CN105690299B - One kind vapour deposition shallow layer solidification frock - Google Patents

One kind vapour deposition shallow layer solidification frock Download PDF

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Publication number
CN105690299B
CN105690299B CN201610224063.4A CN201610224063A CN105690299B CN 105690299 B CN105690299 B CN 105690299B CN 201610224063 A CN201610224063 A CN 201610224063A CN 105690299 B CN105690299 B CN 105690299B
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China
Prior art keywords
side plate
seat board
ribs
loading blocks
spacing
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CN201610224063.4A
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Chinese (zh)
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CN105690299A (en
Inventor
黄孝庆
刘燕
王川
王家明
刘智昂
郑晓冬
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Aerospace Precision Products Co Ltd
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Aerospace Precision Products Co Ltd
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Priority to CN201610224063.4A priority Critical patent/CN105690299B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00Investigating materials by mechanical methods
    • G01N19/04Measuring adhesive force between materials, e.g. of sealing tape, of coating

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention provides a kind of vapour deposition shallow layer solidification frock, including seat board, side plate and loading blocks;The side plate is fixed on the both sides of the seat board;The seat board center is provided with the ribs parallel with side plate, the ribs and is evenly equipped with some grooves;The loading blocks are in ladder shaft-like, and relatively described ribs are symmetrical and uniform along the bearing of trend of the ribs in pairs;The groove that the small end of the loading blocks is located at the ribs is interior and spacing by groove this described, and the big end of the loading blocks is located on any upper surface of the seat board of ribs both sides and positioned by the upper surface;Some screw holes matched with trip bolt are also evenly equipped with the side plate, the end of the trip bolt penetrates between side plate from the screw hole and contacted with the big end outer surface centre bore of the loading blocks, the trip bolt can by the centre bore to loading blocks apply axial load.The invention can be reliably controlled axial pre tightening force, accurate positioning, efficiency high.

Description

One kind vapour deposition shallow layer solidification frock
Technical field
The invention belongs to coating binding force detection device technical field, more particularly to a kind of PVD (sink by physical vapor Product) and CVD (chemical vapor deposition) shallow layer solidify frock.
Background technology
Coating prepared by PVD (physical vapour deposition (PVD)) and CVD (chemical vapor deposition) coating has bond strength high, tough The good, wearability of property is good, and the features such as high and good heat endurance of chemical stability is good is high-end component of machine surfacecti proteon The coating of future is most applied in coating material.Such as CrN, TiN, TiCN, WCN coating are widely used in cutter, measuring tool, mould Has contour terminal tool part field.
But coating prepared by PVD (physical vapour deposition (PVD)) and CVD (chemical vapor deposition) is very thin, majority is 2~20 μm, is given Clamping during the adhesion detection of coating brings very big difficulty.The preparation of existing coating test is difficult to obtain reliable dress Press from both sides pretightning force.
The content of the invention
The invention, can to solve the problems of the prior art there is provided one kind vapour deposition shallow layer solidification frock It is good with simple and easy to operate, highly versatile, accurate positioning, efficiency high and security reliably to be controlled axial pre tightening force The features such as.
A kind of vapour deposition shallow layer solidification frock that the invention is provided, including seat board, side plate and loading blocks;It is described Side plate is fixed on the both sides of the seat board;The seat board center is provided with the ribs parallel with side plate, the ribs It is furnished with some grooves;The loading blocks are in ladder shaft-like, and relatively described ribs are symmetrical in pairs and along the extension of the ribs Direction is uniform;The small end of the loading blocks is located in the groove of the ribs and, the loading blocks spacing by groove this described Big end be located at ribs both sides seat board any upper surface on and positioned by the upper surface;It is also uniform on the side plate Have some screw holes matched with trip bolt, the end of the trip bolt penetrated from the screw hole between side plate and with institute The big end outer surface centre bore contact of loading blocks is stated, the trip bolt can be applied by the centre bore to loading blocks axially to be carried Lotus.
Wherein, the side plate outer surface is in alternate concaveconvex structure, and the female parts of the side plate are evenly equipped with can be with consolidating Determine the fixing hole of screw mates, the correspondence position of the seat board bottom also is provided with the base plate hole that can be matched with fixing screws, institute Side plate is stated to be fixedly connected with the bottom of the seat board by the fixing screws for being distributed in female parts.It is preferred that, the fixing screws From hexagon socket cap head screw.
Wherein, the trip bolt is distributed in the concave portion of side plate.
Wherein, the trip bolt is sequentially provided with head, threaded portion, guide rod portion and end;Head is preferably turret head Portion;End is in the angle of horn shape, preferably 60 °.
Wherein, the groove of the ribs of the seat board is preferably in inverted trapezoidal groove.
Wherein, at least one pair of spacing hole is symmetrically arranged with also relative to seat board oblique angle on the side plate, the spacing hole is supplied Spacer pin by and go deep into inside seat board realizing between seat board and side plate further consolidate it is spacing.The preferred status of spacing hole In the female parts of the side plate, it more preferably can directly replace fixing screws relevant position required on side plate and set.
Wherein, it is additionally provided with the seat board and the limit channels of stop screw is communicated and can accommodated with groove, it is described spacing Passage coordinates with the stop screw screw thread.
Further, the stop screw is sequentially provided with spacing head, thread segment and spacing end;The thread segment is excellent Selection of land uses fine thread;The end face of the spacing end is plane.
Wherein, the centre bore of the loading blocks is preferably the hole made according to GB/T4459.5-B2/5.Further, it is described The end Ying Qing angles processing of the small end of loading blocks.
The invention is simple in construction, easy to operate, versatility is good, and clamping position is stable and position is accurate, and can lead to Cross fine setting and eliminate workpiece machining error, reduce offset deviation, the blessing that can be applied to 2~20 μm of shallow layers is fixed.
Brief description of the drawings
Fig. 1 is a kind of overall structure diagram of embodiment of the invention;
Fig. 2 is structural representations of the Fig. 1 in overlook direction;
Fig. 3 is the sectional view in A-A directions in Fig. 2;
Fig. 4 is the structural representation of Fig. 1 latus inframediums;
Fig. 5 is the sectional view in B-B directions in Fig. 4;
Fig. 6 is the structural representation of seat board in Fig. 1;
Fig. 7 is structural representations of the Fig. 6 in left view direction;
Fig. 8 is structural representations of the Fig. 6 in overlook direction;
Fig. 9 is the structural representation of trip bolt in Fig. 1;
Figure 10 is structural representations of the Fig. 9 in left view direction;
Figure 11 is the structural representation of loading blocks in Fig. 1;
Figure 12 is structural representations of the Figure 11 in overlook direction;
Figure 13 is the structural representation of stop screw in Fig. 1;
Figure 14 is structural representations of the Figure 13 in left view direction.
Wherein, 1- seat boards;11- ribs;111- grooves;12- base plate holes;13- limit channels;2- side plates;21- screws Hole;22- fixing holes;3- loading blocks;4- trip bolts;41- heads;42- threaded portions;43- guide rods portion;44- ends;5- fixes spiral shell Nail;6- spacer pins;7- stop screws;The spacing heads of 71-;72- thread segments;The spacing ends of 73-.
Embodiment
The invention is further described below by with reference to accompanying drawing.
A kind of embodiment of the invention structure as Figure 1-3, including seat board 1, side plate 2 and loading blocks 3;The side Plate 2 is fixed on the both sides of the seat board 1;The center of seat board 1 is provided with the ribs 11 parallel with side plate 2, the ribs Some grooves 111 are evenly equipped with 11;The loading blocks 3 are in ladder shaft-like, and relatively described ribs 11 are symmetrical in pairs and along described The bearing of trend of ribs 11 is uniform;The small end of the loading blocks 3 is located in the groove 111 of the ribs 11 and by this described Groove 111 is spacing, and the big end of the loading blocks 3 is located on any upper surface of the seat board 1 of the both sides of ribs 11 and by the upper table Face contact positioning;Some screw holes 21 matched with trip bolt 4, the end of the trip bolt 4 are also evenly equipped with the side plate 2 Portion penetrates between side plate 2 from the screw hole 21 and contacted with the big end outer surface centre bore of the loading blocks 3, the fastening spiral shell Nail 4 can by the centre bore to loading blocks 3 apply axial load.
Wherein, the side plate 2 is as illustrated in figures 4-5.The outer surface of side plate 2 is in alternate concaveconvex structure, the side plate 2 Female parts are evenly equipped with the fixing hole 22 that can be matched with fixing screws 5, and the correspondence position of the bottom of seat board 1 also is provided with can The base plate hole 12 matched with fixing screws 5, the side plate 2 is by being distributed in the fixing screws 5 of female parts and the bottom of the seat board 1 Portion is fixedly connected, and the attachment structure helps to realize the steadiness of the two connection.It is preferred that, the fixing screws 5 are from interior six Angle fillister head screw.
Wherein, the trip bolt 4 is distributed in the concave portion of side plate 2, contributes to increase trip bolt 4 and the phase of side plate 2 The length of mutual contact portion, is more beneficial for improving positioning precision.
Wherein, the trip bolt 4 is as shown in figs. 9-10.The trip bolt 4 be sequentially provided with head 41, threaded portion 42, Guide rod portion 43 and end 44;Head 41 is preferably hexagon-head;Threaded portion 42 be used for in the screw hole 21 of the side plate 2 Screw thread is mutually engaged and positioned;Guide rod portion 43 and the gap of screw hole 21 of the side plate 2, which coordinate, is easy to stretching for the trip bolt 4 Enter;End 44 is in the angle of horn shape, preferably 60 °, is easy to accurately contact with the big end outer surface centre bore of loading blocks 3.
Wherein, the groove 111 of the ribs 11 of the seat board 1 is in preferably inverted trapezoidal groove, and positioning precision is higher, be easy to Trip bolt 4 coordinates the positioning action reached to loading blocks 3.
Wherein, at least one pair of spacing hole, the spacing hole are symmetrically arranged with also relative to the oblique angle of seat board 1 on the side plate 2 For spacer pin 6 by and go deep into realizing inside seat board 1 between seat board 1 and side plate 2 further consolidate it is spacing.The spacing hole is excellent Selection of land is located at the female parts of the side plate 2, the relevant position of fixing screws 5 needed for more preferably can directly replacing on side plate 2 And set.
Wherein, the seat board 1 is as shown in figs 6-8.It is additionally provided with the seat board 1 and limit is communicated and can accommodated with groove 111 The limit channels 13 of position screw 7, the limit channels 13 coordinate with the screw thread of stop screw 7, and the stop screw 7 can lead to Minor adjustment of the lift action realization to the small end position of loading blocks 3 of screw thread cooperation is crossed, so as to eliminate part manufacturing tolerance Caused loading position skew.
Further, the stop screw 7 is as illustrated in figs. 13-14.It is sequentially provided with spacing head 71, thread segment 72 and limit Position end 73;It is easy to the twisting in position adjustment in the spacing head 71;The thread segment 72 be used to it is described spacing logical The screw thread in road 13 coordinates, and preferably by fine thread, is easy to the control of small lifting travel;The end face of the spacing end 73 For plane, it is easy to contact with the small end outer surface of loading blocks 3.
Wherein, the loading blocks 3 are as depicted in figs. 11-12.The centre bore of the loading blocks 3 is preferably according to GB/ The hole that T4459.5-B2/5 makes.Further, the end Ying Qing angles processing of the small end of the loading blocks 3.
The invention is in use, only need scumbling to be detected being placed between symmetrically arranged loading blocks 3, and make Symmetrical loading blocks 3 clamp shallow layer to be detected under the tiny pretightning force effect in axial direction that both sides trip bolt 4 applies, When needing to be finely adjusted to eliminate deviation the position of loading blocks 3, slight adjustment stop screw 7.
The preferred embodiment of the invention is the foregoing is only, creation is not intended to limit the invention, it is all at this Within the spirit and principle of innovation and creation, any modification, equivalent substitution and improvements made etc. should be included in the invention Protection domain within.

Claims (6)

1. one kind vapour deposition shallow layer solidification frock, including seat board, side plate and loading blocks;The side plate is fixed on the seat board Both sides;The seat board center is provided with the ribs parallel with side plate, the ribs and is evenly equipped with some grooves;It is described to add It is in ladder shaft-like to carry block, and relatively described ribs are symmetrical and uniform along the bearing of trend of the ribs in pairs;The loading blocks Small end be located in the groove of the ribs and spacing by groove this described, the big ends of the loading blocks is located at ribs both sides Seat board any upper surface on and positioned by the upper surface;Also it is evenly equipped with and some is matched with trip bolt on the side plate Screw hole, the end of the trip bolt penetrated from the screw hole between side plate and with the big end outer surface of the loading blocks Centre bore contact, the trip bolt can by the centre bore to loading blocks apply axial load;
The groove of the ribs of the seat board is in inverted trapezoidal groove;It is additionally provided with the seat board and communicates and can accommodate spacing with groove The limit channels of screw, the limit channels coordinate with the stop screw screw thread;The stop screw is sequentially provided with spacing head Portion, thread segment and spacing end;The thread segment uses fine thread;The end face of the spacing end is plane.
2. a kind of vapour deposition shallow layer solidification frock according to claim 1, it is characterised in that the side plate outer surface In alternate concaveconvex structure, the female parts of the side plate are evenly equipped with the fixing hole that can be matched with fixing screws, the seat board The correspondence position of bottom also is provided with the base plate hole that can be matched with fixing screws, and the side plate is by being distributed in the fixations of female parts Screw is fixedly connected with the bottom of the seat board.
3. a kind of vapour deposition shallow layer solidification frock according to claim 2, it is characterised in that the trip bolt is equal It is distributed in the concave portion of side plate.
4. a kind of vapour deposition shallow layer solidification frock according to claim 1, it is characterised in that the trip bolt according to It is secondary to be provided with head, threaded portion, guide rod portion and end;Head is preferably hexagon-head;End is in horn shape.
5. a kind of vapour deposition shallow layer solidification frock according to claim 1, it is characterised in that phase is gone back on the side plate Be symmetrically arranged with least one pair of spacing hole for seat board oblique angle, the spacing hole for spacer pin by and go deep into realization inside seat board Further consolidated between seat board and side plate spacing.
6. a kind of vapour deposition shallow layer solidification frock according to claim 1, it is characterised in that in the loading blocks Heart hole is preferably the hole made according to GB/T4459.5-B2/5;The end Zuo Qing angles processing of the small end of the loading blocks.
CN201610224063.4A 2016-04-08 2016-04-08 One kind vapour deposition shallow layer solidification frock Active CN105690299B (en)

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Application Number Priority Date Filing Date Title
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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107900930A (en) * 2017-10-12 2018-04-13 重庆长安工业(集团)有限责任公司 A kind of multi-functional embedding solidification equipment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4100215A1 (en) * 1991-01-07 1992-07-09 Reichsbahn Ingenieurbuero Fuer Symmetrical work automatic clamping and centring mechanism - comprises pairs of spring-loaded bell crank levers
CN201355343Y (en) * 2008-12-24 2009-12-02 中国航空工业第一集团公司北京航空制造工程研究所 Tensile specimen for testing bonding strength of coating
CN202479786U (en) * 2012-02-26 2012-10-10 玉溪台正智能机械有限公司 Micro-adjustment structure of junction surface of machine tool
CN103921229A (en) * 2014-04-25 2014-07-16 成都西图科技有限公司 Sheet clamp
CN204195219U (en) * 2014-09-30 2015-03-11 中国科学院西安光学精密机械研究所 A kind of slit assembly adjustment frock

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10167571B2 (en) * 2013-03-15 2019-01-01 Veeco Instruments Inc. Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systems

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4100215A1 (en) * 1991-01-07 1992-07-09 Reichsbahn Ingenieurbuero Fuer Symmetrical work automatic clamping and centring mechanism - comprises pairs of spring-loaded bell crank levers
CN201355343Y (en) * 2008-12-24 2009-12-02 中国航空工业第一集团公司北京航空制造工程研究所 Tensile specimen for testing bonding strength of coating
CN202479786U (en) * 2012-02-26 2012-10-10 玉溪台正智能机械有限公司 Micro-adjustment structure of junction surface of machine tool
CN103921229A (en) * 2014-04-25 2014-07-16 成都西图科技有限公司 Sheet clamp
CN204195219U (en) * 2014-09-30 2015-03-11 中国科学院西安光学精密机械研究所 A kind of slit assembly adjustment frock

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Application publication date: 20160622

Assignee: Dongguan Yibao Metal Technology Co.,Ltd.

Assignor: AEROSPACE PRECISION PRODUCTS Corp.

Contract record no.: X2022120000001

Denomination of invention: A curing tooling for vapor deposition thin coating

Granted publication date: 20170825

License type: Common License

Record date: 20220223