CN207262934U - A kind of ultrahigh vacuum heat-treatment furnace - Google Patents
A kind of ultrahigh vacuum heat-treatment furnace Download PDFInfo
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- CN207262934U CN207262934U CN201721168943.0U CN201721168943U CN207262934U CN 207262934 U CN207262934 U CN 207262934U CN 201721168943 U CN201721168943 U CN 201721168943U CN 207262934 U CN207262934 U CN 207262934U
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- vacuum
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Abstract
The utility model discloses a kind of ultrahigh vacuum heat-treatment furnace, including vacuum chamber, the water delivery adapter of vacuum chamber, vacuum adapter, electrode are connected with water system, ultrahigh vacuum unit, heating electric power system respectively.Vacuum chamber includes upper and lower bell and furnace shell；Upper bell is fixedly connected with furnace shell；Lower bell passes through lifting gear rise and fall；When lower bell is risen in place, lower bell forms airtight chamber with upper bell, furnace shell；Installation thermocouple terminal pad at the top of upper bell；The medial surface of upper and lower bell and furnace shell is provided with heat screen；Squirrel-cage metallic heating body is installed in the space that all heat screens are formed；Charging tray is installed, when lower bell is risen in place, charging tray is placed in the heating chamber of squirrel-cage metallic heating body formation on lower bell.Ultrahigh vacuum unit includes dry pump, molecular pump, titanium pump, ionic pump.The utility model can effectively realize ultrahigh vacuum heat treatment process, and the degree of automation is high, and production efficiency is high, and processing safety is high.
Description
Technical field
A kind of heat-treatment furnace is the utility model is related to, espespecially a kind of ultrahigh vacuum heat-treatment furnace.
Background technology
With modern science and technology such as high energy acclerator, thermonuclear reaction, semiconducter research, space exploration, study of surfaces
Grow rapidly, the application field of vacuum has also obtained quick expansion.Nowadays, vacuum technique is progressively from low vacuum to high vacuum, super
High vacuum is fast-developing, has oil system to the fast development of no oil system, meanwhile, closely related control, measurement, analysis etc. with this
Technology is also required to develop towards automation, digitlization, intelligentized direction.At the existing Vacuum Heat of the producer of domestic production at present
Reason stove be related to low vacuum or high vacuum mostly and operation for many years, equipment is there are lengthy and tedious, and the degree of automation is not high, low production efficiency,
The shortcomings of manual operation is cumbersome, pollution protection imperfection, processing safety is not high, has been unable to meet the demand of existing producer, has
Wait to improve.
Utility model content
The purpose of this utility model is to provide a kind of ultrahigh vacuum heat-treatment furnace, it can be effectively realized at ultrahigh vacuum heat
Science and engineering skill, the degree of automation is high, and production efficiency is high, and pollution protection is perfect, and processing safety is high.
To achieve these goals, the utility model employs following technical scheme：
A kind of ultrahigh vacuum heat-treatment furnace, it is characterised in that：It includes passing through vacuum chamber of the upright supports on base, very
Water delivery adapter in empty room is connected by aqueduct with water system, and the vacuum adapter on vacuum chamber passes through bellows and superelevation
Vacuum pump set connects, and the electrode on vacuum chamber is connected with heating electric power system, and vacuum chamber, water system, ultrahigh vacuum unit, add
Hot electric power system is connected with electric-control system, wherein：
Vacuum chamber includes jacket structured upper bell, lower bell and the furnace shell of Double water-cooled；Upper bell is fixed with furnace shell
Connection；Lower bell by lifting gear rise and fall to be fed, discharge operation；Instantly when bell is risen in place, lower stove
Lid forms airtight chamber together with upper bell, furnace shell；Thermocouple terminal pad is installed at the top of upper bell；Upper bell, lower bell,
The medial surface of furnace shell is mounted on heat screen；Squirrel-cage metallic heating body, mouse are installed in the space that all heat screens are formed
The metal connecting plate that cage metallic heating body stretches out vacuum chamber is connected with electrode；Lower bell is provided with above with workpiece support bar
Charging tray, when bell is risen in place instantly, charging tray is placed in the heating chamber of squirrel-cage metallic heating body formation；
Ultrahigh vacuum unit includes the vacuum lead being connected with bellows, and dry pump, molecule are connected with vacuum lead
Pump, titanium pump, ionic pump.
The utility model has the advantages that：
The utility model uses lower charge mode and for a kind of oil-free vacuum system, can effectively realize at ultrahigh vacuum heat
Science and engineering skill, device structure is compact, is easily installed and transports, and the degree of automation is high, and production efficiency is high, and manual operation is simple, convenient,
Pollution protection is perfect, and processing safety is high, suitable for popularizing.
Brief description of the drawings
Fig. 1 is the structure diagram of the utility model ultrahigh vacuum heat-treatment furnace.
Fig. 2 is the schematic top plan view of Fig. 1.
Fig. 3 is the structure diagram of squirrel-cage metallic heating body.
Embodiment
As shown in Figure 1 to Figure 3, the utility model ultrahigh vacuum heat-treatment furnace includes being supported on base 15 by column 21
Vacuum chamber, the water delivery adapter on vacuum chamber is connected by aqueduct 16 with water system (known device), aqueduct 16
On some valves (as scheme) can be installed, the vacuum adapter on vacuum chamber is connected by bellows 8 with ultrahigh vacuum unit, vacuum
Electrode 26 on room is connected with heating electric power system 24, vacuum chamber, water system, ultrahigh vacuum unit, heating electric power system 24
It is connected with electric-control system 1 (known technology), ultrahigh vacuum unit, water system are also disposed on base 15, integration of equipments one,
It is easily installed and transports.
Such as figure, vacuum chamber includes jacket structured upper bell 2, lower bell 17 and the furnace shell 23 of Double water-cooled, upper bell 2,
Water delivery adapter, water delivery adapter and the interlayer of upper bell 2, lower bell 17 and furnace shell 23 are installed on lower bell 17 and furnace shell 23
Water cavity communicates；Upper bell 2 is fixedly connected with furnace shell 23；Lower bell 17 is by 22 rise and fall of lifting gear come into luggage
Material, discharging operation；Instantly when bell 17 is risen in place, lower bell 17 forms airtight chamber together with upper bell 2, furnace shell 23；
The upper top of bell 2 is provided with the thermocouple terminal pad 3 for measuring vacuum indoor temperature, and thermocouple terminal pad 3 includes thermocouple
(CF electrode forms), thermocouple terminal pad 3 is connected with electric-control system 1；Upper bell 2, lower bell 17, the medial surface of furnace shell 23 are equal
Heat screen is installed, i.e., as shown in Figure 1,2 medial surface of upper bell installs heat screen 4, lower 17 medial surface of bell installs heat screen 18,
23 medial surface of furnace shell installs heat screen 6, and heat screen 7 is installed on the part that 23 bottom of furnace shell will be combined with lower bell 17；Institute
Have and squirrel-cage metallic heating body 5 is installed in the space of heat screen formation, squirrel-cage metallic heating body 5 stretches out the metal of vacuum chamber
Connecting plate 31 is connected with electrode 26；Lower bell 17 is provided with charging tray 20 above with workpiece support bar 19, and bell 17 rises instantly
When in place, charging tray 20 is placed in the heating chamber of the formation of squirrel-cage metallic heating body 5.
Such as figure, ultrahigh vacuum unit includes the vacuum lead 11 being connected with bellows 8, is connected with vacuum lead 11
Dry pump 13, molecular pump 9 (such as turbomolecular pump), titanium pump 12, ionic pump 10, dry pump 13, molecular pump 9, titanium pump 12 and ionic pump
On the support 14, stent 14 is placed on base 15 for 10 installations.
In actual design, upper bell 2 is bolted with furnace shell 23 and upper bell 2 uses between the two with furnace shell 23
Metal sealing form seals.Instantly when bell 17 is risen in place, cushion rubber (such as fluorubber is passed through between lower bell 17 and furnace shell 23
Circle) realize sealing.
In addition, between thermocouple terminal pad 3 and upper bell 2, situation is equal between vacuum adapter, electrode 26 and furnace shell 23 etc.
Sealed using metal sealing form.
In practice, the metal sealing that the utility model is related to can use the metals such as silver, copper to realize, belong to known skill
Art.
In the utility model, heat screen is made of multilayered metal film stacking.
As shown in figure 3, the squirrel-cage metallic heating body 5 of suspension installation includes upper becket 29, lower becket 32, it is upper and lower
Becket 29,32 is connected by squirrel-cage metal cylinder 30, and some metal connecting plates 31, metal connection are connected with upper becket 29
Plate 31 stretches out vacuum chamber.In practice, after metal connecting plate 31 is connected with electrode 26, connection cables 25 and heating power supply system are passed through
The connection of system 24.
Such as Fig. 1, lifting gear 22 includes leading screw, driving motor, and lower bell 17 is connected with leading screw, and lower bell 17 is driven
Motor-driven leading screw drives linear motion above and below lower carry out, and driving motor is connected with electric-control system 1, is controlled by electric-control system 1.
Such as Fig. 1 and Fig. 2, it is (known to set that 11 head end of vacuum lead being connected with bellows 8 is provided with the first gate valve 27
It is standby), the second gate valve 28 (known device) is installed between 11 tail end of the first gate valve 27 and vacuum lead, is inserted between first
11 part of vacuum lead between 27 and second gate valve 28 of plate valve is connected with dry pump 13, molecular pump 9, between the second gate valve
11 part of vacuum lead between 28 and 11 tail end of vacuum lead is connected with ionic pump 10, and titanium pump 12 is installed on vacuum-pumping tube
On the tail end in road 11.
In addition, in actual design, leak detection mouth and spectrometer interface etc. can be also equipped with vacuum lead 11.
In the utility model, dry pump 13, molecular pump 9, titanium pump 12, ionic pump 10, and the first gate valve 27, second are inserted
The grade valve of plate valve 28 is connected with electric-control system 1, is controlled by electric-control system 1.
In actual design, heating electric power system 24 may include transformer.
In use, making lower bell 17 decline by lifting gear 22, pending workpiece is placed on charging tray 20, is then passed through
The lower bell 17 of the order of lifting gear 22 rises, and performs charging operation.Instantly after bell 17 rises in place, pending workpiece is placed in very
In empty room in closed heating chamber, then pass through ultrahigh vacuum unit and heating chamber is carried out to vacuumize operation, make it that superelevation be presented
Vacuum state, while make squirrel-cage metallic heating body 5 be warming up to design temperature by heating electric power system 24, so as to pending
Workpiece implements heat treatment operation.
During heat treatment operation, thermocouple measures the temperature in heating chamber and passes temperature data back automatically controlled system in real time
System 1, so that when temperature is beyond setting heating temperature range, electric-control system 1 makes squirrel-cage metal by heating electric power system 24
Heater 5 realizes corresponding heating or cooling.
And during heat treatment operation, water system goes up the intermediate water of bell 2, lower bell 17 and furnace shell 23 always
Intracavitary is passed through cooling water, to be protected to vacuum chamber.
After the completion of heat treatment, when temperature drop to predetermined temperature and vacuum chamber from ultra-high vacuum state return normal atmosphere (An)
After state, make lower bell 17 decline by lifting gear 22, perform discharging operation.
When actually carrying out vacuumizing operation, dry pump 13, the progress forvacuum of molecular pump 9 are usually first passed through, is then led to again
Cross titanium pump 12, ionic pump 10 carries out formal vacuumize.In the utility model, to the first gate valve 27, the second gate valve 28
Open and belong to technology known in the art with detailed process with the control opportunity closed, therefore be not described in detail herein.
The utility model uses lower charge mode and for a kind of oil-free vacuum system, can effectively realize at ultrahigh vacuum heat
Science and engineering skill, device structure is compact, is easily installed and transports, and the degree of automation is high, and production efficiency is high, and manual operation is simple, convenient,
Pollution protection is perfect, and processing safety is high, suitable for popularizing.
The above is the utility model preferred embodiment and its technical principle used, for those skilled in the art
It is any based on technical solutions of the utility model basis in the case of the spirit and scope without departing substantially from the utility model for member
On equivalent transformation, simple replacement etc. is obvious changes, belong within scope of protection of the utility model.
Claims (7)
- A kind of 1. ultrahigh vacuum heat-treatment furnace, it is characterised in that：It includes passing through vacuum chamber of the upright supports on base, vacuum Water delivery adapter on room is connected by aqueduct with water system, and the vacuum adapter on vacuum chamber is true with superelevation by bellows Empty unit connects, and the electrode on vacuum chamber is connected with heating electric power system, vacuum chamber, water system, ultrahigh vacuum unit, heating Electric power system is connected with electric-control system, wherein：Vacuum chamber includes jacket structured upper bell, lower bell and the furnace shell of Double water-cooled；Upper bell is fixedly connected with furnace shell； Lower bell by lifting gear rise and fall to be fed, discharge operation；Instantly bell rise in place when, lower bell with it is upper Bell, furnace shell form airtight chamber together；Thermocouple terminal pad is installed at the top of upper bell；Upper bell, lower bell, furnace shell Medial surface be mounted on heat screen；Squirrel-cage metallic heating body, squirrel-cage gold are installed in the space that all heat screens are formed The metal connecting plate for belonging to heater stretching vacuum chamber is connected with electrode；Lower bell is provided with charging tray above with workpiece support bar, Instantly when bell is risen in place, charging tray is placed in the heating chamber of squirrel-cage metallic heating body formation；Ultrahigh vacuum unit includes the vacuum lead being connected with bellows, and dry pump, molecular pump, titanium are connected with vacuum lead Pump, ionic pump.
- 2. ultrahigh vacuum heat-treatment furnace as claimed in claim 1, it is characterised in that：The upper bell is bolted with the furnace shell and is sealed between the two using metal sealing form；When the lower bell rises in place, pass through rubber sealing between the lower bell and the furnace shell.
- 3. ultrahigh vacuum heat-treatment furnace as claimed in claim 1, it is characterised in that：The heat screen is made of multilayered metal film stacking.
- 4. ultrahigh vacuum heat-treatment furnace as claimed in claim 1, it is characterised in that：The squirrel-cage metallic heating body of suspension installation includes upper becket, lower becket, and upper and lower becket passes through squirrel-cage Metal cylinder connects, and some metal connecting plates are connected with upper becket, and the metal connecting plate stretches out the vacuum chamber.
- 5. ultrahigh vacuum heat-treatment furnace as claimed in claim 1, it is characterised in that：The lifting gear includes leading screw, driving motor, and the lower bell is connected with leading screw, and the lower bell is in motor driven The leading screw of driving drives linear motion above and below lower carry out.
- 6. ultrahigh vacuum heat-treatment furnace as claimed in claim 1, it is characterised in that：The vacuum lead head end being connected with the bellows is provided with the first gate valve, and the first gate valve is taken out very with described Second gate valve is installed, the vacuum lead between the first gate valve and the second gate valve between vacant duct tail end Part is connected with the dry pump, the molecular pump, the pumping between the second gate valve and the vacuum lead tail end Vacuum pipe part is connected with the ionic pump, and the titanium pump is installed on the tail end of the vacuum lead.
- 7. ultrahigh vacuum heat-treatment furnace as claimed in claim 1, it is characterised in that：The heating electric power system includes transformer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721168943.0U CN207262934U (en) | 2017-09-12 | 2017-09-12 | A kind of ultrahigh vacuum heat-treatment furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721168943.0U CN207262934U (en) | 2017-09-12 | 2017-09-12 | A kind of ultrahigh vacuum heat-treatment furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207262934U true CN207262934U (en) | 2018-04-20 |
Family
ID=61920586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721168943.0U Active CN207262934U (en) | 2017-09-12 | 2017-09-12 | A kind of ultrahigh vacuum heat-treatment furnace |
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| Country | Link |
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| CN (1) | CN207262934U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114216344A (en) * | 2021-12-29 | 2022-03-22 | 湖南红太阳新能源科技有限公司 | Equipment for preparing carbon-carbon composite material |
-
2017
- 2017-09-12 CN CN201721168943.0U patent/CN207262934U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114216344A (en) * | 2021-12-29 | 2022-03-22 | 湖南红太阳新能源科技有限公司 | Equipment for preparing carbon-carbon composite material |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190621 Address after: 101407 No. 11 Xingke East Street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee after: Research Institute of engineering and Technology Co., Ltd. Address before: No. 2, Xinjie street, Xicheng District, Beijing, Beijing Patentee before: General Research Institute for Nonferrous Metals |
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| TR01 | Transfer of patent right |