CN105702852B - 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites preparation method and preparation smelting tool - Google Patents

2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites preparation method and preparation smelting tool Download PDF

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CN105702852B
CN105702852B CN201410712388.8A CN201410712388A CN105702852B CN 105702852 B CN105702852 B CN 105702852B CN 201410712388 A CN201410712388 A CN 201410712388A CN 105702852 B CN105702852 B CN 105702852B
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piezoelectric ceramics
monocrystalline ferroelectric
monocrystalline
ferroelectric material
block
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CN105702852A (en
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李永川
郭瑞彪
钱明
薛术
郑海荣
陈然然
苏敏
刘广
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Shenzhen Institute of Advanced Technology of CAS
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Abstract

2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites preparation method and preparation smelting tool reach preset thickness by refining piezoelectric ceramics/monocrystalline ferroelectric material.Then it cuts to form the fixed groove of depth along piezoelectric ceramics/monocrystalline ferroelectric material length direction.It is finally stacked along groove towards by multiple piezoelectric ceramics/monocrystalline ferroelectric material sub-block, then the filled polymer in the groove of heap poststack.Therefore, when trench depth is fixed, the thickness of polymer is just capable of fixing as trench depth, influences piezoelectric ceramics/monocrystalline ferroelectric material overall width so as to avoid polymer thickness from being more than threshold value.And use first to cut in the above method and stack filling afterwards, so that piezoelectric ceramics/monocrystalline ferroelectric material overall width is fixed as preset piezoelectric ceramics/monocrystalline ferroelectric material thickness, comply with user's requirement.

Description

2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites preparation method and preparation smelting tool
Technical field
The present invention relates to 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites, more particularly to a kind of simple process.It is compound Energy converter high-frequency parameter requires 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites preparation method and preparation smelting tool.
Background technique
Piezo-electricity composite material is by certain by piezoelectric material and polymer together with mode, certain volume (or weight) ratio Example is combined.Piezo-electricity composite material has many excellent performances, such as acoustic impedance is low, and flexibility is good, the energy converter burst length It is short, mechanical shock resistance with higher etc..The piezoelectric phase and polymer phase of 2-2 type piezo-electricity composite material are in two-dimensional surface Composite construction that is interior to connect certainly, being overlapped with stratiform.Its performance depends on the volume ratio of piezoelectric ceramics and polymer, can find One optimum volume ratio makes mechanical coupling coefficient highest, and lateral vibration coupling is most weak, and its most significant advantage is can to make At the energy converter of hyperfrequency, the resolution ratio of image is improved.Therefore it is widely used in imaging of medical, the fields such as non-destructive testing.
Center operating frequency 20MHz or more high frequency 2-2 type PZT (piezoelectric transducer), between piezoelectric ceramics column and ceramics pole The thickness requirement of polymer is higher.Traditional general method refilled using fine cut, due to scribing rounding machine cutter thickness (> Limitation 10um) is difficult to reach the height of energy converter with the kerf width that ceramics/monocrystalline Ferroelectric Composites after this cutting are formed Frequency parameter request, and by the mach piezoelectric ceramics of scribing, there are chipping phenomenons, seriously affect the property of piezo-electricity composite material Energy.
Summary of the invention
Based on this, it is necessary to a kind of simple process.Composite transducer high-frequency parameter requires 2-2 type piezoelectric ceramics/single-crystal iron The preparation method of composite.
A kind of preparation method of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites, includes the following steps:
Piezoelectric ceramics/monocrystalline ferroelectric material is refined, its upper and lower surface is made to reach preset thickness (K+W) mm, wherein K is pressure The width of slit of electroceramics/between monocrystalline ferroelectric material array element and array element, W are piezoelectric ceramics/monocrystalline ferroelectric material array element width Degree;
It is cut along the piezoelectric ceramics/monocrystalline ferroelectric material length direction, makes the piezoelectric ceramics/monocrystalline ferroelectric material The groove that depth is K mm is formed in a thickness direction;
It is cut along the piezoelectric ceramics/monocrystalline ferroelectric material width direction, it is made to be divided into several piezoelectric ceramics/single-crystal irons Electric material sub-block;
Several piezoelectric ceramics/monocrystalline ferroelectric material sub-block is stacked, and piezoelectric ceramics/monocrystalline ferroelectric material sub-block groove Direction is consistent;
Polymer is added into piezoelectric ceramics/monocrystalline ferroelectric material sub-block groove of stacking and it is made to be formed by curing piezoelectricity Ceramics/monocrystalline Ferroelectric Composites.
It in one of the embodiments, further include that the piezoelectric ceramics/monocrystalline Ferroelectric Composites are polished and cut Except piezoelectric ceramics/monocrystalline ferroelectric material sub-block trough rim of all stackings.
The step along the cutting of the piezoelectric ceramics/monocrystalline ferroelectric material length direction in one of the embodiments, Suddenly include:
It is cut using diamond slice machine along the piezoelectric ceramics/monocrystalline ferroelectric material length direction.
The step along the cutting of the piezoelectric ceramics/monocrystalline ferroelectric material width direction in one of the embodiments, Suddenly include:
It is cut using diamond slice machine along the piezoelectric ceramics/monocrystalline ferroelectric material width direction.
In one of the embodiments, described the step of stacking several piezoelectric ceramics/monocrystalline ferroelectric material sub-block it Before further include:
Several piezoelectric ceramics/monocrystalline ferroelectric material sub-block is cleaned and dried using supersonic cleaning machine.
It is described in one of the embodiments, to stack several piezoelectric ceramics/monocrystalline ferroelectric material sub-block, and piezoelectricity is made pottery The step for the porcelain/groove direction of monocrystalline ferroelectric material sub-block is consistent includes:
By several piezoelectric ceramics/monocrystalline ferroelectric material sub-block groove towards stacking, and by the piezoelectric ceramics entirely stacked/mono- The trough rim of brilliant ferroelectric material sub-block is fixed to clamp using fixture.
The width of slit K of the piezoelectric ceramics/between monocrystalline ferroelectric material array element and array element in one of the embodiments, Less than 10 μm.
The piezoelectric ceramics/monocrystalline ferroelectric material array element width W is less than 0.1mm in one of the embodiments,.
In addition, also providing a kind of simple process.Composite transducer high-frequency parameter requires 2-2 type piezoelectric ceramics/monocrystalline ferroelectricity The preparation smelting of composite material has.
A kind of preparation smelting tool of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites, for by above-mentioned 2-2 type piezoelectric ceramics/ The piezoelectric ceramics stacked in the preparation method of monocrystalline Ferroelectric Composites/monocrystalline ferroelectric material sub-block clamps;It is characterized in that, packet It includes clamp body pedestal, clamp bottom plate and fishbolt;
The clamp body pedestal is used to place piezoelectric ceramics/monocrystalline ferroelectric material sub-block of heap poststack, the clamp body bottom Seat is groove body, and the clamping press plate is set to clamp body base top both ends, the clamping press plate and the clamp body pedestal It is spirally connected, the fishbolt is set on the clamping press plate, adjusts the fishbolt to clamp piezoelectric ceramics/monocrystalline of stacking Ferroelectric material sub-block.
The clamping press plate is fixedly connected by fastening screw with the clamp body pedestal in one of the embodiments,.
The preparation methods of above-mentioned 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites and preparation smelting tool by by piezoelectric ceramics/ Monocrystalline ferroelectric material is refined, and preset thickness is reached.Then it is cut along piezoelectric ceramics/monocrystalline ferroelectric material length direction It cuts to form the fixed groove of depth.It is finally stacked along groove towards by multiple piezoelectric ceramics/monocrystalline ferroelectric material sub-block, then in heap Filled polymer in the groove of poststack.Therefore, when trench depth is fixed, the thickness of polymer is just capable of fixing as trench depth, Piezoelectric ceramics/monocrystalline ferroelectric material overall width is influenced so as to avoid polymer thickness from being more than threshold value.And the above method It is middle to stack filling afterwards using first cutting so that piezoelectric ceramics/monocrystalline ferroelectric material overall width be fixed as preset piezoelectric ceramics/ Monocrystalline ferroelectric material thickness complies with user's requirement.
Detailed description of the invention
Fig. 1 is the flow chart of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites preparation method;
Fig. 2 is piezoelectric ceramics/monocrystalline ferroelectric material structural schematic diagram;
Fig. 3 is piezoelectric ceramics/monocrystalline ferroelectric material structural schematic diagram after fine grinding;
Fig. 4 is that cutting forms piezoelectric ceramics/monocrystalline ferroelectric material structural schematic diagram after groove;
Fig. 5 is piezoelectric ceramics/monocrystalline ferroelectric material sub-block structural schematic diagram;
Fig. 6 is piezoelectric ceramics/monocrystalline ferroelectric material sub-block structural schematic diagram of heap poststack;
Fig. 7 is the piezoelectric ceramics/monocrystalline ferroelectric material sub-block structural schematic diagram added after polymer;
Fig. 8 is piezoelectric ceramics/monocrystalline Ferroelectric Composites structural schematic diagram;
Fig. 9 is the structural schematic diagram that 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites prepare smelting tool;
Figure 10 is the decomposition diagram that 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites prepare smelting tool.
Specific embodiment
As shown in Figure 1, being the flow chart of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites preparation method.
A kind of preparation method of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites, includes the following steps:
Step S110 refines piezoelectric ceramics/monocrystalline ferroelectric material, its upper and lower surface is made to reach preset thickness (K+W) mm, In, K is the width of slit of piezoelectric ceramics/between monocrystalline ferroelectric material array element and array element, and W is piezoelectric ceramics/monocrystalline ferroelectric material The width of array element.
Before refining piezoelectric ceramics/monocrystalline ferroelectric material, need to be cleaned and dried in the air using supersonic cleaning machine It is dry.As shown in Fig. 2, being piezoelectric ceramics/monocrystalline ferroelectric material structural schematic diagram.Before the finish grinding, piezoelectric ceramics/monocrystalline ferroelectricity The thickness of material is more than preset thickness (K+W) mm.Therefore, it is necessary to refine to it.
Piezoelectric ceramics/monocrystalline ferroelectric material after being refined is as shown in Figure 3.It is with a thickness of preset thickness (K+W) mm. Wherein piezoelectric ceramics/monocrystalline ferroelectric material array element refers to single piezoelectric ceramics/monocrystalline ferroelectric material.And width of slit is two adjacent The distance between piezoelectric ceramics/monocrystalline ferroelectric material.
Step S120 is cut along the piezoelectric ceramics/monocrystalline ferroelectric material length direction, makes the piezoelectric ceramics/mono- Brilliant ferroelectric material forms the groove that depth is K mm in a thickness direction.
It is described along the piezoelectric ceramics/monocrystalline ferroelectric material length direction cutting the step of include:
It is cut using diamond slice machine along the piezoelectric ceramics/monocrystalline ferroelectric material length direction.
Using diamond slice machine in piezoelectric ceramics/monocrystalline ferroelectric material thickness direction grooving, groove depth is accurately controlled For K mm, this is the committed step for guaranteeing width of slit.
Piezoelectric ceramics/monocrystalline ferroelectric material that cutting forms groove is as shown in Figure 4.The groove depth that cutting forms groove is K mm。
Step S130 is cut along the piezoelectric ceramics/monocrystalline ferroelectric material width direction, it is made to be divided into several piezoelectricity potteries Porcelain/monocrystalline ferroelectric material sub-block.
It is described along the piezoelectric ceramics/monocrystalline ferroelectric material width direction cutting the step of include:
It is cut using diamond slice machine along the piezoelectric ceramics/monocrystalline ferroelectric material width direction.
Piezoelectric ceramics/monocrystalline ferroelectric material is cut into several sub-blocks in the width direction using diamond slice machine.Its In, several piezoelectric ceramics/monocrystalline ferroelectric material sub-block is uniform in size.As shown in Figure 5.
Further include before described the step of stacking several piezoelectric ceramics/monocrystalline ferroelectric material sub-block:
Several piezoelectric ceramics/monocrystalline ferroelectric material sub-block is cleaned and dried using supersonic cleaning machine.
After cutting twice, piezoelectric ceramics/monocrystalline ferroelectric material sub-block surface can adhere to piezoelectric ceramics/monocrystalline ferroelectricity material Feed powder end for the quality for guaranteeing subsequent technique needs that piezoelectric ceramics/monocrystalline ferroelectric material is cleaned and dried in the air using supersonic cleaning machine It is dry.
Step S140 stacks several piezoelectric ceramics/monocrystalline ferroelectric material sub-block, and piezoelectric ceramics/monocrystalline ferroelectric material The groove direction of sub-block is consistent.
Step 140 includes:
By several piezoelectric ceramics/monocrystalline ferroelectric material sub-block groove towards stacking, and by the piezoelectric ceramics entirely stacked/mono- The trough rim of brilliant ferroelectric material sub-block is fixed to clamp using fixture.
Specifically, several piezoelectric ceramics for cleaning up and drying/monocrystalline ferroelectric material sub-block is taken to stack, wherein piezoelectricity Ceramics/monocrystalline ferroelectric material sub-block left and right directions alignment, and groove is towards unanimously.Then in piezoelectric ceramics/monocrystalline ferroelectric material The both ends of the groove of sub-block apply pressure to the piezoelectric ceramics of entire heap poststack/monocrystalline ferroelectric material sub-block, make piezoelectric ceramics/mono- Brilliant ferroelectric material sub-block clamps.As shown in Figure 6.
Step S150 adds polymer into piezoelectric ceramics/monocrystalline ferroelectric material sub-block groove of stacking and keeps it solid Change forms piezoelectric ceramics/monocrystalline Ferroelectric Composites.
Piezoelectric ceramics/monocrystalline ferroelectric material sub-block after applied force is fixed, polymer is added into groove, that is, The joint-cutting addition polymer formed between piezoelectric ceramics/monocrystalline ferroelectric material sub-block.Then polymer solidification is waited.Form pressure Electroceramics/monocrystalline Ferroelectric Composites.As shown in Figure 7.
2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites preparation method further includes to the piezoelectric ceramics/monocrystalline ferroelectricity Composite material is polished and cuts off piezoelectric ceramics/monocrystalline ferroelectric material sub-block trough rim of all stackings.
In actual use, two trough rims of piezoelectric ceramics/monocrystalline ferroelectric material sub-block need to cut off, and therefore, piezoelectricity is made pottery It is piezoelectric ceramics/monocrystalline Ferroelectric Composites that user needs after porcelain/two trough rim of monocrystalline ferroelectric material sub-block excision.Such as Fig. 8 It is shown.
Further, it polishes piezoelectric ceramics/monocrystalline Ferroelectric Composites after excision trough rim.Remove extra gather Close object or piezoelectric ceramics/monocrystalline ferroelectric material.Size needed for making its thickness reach user.
The width of slit K of piezoelectric ceramics/between monocrystalline ferroelectric material array element and array element is less than 10 μm.
Piezoelectric ceramics/monocrystalline ferroelectric material array element width W is less than 0.1mm.
Based on above-mentioned all embodiments, the workflow of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites preparation method It is as follows:
First choice takes several piezoelectric ceramics/monocrystalline ferroelectric material supersonic cleaning machine to clean, after it is dried.Refine piezoelectricity pottery Porcelain/monocrystalline ferroelectric material upper and lower surface reaches preset thickness (K+W) mm.Piezoelectricity pottery can be accurately controlled by fine grinding Porcelain/monocrystalline ferroelectric material thickness.Then using diamond slice machine along piezoelectric ceramics/monocrystalline ferroelectric material length side To cutting, the groove that depth is K mm is formed on piezoelectric ceramics/monocrystalline ferroelectric material thickness direction.Reuse diamond cutting Piezoelectric ceramics/monocrystalline ferroelectric material is cut into uniform several sub-blocks by piece machine.Then by piezoelectric ceramics/monocrystalline ferroelectric material Block stacks, and all piezoelectric ceramics/monocrystalline ferroelectric material sub-block groove is towards unanimously.The piezoelectric ceramics that heap is folded/mono- Two trough rims of brilliant ferroelectric material sub-block apply pressure, fix piezoelectric ceramics/monocrystalline ferroelectric material sub-block of several stackings.Finally Polymer is added into the piezoelectric ceramics that heap is folded/monocrystalline ferroelectric material sub-block groove.After polymer solidification, that is, formed Piezoelectric ceramics/monocrystalline Ferroelectric Composites.In actually using, the two of piezoelectric ceramics/monocrystalline Ferroelectric Composites groove Trough rim needs to cut off.Meanwhile during adding polymer and cutting piezoelectric ceramics/monocrystalline ferroelectric material, it is extra to have part Polymer and piezoelectric ceramics/monocrystalline ferroelectric material occur, therefore, complete piezoelectric ceramics/monocrystalline Ferroelectric Composites system It after standby, needs to refine piezoelectric ceramics/monocrystalline Ferroelectric Composites, complies with the size of user's needs.
As shown in figure 9, preparing the structural schematic diagram of smelting tool for 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites.Such as figure Shown in 10, the decomposition diagram of smelting tool is prepared for kind of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites.
Incorporated by reference to Fig. 9 and Figure 10.
A kind of preparation smelting tool of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites, for by above-mentioned 2-2 type piezoelectric ceramics/ The piezoelectric ceramics stacked in the preparation method of monocrystalline Ferroelectric Composites/monocrystalline ferroelectric material sub-block clamps;Including clamp body bottom Seat 1 clamps bottom plate 3 and 9 and fishbolt 5 and 7.
The clamp body pedestal 1 is used to place piezoelectric ceramics/monocrystalline ferroelectric material sub-block 10 of heap poststack, the clamp body Pedestal 1 is groove body, and the clamping press plate 3 and 9 is respectively arranged on the 1 top both ends of clamp body pedestal, the clamping press plate 3 and 9 It is spirally connected with the clamp body pedestal 1, the fishbolt 5 and 7 is respectively arranged on the clamping press plate 3 and 9, adjusts the clamping Bolt 5 and 7 clamps piezoelectric ceramics/monocrystalline ferroelectric material sub-block 10 of stacking.
Clamping press plate 3 and 9 is fixedly connected by fastening screw 2,4,6,8 with the clamp body pedestal 1.
The preparation methods of above-mentioned 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites and preparation smelting tool by by piezoelectric ceramics/ Monocrystalline ferroelectric material is refined, and preset thickness is reached.Then it is cut along piezoelectric ceramics/monocrystalline ferroelectric material length direction It cuts to form the fixed groove of depth.It is finally stacked along groove towards by multiple piezoelectric ceramics/monocrystalline ferroelectric material sub-block, then in heap Filled polymer in the groove of poststack.Therefore, when trench depth is fixed, the thickness of polymer is just capable of fixing as trench depth, Piezoelectric ceramics/monocrystalline ferroelectric material overall width is influenced so as to avoid polymer thickness from being more than threshold value.And the above method It is middle to stack filling afterwards using first cutting so that piezoelectric ceramics/monocrystalline ferroelectric material overall width be fixed as preset piezoelectric ceramics/ Monocrystalline ferroelectric material thickness complies with user's requirement.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, all should be considered as described in this specification.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to protection of the invention Range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.

Claims (10)

1. a kind of preparation method of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites, includes the following steps:
Piezoelectric ceramics/monocrystalline ferroelectric material is refined, its upper and lower surface is made to reach preset thickness (K+W) mm, wherein K is piezoelectricity pottery The width of slit of porcelain/between monocrystalline ferroelectric material array element and array element, W are piezoelectric ceramics/monocrystalline ferroelectric material array element width;
It is cut along the piezoelectric ceramics/monocrystalline ferroelectric material length direction, makes the piezoelectric ceramics/monocrystalline ferroelectric material in thickness Degree side is upwardly formed the groove that depth is Kmm;
It is cut along the piezoelectric ceramics/monocrystalline ferroelectric material width direction, it is made to be divided into several piezoelectric ceramics/monocrystalline ferroelectricity material Material for making clothes block;
Several piezoelectric ceramics/monocrystalline ferroelectric material sub-block is stacked, and piezoelectric ceramics/monocrystalline ferroelectric material sub-block groove direction Unanimously;
Polymer is added into piezoelectric ceramics/monocrystalline ferroelectric material sub-block groove of stacking and it is made to be formed by curing piezoelectricity pottery Porcelain/monocrystalline Ferroelectric Composites.
2. the preparation method of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites according to claim 1, which is characterized in that It further include the piezoelectric ceramics/single-crystal iron for being polished the piezoelectric ceramics/monocrystalline Ferroelectric Composites and being cut off all stackings The trough rim of electric material sub-block.
3. the preparation method of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites according to claim 1, which is characterized in that It is described along the piezoelectric ceramics/monocrystalline ferroelectric material length direction cutting the step of include:
It is cut using diamond slice machine along the piezoelectric ceramics/monocrystalline ferroelectric material length direction.
4. the preparation method of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites according to claim 1, which is characterized in that It is described along the piezoelectric ceramics/monocrystalline ferroelectric material width direction cutting the step of include:
It is cut using diamond slice machine along the piezoelectric ceramics/monocrystalline ferroelectric material width direction.
5. the preparation method of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites according to claim 1, which is characterized in that Further include before described the step of stacking several piezoelectric ceramics/monocrystalline ferroelectric material sub-block:
Several piezoelectric ceramics/monocrystalline ferroelectric material sub-block is cleaned and dried using supersonic cleaning machine.
6. the preparation method of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites according to claim 1, which is characterized in that It is described to stack several piezoelectric ceramics/monocrystalline ferroelectric material sub-block, and piezoelectric ceramics/monocrystalline ferroelectric material sub-block groove direction Consistent step includes:
Several piezoelectric ceramics/monocrystalline ferroelectric material sub-block groove direction is stacked, and the piezoelectric ceramics/single-crystal iron that will entirely stack The trough rim of electric material sub-block is fixed to clamp using fixture.
7. the preparation method of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites according to claim 1, which is characterized in that The width of slit K of the piezoelectric ceramics/between monocrystalline ferroelectric material array element and array element is less than 10 μm.
8. the preparation method of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites according to claim 1, which is characterized in that The piezoelectric ceramics/monocrystalline ferroelectric material array element width W is less than 0.1mm.
9. a kind of preparation smelting of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites has, it is used for claim 1-8 any one The piezoelectric ceramics stacked in the preparation method of the 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites/monocrystalline ferroelectric material sub-block It clamps;It is characterised in that it includes clamp body pedestal, clamping press plate and fishbolt;
The clamp body pedestal is used to place piezoelectric ceramics/monocrystalline ferroelectric material sub-block of heap poststack, and the clamp body pedestal is Groove body, the clamping press plate are set to clamp body base top both ends, and the clamping press plate is spirally connected with the clamp body pedestal, The fishbolt is set on the clamping press plate, adjusts the fishbolt to clamp the piezoelectric ceramics of stacking/monocrystalline ferroelectricity Material sub-block.
10. the preparation smelting of 2-2 type piezoelectric ceramics/monocrystalline Ferroelectric Composites according to claim 9 has, feature exists In the clamping press plate is fixedly connected by fastening screw with the clamp body pedestal.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5539965A (en) * 1994-06-22 1996-07-30 Rutgers, The University Of New Jersey Method for making piezoelectric composites
US6183578B1 (en) * 1998-04-21 2001-02-06 Penn State Research Foundation Method for manufacture of high frequency ultrasound transducers
CN101657914A (en) * 2007-04-11 2010-02-24 通用电气检查技术有限合伙人公司 The acoustic stack and the manufacture method thereof that are used for ultrasonic transducer
CN103456879A (en) * 2013-09-01 2013-12-18 济南大学 2-2 type piezoelectric composite material with matrixes arranged in inhomogeneous and periodical mode and preparation method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5539965A (en) * 1994-06-22 1996-07-30 Rutgers, The University Of New Jersey Method for making piezoelectric composites
US6183578B1 (en) * 1998-04-21 2001-02-06 Penn State Research Foundation Method for manufacture of high frequency ultrasound transducers
CN101657914A (en) * 2007-04-11 2010-02-24 通用电气检查技术有限合伙人公司 The acoustic stack and the manufacture method thereof that are used for ultrasonic transducer
CN103456879A (en) * 2013-09-01 2013-12-18 济南大学 2-2 type piezoelectric composite material with matrixes arranged in inhomogeneous and periodical mode and preparation method thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Novel Method for Producing High Frequency 2-2 Compositions from PZT Ceramic;Wesley Hackenberger et al.;《Ultrasonics Symposium, 2000 IEEE》;20001025;969-972 *

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