CN105700074A - 偏振无关的级联可调光衰减器 - Google Patents

偏振无关的级联可调光衰减器 Download PDF

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CN105700074A
CN105700074A CN201610226520.3A CN201610226520A CN105700074A CN 105700074 A CN105700074 A CN 105700074A CN 201610226520 A CN201610226520 A CN 201610226520A CN 105700074 A CN105700074 A CN 105700074A
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optical attenuator
adjustable optical
mzi
variable optical
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CN105700074B (zh
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任梅珍
张家顺
安俊明
王亮亮
张春威
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HENAN SHIJIA PHOTONS TECHNOLOGY Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
    • G02F1/0144—TE-TM mode separation

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

本发明公开了一种偏振无关的级联可调光衰减器，包括第一级MZI可调光衰减器和第二级MZI可调光衰减器，第一级MZI可调光衰减器的输出端与第二级MZI可调光衰减器的输入端相连，第一级MZI可调光衰减器和第二级MZI可调光衰减器的波导宽度大于波导高度。本发明通过加宽第一级MZI可调光衰减器和第二级MZI可调光衰减器的波导宽度，使第一级MZI可调光衰减器的PDL1与第二级MZI可调光衰减器的PDL2大小相等，符号相反，这样补偿了整个器件的偏振相关损耗。

Description

偏振无关的级联可调光衰减器
技术领域
本发明属于集成光学技术领域，具体涉及一种偏振无关的级联可调光衰减器。
背景技术
近年来，WDM（WavelengthDivisionMultiplexing）和DWDM（DenseWavelengthDivisionMultiplexing）系统得到越来越广泛的应用，WDM系统中的各个信道需要功率均衡，这是可调光衰减器的主要用途。此外，光学衰减器还可以用于某些器件的过功率保护，如光学衰减器与光电探测器集成可以有效抑制光电探测器的饱和；光学衰减器还是构成其他光电功能模块的重要元件，如OADM（OpticalAdd-DropMultiplexer）、MUX+VOA（Multiplexer+VariableOpticalAttenuator）等；光学衰减器广泛用于有线电视网络节点处的功率均衡。
平面光波导型可调光衰减器具有制作简单，稳定性好，尺寸小，成本低，易于集成、适合大规模生产等优点，随着技术的发展和成熟，已成为光通信系统中非常关键的光器件之一。但是PLC（PlanarLightwaveCircuit）型VOA（VariableOpticalAttenuator）的PDL随着衰减的增大而增大，这限制了PLC型VOA的使用。
而且，目前PLC型可调光衰减器常用的技术为硅基二氧化硅技术，包层和芯区的折射率差为0.75%，芯区尺寸为6×6μm。在该工艺下制作的对称型MZI，在相移达到π时，PDL的符号改变不明显，当做成级联VOA时，PDL补偿的效果很差。
发明内容
针对上述现有技术中描述的不足，本发明的目的是提供一种方法，该方法通过增大波导宽度，优化级联可调光衰减器的偏振相关损耗。。
为实现上述技术目的，本发明所采用的技术方案如下：
一种偏振无关的级联可调光衰减器，包括第一级MZI可调光衰减器和第二级MZI可调光衰减器，第一级MZI可调光衰减器的输出端与第二级MZI可调光衰减器的输入端相连，第一级MZI可调光衰减器和第二级MZI可调光衰减器的波导宽度大于波导高度。
所述波导宽度大于6μm，且小于8μm。
所述第一级MZI可调光衰减器的PDL1与第二级MZI可调光衰减器的PDL2大小相等，符号相反，PDL1=-PDL2。
第一级MZI可调光衰减器与第二级MZI可调光衰减器的相位差为2π。
所述第一级MZI可调光衰减器的相位为0到π之间，第二级MZI可调光衰减器的相位为2π到π之间。
所述所述第一级MZI可调光衰减器的相位为-π到0之间，第二级MZI可调光衰减器的相位为π到0之间。
对于PLC型热光可调光衰减器，其偏振相关损耗是由波导中的二次光弹效应引起的，即折射率不仅随着二氧化硅的各向同性的热光效应而变化，当波导被金属电极加热时，折射率也随着各向异性的光弹效应而变化。该二次光弹效应可以理解为当波导被加热时，由于二氧化硅的热膨胀系数远小于硅的热膨胀系数，故二氧化硅可以自由的向硅衬底膨胀，即垂直方向自由膨胀；而在水平方向，由于芯区二氧化硅的热膨胀系数略大于包层二氧化硅的热膨胀系数，二氧化硅在该方向的膨胀是受到限制的，因此在水平方向会产生一种压应力，且该应力主要影响TM模的传输，使TM模的偏移大于TE模。该压应力越大，偏移也就越大，器件的偏振相关损耗越大。本发明中提出的加宽波导宽度的方法，可以使这种压应力减小，因为波导宽度变宽时，芯区二氧化硅在水平方向受到的压应力会减小；反之当波导宽度变窄时，包层二氧化硅对芯区的限制作用更强，芯区二氧化硅在水平方向受到的压应力会增大。基于上述原理，在制作器件时加宽波导宽度，可以改善其偏振相关损耗。
本发明通过加宽第一级MZI可调光衰减器和第二级MZI可调光衰减器的波导宽度，使第一级MZI可调光衰减器的PDL1与第二级MZI可调光衰减器的PDL2大小相等，符号相反，这样补偿了整个器件的偏振相关损耗。
附图说明
图1为本发明的结构示意图。
图2为波导宽度为5μm时，对称型VOA的偏振模式。
图3为波导宽度为7μm时，对称型VOA的偏振模式；
图4为波导宽度为5μm时，非对称型VOA的偏振模式；
图5为波导宽度为7μm时，非对称型VOA的偏振模式。
具体实施方式
下面结合附图，阐述本发明的具体实施方式。
如图1所示，一种偏振无关的级联可调光衰减器，包括第一级MZI可调光衰减器1和第二级MZI可调光衰减器2，第一级MZI可调光衰减器1的输出端与第二级MZI可调光衰减器2的输入端相连，第一级MZI可调光衰减器1和第二级MZI可调光衰减器2的波导宽度大于波导高度。所述波导宽度大于6μm，且小于8μm。
优选地，所述波导宽度为7μm，这种情况下，偏振补偿效果最好。
由于波导宽度的加宽，第一级MZI可调光衰减器1的PDL1与第二级MZI可调光衰减器2的PDL2大小相等，符号相反，PDL1=-PDL2。而且，第一级MZI可调光衰减器1与第二级MZI可调光衰减器2的相位差为2π。
当第一级MZI可调光衰减器1的相位为0到π之间，那么，第二级MZI可调光衰减器2的相位为2π到π之间。当，第一级MZI可调光衰减器1的相位为-π到0之间，那么，第二级MZI可调光衰减器2的相位为π到0之间。
下面以一个具体事例对本发明进行说明。
第一级MZI可调光衰减器1为对称型MZI可调光衰减器，第二级MZI可调光衰减器2为非对称型MZI可调光衰减器，即第一级MZI可调光衰减器的相位为0，第二级MZI可调光衰减器的相位为2π。
对于第一级MZI可调光衰减器1，当其芯区的波导宽度为5μm时，随着加在调制臂上的电压的增大，其TE模和TM模随着折射率差的变化曲线如图2所示。由图2可看出，随着折射率差的增大，TM模的IL始终大于TE模；在相位差达到π时，PDL未改变符号。当其芯区波导宽度为7μm时，随着加在调制臂上的电压的增大，其TE模和TM模随着折射率差的变化曲线如图3所示。由图3可看出，在相位差达到π时，PDL改变符号。
对于第二级MZI可调光衰减器2，当其芯区波导宽度为5μm时，随着加在调制臂上的电压的增大，其TE模和TM模随着折射率差的变化曲线如图4所示。由图4可看出，随着折射率差的增大，TM模的IL始终大于TE模；在衰减达到最大时，PDL未改变符号。当其芯区波导宽度为7μm时，随着加在调制臂上的电压的增大，其TE模和TM模随着折射率差的变化曲线如图5所示。由图5可看出，在衰减达到最大时，PDL改变符号。
当第一级MZI可调光衰减器1与第二级MZI可调光衰减器2级联，并采用上述的调制方式时，第一级MZI可调光衰减器与第二级MZI可调光衰减器的PDL符号相反，即PDL1=-PDL2，能达到补偿偏振相关损耗的效果。
本发明中的平面波导型可调光衰减器，使芯区的波导宽度>6μm，当然波导宽度也不能无限制的加宽，从已开展的工作中我们发现波导宽度为7μm时，PDL的补偿效果较好。

Claims (7)

1.一种偏振无关的级联可调光衰减器，包括第一级MZI可调光衰减器(1)和第二级MZI可调光衰减器(2)，第一级MZI可调光衰减器(1)的输出端与第二级MZI可调光衰减器(2)的输入端相连，其特征在于：第一级MZI可调光衰减器(1)和第二级MZI可调光衰减器(2)的波导宽度大于波导高度。
2.根据权利要求1所述的偏振无关的级联可调光衰减器，其特征在于：所述波导宽度大于6μm，且小于8μm。
3.根据权利要求2所述的偏振无关的级联可调光衰减器，其特征在于：所述波导宽度为7μm。
4.根据权利要求1或2或3所述的偏振无关的级联可调光衰减器，其特征在于：所述第一级MZI可调光衰减器(1)的PDL1与第二级MZI可调光衰减器(2)的PDL2大小相等，符号相反，PDL1＝-PDL2。
5.根据权利要求4所述的偏振无关的级联可调光衰减器，其特征在于：第一级MZI可调光衰减器(1)与第二级MZI可调光衰减器(2)的相位差为2π。
6.根据权利要求5所述的偏振无关的级联可调光衰减器，其特征在于：所述第一级MZI可调光衰减器(1)的相位为0到π之间，第二级MZI可调光衰减器(2)的相位为2π到π之间。
7.根据权利要求5所述的偏振无关的级联可调光衰减器，其特征在于：所述第一级MZI可调光衰减器(1)的相位为-π到0之间，第二级MZI可调光衰减器(2)的相位为π到0之间。
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CN108227084A (zh) * 2018-01-16 2018-06-29 上海理工大学 一种基于氮化硅波导的偏振无关集成光开关及其制作方法
CN110595527A (zh) * 2019-09-10 2019-12-20 中国人民解放军国防科技大学 光芯片上多级交错马赫曾德干涉仪中可控相移器标定方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107764791A (zh) * 2017-10-11 2018-03-06 河南仕佳光子科技股份有限公司 一种基于倏逝波的离子浓度测试芯片
CN107764791B (zh) * 2017-10-11 2021-03-23 河南仕佳光子科技股份有限公司 一种基于倏逝波的离子浓度测试芯片
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CN110595527A (zh) * 2019-09-10 2019-12-20 中国人民解放军国防科技大学 光芯片上多级交错马赫曾德干涉仪中可控相移器标定方法

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