CN105682270A - High-frequency electromagnetic induction hot-pressing sintering and brazing device - Google Patents

High-frequency electromagnetic induction hot-pressing sintering and brazing device Download PDF

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Publication number
CN105682270A
CN105682270A CN201610054245.1A CN201610054245A CN105682270A CN 105682270 A CN105682270 A CN 105682270A CN 201610054245 A CN201610054245 A CN 201610054245A CN 105682270 A CN105682270 A CN 105682270A
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CN
China
Prior art keywords
heater
induction heating
electromagnetic induction
push
inductor block
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Granted
Application number
CN201610054245.1A
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Chinese (zh)
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CN105682270B (en
Inventor
韩绍华
薛丁琪
刘志森
徐筱威
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Fuzhou University
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Fuzhou University
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Priority to CN201610054245.1A priority Critical patent/CN105682270B/en
Publication of CN105682270A publication Critical patent/CN105682270A/en
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Publication of CN105682270B publication Critical patent/CN105682270B/en
Expired - Fee Related legal-status Critical Current
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/04Crucible or pot furnaces adapted for treating the charge in vacuum or special atmosphere
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/08Details peculiar to crucible or pot furnaces
    • F27B14/14Arrangements of heating devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00Cooling of furnaces or of charges therein
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/22Furnaces without an endless core
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/36Coil arrangements
    • H05B6/42Cooling of coils
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/04Crucible or pot furnaces adapted for treating the charge in vacuum or special atmosphere
    • F27B2014/045Vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00Cooling of furnaces or of charges therein
    • F27D2009/0002Cooling of furnaces
    • F27D2009/001Cooling of furnaces the cooling medium being a fluid other than a gas
    • F27D2009/0013Cooling of furnaces the cooling medium being a fluid other than a gas the fluid being water
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2206/00Aspects relating to heating by electric, magnetic, or electromagnetic fields covered by group H05B6/00
    • H05B2206/02Induction heating

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Induction Heating (AREA)
  • Furnace Details (AREA)

Abstract

The invention relates to a high-frequency electromagnetic induction hot-pressing sintering and brazing device. The high-frequency electromagnetic induction hot-pressing sintering and brazing device comprises a high-frequency induction power supply, an inductor, an induction heating furnace body, a driving mechanism, a dual-pressurizing mechanism, a vacuum pumping mechanism, an inert gas protection mechanism, a graphite mold assembly for accommodating a test specimen, and a non-contact infrared temperature-measuring mechanism, wherein the inductor and the induction heating furnace body of high-frequency electromagnetic induction heating equipment can be subjected to circulating water cooling through a same cooling-water machine; the dual-pressurizing mechanism consists of a mechanical loading part of an upper pressure head part and a hydraulic loading part of a lower pressure head part; the induction heating furnace body can be subjected to vacuum pumping after being sealed, and inert gas is introduced into the induction heating furnace body to protect the induction heating furnace body; and an optical-fiber infrared temperature sensor for measuring a thermal cycle is arranged in front of the induction heating furnace body. The high-frequency electromagnetic induction hot-pressing sintering and brazing device has the advantages of high heating speed, energy saving, and capability of realizing integration of high-frequency electromagnetic induction heating, mechanism pressurizing and atmosphere protection

Description

A kind of high-frequency electromagnetic induction hot pressed sintering and brazing device
Technical field
The present invention relates to mechanical equipment technical field, particularly a kind of high-frequency electromagnetic induction hot pressed sintering and brazing device.
Background technology
In traditional heating technology, what generally adopt is the mode of resistance wire and graphite heating. And in these type of heating, power loss is big, heat energy efficiency is low, and rate of heating is slow, and resistance wire stands high temperature oxidation for a long time and easily blows damage, but also there is certain potential safety hazard. And electromagnetic induction heating utilizes exchange current to produce alternating magnetic field by inductor block, cause the interior of articles being in wherein to produce exchange current, thus play the effect of heating object. This kind of type of heating belongs to material internal heating, has the advantages such as energy-efficient, environmental protection, production efficiency height and long service life.
Electromagnetic induction heating technology has been widely used in the fields such as the thermal treatment of various metallic substance, Metal Melting and welding. Current electromagnetic induction hot-press equipment is substantially all adopt hydraulic pulldown, in general the minimum pressure applied under this kind of pressuring method is all bigger, therefore and be not suitable for required moulding pressure less under situation, when particularly the pottery great material of this kind of fragility being connected, it is very difficult to realize the high-frequency electromagnetic induction under little pressure and connect shaping.
Summary of the invention
In view of this, it is an object of the invention to provide a kind of high-frequency electromagnetic induction hot pressed sintering and brazing device, rate of heating is fast, save energy, it may be achieved high-frequency electromagnetic induction heating, machinery pressurization, atmosphere protection integration.
The present invention adopts following scheme to realize: a kind of high-frequency electromagnetic induction hot pressed sintering and brazing device, comprise high frequency induction power supply, inductor block, induction heating body of heater, driving mechanism, two pressing mechanism, vacuum device, protection of inert gas mechanism, in order to place graphite jig assembly and the Non-contact Infrared Temperature Measurement mechanism of sample; Described driving mechanism is provided with one pair of pressing mechanism, described induction heating body of heater is connected with described pair of pressing mechanism, described vacuum device and described protection of inert gas mechanism, and described graphite jig assembly is positioned on described pair of pressing mechanism and moves;The body of heater that described inductor block is arranged at described inductor block heating furnace body is inner, and described inductor block is also connected with described high frequency induction power supply; Described Non-contact Infrared Temperature Measurement mechanism comprises an optical fiber infrared temperature probe, and described optical fiber infrared temperature probe is arranged at described induction heating body of heater front, in order to body of heater is carried out Non-contact Infrared Temperature Measurement.
Further, described induction heating body of heater is interlayer water-cooling structure, and a sidewall of described induction heating body of heater is provided with an entrance of cooling water and a cooling water outlet; The cold water machine that described induction heating body of heater and described inductor block are carried out circulating water by described entrance of cooling water and described cooling water outlet with one is connected.
Further, an inductor block access port has been offered at the rear of described induction heating body of heater, and described inductor block is arranged at the centre portions of described inductor block heating furnace body by described inductor block access port; The gap portion of described inductor block access port and described induction heating body of heater is sealed by sealing-ring and refractory seals glue.
Further, a fire door has been offered in the front of described induction heating body of heater, described fire door is provided with one in order to the viewing window of infrared measurement of temperature, and described viewing window is made up of high temperature resistant silica glass.
Further, described driving mechanism comprises a upper mounted plate and retaining plate once, fixed plate is provided with the motor, speed reduction unit, shaft coupling and the screw mandrel that are connected, described screw mandrel is provided with ball nut, described ball nut and upper shifting board are connected, being provided with a hydro-pump on described lower retaining plate, described hydro-pump is connected with push-down head; A guide rod also vertically it is provided with between fixed plate and described lower retaining plate.
Further, described vacuum device comprises one in order to the vacuum pump of extracting air, and described protection of inert gas mechanism comprises one in order to the rare gas element topping-up pump of injecting inert gas; Another sidewall of described induction heating body of heater is provided with a vacuum pump connection valve being connected with described vacuum pump and a rare gas element topping-up pump connection valve being connected with described rare gas element topping-up pump.
Further, described pair of pressing mechanism is made up of the hydraulic pulldown of the mechanical pressurization device of upper part and lower part, comprise and erect the upper shifting board to reciprocal motor adjustment and hydro-pump push rod through what driving mechanism drove for independently carrying out, the cylindrical seaming chuck above for slotting embedding body of heater it is provided with below described upper shifting board, being provided with the cylindrical push-down head below for slotting embedding body of heater above described hydro-pump push rod, described seaming chuck and push-down head are fixed through bolt respectively.
Further; the outer material of described seaming chuck and described push-down head is stainless steel; the material inside embedding described seaming chuck and described push-down head is graphite pressure head; there is ring seal rubber pad the position of the slotting embedding body of heater of described seaming chuck and described push-down head, uses to prevent shielding gas leaks on Loading paths.
Further, the mode that seaming chuck in described pair of pressing mechanism adopts the speed reduction unit of turbine and worm to connect ball-screw carries out erecting to to-and-fro movement, in order to regulate speed and amplitude and little pressure of exerting pressure.
Further, the mode that the push-down head in described pair of pressing mechanism adopts hydro-pump push rod to connect push-down head carries out erecting to to-and-fro movement, in order to big pressure of exerting pressure.
In the present invention, the using method of described electromagnetic induction hot pressed sintering and brazing device, comprises the following steps:
(1) sample is placed in graphite jig and together it is placed on push-down head, push-down head being moved up until starting two pressing mechanism after seaming chuck contacts, making sample remain in inductor block central position always;
(2) heating furnace body is sealed, lead to after vacuumizing into inert protective gas;
(3) open cold water electromechanical source, respectively inductor block and induction heating body of heater are carried out circulating water;
(4) start high frequency induction power supply, material can be heated by inductor block under a certain fixed current or fixed frequency; In heat-processed, the laser aiming point of optical fiber infrared temperature probe is in sample center all the time, the whole thermal cycling in heat-processed is measured.
Compared with prior art, the present invention has following useful effect:
1, inductor block and heating furnace body are carried out circulating water by same cold water machine simultaneously.
2, the integrated of electromagnetic induction heating, controlled atmosphere and hot pressed sintering or soldering tech is achieved. Have employed two pressurization system, the high-frequency electromagnetic induction that both can realize under little pressure connects shaping needs, it is also possible to big pressure required when meeting powder sintered.
3, utilize high thermal conductivity and the permeability of high purity graphite, induction heating process serves the effect of auxiliary intensification, it is to increase the repeatability of heating rate and experiment.
Accompanying drawing explanation
Fig. 1 is the structural representation of device side in the present invention.
Fig. 2 is the structural representation in the device front of the present invention.
Fig. 3 is the body of heater schematic diagram of the present invention.
In figure:
Retaining plate under 1-; 2-hydro-pump; 3-push-down head; 4-viewing window; 5-fire door; 6-induction heating body of heater; 7-seaming chuck; 8-upper shifting board; 9-guide pin bushing; 10-pressure transmitter; 11-upper mounted plate; 12-guide rod; 13-shaft coupling; 14-speed reduction unit; 15-ball nut; 16-screw mandrel; 17-inductor block access port; 18-inductor block; 19-vacuum pump connection valve; 20-rare gas element topping-up pump connection valve; 21-link rod; 22-handwheel; The cold water intaking import of 23-; 24-cooling water outlet.
Embodiment
Below in conjunction with drawings and Examples, the present invention will be further described.
This enforcement provides a kind of high-frequency electromagnetic induction hot pressed sintering and brazing device, as shown in Figure 1, Figure 2 and Figure 3, comprise high frequency induction power supply, inductor block, induction heating body of heater, driving mechanism, two pressing mechanism, vacuum device, protection of inert gas mechanism, in order to place graphite jig assembly and the Non-contact Infrared Temperature Measurement mechanism of sample; Described driving mechanism is provided with one pair of pressing mechanism, described induction heating body of heater is connected with described pair of pressing mechanism, described vacuum device and described protection of inert gas mechanism, and described graphite jig assembly is positioned on described pair of pressing mechanism and moves; The body of heater that described inductor block is arranged at described inductor block heating furnace body is inner, and described inductor block is also connected with described high frequency induction power supply; Described Non-contact Infrared Temperature Measurement mechanism comprises an optical fiber infrared temperature probe, and described optical fiber infrared temperature probe is arranged at described induction heating body of heater front, in order to body of heater is carried out Non-contact Infrared Temperature Measurement.
In the present embodiment, described induction heating body of heater 6 is interlayer water-cooling structure, and a sidewall of described induction heating body of heater is provided with entrance of cooling water 23 and a cooling water outlet 24; The cold water machine that described induction heating body of heater and described inductor block are carried out circulating water by described entrance of cooling water and described cooling water outlet with one is connected.
In the present embodiment, an inductor block access port 17 has been offered at the rear of described induction heating body of heater, and described inductor block is arranged at the centre portions of described inductor block heating furnace body by described inductor block access port; The gap portion of described inductor block access port and described induction heating body of heater is sealed by sealing-ring and refractory seals glue.
In the present embodiment, a fire door 5 has been offered in the front of described induction heating body of heater, described fire door is provided with one in order to the viewing window 4 of infrared measurement of temperature, and described viewing window is made up of high temperature resistant silica glass.
In the present embodiment, described driving mechanism comprises a upper mounted plate 11 and retaining plate 1 once, fixed plate is provided with the motor, speed reduction unit 14, shaft coupling 13 and the screw mandrel 16 that are connected, described screw mandrel is provided with ball nut 15, described ball nut and upper shifting board are connected, being provided with a hydro-pump 2 on described lower retaining plate, described hydro-pump is connected with push-down head; A guide rod 12 also vertically it is provided with between fixed plate and described lower retaining plate.
In the present embodiment, described vacuum device comprises one in order to the vacuum pump of extracting air, and described protection of inert gas mechanism comprises one in order to the rare gas element topping-up pump of injecting inert gas; Another sidewall of described induction heating body of heater is provided with the vacuum pump connection valve being connected with described vacuum pump 19 and the rare gas element topping-up pump connection valve 20 being connected with described rare gas element topping-up pump.
In the present embodiment, described pair of pressing mechanism is made up of the hydraulic pulldown of the mechanical pressurization device of upper part and lower part, comprise and erect the upper shifting board 8 to reciprocal motor adjustment and hydro-pump push rod through what driving mechanism drove for independently carrying out, the cylindrical seaming chuck 7 above for slotting embedding body of heater it is provided with below described upper shifting board, being provided with the cylindrical push-down head 3 below for slotting embedding body of heater above described hydro-pump push rod, described seaming chuck and push-down head are fixed through bolt respectively.
In the present embodiment; the outer material of described seaming chuck and described push-down head is stainless steel; the material inside embedding described seaming chuck and described push-down head is graphite pressure head; there is ring seal rubber pad the position of the slotting embedding body of heater of described seaming chuck and described push-down head, uses to prevent shielding gas leaks on Loading paths.
In the present embodiment, the mode that seaming chuck in described pair of pressing mechanism adopts the speed reduction unit of turbine and worm to connect ball-screw carries out erecting to to-and-fro movement, in order to regulate speed and amplitude and little pressure of exerting pressure.
In the present embodiment, the mode that the push-down head in described pair of pressing mechanism adopts hydro-pump push rod to connect push-down head carries out erecting to to-and-fro movement, in order to big pressure of exerting pressure.
In the present embodiment, described upper shifting board is also provided with a pressure transmitter 10.
In the present embodiment, this device also comprises plural number root link rod 21, in order to fixing described driving mechanism and described pair of pressing mechanism; The connection root one end arranged above fixed plate is also connected with a handwheel 22, and described upper shifting board is connected with described root by guide pin bushing 9.
In the present embodiment, the using method of described electromagnetic induction hot pressed sintering and brazing device, comprises the following steps:
(1) sample is placed in graphite jig and together it is placed on push-down head, push-down head being moved up until starting two pressing mechanism after seaming chuck contacts, making sample remain in inductor block central position always;
(2) heating furnace body is sealed, lead to after vacuumizing into inert protective gas;
(3) open cold water electromechanical source, respectively inductor block and induction heating body of heater are carried out circulating water;
(4) start high frequency induction power supply, it is that material can be heated by inductor block under a certain fixed current or fixed frequency; In heat-processed, the laser aiming point of optical fiber infrared temperature probe is in sample center all the time, the whole thermal cycling in heat-processed is measured.
The foregoing is only the better embodiment of the present invention, all impartial changes done according to the present patent application patent scope, with modifying, all should belong to the covering scope of the present invention.

Claims (10)

1. a high-frequency electromagnetic induction hot pressed sintering and brazing device, it is characterised in that: comprise high frequency induction power supply, inductor block, induction heating body of heater, driving mechanism, two pressing mechanism, vacuum device, protection of inert gas mechanism, in order to place graphite jig assembly and the Non-contact Infrared Temperature Measurement mechanism of sample;Described driving mechanism is provided with one pair of pressing mechanism, described induction heating body of heater is connected with described pair of pressing mechanism, described vacuum device and described protection of inert gas mechanism, and described graphite jig assembly is positioned on described pair of pressing mechanism and moves; The body of heater that described inductor block is arranged at described inductor block heating furnace body is inner, and described inductor block is also connected with described high frequency induction power supply; Described Non-contact Infrared Temperature Measurement mechanism comprises an optical fiber infrared temperature probe, and described optical fiber infrared temperature probe is arranged at described induction heating body of heater front, in order to body of heater is carried out Non-contact Infrared Temperature Measurement.
2. a kind of high-frequency electromagnetic induction hot pressed sintering according to claim 1 and brazing device, it is characterised in that: described induction heating body of heater is interlayer water-cooling structure, and a sidewall of described induction heating body of heater is provided with an entrance of cooling water and a cooling water outlet; The cold water machine that described induction heating body of heater and described inductor block are carried out circulating water by described entrance of cooling water and described cooling water outlet with one is connected.
3. electromagnetic induction hot pressed sintering according to claim 1 and brazing device, it is characterized in that: an inductor block access port has been offered at the rear of described induction heating body of heater, described inductor block is arranged at the centre portions of described inductor block heating furnace body by described inductor block access port; The gap portion of described inductor block access port and described induction heating body of heater is sealed by sealing-ring and refractory seals glue.
4. electromagnetic induction hot pressed sintering according to claim 1 and brazing device, it is characterized in that: a fire door has been offered in the front of described induction heating body of heater, being provided with one on described fire door in order to the viewing window of infrared measurement of temperature, described viewing window is made up of high temperature resistant silica glass.
5. electromagnetic induction hot pressed sintering according to claim 1 and brazing device, it is characterized in that: described driving mechanism comprises a upper mounted plate and retaining plate once, fixed plate is provided with the motor, speed reduction unit, shaft coupling and the screw mandrel that are connected, described screw mandrel is provided with ball nut, described ball nut and upper shifting board are connected, being provided with a hydro-pump on described lower retaining plate, described hydro-pump is connected with push-down head; A guide rod also vertically it is provided with between fixed plate and described lower retaining plate.
6. electromagnetic induction hot pressed sintering according to claim 1 and brazing device, it is characterized in that: described vacuum device comprises one in order to the vacuum pump of extracting air, described protection of inert gas mechanism comprises one in order to the rare gas element topping-up pump of injecting inert gas; Another sidewall of described induction heating body of heater is provided with a vacuum pump connection valve being connected with described vacuum pump and a rare gas element topping-up pump connection valve being connected with described rare gas element topping-up pump.
7. electromagnetic induction hot pressed sintering according to claim 1 and brazing device, it is characterized in that: described pair of pressing mechanism is made up of the hydraulic pulldown of the mechanical pressurization device of upper part and lower part, comprise and erect the upper shifting board to reciprocal motor adjustment and hydro-pump push rod through what driving mechanism drove for independently carrying out, the cylindrical seaming chuck above for slotting embedding body of heater it is provided with below described upper shifting board, being provided with the cylindrical push-down head below for slotting embedding body of heater above described hydro-pump push rod, described seaming chuck and push-down head are fixed through bolt respectively.
8. electromagnetic induction hot pressed sintering according to claim 7 and brazing device; it is characterized in that: the outer material of described seaming chuck and described push-down head is stainless steel; the material inside embedding described seaming chuck and described push-down head is graphite pressure head; there is ring seal rubber pad the position of the slotting embedding body of heater of described seaming chuck and described push-down head, uses to prevent shielding gas leaks on Loading paths.
9. electromagnetic induction hot pressed sintering according to claim 7 and brazing device, it is characterized in that: the mode that seaming chuck in described pair of pressing mechanism adopts the speed reduction unit of turbine and worm to connect ball-screw carries out erecting to to-and-fro movement, in order to regulate speed and amplitude and little pressure of exerting pressure.
10. electromagnetic induction hot pressed sintering according to claim 7 and brazing device, it is characterised in that: the mode that the push-down head in described pair of pressing mechanism adopts hydro-pump push rod to connect push-down head carries out erecting to to-and-fro movement, in order to big pressure of exerting pressure.
CN201610054245.1A 2016-01-27 2016-01-27 A kind of high-frequency electromagnetic induction hot pressed sintering and brazing device Expired - Fee Related CN105682270B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107504811A (en) * 2017-08-25 2017-12-22 天津中环电炉股份有限公司 A kind of vacuum box type atmosphere furnace
CN108050838A (en) * 2017-12-21 2018-05-18 张大玲 A kind of novel evacuated smelting furnace
CN110920214A (en) * 2019-12-17 2020-03-27 河南科技大学 Preparation method of copper-aluminum laminated composite material
CN114608311A (en) * 2022-01-24 2022-06-10 快克智能装备股份有限公司 Sintering equipment and controllable pressure sintering mechanism of atmosphere thereof

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CN201311179Y (en) * 2008-09-28 2009-09-16 锦州航星真空设备有限公司 Multifunction vacuum high temperature hot pressing furnace
CN203908307U (en) * 2014-06-18 2014-10-29 上海福乃斯电炉科技有限公司 Integrated high-temperature vacuum hot pressing sintering furnace
CN104534874A (en) * 2014-12-25 2015-04-22 合肥科晶材料技术有限公司 Vacuum medium-frequency induction furnace
CN104697331A (en) * 2013-12-04 2015-06-10 中国科学院上海高等研究院 Semiconductor material preparation equipment
CN105170981A (en) * 2015-10-12 2015-12-23 福州大学 Microwave hot-pressing sintering and brazing device and using method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201311179Y (en) * 2008-09-28 2009-09-16 锦州航星真空设备有限公司 Multifunction vacuum high temperature hot pressing furnace
CN104697331A (en) * 2013-12-04 2015-06-10 中国科学院上海高等研究院 Semiconductor material preparation equipment
CN203908307U (en) * 2014-06-18 2014-10-29 上海福乃斯电炉科技有限公司 Integrated high-temperature vacuum hot pressing sintering furnace
CN104534874A (en) * 2014-12-25 2015-04-22 合肥科晶材料技术有限公司 Vacuum medium-frequency induction furnace
CN105170981A (en) * 2015-10-12 2015-12-23 福州大学 Microwave hot-pressing sintering and brazing device and using method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107504811A (en) * 2017-08-25 2017-12-22 天津中环电炉股份有限公司 A kind of vacuum box type atmosphere furnace
CN108050838A (en) * 2017-12-21 2018-05-18 张大玲 A kind of novel evacuated smelting furnace
CN110920214A (en) * 2019-12-17 2020-03-27 河南科技大学 Preparation method of copper-aluminum laminated composite material
CN114608311A (en) * 2022-01-24 2022-06-10 快克智能装备股份有限公司 Sintering equipment and controllable pressure sintering mechanism of atmosphere thereof

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