CN105682270B - A kind of high-frequency electromagnetic induction hot pressed sintering and brazing device - Google Patents
A kind of high-frequency electromagnetic induction hot pressed sintering and brazing device Download PDFInfo
- Publication number
- CN105682270B CN105682270B CN201610054245.1A CN201610054245A CN105682270B CN 105682270 B CN105682270 B CN 105682270B CN 201610054245 A CN201610054245 A CN 201610054245A CN 105682270 B CN105682270 B CN 105682270B
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- furnace body
- heating furnace
- inductor
- induction heating
- induction
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/04—Crucible or pot furnaces adapted for treating the charge in vacuum or special atmosphere
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/14—Arrangements of heating devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/22—Furnaces without an endless core
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/36—Coil arrangements
- H05B6/42—Cooling of coils
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/04—Crucible or pot furnaces adapted for treating the charge in vacuum or special atmosphere
- F27B2014/045—Vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
- F27D2009/0002—Cooling of furnaces
- F27D2009/001—Cooling of furnaces the cooling medium being a fluid other than a gas
- F27D2009/0013—Cooling of furnaces the cooling medium being a fluid other than a gas the fluid being water
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2206/00—Aspects relating to heating by electric, magnetic, or electromagnetic fields covered by group H05B6/00
- H05B2206/02—Induction heating
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
- General Induction Heating (AREA)
Abstract
The present invention relates to a kind of high-frequency electromagnetic induction hot pressed sintering and brazing devices, including high frequency induction power supply, inductor, induction heating furnace body, driving mechanism, double pressing mechanisms, vacuum device, inert gas shielding mechanism, the graphite jig component to place sample and Non-contact Infrared Temperature Measurement mechanism；The inductor and induction heating furnace body of the high-frequency electromagnetic induction heating equipment can carry out circulating water by same cooling-water machine；Double pressing mechanisms are made of the mechanical load of seaming chuck part and the hydraulic loaded part of push-down head part; it vacuum-pumping and is passed through inert gas after induction heating furnace body sealing and is protected, the optical fiber infrared temperature transducers for measuring thermal cycle are provided in front of the induction heating furnace body.Present apparatus heating speed is fast, energy saving, it can be achieved that high-frequency electromagnetic induction heating, mechanical pressurization, atmosphere protection integration.
Description
Technical field
The present invention relates to mechanical equipment technical field, especially a kind of high-frequency electromagnetic induction hot pressed sintering and brazing device.
Background technique
In conventional heating techniques, what is generallyd use is the mode of resistance wire and graphite heating.And in these heating methods,
Energy loss is big, and heat energy efficiency is low, and heating speed is slow, and resistance wire is subjected to high-temperature oxydation for a long time and is easy to blow damage, and
There is also some potential safety problemss.And electromagnetic induction heating is to generate alternating magnetic field by inductor using alternating current, is led
It causes to generate alternating current in interior of articles therein, to play the effect of heating object.This heating method belongs to material
Inside heating, has many advantages, such as energy-efficient, environmentally friendly, high production efficiency and long service life.
Electromagnetic induction heating technology has been widely used in heat treatment, Metal Melting and welding of various metal materials etc.
Field.Current electromagnetic induction hot-press equipment is substantially using hydraulic pulldown, is applied under in general this pressuring method
The minimum pressure added is all larger, thus be not appropriate for required moulding pressure it is smaller under situation, especially to this kind of brittleness of ceramics
When great material is attached, the high-frequency electromagnetic induction connection being difficult to realize under small pressure is formed.
Summary of the invention
In view of this, the object of the present invention is to provide a kind of high-frequency electromagnetic induction hot pressed sintering and brazing device, heating speed
It spends fast, energy saving, it can be achieved that high-frequency electromagnetic induction heating, mechanical pressurization, atmosphere protection integration.
The present invention is realized using following scheme: a kind of high-frequency electromagnetic induction hot pressed sintering and brazing device, including high frequency sense
It answers power supply, inductor, induction heating furnace body, driving mechanism, double pressing mechanisms, vacuum device, inert gas shielding mechanism, use
To place the graphite jig component and Non-contact Infrared Temperature Measurement mechanism of sample；A pair of pressurization is provided in the driving mechanism
Mechanism, the induction heating furnace body and double pressing mechanisms, the vacuum device and the inert gas shielding mechanism
It is connected, the graphite jig component is placed on double pressing mechanisms and is moved；The inductor is set to the induction
The furnace interior of device heating furnace body, and the inductor is also connected with the high frequency induction power supply；The non-contact infrared is surveyed
Warm mechanism includes an optical fiber infrared temperature transducer, before the optical fiber infrared temperature transducer is set to the induction heating furnace body
Side, to carry out Non-contact Infrared Temperature Measurement to furnace body.
Further, the induction heating furnace body is interlayer water-cooling structure, and the one side wall of the induction heating furnace body is equipped with
One cooling water inlet and a cooling water outlet；The cooling water inlet and the cooling water outlet and a pair of induction heater
Body is connected with the cooling-water machine that the inductor carries out circulating water.
Further, the rear of the induction heating furnace body offers an inductor access port, and the inductor passes through institute
State the central part that inductor access port is set to the inductor heating furnace body；The inductor access port and the induction add
The gap portion of hot stove body is sealed by sealing ring and refractory seals glue.
Further, a fire door is offered in front of the induction heating furnace body, one is provided on the fire door to red
The observation window of outer thermometric, the observation window are made of high temperature resistant quartz glass.
Further, the driving mechanism includes a upper mounted plate and a bottom plate, is provided on fixed plate
Motor, retarder, shaft coupling and the screw rod being connected, the screw rod be equipped with ball nut, the ball nut with move up
Movable plate is connected, and a hydraulic pump is provided on the bottom plate, the hydraulic pump is connected with push-down head；Fixed plate and institute
It states and is also vertically arranged with a guide rod between bottom plate.
Further, the vacuum device includes a vacuum pump to extract air, the inert gas shielding machine
Structure includes an inert gas booster pump to inject inert gas；Another side wall of the induction heating furnace body be provided with one with
The inert gas booster pump that the vacuum pump connection valve and one that the vacuum pump connects are connected with the inert gas booster pump connects
Connect valve.
Further, double pressing mechanisms are by the mechanical pressurization device of upper part and the hydraulic pulldown group of lower part
At including the upper shifting board and hydraulic pump mandril adjusted for the vertical reciprocating motion of independent progress driven through driving mechanism, institute
It states and is equipped with below upper shifting board for inserting the cylindrical seaming chuck above insertion furnace body, be equipped with and use above the hydraulic pump mandril
In inserting the cylindrical push-down head below insertion furnace body, the seaming chuck is fixed through bolt respectively with push-down head.
Further, the exterior material of the seaming chuck and the push-down head is stainless steel, is embedded in the seaming chuck and institute
The internal material of push-down head is stated as graphite pressure head, the position of the seaming chuck and the slotting insertion furnace body of the push-down head has annular close
Rubber pad is sealed, to prevent the protective gas on Loading paths from leaking.
Further, the seaming chuck in double pressing mechanisms connects the side of ball-screw using the retarder of turbine and worm
Formula is vertically moved back and forth, to adjustment speed and amplitude and the small pressure that presses.
Further, the push-down head in double pressing mechanisms is erected in such a way that hydraulic pump mandril connects push-down head
To reciprocating motion, to the big pressure that presses.
In the present invention, the application method of the electromagnetic induction hot pressed sintering and brazing device, comprising the following steps:
(1) sample is placed in graphite jig and is placed on push-down head together, move up push-down head until in upper
Start double pressing mechanisms after pressure head contact, is always maintained at sample in inductor center；
(2) heating furnace body is sealed, is passed through inert protective gas after vacuumizing；
(3) cold water electromechanical source is opened, circulating water is carried out to inductor and induction heating furnace body respectively；
(4) start high frequency induction power supply, carry out inductor under a certain fixed current or fixed frequency to material
Heating；In heating process, the laser aiming point of optical fiber infrared temperature transducer is in sample center always, in heating process
Entire thermal cycle measures.
Compared with prior art, the invention has the following advantages:
1, circulating water is carried out to inductor and heating furnace body simultaneously by same cooling-water machine.
2, the integrated of electromagnetic induction heating, controlled atmosphere and hot pressed sintering or soldering tech is realized.Add using double
Pressure system, the high-frequency electromagnetic induction that both may be implemented under small pressure connect molding needs, institute when also can satisfy powder sintered
The big pressure needed.
3, using the high thermal conductivity of high purity graphite and magnetic permeability, the work of auxiliary heating is played during induction heating
With improving the repeatability of the rate of heat addition and experiment.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of device side in the present invention.
Fig. 2 is the positive structural schematic diagram of the device of the invention.
Fig. 3 is furnace body schematic diagram of the invention.
In figure:
1- bottom plate；2- hydraulic pump；3- push-down head；4- observation window；5- fire door；6- induction heating furnace body；7- seaming chuck；
8- upper shifting board；9- guide sleeve；10- pressure sensor；11- upper mounted plate；12- guide rod；13- shaft coupling；14- retarder；15- rolling
Pearl nut；16- screw rod；17- inductor access port；18- inductor；19- vacuum pump connection valve；20- inert gas booster pump connects
Connect valve；21- joining beam；22- handwheel；23- cooling water inlet；24- cooling water outlet.
Specific embodiment
The present invention will be further described with reference to the accompanying drawings and embodiments.
This implementation provides a kind of high-frequency electromagnetic induction hot pressed sintering and brazing device, as shown in Figure 1, Figure 2 and Figure 3, including
High frequency induction power supply, inductor, induction heating furnace body, driving mechanism, double pressing mechanisms, vacuum device, inert gas shielding
Mechanism, the graphite jig component to place sample and Non-contact Infrared Temperature Measurement mechanism；It is provided in the driving mechanism
A pair of pressing mechanism, the induction heating furnace body and double pressing mechanisms, the vacuum device and the inert gas
Protection mechanism is connected, and the graphite jig component is placed on double pressing mechanisms and is moved；The inductor is set to
The furnace interior of the inductor heating furnace body, and the inductor is also connected with the high frequency induction power supply；It is described non-contact
Formula infrared measurement of temperature mechanism includes an optical fiber infrared temperature transducer, and the optical fiber infrared temperature transducer is set to the induction and adds
In front of hot stove body, to carry out Non-contact Infrared Temperature Measurement to furnace body.
In the present embodiment, the induction heating furnace body 6 is interlayer water-cooling structure, the one side wall of the induction heating furnace body
Equipped with a cooling water inlet 23 and a cooling water outlet 24；The cooling water inlet and the cooling water outlet and a pair of sense
The cooling-water machine for answering heating furnace body to carry out circulating water with the inductor is connected.
In the present embodiment, the rear of the induction heating furnace body offers an inductor access port 17, the inductor
The central part of the inductor heating furnace body is set to by the inductor access port；The inductor access port with it is described
The gap portion of induction heating furnace body is sealed by sealing ring and refractory seals glue.
In the present embodiment, a fire door 5 is offered in front of the induction heating furnace body, is provided with a use on the fire door
With the observation window 4 of infrared measurement of temperature, the observation window is made of high temperature resistant quartz glass.
In the present embodiment, the driving mechanism includes a upper mounted plate 11 and a bottom plate 1, on fixed plate
It is provided with the motor being connected, retarder 14, shaft coupling 13 and screw rod 16, the screw rod is equipped with ball nut 15, described
Ball nut and upper shifting board are connected, and a hydraulic pump 2 are provided on the bottom plate, the hydraulic pump is connected with push-down head；
A guide rod 12 is also vertically arranged between fixed plate and the bottom plate.
In the present embodiment, the vacuum device includes a vacuum pump to extract air, and the inert gas is protected
Protecting mechanism includes an inert gas booster pump to inject inert gas；Another side wall of the induction heating furnace body is provided with
The one vacuum pump connection valve 19 connecting with the vacuum pump and the inert gas that is connected with the inert gas booster pump increase
Press pump connection valve 20.
In the present embodiment, double pressing mechanisms are filled by the mechanical pressurization device of upper part and the hydraulic pressurization of lower part
Composition is set, carries out the upper shifting board 8 and hydraulic pump top that vertical reciprocating motion is adjusted for independent including what is driven through driving mechanism
Bar, the upper shifting board lower section is equipped with the seaming chuck 7 for inserting the cylinder above insertion furnace body, the hydraulic pump mandril top
Equipped with for inserting the cylindrical push-down head 3 below insertion furnace body, the seaming chuck is fixed through bolt respectively with push-down head.
In the present embodiment, the exterior material of the seaming chuck and the push-down head is stainless steel, is embedded in the seaming chuck
Internal material with the push-down head is graphite pressure head, and there is ring in the position of the seaming chuck and the slotting insertion furnace body of the push-down head
Shape sealing rubber pad, to prevent the protective gas on Loading paths from leaking.
In the present embodiment, the seaming chuck in double pressing mechanisms connects ball-screw using the retarder of turbine and worm
Mode vertically moved back and forth, to adjustment speed and amplitude and the small pressure that presses.
In the present embodiment, the push-down head in double pressing mechanisms using hydraulic pump mandril connect push-down head by the way of into
Row is vertical to be moved back and forth, to the big pressure that presses.
In the present embodiment, a pressure sensor 10 is additionally provided on the upper shifting board.
In the present embodiment, which further includes complex root joining beam 21, is added to the fixation driving mechanism and described pair
Press mechanism；The connection root one end being arranged above fixed plate is also connected with a handwheel 22, the upper shifting board by guide sleeve 9 with
The root is connected.
In the present embodiment, the application method of the electromagnetic induction hot pressed sintering and brazing device, comprising the following steps:
(1) sample is placed in graphite jig and is placed on push-down head together, move up push-down head until in upper
Start double pressing mechanisms after pressure head contact, is always maintained at sample in inductor center；
(2) heating furnace body is sealed, is passed through inert protective gas after vacuumizing；
(3) cold water electromechanical source is opened, circulating water is carried out to inductor and induction heating furnace body respectively；
(4) start high frequency induction power supply, be that inductor can carry out material under a certain fixed current or fixed frequency
Heating；In heating process, the laser aiming point of optical fiber infrared temperature transducer is in sample center always, in heating process
Entire thermal cycle measures.
The foregoing is merely presently preferred embodiments of the present invention, all equivalent changes done according to scope of the present invention patent with
Modification, is all covered by the present invention.
Claims (7)
1. a kind of high-frequency electromagnetic induction hot pressed sintering and brazing device, it is characterised in that: including high frequency induction power supply, inductor,
Induction heating furnace body, driving mechanism, double pressing mechanisms, vacuum device, inert gas shielding mechanism, the stone to place sample
Black die assembly and Non-contact Infrared Temperature Measurement mechanism；A pair of pressing mechanism, the induction are provided in the driving mechanism
Heating furnace body is connected with double pressing mechanisms, the vacuum device and the inert gas shielding mechanism, the graphite
Die assembly is placed on double pressing mechanisms and is moved；The inductor is set to the furnace of the inductor heating furnace body
Internal portion, and the inductor is also connected with the high frequency induction power supply；The Non-contact Infrared Temperature Measurement mechanism includes a light
Fine infrared temperature probe, the optical fiber infrared temperature transducer is set in front of the induction heating furnace body, to furnace body
Carry out Non-contact Infrared Temperature Measurement；Double pressing mechanisms are filled by the mechanical pressurization device of upper part and the hydraulic pressurization of lower part
Composition is set, carries out the upper shifting board and hydraulic pump top that vertical reciprocating motion is adjusted for independent including what is driven through driving mechanism
Bar, the upper shifting board lower section is equipped with the seaming chuck for inserting the cylinder above insertion furnace body, the hydraulic pump mandril top
Equipped with for inserting the cylindrical push-down head below insertion furnace body, the seaming chuck is fixed through bolt respectively with push-down head；
Seaming chuck in double pressing mechanisms carries out vertical reciprocal fortune in such a way that the retarder of turbine and worm connects ball-screw
It is dynamic, to adjustment speed and amplitude and the small pressure that presses；Push-down head in double pressing mechanisms is connected using hydraulic pump mandril
The mode of push-down head is vertically moved back and forth, to the big pressure that presses.
2. a kind of high-frequency electromagnetic induction hot pressed sintering according to claim 1 and brazing device, it is characterised in that: the sense
Answering heating furnace body is interlayer water-cooling structure, and the one side wall of the induction heating furnace body is equipped with a cooling water inlet and goes out with a cooling water
Mouthful；The cooling water inlet and the cooling water outlet and a pair of induction heating furnace body and the inductor carry out recirculated water
Cooling cooling-water machine is connected.
3. high-frequency electromagnetic induction hot pressed sintering according to claim 1 and brazing device, it is characterised in that: the induction adds
The rear of hot stove body offers an inductor access port, and the inductor is set to the induction by the inductor access port
The central part of device heating furnace body；The gap portion of the inductor access port and the induction heating furnace body is by sealing ring and resistance to
High-temperature seal adhesive is sealed.
4. high-frequency electromagnetic induction hot pressed sintering according to claim 1 and brazing device, it is characterised in that: the induction adds
Offer a fire door in front of hot stove body, be provided with an observation window to infrared measurement of temperature on the fire door, the observation window by
High temperature resistant quartz glass is made.
5. high-frequency electromagnetic induction hot pressed sintering according to claim 1 and brazing device, it is characterised in that: the driving machine
Structure includes a upper mounted plate and a bottom plate, be provided on fixed plate the motor, retarder, shaft coupling that are connected with
And screw rod, the screw rod are equipped with ball nut, the ball nut and upper shifting board are connected, are provided on the bottom plate
One hydraulic pump, the hydraulic pump are connected with push-down head；One is also vertically arranged between fixed plate and the bottom plate
Guide rod.
6. high-frequency electromagnetic induction hot pressed sintering according to claim 1 and brazing device, it is characterised in that: described to vacuumize
Mechanism includes a vacuum pump to extract air, and the inert gas shielding mechanism includes one to inject the lazy of inert gas
Property gas booster pump；Another side wall of the induction heating furnace body is provided with a vacuum pump connection valve connecting with the vacuum pump
And the inert gas booster pump connection valve that is connected with the inert gas booster pump.
7. high-frequency electromagnetic induction hot pressed sintering according to claim 1 and brazing device, it is characterised in that: the seaming chuck
Exterior material with the push-down head is stainless steel, and the internal material for being embedded in the seaming chuck and the push-down head is graphite pressure
There is ring packing rubber pad in the position of the slotting insertion furnace body of head, the seaming chuck and the push-down head, to prevent on pressurization road
Protective gas leaks on diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610054245.1A CN105682270B (en) | 2016-01-27 | 2016-01-27 | A kind of high-frequency electromagnetic induction hot pressed sintering and brazing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610054245.1A CN105682270B (en) | 2016-01-27 | 2016-01-27 | A kind of high-frequency electromagnetic induction hot pressed sintering and brazing device |
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| Publication Number | Publication Date |
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| CN105682270A CN105682270A (en) | 2016-06-15 |
| CN105682270B true CN105682270B (en) | 2019-07-09 |
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| CN201610054245.1A Expired - Fee Related CN105682270B (en) | 2016-01-27 | 2016-01-27 | A kind of high-frequency electromagnetic induction hot pressed sintering and brazing device |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107504811B (en) * | 2017-08-25 | 2019-11-22 | 天津中环电炉股份有限公司 | A kind of vacuum box type atmosphere furnace |
| CN108050838A (en) * | 2017-12-21 | 2018-05-18 | 张大玲 | A kind of novel evacuated smelting furnace |
| CN110920214A (en) * | 2019-12-17 | 2020-03-27 | 河南科技大学 | Preparation method of copper-aluminum laminated composite material |
| JP2022133684A (en) * | 2021-03-02 | 2022-09-14 | 株式会社ジェイテクトサーモシステム | Heat treatment apparatus |
| CN114608311A (en) * | 2022-01-24 | 2022-06-10 | 快克智能装备股份有限公司 | Sintering equipment and controllable pressure sintering mechanism of atmosphere thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201311179Y (en) * | 2008-09-28 | 2009-09-16 | 锦州航星真空设备有限公司 | Multifunction vacuum high temperature hot pressing furnace |
| CN203908307U (en) * | 2014-06-18 | 2014-10-29 | 上海福乃斯电炉科技有限公司 | Integrated high-temperature vacuum hot pressing sintering furnace |
| CN104534874A (en) * | 2014-12-25 | 2015-04-22 | 合肥科晶材料技术有限公司 | Vacuum medium-frequency induction furnace |
| CN104697331A (en) * | 2013-12-04 | 2015-06-10 | 中国科学院上海高等研究院 | Semiconductor material preparation equipment |
| CN105170981A (en) * | 2015-10-12 | 2015-12-23 | 福州大学 | Microwave hot-pressing sintering and brazing device and using method thereof |
-
2016
- 2016-01-27 CN CN201610054245.1A patent/CN105682270B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201311179Y (en) * | 2008-09-28 | 2009-09-16 | 锦州航星真空设备有限公司 | Multifunction vacuum high temperature hot pressing furnace |
| CN104697331A (en) * | 2013-12-04 | 2015-06-10 | 中国科学院上海高等研究院 | Semiconductor material preparation equipment |
| CN203908307U (en) * | 2014-06-18 | 2014-10-29 | 上海福乃斯电炉科技有限公司 | Integrated high-temperature vacuum hot pressing sintering furnace |
| CN104534874A (en) * | 2014-12-25 | 2015-04-22 | 合肥科晶材料技术有限公司 | Vacuum medium-frequency induction furnace |
| CN105170981A (en) * | 2015-10-12 | 2015-12-23 | 福州大学 | Microwave hot-pressing sintering and brazing device and using method thereof |
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| Publication number | Publication date |
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| CN105682270A (en) | 2016-06-15 |
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