CN105690299A - Vapor deposition thin coating layer curing tool - Google Patents

Vapor deposition thin coating layer curing tool Download PDF

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Publication number
CN105690299A
CN105690299A CN201610224063.4A CN201610224063A CN105690299A CN 105690299 A CN105690299 A CN 105690299A CN 201610224063 A CN201610224063 A CN 201610224063A CN 105690299 A CN105690299 A CN 105690299A
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CN
China
Prior art keywords
side plate
seat board
loading blocks
frock
solidifies
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Application number
CN201610224063.4A
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Chinese (zh)
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CN105690299B (en
Inventor
黄孝庆
刘燕
王川
王家明
刘智昂
郑晓冬
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Aerospace Precision Products Co Ltd
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Aerospace Precision Products Co Ltd
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Priority to CN201610224063.4A priority Critical patent/CN105690299B/en
Publication of CN105690299A publication Critical patent/CN105690299A/en
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Publication of CN105690299B publication Critical patent/CN105690299B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00Investigating materials by mechanical methods
    • G01N19/04Measuring adhesive force between materials, e.g. of sealing tape, of coating

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The invention provides a vapor deposition thin coating layer curing tool. The tool comprises a base plate, side plates and loading blocks; the side plates are fixed on two sides of the base plate; support ribs parallel to the side plates are arranged in the center of the base plate; multiple grooves are uniformly distributed in the support ribs; the loading blocks take the shape of step shafts, are pairwise symmetrical corresponding to the support ribs, and are uniformly distributed in the extending direction of the support ribs; small ends of the support ribs are positioned in the grooves of the support ribs, and are limited by the grooves; large ends of the support ribs are positioned on any upper surface of the base plate on two sides of the support ribs, and are contacted and positioned by the upper surface; multiple screw holes matched with fastening screws are uniformly distributed on the side plates; the end parts of the fastening screws are inserted between the side plates from the screw holes, and are contacted with center holes of the outer surfaces of the large ends of the loading blocks; and the fastening screws can apply axial load to the loading blocks through the center holes. The tool can reliably control axial pre-tightening force, and is accurate in positioning and high in efficiency.

Description

A kind of vapour deposition shallow layer solidifies frock
Technical field
The invention belongs to coating binding force detection equipment technical field, and the shallow layer particularly relating to a kind of PVD (physical vapour deposition (PVD)) and CVD (chemical vapour deposition (CVD)) solidifies frock。
Background technology
Coating prepared by the coating of PVD (physical vapour deposition (PVD)) and CVD (chemical vapour deposition (CVD)) has bond strength height, good toughness, wearability are good, the features such as the Heat stability is good that chemical stability is high and good, are the coatings most applying future in high-end component of machine surface protection coating material。As the coatings such as CrN, TiN, TiCN, WCN are widely used in cutter, measuring tool, the contour terminal tool part field of mould。
But coating prepared by PVD (physical vapour deposition (PVD)) and CVD (chemical vapour deposition (CVD)) is very thin, and majority is 2~20 μm, clamping when detecting to the adhesion of coating brings very big difficulty。The preparation of existing coating test is difficult to obtain reliable clamping pretightning force。
Summary of the invention
The invention is for solving the problems of the prior art, it is provided that a kind of vapour deposition shallow layer solidifies frock, it is possible to axial pre tightening force is reliably controlled, the feature such as have that simple and easy to operate, highly versatile, accurate positioning, efficiency is high and safety is good。
A kind of vapour deposition shallow layer that the invention provides solidifies frock, including seat board, side plate and loading blocks;Described side plate is fixed on the both sides of described seat board;Described seat board central authorities are provided with the supporting rib parallel with side plate, and described ribs is evenly equipped with some grooves;Described loading blocks is ladder shaft-like, and relatively described supporting rib is symmetrical and uniform along the bearing of trend of described ribs in pairs;The small end of described loading blocks is positioned at the groove of described ribs and spacing by groove this described, and the big end of described loading blocks is positioned on arbitrary upper surface of the seat board of supporting rib both sides and is positioned by this upper surface;Described side plate is also evenly equipped with some screw holes mated with trip bolt, the end of described trip bolt penetrates between side plate from described screw hole and contacts with the big end outer surface centre bore of described loading blocks, and described trip bolt can apply axial load by this centre bore to loading blocks。
Wherein, described side plate outer surface is in concaveconvex structure alternately, the female parts of described side plate is evenly equipped with can with the fixing hole of fixing screw mates, correspondence position bottom described seat board also is provided with can with the base plate hole of fixing screw mates, and described side plate is connected by the bottom of the fixing screw with described seat board that are distributed in female parts is fixing。Preferably, hexagon socket cap head screw selected by described fixing screw。
Wherein, described trip bolt is distributed in the concave portion of side plate。
Wherein, described trip bolt is sequentially provided with head, threaded portion, guide rod portion and end;Head is preferably hexagon-head;End is horn shape, it is preferred to the angle of 60 °。
Wherein, the groove of the supporting rib of described seat board is preferably in inverted trapezoidal groove。
Wherein, described side plate being symmetrically arranged with at least one pair of spacing hole also relative to seat board oblique angle, described spacing hole pass through and gos deep into realize inside seat board further to consolidate between seat board and side plate spacing for spacer pin。Described spacing hole is preferably located in the female parts of described side plate, it is more preferred to can directly replace fixing screw relevant position required on side plate and arrange。
Wherein, the limit channels communicating and can holding stop screw with groove, described limit channels and described stop screw threaded engagement it are additionally provided with in described seat board。
Further, described stop screw is sequentially provided with spacing head, thread segment and spacing end;Described thread segment is preferably by fine thread;The end face of described spacing end is plane。
Wherein, the centre bore of described loading blocks is preferably according to the GB/T4459.5-B2/5 hole made。Further, the Ying Qing angle, end of the small end of described loading blocks processes。
The invention simple in construction, easy and simple to handle, versatility good, and clamping position is stable and position is accurate, and can pass through to finely tune to eliminate workpiece machining error, reduces offset deviation, it is possible to the blessing suitable in 2~20 μm of shallow layers is fixed。
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of a kind of embodiment of the invention;
Fig. 2 is that Fig. 1 is at the structural representation overlooking direction;
Fig. 3 is the sectional view in A-A direction in Fig. 2;
Fig. 4 is the structural representation of Fig. 1 latus inframedium;
Fig. 5 is the sectional view in B-B direction in Fig. 4;
Fig. 6 is the structural representation of seat board in Fig. 1;
Fig. 7 is the Fig. 6 structural representation in left view direction;
Fig. 8 is that Fig. 6 is at the structural representation overlooking direction;
Fig. 9 is the structural representation of trip bolt in Fig. 1;
Figure 10 is the Fig. 9 structural representation in left view direction;
Figure 11 is the structural representation of loading blocks in Fig. 1;
Figure 12 is that Figure 11 is at the structural representation overlooking direction;
Figure 13 is the structural scheme of mechanism of stop screw in Fig. 1;
Figure 14 is the Figure 13 structural representation in left view direction。
Wherein, 1-seat board;11-supporting rib;111-groove;12-base plate hole;13-limit channels;2-side plate;21-screw hole;22-fixing hole;3-loading blocks;4-trip bolt;41-head;42-threaded portion;43-guide rod portion;44-end;5-fixes screw;6-spacer pin;7-stop screw;The spacing head of 71-;72-thread segment;The spacing end of 73-。
Detailed description of the invention
Below by conjunction with accompanying drawing, the invention is further described。
The invention structure one embodiment as Figure 1-3, including seat board 1, side plate 2 and loading blocks 3;Described side plate 2 is fixed on the both sides of described seat board 1;Described seat board 1 central authorities are provided with the supporting rib 11 parallel with side plate 2, and described ribs 11 is evenly equipped with some grooves 111;Described loading blocks 3 is in ladder shaft-like, and relatively described supporting rib 11 is symmetrical and uniform along the bearing of trend of described ribs 11 in pairs;The small end of described loading blocks 3 is positioned at the groove 111 of described ribs 11 and spacing by groove this described 111, and the big end of described loading blocks 3 is positioned on arbitrary upper surface of the seat board 1 of supporting rib 11 both sides and is positioned by this upper surface;Described side plate 2 is also evenly equipped with some screw holes 21 mated with trip bolt 4, the end of described trip bolt 4 penetrates between side plate 2 from described screw hole 21 and contacts with the big end outer surface centre bore of described loading blocks 3, and described trip bolt 4 can pass through this centre bore and apply axial load to loading blocks 3。
Wherein, described side plate 2 is as illustrated in figures 4-5。Described side plate 2 outer surface is in concaveconvex structure alternately, the female parts of described side plate 2 is evenly equipped with the fixing hole 22 that can mate with fixing screw 5, correspondence position bottom described seat board 1 also is provided with the base plate hole 12 that can mate with fixing screw 5, described side plate 2 is connected by the bottom of the fixing screw 5 with described seat board 1 that are distributed in female parts is fixing, and this attachment structure contributes to the steadiness that both realizations connect。Preferably, hexagon socket cap head screw selected by described fixing screw 5。
Wherein, described trip bolt 4 is distributed in the concave portion of side plate 2, contributes to increasing trip bolt 4 and side plate 2 and contacts with each other the length of part, is more beneficial for improving positioning precision。
Wherein, described trip bolt 4 is as shown in figs. 9-10。Described trip bolt 4 is sequentially provided with head 41, threaded portion 42, guide rod portion 43 and end 44;Head 41 is preferably hexagon-head;Threaded portion 42 is engaged mutually for the female thread of the screw hole 21 with described side plate 2 and positions;Screw hole 21 matched in clearance of guide rod portion 43 and described side plate 2 is easy to stretching into of described trip bolt 4;End 44 is in horn shape, it is preferred to the angle of 60 °, it is simple to accurately contact with the big end outer surface centre bore of loading blocks 3。
Wherein, the groove 111 of the supporting rib 11 of described seat board 1 is preferably in inverted trapezoidal groove, and positioning precision is higher, it is simple to coordinate, with trip bolt 4, the positioning action reached loading blocks 3。
Wherein, described side plate 2 being symmetrically arranged with at least one pair of spacing hole also relative to seat board 1 oblique angle, described spacing hole passes through and gos deep into seat board 1 inside for spacer pin 6 and realizes between seat board 1 and side plate 2 further firm spacing。Described spacing hole is preferably located in the female parts of described side plate 2, it is more preferred to can directly replace fixing screw 5 relevant position required on side plate 2 and arrange。
Wherein, described seat board 1 is as shown in figs 6-8。The limit channels 13 communicating and can holding stop screw 7 with groove 111 it is additionally provided with in described seat board 1, described limit channels 13 and described stop screw 7 threaded engagement, described stop screw 7 can pass through the lift action realization of the threaded engagement small adjustment to the little end position of loading blocks 3, thus eliminating the loading position skew that part manufacturing tolerance causes。
Further, described stop screw 7 is as illustrated in figs. 13-14。It is sequentially provided with spacing head 71, thread segment 72 and spacing end 73;Described spacing head 71 is easy to the twisting in position adjustment;Described thread segment 72 is in order to the threaded engagement with described limit channels 13, it is preferable that adopt fine thread, it is simple to the control of small lifting travel;The end face of described spacing end 73 is plane, it is simple to the small end exterior surface of loading blocks 3。
Wherein, described loading blocks 3 is as depicted in figs. 11-12。The centre bore of described loading blocks 3 is preferably according to the GB/T4459.5-B2/5 hole made。Further, the Ying Qing angle, end of the small end of described loading blocks 3 processes。
When the invention uses, only need to be placed in by shallow layer to be detected between symmetrically arranged loading blocks 3, and make the loading blocks 3 of symmetry clamp shallow layer to be detected under the axial tiny pretightning force effect that both sides trip bolt 4 applies, when needing to finely tune to eliminate deviation to the position of loading blocks 3, slight adjustment stop screw 7。
The foregoing is only the preferred embodiment of the invention; not in order to limit the invention; within all spirit in the invention and principle, any amendment of making, equivalent replacement, improvement etc., should be included within the protection domain of the invention。

Claims (9)

1. vapour deposition shallow layer solidifies a frock, including seat board, side plate and loading blocks;Described side plate is fixed on the both sides of described seat board;Described seat board central authorities are provided with the supporting rib parallel with side plate, and described ribs is evenly equipped with some grooves;Described loading blocks is ladder shaft-like, and relatively described supporting rib is symmetrical and uniform along the bearing of trend of described ribs in pairs;The small end of described loading blocks is positioned at the groove of described ribs and spacing by groove this described, and the big end of described loading blocks is positioned on arbitrary upper surface of the seat board of supporting rib both sides and is positioned by this upper surface;Described side plate is also evenly equipped with some screw holes mated with trip bolt, the end of described trip bolt penetrates between side plate from described screw hole and contacts with the big end outer surface centre bore of described loading blocks, and described trip bolt can apply axial load by this centre bore to loading blocks。
2. a kind of vapour deposition shallow layer according to claim 1 solidifies frock, it is characterized in that, described side plate outer surface is in concaveconvex structure alternately, the female parts of described side plate is evenly equipped with can with the fixing hole of fixing screw mates, correspondence position bottom described seat board also is provided with can with the base plate hole of fixing screw mates, and described side plate is connected by the bottom of the fixing screw with described seat board that are distributed in female parts is fixing。
3. a kind of vapour deposition shallow layer according to claim 2 solidifies frock, it is characterised in that described trip bolt is distributed in the concave portion of side plate。
4. a kind of vapour deposition shallow layer according to claim 1 solidifies frock, it is characterised in that described trip bolt is sequentially provided with head, threaded portion, guide rod portion and end;Head is preferably hexagon-head;End is horn shape。
5. a kind of vapour deposition shallow layer according to claim 1 solidifies frock, it is characterised in that the groove of the supporting rib of described seat board is inverted trapezoidal groove。
6. a kind of vapour deposition shallow layer according to claim 1 solidifies frock, it is characterized in that, being symmetrically arranged with at least one pair of spacing hole also relative to seat board oblique angle on described side plate, described spacing hole pass through and gos deep into realize inside seat board further to consolidate between seat board and side plate spacing for spacer pin。
7. a kind of vapour deposition shallow layer according to claim 1 solidifies frock, it is characterised in that be additionally provided with the limit channels communicating and can holding stop screw with groove, described limit channels and described stop screw threaded engagement in described seat board。
8. a kind of vapour deposition shallow layer according to claim 7 solidifies frock, it is characterised in that described stop screw is sequentially provided with spacing head, thread segment and spacing end;Described thread segment adopts fine thread;The end face of described spacing end is plane。
9. a kind of vapour deposition shallow layer according to claim 1 solidifies frock, it is characterised in that the centre bore of described loading blocks is preferably according to the GB/T4459.5-B2/5 hole made;The Zuo Qing angle, end of the small end of described loading blocks processes。
CN201610224063.4A 2016-04-08 2016-04-08 One kind vapour deposition shallow layer solidification frock Active CN105690299B (en)

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Application Number Priority Date Filing Date Title
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CN105690299B CN105690299B (en) 2017-08-25

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107900930A (en) * 2017-10-12 2018-04-13 重庆长安工业(集团)有限责任公司 A kind of multi-functional embedding solidification equipment

Citations (6)

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Publication number Priority date Publication date Assignee Title
DE4100215A1 (en) * 1991-01-07 1992-07-09 Reichsbahn Ingenieurbuero Fuer Symmetrical work automatic clamping and centring mechanism - comprises pairs of spring-loaded bell crank levers
CN201355343Y (en) * 2008-12-24 2009-12-02 中国航空工业第一集团公司北京航空制造工程研究所 Tensile specimen for testing bonding strength of coating
CN202479786U (en) * 2012-02-26 2012-10-10 玉溪台正智能机械有限公司 Micro-adjustment structure of junction surface of machine tool
CN103921229A (en) * 2014-04-25 2014-07-16 成都西图科技有限公司 Sheet clamp
US20140261187A1 (en) * 2013-03-15 2014-09-18 Veeco Instruments, Inc. Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systems
CN204195219U (en) * 2014-09-30 2015-03-11 中国科学院西安光学精密机械研究所 Slit component adjusting tool

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4100215A1 (en) * 1991-01-07 1992-07-09 Reichsbahn Ingenieurbuero Fuer Symmetrical work automatic clamping and centring mechanism - comprises pairs of spring-loaded bell crank levers
CN201355343Y (en) * 2008-12-24 2009-12-02 中国航空工业第一集团公司北京航空制造工程研究所 Tensile specimen for testing bonding strength of coating
CN202479786U (en) * 2012-02-26 2012-10-10 玉溪台正智能机械有限公司 Micro-adjustment structure of junction surface of machine tool
US20140261187A1 (en) * 2013-03-15 2014-09-18 Veeco Instruments, Inc. Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systems
CN103921229A (en) * 2014-04-25 2014-07-16 成都西图科技有限公司 Sheet clamp
CN204195219U (en) * 2014-09-30 2015-03-11 中国科学院西安光学精密机械研究所 Slit component adjusting tool

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107900930A (en) * 2017-10-12 2018-04-13 重庆长安工业(集团)有限责任公司 A kind of multi-functional embedding solidification equipment

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Application publication date: 20160622

Assignee: Dongguan Yibao Metal Technology Co.,Ltd.

Assignor: AEROSPACE PRECISION PRODUCTS Corp.

Contract record no.: X2022120000001

Denomination of invention: A curing tooling for vapor deposition thin coating

Granted publication date: 20170825

License type: Common License

Record date: 20220223