity composite material and polymer phase all certainly connect in two dimensional surface, have the composite construction that stratiform is overlapping。Its performance depends on the volume ratio of piezoelectric ceramics and polymer, it is possible to finds an optimum volume ratio, makes mechanical coupling coefficient the highest, and lateral vibration coupling is the most weak, and its most significant advantage is able to make the transducer of hyperfrequency, improves the resolution of image。Therefore it is widely used in fields such as imaging of medical, Non-Destructive Testings。
Center operating frequency is at the high frequency 2-2 type piezoelectric transducer of more than 20MHz, and the thickness requirement of polymer between piezoelectric ceramics post and ceramics pole is higher。Traditional is generally adopted cutting-completion method, due to scribing machine cutter thickness (> 10um) restriction, it is difficult to reach the high-frequency parameter requirement of transducer, and by the mach piezoelectric ceramics of scribing, exist and collapse limit phenomenon, have a strong impact on the performance of piezo-electricity composite material。
Summary of the invention
Based on this, it is necessary to the 2-2 type piezo-electricity composite material preparation method that, composite transducer high-frequency parameter simple for a kind of technique of offer requires。
A kind of 2-2 type piezo-electricity composite material preparation method, comprises the following steps:
Piezoelectric ceramic piece/single-crystal iron electricity sheet that one side is covered with polymer is placed in centrifuge, controls rotating speed and the centrifugation time of described centrifuge, make the one side that described polymer uniform is cast in described piezoelectric ceramic piece/single-crystal iron electricity sheet form piezo-electricity composite material array element;
Piezoelectric ceramics unnecessary in described piezo-electricity composite material array element/single-crystal iron electricity and polymer are ground off, makes described piezoelectric ceramic piece/single-crystal iron electricity sheet and described polymer respectively reach respective preset thickness;
Repeat the above steps obtains the piezo-electricity composite material array element of requirement, by stacking for multiple piezo-electricity composite material array elements, and coats polymer at faying face, makes the bonding formation piezo-electricity composite material of multiple piezo-electricity composite material array element。
Wherein in an embodiment, also include cutting multiple piezo-electricity composite material array elements bonded together along the direction of vertical faying face, form the piezo-electricity composite material of monolithic。
Wherein in an embodiment, described polymer uniform is cast in the polymer thickness in described piezoelectric ceramic piece/single-crystal iron electricity sheet one side less than 20 μm。
Wherein in an embodiment, also included before the described step that unnecessary piezoelectric ceramics and polymer in described piezo-electricity composite material array element are ground off:
Described piezo-electricity composite material array element is placed in the environment that cleaning is dry and dries。
Wherein in an embodiment, the piezo-electricity composite material array element also including just multiple heap poststack adopts fixture to fix to clamp, and makes unnecessary polymer overflow。
Wherein in an embodiment, also included before the described step that multiple piezo-electricity composite material array elements bonded together are cut along the direction of vertical faying face:
Multiple piezoelectricity bonded together meet material array element adopts fixture to fix to clamp to be placed in the environment that cleaning is dry and dry。
Wherein in an embodiment, described the step that multiple piezo-electricity composite material array elements bonded together are cut along the direction of vertical faying face is included:
Adopt diamond dicing saw to meet material array element along the direction multiple piezoelectricity bonded together of cutting of vertical faying face, form piezo-electricity composite material。
Wherein in an embodiment, adopt grinding machine to grind the two sides of described piezo-electricity composite material, make described piezo-electricity composite material reach the second preset thickness。
Wherein in an embodiment, the polymer thickness for bonding multiple piezo-electricity composite material array elements is 1 μm-2 μm。
Additionally, also provide for that a kind of processing technology is simple, the 2-2 type piezo-electricity composite material of composite transducer high-frequency parameter requirement。
A kind of 2-2 type piezo-electricity composite material, including piezoelectric ceramic piece/single-crystal iron electricity sheet and polymer;Described polymer adopts the one side that centrifuge cast is uniformly cast in described piezoelectric ceramic piece/single-crystal iron electricity sheet to form piezo-electricity composite material array element;Described piezo-electricity composite material array element is placed in grinding machine and grinds off unnecessary piezoelectric ceramics/single-crystal iron electricity and polymer;Described piezoelectric ceramic piece/single-crystal iron electricity sheet and described polymer is made to respectively reach respective preset thickness;The plurality of piezo-electricity composite material array element is stacking and coats polymer at faying face and carries out bonding formation piezo-electricity composite material。
Above-mentioned 2-2 type piezo-electricity composite material and preparation method thereof adopts centrifuge to make polymer uniform be cast in the one side of described piezoelectric ceramic piece/single-crystal iron electricity sheet, can be controlled the thickness of polymer by centrifuge。Again polymer unnecessary in piezo-electricity composite material array element and piezoelectric ceramics/single-crystal iron electric mill are gone, make piezoelectric ceramic piece/single-crystal iron electricity sheet and described polymer respectively reach respective preset thickness。By stacking for multiple piezo-electricity composite material array elements and bonding after, control faying face polymer thickness。Thus forming piezo-electricity composite material。In above process, strictly control the thickness of piezoelectric ceramic piece/single-crystal iron electricity sheet and polymer, it is thus possible to ensure that the minimum overall width of piezoelectric ceramic piece/single-crystal iron electricity sheet and polymer is done at 50 μm, meet the high frequency requirements of 2-2 type high frequency piezo composite transducer, and allowance is little, improve the utilization rate of material。
Accompanying drawing explanation
Fig. 1 is the flow chart of 2-2 type piezo-electricity composite material preparation method;
Fig. 2 is the structural representation of monolithic piezoelectric composite;
Fig. 3 is the structural representation of monolithic piezoelectric composite;
Fig. 4 is the process chart of 2-2 type piezo-electricity composite material in an embodiment;
Fig. 5 is the process chart of 2-2 type piezo-electricity composite material in another embodiment。
Detailed description of the invention
As it is shown in figure 1, be the flow chart of 2-2 type piezo-electricity composite material preparation method。
A kind of 2-2 type piezo-electricity composite material preparation method, comprises the following steps:
Step S110, piezoelectric ceramic piece/single-crystal iron electricity sheet that one side is covered with polymer is placed in centrifuge, control rotating speed and the centrifugation time of described centrifuge, make the one side that described polymer uniform is cast in described piezoelectric ceramic piece/single-crystal iron electricity sheet form piezo-electricity composite material array element。
Polymer is epoxy resin or the polymer being made up of epoxy resin, firming agent and/or alumina powder, argentum powder etc.。
Polymer uniform is cast in the polymer thickness in described piezoelectric ceramic piece/single-crystal iron electricity sheet one side less than 20 μm。
Concrete, clean piezoelectric ceramic piece/single-crystal iron electricity sheet is placed in centrifuge, a certain amount of polymer is poured on piezoelectric ceramic piece/single-crystal iron electricity sheet, by controlling rotating speed and centrifugation time, being cast in polymer uniform on piezoelectric ceramic piece/single-crystal iron electricity sheet of centrifuge。Owing to using centrifuge to carry out polymer cast, therefore, the thickness of polymer can control within 20 μm。Then dry in the air that cleaning dries, namely form one piece of piezo-electricity composite material array element。
Also included before the described step that unnecessary piezoelectric ceramics and polymer in described piezo-electricity composite material array element are ground off: described piezo-electricity composite material array element is placed in the environment that cleaning is dry and dries。
Step S120, grinds off piezoelectric ceramics unnecessary in described piezo-electricity composite material array element/single-crystal iron electricity and polymer, makes described piezoelectric ceramic piece/single-crystal iron electricity sheet and described polymer respectively reach respective preset thickness。
Due to the thickness that the polymer after original piezoelectric ceramic piece/single-crystal iron electricity sheet and cast is not practically necessary, therefore, before being for further processing, need to grind off unnecessary piezoelectric ceramic piece/single-crystal iron electricity sheet and polymer, the thickness making piezoelectric ceramic piece/single-crystal iron electricity sheet and polymer reaches preset thickness, it is to avoid occur underproof piezo-electricity composite material in subsequent technique。
Step S130, repeat the above steps obtains the piezo-electricity composite material array element of requirement, by stacking for multiple piezo-electricity composite material array elements, and coats polymer at faying face, makes the bonding formation piezo-electricity composite material of multiple piezo-electricity composite material array element。As in figure 2 it is shown, be the structural representation of monolithic piezoelectric composite。
Polymer thickness for bonding multiple piezo-electricity composite material array elements is 1 μm-2 μm。
After repeated execution of steps 110-120, multiple piezo-electricity composite material array element can be obtained, choose the piezo-electricity composite material array element needing quantity, by stacking for these piezo-electricity composite material array elements。Then polymer is coated at faying face, thus being bonded together by conjugate。Fix to clamp again through fixture, it is possible to extrude unnecessary polymer。It it is 1 μm-2 μm general with being used for bonding polymer thickness in face。This makes it possible to form a monoblock 2-2 type piezo-electricity composite material。Then dry in the air that cleaning dries, to use fixture stacking piezo-electricity composite material array element to be compressed in dry process, to ensure the smooth of piezo-electricity composite material array element and concordance always。
2-2 type piezo-electricity composite material preparation method also includes the piezo-electricity composite material array element of just multiple heap poststack and adopts fixture to fix to clamp, and makes unnecessary polymer overflow。
Also included before the described step that multiple piezo-electricity composite material array elements bonded together are cut along the direction of vertical faying face: multiple piezoelectricity bonded together are met material array element and adopts fixture to fix to clamp to be placed in the environment that cleaning is dry and dry。
Multiple piezo-electricity composite material array elements bonded together are cut by step S140 along the direction of vertical faying face, form the piezo-electricity composite material of monolithic。As it is shown on figure 3, be the structural representation of monolithic piezoelectric composite。
The step that multiple piezo-electricity composite material array elements bonded together are cut along the direction of vertical faying face is included: adopt diamond dicing saw to cut multiple piezoelectricity bonded together along the direction of vertical faying face and meet material array element, form monolithic piezoelectric composite。
Concrete, in cutting process, it is possible to select to cut into the monolithic piezoelectric composite of desired thickness。
Adopt grinding machine to grind the two sides of described piezo-electricity composite material, make described piezo-electricity composite material reach the second preset thickness。
Owing to having error in practical operation, thus the thickness of the monolithic piezoelectric composite after cutting might not comply fully with user's request, it is therefore desirable to the monolithic piezoelectric composite after cutting is polished, makes the piezo-electricity composite material of monolithic reach preset thickness。
Based on above-mentioned all embodiments, adopt 2-2 type piezo-electricity composite material preparation method can prepare the piezo-electricity composite material of the 2-2 type piezoelectric transducer for high frequency characteristics (more than center operating frequency 20MHz), it is also possible to preparation is for the piezo-electricity composite material of the 2-2 type piezoelectric transducer of low frequency characteristic (below center operating frequency 20MHz)。
Based on above-mentioned all embodiments, the technological process of 2-2 type piezo-electricity composite material preparation method is as follows:
Incorporated by reference to Fig. 4。
First it is choose clean piezoelectric ceramic piece/single-crystal iron electricity sheet to be placed in centrifuge, a certain amount of polymer is poured on the one side of piezoelectric ceramic piece/single-crystal iron electricity sheet。Then conversion and the centrifugation time of centrifuge are controlled。The one side that polymer uniform is cast in piezoelectric ceramic piece/single-crystal iron electricity sheet is made to form piezo-electricity composite material array element。Part unnecessary for the two sides of piezo-electricity composite material array element is ground off。Piezoelectric ceramic piece/single-crystal iron electricity sheet and polymer is made to respectively reach preset thickness。Obtain multiple after the piezo-electricity composite material array element grinding off excess stock。Choose and need the piezo-electricity composite material array element of quantity to carry out stacking。And coat polymer at faying face。Fix to clamp with fixture again, make unnecessary polymer overflow。Material is thus formed a monolithic piezoelectric composite。The piezo-electricity composite material being fixed on fixture is placed in the environment that cleaning is dry and dries。Finally, adopt diamond dicing saw along the direction cutting being perpendicular to faying face the piezo-electricity composite material after drying, form the piezo-electricity composite material of monolithic。Owing to there being error in practical operation, the monolithic piezoelectric thickness of composite material after cutting is likely to not meet user's request, accordingly, it would be desirable to the monolithic piezoelectric composite after cutting is polished process so that it is thickness reaches preset thickness。Thus form satisfactory monolithic piezoelectric composite。
In a preferred embodiment, 2-2 type piezo-electricity composite material preparation method can also is that following flow process:
Incorporated by reference to Fig. 5。
First it is choose clean piezoelectric ceramic piece/single-crystal iron electricity sheet to be placed in centrifuge, a certain amount of polymer is poured on the one side of piezoelectric ceramic piece/single-crystal iron electricity sheet。Then conversion and the centrifugation time of centrifuge are controlled。The one side that polymer uniform is cast in piezoelectric ceramic piece/single-crystal iron electricity sheet is made to form piezo-electricity composite material array element。Part unnecessary for the two sides of piezo-electricity composite material array element is ground off。Piezoelectric ceramic piece/single-crystal iron electricity sheet and polymer is made to respectively reach preset thickness。Obtaining multiple after the piezo-electricity composite material array element grinding off excess stock, the faying face two piezo-electricity composite material array elements is coated polymer and is carried out bonding, is formed and comprises the new overall of two piezo-electricity composite material array elements。Is polished in this new overall two sides, then stacking, and coat polymer at faying face。Fix to clamp with fixture again, make unnecessary polymer overflow。Material is thus formed a monolithic piezoelectric composite。The piezo-electricity composite material being fixed on fixture is placed in the environment that cleaning is dry and dries。Finally, adopt diamond dicing saw along the direction cutting being perpendicular to faying face the piezo-electricity composite material after drying, form the piezo-electricity composite material of monolithic。Owing to there being error in practical operation, the monolithic piezoelectric thickness of composite material after cutting is likely to not meet user's request, accordingly, it would be desirable to the monolithic piezoelectric composite after cutting is polished process so that it is thickness reaches preset thickness。Thus form satisfactory monolithic piezoelectric composite。
2-2 type piezo-electricity composite material preparation method adopts centrifuge to make polymer uniform be cast in the one side of piezoelectric ceramic piece/single-crystal iron electricity sheet, can be controlled the thickness of polymer by centrifuge。Again polymer unnecessary in piezo-electricity composite material array element and piezoelectric ceramics/single-crystal iron electric mill are gone, make piezoelectric ceramic piece/single-crystal iron electricity sheet and described polymer respectively reach preset thickness。By stacking for multiple piezo-electricity composite material array elements and bonding after, control faying face polymer thickness。Thus forming piezo-electricity composite material。In above process, strictly control the thickness of piezoelectric ceramic piece/single-crystal iron electricity sheet and polymer, it is thus possible to ensure that the minimum overall width of piezoelectric ceramic piece/single-crystal iron electricity sheet and polymer is done at 50 μm, meet the high frequency requirements of 2-2 type high frequency piezo composite transducer, and allowance is little, improve the utilization rate of material。
Based on above-mentioned all embodiments, a kind of 2-2 type piezo-electricity composite material, including piezoelectric ceramic piece/single-crystal iron electricity sheet and polymer;Described polymer adopts the one side that centrifuge cast is uniformly cast in described piezoelectric ceramic piece/single-crystal iron electricity sheet to form piezo-electricity composite material array element;Described piezo-electricity composite material array element is placed in grinding machine and grinds off unnecessary piezoelectric ceramics/single-crystal iron electricity and polymer;Described piezoelectric ceramic piece/single-crystal iron electricity sheet and described polymer is made to respectively reach preset thickness;The plurality of piezo-electricity composite material array element is stacking and coats polymer at faying face and carries out bonding formation piezo-electricity composite material。
Each technical characteristic of embodiment described above can combine arbitrarily, for making description succinct, the all possible combination of each technical characteristic in above-described embodiment is not all described, but, as long as the combination of these technical characteristics is absent from contradiction, all it is considered to be the scope that this specification is recorded。
Embodiment described above only have expressed the several embodiments of the present invention, and it describes comparatively concrete and detailed, but can not therefore be construed as limiting the scope of the patent。It should be pointed out that, for the person of ordinary skill of the art, without departing from the inventive concept of the premise, it is also possible to making some deformation and improvement, these broadly fall into protection scope of the present invention。Therefore, the protection domain of patent of the present invention should be as the criterion with claims。

Claims (10)

1. a 2-2 type piezo-electricity composite material preparation method, comprises the following steps:
Piezoelectric ceramic piece/single-crystal iron electricity sheet that one side is covered with polymer is placed in centrifuge, controls rotating speed and the centrifugation time of described centrifuge, make the one side that described polymer uniform is cast in described piezoelectric ceramic piece/single-crystal iron electricity sheet form piezo-electricity composite material array element;
Piezoelectric ceramics unnecessary in described piezo-electricity composite material array element/single-crystal iron electricity and polymer are ground off, makes described piezoelectric ceramic piece/single-crystal iron electricity sheet and described polymer respectively reach respective preset thickness;
Repeat the above steps obtains the piezo-electricity composite material array element of requirement, by stacking for multiple piezo-electricity composite material array elements, and coats polymer at faying face, makes the bonding formation piezo-electricity composite material of multiple piezo-electricity composite material array element。
2. 2-2 type piezo-electricity composite material preparation method according to claim 1, it is characterised in that also include cutting multiple piezo-electricity composite material array elements bonded together along the direction of vertical faying face, forms the piezo-electricity composite material of monolithic。
3. 2-2 type piezo-electricity composite material preparation method according to claim 1, it is characterised in that described polymer uniform is cast in the polymer thickness in described piezoelectric ceramic piece/single-crystal iron electricity sheet one side less than 20 μm。
4. 2-2 type piezo-electricity composite material preparation method according to claim 1, it is characterised in that also included before the described step that unnecessary piezoelectric ceramics and polymer in described piezo-electricity composite material array element are ground off:
Described piezo-electricity composite material array element is placed in the environment that cleaning is dry and dries。
5. 2-2 type piezo-electricity composite material preparation method according to claim 1, it is characterised in that the piezo-electricity composite material array element also including just multiple heap poststack adopts fixture to fix to clamp, and makes unnecessary polymer overflow。
6. 2-2 type piezo-electricity composite material preparation method according to claim 1, it is characterised in that also included before the described step that multiple piezo-electricity composite material array elements bonded together are cut along the direction of vertical faying face:
Multiple piezoelectricity bonded together meet material array element adopts fixture to fix to clamp to be placed in the environment that cleaning is dry and dry。
7. 2-2 type piezo-electricity composite material preparation method according to claim 1, it is characterised in that described the step that multiple piezo-electricity composite material array elements bonded together are cut along the direction of vertical faying face is included:
Adopt diamond dicing saw to meet material array element along the direction multiple piezoelectricity bonded together of cutting of vertical faying face, form piezo-electricity composite material。
8. the 2-2 type piezo-electricity composite material preparation method according to claim 1-7 any one, it is characterised in that adopt grinding machine to grind the two sides of described piezo-electricity composite material, make described piezo-electricity composite material reach the second preset thickness。
9. 2-2 type piezo-electricity composite material preparation method according to claim 1, it is characterised in that the polymer thickness for bonding multiple piezo-electricity composite material array elements is 1 μm-2 μm。
10. a 2-2 type piezo-electricity composite material, it is characterised in that include piezoelectric ceramic piece/single-crystal iron electricity sheet and polymer;Described polymer adopts the one side that centrifuge cast is uniformly cast in described piezoelectric ceramic piece/single-crystal iron electricity sheet to form piezo-electricity composite material array element;Described piezo-electricity composite material array element is placed in grinding machine and grinds off unnecessary piezoelectric ceramics/single-crystal iron electricity and polymer;Described piezoelectric ceramic piece/single-crystal iron electricity sheet and described polymer is made to respectively reach respective preset thickness;The plurality of piezo-electricity composite material array element is stacking and coats polymer at faying face and carries out bonding formation piezo-electricity composite material。
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CN102615025A (en) * 2012-04-19 2012-08-01 中国第一汽车股份有限公司 Method for preparing uniform film coating on small-size sample piece
CN103346253A (en) * 2013-06-08 2013-10-09 西安交通大学 Ferroelectric single crystal/epoxy 2-2 structure and 2-2 structure composite materials reinforced by stress plates
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61195000A (en) * 1985-02-23 1986-08-29 Toshiba Corp Manufacture of composite piezoelectric body
EP0351015A2 (en) * 1988-07-15 1990-01-17 Koninklijke Philips Electronics N.V. A method for fabricating a piezoelectric composite transducer
US6183578B1 (en) * 1998-04-21 2001-02-06 Penn State Research Foundation Method for manufacture of high frequency ultrasound transducers
CN101324528B (en) * 2008-07-16 2011-08-17 清华大学 Thin film with local field enhancement function and preparing method thereof
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