CN105690240A - Flexible polishing pad - Google Patents
Flexible polishing pad Download PDFInfo
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- CN105690240A CN105690240A CN201610198892.XA CN201610198892A CN105690240A CN 105690240 A CN105690240 A CN 105690240A CN 201610198892 A CN201610198892 A CN 201610198892A CN 105690240 A CN105690240 A CN 105690240A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
The invention relates to the technical fields of grinding and polishing, in particular to a flexible polishing pad for grinding and processing super-hard materials. The flexible polishing pad mainly consists of a high temperature resisting flexible fiber pad, super-hard composite ceramic flakes and flexible resins. The flexible polishing pad is made through the following steps of performing in-situ sintering of a layer of rigid super-hard composite ceramics on the high temperature resisting flexible fiber pad; then enabling the flexible resins to be penetrated in gaps and holes in the fiber pad and gaps and holes in the super-hard composite ceramic flakes, so that after the resins are solidified, the composite ceramics are fixed on the flexible fiber pad; and finally, removing high molecular materials covering the surfaces of the composite ceramics, so that the surfaces of the ceramics are exposed, and the flexible polishing pad is obtained. According to the flexible polishing pad disclosed by the invention, the super-hard composite ceramic flakes obtained through in-situ sintering have a high grinding removing efficiency; in addition, the flakes are positioned on the flexible fiber pad and the flexible resins, so that when the flakes meet with strong grinding collision, the fiber pad and the resins have the buffering effect, the situation that the ceramic flakes are in hard contact with the surface of a processing workpiece is avoided, and the scratching probability is reduced.
Description
Technical field
The present invention relates to grinding and polishing technical field, espespecially a kind of flexible polishing pad being ground processing for superhard material。
Background technology
The superhard materials such as magnetic, function ceramics, quartz, sapphire are the widely used important materials in field such as precision optical machinery, optoelectronic information, solar energy, these materials have the physical characteristics such as hardness height, fragility is big, processing and forming, surface finish are extremely difficult, and grinding and polishing is a kind of important method that hard brittle material carries out post-production。
The method that hard brittle material is ground polishing is typically with grinding and polishing liquid, polishing fluid is input between two flat tools and is ground polishing, workpiece also is located between abrasive disk, the material type of abrasive disk has cast iron plate or ceramic disk, and grinding and polishing liquid is mainly made up of (representative formula is referred to China's application disclosed invention patent 201510332654.9,201510334985.6,201510388669.7,201210101944.9) components such as abrasive material, acid-base modifier, surfactant and oxidants；And adopt grinding and polishing liquid to be ground polishing and belong to the processing of abrasive material free type, the program there are disadvantages that, for instance working (machining) efficiency is low, and abrasive material makes that consumption is huge, need larger amount of milling apparatus, and treatment cost of waste liquor is high。But the advantage of free type grinding and polishing is in that the surface quality that its rapidoprint obtains is very good, and scuffing rate is low。
For processing relative to conventional abrasive material free type, solidified abrasive grinding polishing technology is arisen at the historic moment in this context。Abrasive grain binding agent is mainly fixed by concretion abrasive, and abrasive particle and workpiece that abutment surface is protruding interact, and reach the effect that material is removed。Employing solidified abrasive grinding polishes, and has higher working (machining) efficiency, can reduce the cleaning of process for treating waste liquor and workpiece, significantly reduce environmental pollution。The bonding agent that concretion abrasive is conventional has metallic bond (such as Chinese patent 201080032139.4, metal-bonded grinding wheel and manufacture method thereof), resinoid bond is (such as Chinese patent 201110329216.9, a kind of resin wheel and preparation method thereof) and vitrified bond (such as Chinese patent 200910225700.X, vitrified bonded grinding wheel) etc.。In multiple bonding agent, concretion abrasive prepared by vitrified bond has more advantages: intensity is high, heat-resist, not easily generates heat and blocking hole, have stable long-lived and higher grinding efficiency in grinding process。But material is ground and polishes there is the problem easily scratched by the concretion abrasive prepared with vitrified bond。
In order to solve the concretion abrasive scuffing problem to material surface, resinoid bond or rubber is generally adopted in the industry to prepare concretion abrasive。Such as Chinese patent 201410539722.4, a kind of fixing abrasive polishing pad adopting nanometer aggregated structure abrasive material, a main employing nanometer aggregated structure abrasive material is that a nanometer gathering silicon oxide, nanometer gathering aluminium oxide, nanometer gathering cerium oxide are as abrasive material, composition problem due to raw material, limiting for the object used, processing clearance is not high simultaneously；For another example Chinese patent 201110068907.8, concretion abrasive polishing pad and preparation method thereof, it is proposed to a kind of concretion abrasive polishing pad with multilamellar abrasive material structure, in abrasive material, the density of abrasive material is gradually increased from top layer to bottom。This concretion abrasive polishing pad is generally mixed compacting by abrasive grains and Resin adhesive and is formed。Chinese patent 200710024821.9, disclose a kind of solidified abrasive grinding polishing pad with self-correction function and preparation method, patent being mentioned, this grinding and polishing pad is made up of abrasive material, rigid layer, wherein abrasive material is made up of super hard abrasive and the macromolecular material such as acrylic compounds or polydimethylsiloxane, although high polymer binder concretion abrasive polishing pad can reduce scuffing probability, but processing clearance is non-normally low。
Summary of the invention
For the removal efficiency for promoting concretion abrasive polishing pad, avoid producing a large amount of scuffing, it is desirable to provide one is for crisp material superhard, super, it is possible to replace traditional free abrasive attrition process simultaneously, improve lapping efficiency, and reduce the flexible polishing pad that surface of the work scratches。
For achieving the above object, the technical solution used in the present invention is: a kind of flexible polishing pad, described polishing pad is mainly made up of high-temperature flexible fiber mat, superhard composite ceramics thin slice and flexible resin, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin permeates in the gap and hole of fiber mat and superhard composite ceramics thin slice, and the preparation method of described polishing pad is as follows:
(1) superhard composite ceramics is prepared: described superhard composite ceramics includes slurry and bonding agent, and slurry is mainly made up of abrasive material and vitrified bonding；Described abrasive material is with superhard material for primary raw material, and composition proportion and granularity are as follows:
Superhard material 3～60wt%, powder granularity 0.5～26um；
Described vitrified bonding with Kaolin, quartz sand, Borax, Lithium hydrate, zinc oxide, ferrum oxide, copper oxide, fluorite mixed powder for primary raw material, each composition proportion and granularity are as follows,
Kaolin 1～3wt%, powder granularity 0.1～2um；
Quartz sand 10～40wt%, powder granularity 1～10um；
Borax 15～20wt%, powder granularity 1～10um；
Lithium hydrate 5～15wt%, powder granularity 1～20um；
Fluorite 10～35wt%, powder granularity 1～10um；
Copper oxide 3～5wt%, powder granularity 1～10um；
Zinc oxide 3～5wt%, powder granularity 1～10um；
Ferrum oxide 3～5wt%, powder granularity 1～10um；
By above-mentioned formula each component is sufficiently mixed and stirs, then press solid 40～60 parts, deionized water 60～40 parts, the ratio mix and blend of bonding agent 1～5 part 1-2 hour, prepare into superhard composite ceramics slurry；
(2) flexible fiber pad-superhard composite ceramics thin slice complex is prepared: the superhard composite ceramics slurry described in step () is uniformly coated to the surface of high-temperature flexible fiber mat, then dries；Dried base substrate is put in vacuum sintering furnace, is evacuated to 5～20Pa, heat 20～40 minutes under 200～300 DEG C of conditions, it is warming up to 600～900 DEG C again, it is incubated 2～3 hours, then naturally cools to room temperature, make superhard composite ceramics thin slice sinter at fiber mat surface in situ；
(3) plastic polishing pad: after in-situ sintering, high-temperature flexible fiber mat-superhard composite ceramics thin slice complex is infiltrated again with flexible resin, resin is made to be filled in the crackle of ceramic sheet and hole and fibrage body, resin is made to solidify again, finally the resin of superhard composite ceramics sheet surface is removed, the surface making superhard composite ceramics thin slice is exposed, and can obtain flexible polishing pad。
Described superhard material is one or more in single-crystal diamond, polycrystalline diamond, boron carbide, cubic boron nitride, carborundum, white fused alumina, Brown Alundum。
Described high-temperature flexible fiber mat is one or more knitted bodies in carbon fiber, glass fibre, asbestos, and thickness is 0.1～3mm。
Described flexible resin be epoxy resin, polyurethane, silica column, polypropylene, polyethylene, polyethylene terephthalate, Polyethylene Glycol, hard paraffin, polrvinyl chloride one or more。
Described bonding agent is coupling agent, or polyacrylic acid, or the mixture of polyacrylic acid and polyacrylate, or coupling agent and polyacrylic mixture, or the mixture of coupling agent and polyacrylic acid, polyacrylate。
Described polishing pad is mainly made up of high-temperature flexible fiber mat, superhard composite ceramics thin slice and flexible resin, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin permeates in the gap and hole of fiber mat and superhard composite ceramics thin slice, and the preparation method of described polishing pad is as follows
(1) superhard composite ceramics is prepared: described superhard composite ceramics includes slurry and bonding agent, and slurry is mainly made up of abrasive material and vitrified bonding；Described abrasive material with polycrystalline diamond for primary raw material, vitrified bonding with Kaolin, quartz sand, Borax, Lithium hydrate, zinc oxide, ferrum oxide, copper oxide, fluorite mixed powder for primary raw material, weigh the material of following mass ratio:
Kaolin 3wt%, powder granularity 0.2um；
Quartz sand 38wt%, powder granularity 1um；
Borax 15wt%, powder granularity 1um；
Lithium hydrate 5wt%, powder granularity 5um；
Fluorite 30wt%, powder granularity 5um；
Copper oxide 3wt%, powder granularity 2um；
Zinc oxide 3wt%, powder granularity 2um；
Ferrum oxide 3wt%, powder granularity 2um；
And with solids content for 50 mass, the ratio mix and blend of 50 parts of quality of deionized water is after 1 hour, in grinding in ball grinder 1 hour；Weighing the ball milling slurry of 100 mass parts after ball milling, and add 55 mass parts polycrystalline diamonds, powder granularity is 3um, adds the polyacrylic acid of 5 mass parts, stirs 1 hour with blender, it is thus achieved that superhard composite ceramics slurry；
(2) flexible fiber pad-superhard composite ceramics thin slice complex is prepared: use comma coating machine to be uniformly coated on the fiberglass packing that thickness is 0.3mm by prepared above-mentioned slurry, coating layer thickness is 0.5～1mm, the glass fibre used is cellular structure, the slurry being coated with can infiltrate through in gap and the hole of fiber, after slurry drying, the fiber mat being coated with blank is put in vacuum sintering furnace, it is evacuated to 5～20Pa, heat 20～40 minutes under 200～300 DEG C of conditions, it is warming up to 600～900 DEG C again, it is incubated 2～3 hours, naturally cool to room temperature again, superhard composite ceramics thin slice is made to sinter at fiberglass packing surface in situ；
(3) plastic polishing pad: after in-situ sintering, high-temperature flexible fiber mat-superhard composite ceramics thin slice complex is infiltrated again with elastic polyurethane, resin is made to be filled in the crackle of ceramic sheet and hole and fibrage body, after waiting that resin solidifies, the surface resin of composite ceramics thin slice is removed, ceramic sheet surface is made to expose, it is thus achieved that flexible polishing pad。
A kind of flexible polishing pad, described polishing pad is mainly made up of high-temperature flexible fiber mat, superhard composite ceramics thin slice and flexible resin, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin permeates in the gap and hole of fiber mat and superhard composite ceramics thin slice, and the preparation method of described polishing pad is as follows:
(1) superhard composite ceramics is prepared: described superhard composite ceramics includes slurry and bonding agent, and slurry is mainly made up of abrasive material and vitrified bonding；Described abrasive material with cubic boron nitride for primary raw material, vitrified bonding with Kaolin, quartz sand, Borax, Lithium hydrate, zinc oxide, ferrum oxide, copper oxide, fluorite mixed powder for primary raw material, weigh the material of following mass ratio:
Kaolin 3wt%, powder granularity 0.2um；
Quartz sand 38wt%, powder granularity 1um；
Borax 15wt%, powder granularity 1um；
Lithium hydrate 5wt%, powder granularity 5um；
Fluorite 30wt%, powder granularity 5um；
Copper oxide 3wt%, powder granularity 2um；
Zinc oxide 3wt%, powder granularity 2um；
Ferrum oxide 3wt%, powder granularity 2um；
And with solids content for 50 mass, the ratio mix and blend of 50 parts of quality of deionized water is after 1 hour, in grinding in ball grinder 1 hour；Weighing the ball milling slurry of 100 mass parts after ball milling, and add 55 mass parts cubic boron nitrides, powder granularity is 3um, adds the polyacrylic acid of 5 mass parts, stirs 1 hour with blender, it is thus achieved that superhard composite ceramics slurry；
(2) flexible fiber pad-superhard composite ceramics thin slice complex is prepared: use comma coating machine to be uniformly coated on the carbon fibre mat that thickness is 0.3mm by prepared above-mentioned slurry, coating layer thickness is 0.5～1mm, the slurry being coated with can infiltrate through in gap and the hole of fiber, after slurry drying, the fiber mat being coated with blank is put in vacuum sintering furnace, it is evacuated to 5～20Pa, heat 20～40 minutes under 200～300 DEG C of conditions, it is warming up to 600～900 DEG C again, it is incubated 2～3 hours, naturally cool to room temperature again, superhard composite ceramics thin slice is made to sinter at fiberglass packing surface in situ；
(3) plastic polishing pad: after in-situ sintering, high-temperature flexible fiber mat-superhard composite ceramics thin slice complex is infiltrated again with elastic polyurethane, resin is made to be filled in the crackle of ceramic sheet and hole and fibrage body, after waiting that resin solidifies, the surface resin of composite ceramics thin slice is removed, ceramic sheet surface is made to expose, it is thus achieved that flexible polishing pad。
Beneficial effects of the present invention is embodied in: the present invention is one layer of superhard composite ceramics of rigidity of in-situ sintering above high-temperature flexible fiber mat, permeate in the gap and hole of fiber mat and superhard composite ceramics thin slice with flexible resin again, after resin solidifies, composite ceramics is fixed on flexible fiber pad；Finally, the macromolecular material covering composite ceramics surface is removed, making ceramic surface expose, it is thus achieved that flexible polishing pad, the superhard composite ceramics thin slice of in-situ sintering has higher grinding removal efficiency, additionally, be positioned on flexible fiber pad and flexible resin due to thin slice, when meeting with stronger grinding and clashing into, fiber mat and resin play cushioning effect, avoid ceramic sheet to occur firmly to contact with the surface of processing work, reduce and scratch probability。
Accompanying drawing explanation
Fig. 1 is the cross-sectional view of flexible polishing pad of the present invention。
Fig. 2 is the front schematic view of flexible polishing pad of the present invention。
Fig. 3 is a kind of typical case's weaving method of high-temperature flexible fiber cloth。
Fig. 4 is another kind of typical case's weaving method of high-temperature flexible fiber cloth。
Accompanying drawing mark illustrates: 101-high-temperature flexible fiber mat；The superhard composite ceramics thin slice of 102-；103-flexible resin。
Detailed description of the invention
The detailed description of the invention of patent of the present invention is described in detail below in conjunction with accompanying drawing:
As shown in Figure 1-2, a kind of flexible polishing pad, described polishing pad is mainly made up of high-temperature flexible fiber mat, superhard composite ceramics thin slice and flexible resin, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin permeates in the gap and hole of fiber mat and superhard composite ceramics thin slice, and the preparation method of described polishing pad is as follows:
(1) superhard composite ceramics is prepared: described superhard composite ceramics includes slurry and bonding agent, and slurry is mainly made up of abrasive material and vitrified bonding；Described abrasive material is with superhard material for primary raw material, and composition proportion and granularity are as follows:
Superhard material 3～60wt%, powder granularity 0.5～26um；
Described vitrified bonding with Kaolin, quartz sand, Borax, Lithium hydrate, zinc oxide, ferrum oxide, copper oxide, fluorite mixed powder for primary raw material, each composition proportion and granularity are as follows,
Kaolin 1～3wt%, powder granularity 0.1～2um；
Quartz sand 10～40wt%, powder granularity 1～10um；
Borax 15～20wt%, powder granularity 1～10um；
Lithium hydrate 5～15wt%, powder granularity 1～20um；
Fluorite 10～35wt%, powder granularity 1～10um；
Copper oxide 3～5wt%, powder granularity 1～10um；
Zinc oxide 3～5wt%, powder granularity 1～10um；
Ferrum oxide 3～5wt%, powder granularity 1～10um；
By above-mentioned formula each component is sufficiently mixed and stirs, then press solid 40～60 parts, deionized water 60～40 parts, the ratio mix and blend of bonding agent 1～5 part 1-2 hour, prepare into superhard composite ceramics slurry；
(2) flexible fiber pad-superhard composite ceramics thin slice complex is prepared: the superhard composite ceramics slurry described in step () is uniformly coated to the surface of high-temperature flexible fiber mat, then dries；Dried base substrate is put in vacuum sintering furnace, is evacuated to 5～20Pa, heat 20～40 minutes under 200～300 DEG C of conditions, it is warming up to 600～1000 DEG C again, it is incubated 2～3 hours, then naturally cools to room temperature, make superhard composite ceramics thin slice sinter at fiber mat surface in situ；
(3) plastic polishing pad: after in-situ sintering, high-temperature flexible fiber mat-superhard composite ceramics thin slice complex is infiltrated again with flexible resin, resin is made to be filled in the crackle of ceramic sheet and hole and fibrage body, resin is made to solidify again, finally the resin of superhard composite ceramics sheet surface is removed, the surface making superhard composite ceramics thin slice is exposed, and can obtain flexible polishing pad。
In the preparation of described superhard composite ceramics slurry, described coupling agent is silane coupling agent, its decomposition temperature is more than 200 DEG C, and described silane coupling agent is any one or a few in aqueous siloxanes, epoxy radicals silicone hydride, double; two amino silane, acyloxy silane, aromatic radical silane or vinyl silanes。
In the preparation of described superhard composite ceramics slurry, described polyacrylate is sodium polyacrylate or polyacrylic acid potassium。Polyacrylic molecular weight is 2000-10000000, and the molecular weight of polyacrylate is 2000-10000000。
In the preparation of described superhard composite ceramics slurry, the particle diameter of abrasive material selects according to the target roughness of polished object, and abrasive material powder body particle size range is 0.5～26um。
The selection of abrasive grain kind is not had special restriction by the present invention, as long as they in hardness more than or equal to by the hardness of paraboloid, abrasive material is preferably used the raw material that hardness is high as far as possible, mass ratio is big as far as possible, because this abrasive material can improve polishing removal efficiency and improve by paraboloid surface quality, can preferably single-crystal diamond, polycrystalline diamond, boron carbide, cubic boron nitride, carborundum, white fused alumina, in Brown Alundum any one or multiple, the ratio of described abrasive material is preferably 3%～60%, more preferably 50%～60%。
Additionally, the base material of coating composite ceramics slurry is not particularly limited by the present invention, as long as have the high temperature resistant porous substrate in hole, the nonrestrictive example of the spendable high temperature resistant porous substrate of the present invention includes carbon fiber, glass fibre, asbestos fibre, preferred thickness is 0.5～5mm, more preferably 1～2mm。
Described fiber remains stable for for a long time under 600～1000 DEG C of high temperature air environment。
In a kind of flexible polishing pad provided by the invention, in order to make superhard composite ceramics slurry uniformly be coated to substrate surface, can using any method known to those skilled in the art, spendable method includes dip-coating, die head painting, roller coat, comma is coated with or it combines。Certainly, it is possible to by being manually coated with。
Embodiment one: the polishing pad being abrasive material with polycrystalline diamond。
A kind of flexible polishing pad, described polishing pad is mainly made up of high-temperature flexible fiber mat, superhard composite ceramics thin slice and flexible resin, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin permeates in the gap and hole of fiber mat and superhard composite ceramics thin slice, and the preparation method of described polishing pad is as follows
(1) superhard composite ceramics is prepared: described superhard composite ceramics includes slurry and bonding agent, and slurry is mainly made up of abrasive material and vitrified bonding；Described abrasive material with polycrystalline diamond for primary raw material, vitrified bonding with Kaolin, quartz sand, Borax, Lithium hydrate, zinc oxide, ferrum oxide, copper oxide, fluorite mixed powder for primary raw material, weigh the material of following mass ratio:
Kaolin 3wt%, powder granularity 0.2um；
Quartz sand 38wt%, powder granularity 1um；
Borax 15wt%, powder granularity 1um；
Lithium hydrate 5wt%, powder granularity 5um；
Fluorite 30wt%, powder granularity 5um；
Copper oxide 3wt%, powder granularity 2um；
Zinc oxide 3wt%, powder granularity 2um；
Ferrum oxide 3wt%, powder granularity 2um；
And with solids content for 50 mass, the ratio mix and blend of 50 parts of quality of deionized water is after 1 hour, in grinding in ball grinder 1 hour；Weighing the ball milling slurry of 100 mass parts after ball milling, and add 55 mass parts polycrystalline diamonds, powder granularity is 3um, adds the polyacrylic acid of 5 mass parts, stirs 1 hour with blender, it is thus achieved that superhard composite ceramics slurry。
(2) flexible fiber pad-superhard composite ceramics thin slice complex is prepared: using comma coating machine to be uniformly coated on the fiberglass packing that thickness is 0.3mm by prepared above-mentioned slurry, coating layer thickness is 0.5～1mm。The glass fibre used is cellular structure, and as shown in Figure 3 or Figure 4, the slurry being coated with can infiltrate through in gap and the hole of fiber the type of weave of fiber。After slurry drying, the fiber mat being coated with blank is put in vacuum sintering furnace, it is evacuated to 5～20Pa, heat 20～40 minutes under 200～300 DEG C of conditions, it is warming up to 600～900 DEG C again, it is incubated 2～3 hours, then naturally cools to room temperature, make superhard composite ceramics thin slice sinter at fiberglass packing surface in situ。
(3) plastic polishing pad: after in-situ sintering, high-temperature flexible fiber mat-superhard composite ceramics thin slice complex is infiltrated again with elastic polyurethane, resin is made to be filled in the crackle of ceramic sheet and hole and fibrage body, after waiting that resin solidifies, the surface resin of composite ceramics thin slice is removed, ceramic sheet surface is made to expose, it is thus achieved that flexible polishing pad。
Embodiment two: the polishing pad being abrasive material with cubic boron nitride。Embodiment two is identical with the production method of embodiment one, differs only in embodiment two and adopts cubic boron nitride as abrasive material, adopts carbon fiber as the base wad of ultra hard ceramic slurry。
Embodiment three: the polishing pad being abrasive material with polycrystalline diamond
A kind of flexible polishing pad, described polishing pad is mainly made up of high-temperature flexible fiber mat, superhard composite ceramics thin slice and flexible resin, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin permeates in the gap and hole of fiber mat and superhard composite ceramics thin slice, and the preparation method of described polishing pad is as follows:
(1) superhard composite ceramics is prepared: described superhard composite ceramics includes slurry and bonding agent, and slurry is mainly made up of abrasive material and vitrified bonding；Described abrasive material with polycrystalline diamond for primary raw material, vitrified bonding with Kaolin, quartz sand, Borax, Lithium hydrate, zinc oxide, ferrum oxide, copper oxide, fluorite mixed powder for primary raw material, weigh the material of following mass ratio,
Kaolin 3wt%, powder granularity 0.2um；
Quartz sand 38wt%, powder granularity 1um；
Borax 15wt%, powder granularity 1um；
Lithium hydrate 5wt%, powder granularity 5um；
Fluorite 30wt%, powder granularity 5um；
Copper oxide 3wt%, powder granularity 2um；
Zinc oxide 3wt%, powder granularity 2um；
Ferrum oxide 3wt%, powder granularity 2um；
And with solids content for 50 parts of quality, 40 parts of quality of deionized water, 5 parts of quality of polyacrylic acid, 5 parts of quality of aqueous silane coupling agent (3-glycidyl ether propyl-triethoxysilicane), mix and blend was after 1 hour, in grinding in ball grinder 1 hour；Weighing the ball milling slurry of 100 mass parts after ball milling, and add 55 mass parts polycrystalline diamonds, powder granularity is 3um, stirs 1 hour with blender, it is thus achieved that superhard composite ceramics slurry。
(2) prepare flexible fiber pad-superhard composite ceramics thin slice complex: identical with (two) in embodiment one, differ only in: embodiment three kinds uses epoxy resin infiltration high-temperature flexible fiber mat-superhard composite ceramics thin slice complex。
(3) plastic polishing pad: after in-situ sintering, high-temperature flexible fiber mat-superhard composite ceramics thin slice complex is infiltrated again with epoxy resin, resin is made to be filled in the crackle of ceramic sheet and hole and fibrage body, after waiting that resin solidifies, the surface resin of composite ceramics thin slice is removed, ceramic sheet surface is made to expose, it is thus achieved that flexible polishing pad。
The above, it it is only presently preferred embodiments of the present invention, not the technical scope of the present invention is imposed any restrictions, the technical staff of the industry, under the inspiration of the technical program, some deformation and amendment, every any amendment, equivalent variations and modification above embodiments made according to the technical spirit of the present invention can be made, all still fall within the scope of technical solution of the present invention。
Claims (7)
1. a flexible polishing pad, it is characterized in that: described polishing pad is mainly made up of high-temperature flexible fiber mat, superhard composite ceramics thin slice and flexible resin, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin permeates in the gap and hole of fiber mat and superhard composite ceramics thin slice, and the preparation method of described polishing pad is as follows:
(1) superhard composite ceramics is prepared: described superhard composite ceramics includes slurry and bonding agent, and slurry is mainly made up of abrasive material and vitrified bonding；Described abrasive material is with superhard material for primary raw material, and composition proportion and granularity are as follows:
Superhard material 3～60wt%, powder granularity 0.5～26um；
Described vitrified bonding with Kaolin, quartz sand, Borax, Lithium hydrate, zinc oxide, ferrum oxide, copper oxide, fluorite mixed powder for primary raw material, each composition proportion and granularity are as follows,
Kaolin 1～3wt%, powder granularity 0.1～2um；
Quartz sand 10～40wt%, powder granularity 1～10um；
Borax 15～20wt%, powder granularity 1～10um；
Lithium hydrate 5～15wt%, powder granularity 1～20um；
Fluorite 10～35wt%, powder granularity 1～10um；
Copper oxide 3～5wt%, powder granularity 1～10um；
Zinc oxide 3～5wt%, powder granularity 1～10um；
Ferrum oxide 3～5wt%, powder granularity 1～10um；
By above-mentioned formula each component is sufficiently mixed and stirs, then press solid 40～60 parts, deionized water 60～40 parts, the ratio mix and blend of bonding agent 1～5 part 1-2 hour, prepare into superhard composite ceramics slurry；
(2) flexible fiber pad-superhard composite ceramics thin slice complex is prepared: by institute in step ()
The superhard composite ceramics slurry stated uniformly is coated to the surface of high-temperature flexible fiber mat, then dries；Dried base substrate is put in vacuum sintering furnace, is evacuated to 5～20Pa, heat 20～40 minutes under 200～300 DEG C of conditions, it is warming up to 600～900 DEG C again, it is incubated 2～3 hours, then naturally cools to room temperature, make superhard composite ceramics thin slice sinter at fiber mat surface in situ；
(3) plastic polishing pad: after in-situ sintering, high-temperature flexible fiber mat-superhard composite ceramics thin slice complex is infiltrated again with flexible resin, resin is made to be filled in the crackle of ceramic sheet and hole and fibrage body, resin is made to solidify again, finally the resin of superhard composite ceramics sheet surface is removed, the surface making superhard composite ceramics thin slice is exposed, and can obtain flexible polishing pad。
2. a kind of flexible polishing pad according to claim 1, it is characterised in that: described superhard material is one or more in single-crystal diamond, polycrystalline diamond, boron carbide, cubic boron nitride, carborundum, white fused alumina, Brown Alundum。
3. a kind of flexible polishing pad according to claim 1, it is characterised in that: described high-temperature flexible fiber mat is one or more knitted bodies in carbon fiber, glass fibre, asbestos, and thickness is 0.1～3mm。
4. a kind of flexible polishing pad according to claim 1, it is characterised in that: described flexible resin be epoxy resin, polyurethane, silica column, polypropylene, polyethylene, polyethylene terephthalate, Polyethylene Glycol, hard paraffin, polrvinyl chloride one or more。
5. a kind of flexible polishing pad according to claim 1, it is characterized in that: described bonding agent is coupling agent, or polyacrylic acid, or the mixture of polyacrylic acid and polyacrylate, or coupling agent and polyacrylic mixture, or the mixture of coupling agent and polyacrylic acid, polyacrylate。
6. a flexible polishing pad, it is characterized in that: described polishing pad is mainly made up of high-temperature flexible fiber mat, superhard composite ceramics thin slice and flexible resin, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin permeates in the gap and hole of fiber mat and superhard composite ceramics thin slice, and the preparation method of described polishing pad is as follows
(1) superhard composite ceramics is prepared: described superhard composite ceramics includes slurry and bonding agent, and slurry is mainly made up of abrasive material and vitrified bonding；Described abrasive material with polycrystalline diamond for primary raw material, vitrified bonding with Kaolin, quartz sand, Borax, Lithium hydrate, zinc oxide, ferrum oxide, copper oxide, fluorite mixed powder for primary raw material, weigh the material of following mass ratio:
Kaolin 3wt%, powder granularity 0.2um；
Quartz sand 38wt%, powder granularity 1um；
Borax 15wt%, powder granularity 1um；
Lithium hydrate 5wt%, powder granularity 5um；
Fluorite 30wt%, powder granularity 5um；
Copper oxide 3wt%, powder granularity 2um；
Zinc oxide 3wt%, powder granularity 2um；
Ferrum oxide 3wt%, powder granularity 2um；
And with solids content for 50 mass, the ratio mix and blend of 50 parts of quality of deionized water is after 1 hour, in grinding in ball grinder 1 hour；Weighing the ball milling slurry of 100 mass parts after ball milling, and add 55 mass parts polycrystalline diamonds, powder granularity is 3um, adds the polyacrylic acid of 5 mass parts, stirs 1 hour with blender, it is thus achieved that superhard composite ceramics slurry；
(2) flexible fiber pad-superhard composite ceramics thin slice complex is prepared: use comma coating machine to be uniformly coated on the fiberglass packing that thickness is 0.3mm by prepared above-mentioned slurry, coating layer thickness is 0.5～1mm, the glass fibre used is cellular structure, the slurry being coated with can infiltrate through in gap and the hole of fiber, after slurry drying, the fiber mat being coated with blank is put in vacuum sintering furnace, it is evacuated to 5～20Pa, heat 20～40 minutes under 200～300 DEG C of conditions, it is warming up to 600～900 DEG C again, it is incubated 2～3 hours, naturally cool to room temperature again, superhard composite ceramics thin slice is made to sinter at fiberglass packing surface in situ；
(3) plastic polishing pad: after in-situ sintering, high-temperature flexible fiber mat-superhard composite ceramics thin slice complex is infiltrated again with elastic polyurethane, resin is made to be filled in the crackle of ceramic sheet and hole and fibrage body, after waiting that resin solidifies, the surface resin of composite ceramics thin slice is removed, ceramic sheet surface is made to expose, it is thus achieved that flexible polishing pad。
7. a flexible polishing pad, it is characterized in that: described polishing pad is mainly made up of high-temperature flexible fiber mat, superhard composite ceramics thin slice and flexible resin, wherein superhard composite ceramics thin slice is attached on high-temperature flexible fiber mat, flexible resin permeates in the gap and hole of fiber mat and superhard composite ceramics thin slice, and the preparation method of described polishing pad is as follows
(1) superhard composite ceramics is prepared: described superhard composite ceramics includes slurry and bonding agent, and slurry is mainly made up of abrasive material and vitrified bonding；Described abrasive material with cubic boron nitride for primary raw material, vitrified bonding with Kaolin, quartz sand, Borax, Lithium hydrate, zinc oxide, ferrum oxide, copper oxide, fluorite mixed powder for primary raw material, weigh the material of following mass ratio:
Kaolin 3wt%, powder granularity 0.2um；
Quartz sand 38wt%, powder granularity 1um；
Borax 15wt%, powder granularity 1um；
Lithium hydrate 5wt%, powder granularity 5um；
Fluorite 30wt%, powder granularity 5um；
Copper oxide 3wt%, powder granularity 2um；
Zinc oxide 3wt%, powder granularity 2um；
Ferrum oxide 3wt%, powder granularity 2um；
And with solids content for 50 mass, the ratio mix and blend of 50 parts of quality of deionized water is after 1 hour, in grinding in ball grinder 1 hour；Weighing the ball milling slurry of 100 mass parts after ball milling, and add 55 mass parts cubic boron nitrides, powder granularity is 3um, adds the polyacrylic acid of 5 mass parts, stirs 1 hour with blender, it is thus achieved that superhard composite ceramics slurry；
(2) flexible fiber pad-superhard composite ceramics thin slice complex is prepared: use comma coating machine to be uniformly coated on the carbon fibre mat that thickness is 0.3mm by prepared above-mentioned slurry, coating layer thickness is 0.5～1mm, the slurry being coated with can infiltrate through in gap and the hole of fiber, after slurry drying, the fiber mat being coated with blank is put in vacuum sintering furnace, it is evacuated to 5～20Pa, heat 20～40 minutes under 200～300 DEG C of conditions, it is warming up to 600～900 DEG C again, it is incubated 2～3 hours, naturally cool to room temperature again, superhard composite ceramics thin slice is made to sinter at fiberglass packing surface in situ；
(3) plastic polishing pad: after in-situ sintering, high-temperature flexible fiber mat-superhard composite ceramics thin slice complex is infiltrated again with elastic polyurethane, resin is made to be filled in the crackle of ceramic sheet and hole and fibrage body, after waiting that resin solidifies, the surface resin of composite ceramics thin slice is removed, ceramic sheet surface is made to expose, it is thus achieved that flexible polishing pad。
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| CN108687655A (en) * | 2018-06-01 | 2018-10-23 | 上海欧柏森环境工程管理有限公司 | A kind of combination stone polishing, grinding, cleaning pad |
| CN110181417A (en) * | 2019-05-30 | 2019-08-30 | 厦门家和兴钻石工具有限公司 | A kind of diamond flexible disc and preparation method thereof |
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