CN105655239A - 硅晶片清洗工艺 - Google Patents
硅晶片清洗工艺 Download PDFInfo
- Publication number
- CN105655239A CN105655239A CN201610200329.1A CN201610200329A CN105655239A CN 105655239 A CN105655239 A CN 105655239A CN 201610200329 A CN201610200329 A CN 201610200329A CN 105655239 A CN105655239 A CN 105655239A
- Authority
- CN
- China
- Prior art keywords
- ponds
- pond
- silicon wafer
- temperature
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610200329.1A CN105655239B (zh) | 2016-03-31 | 2016-03-31 | 硅晶片清洗工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610200329.1A CN105655239B (zh) | 2016-03-31 | 2016-03-31 | 硅晶片清洗工艺 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105655239A true CN105655239A (zh) | 2016-06-08 |
CN105655239B CN105655239B (zh) | 2018-05-25 |
Family
ID=56496941
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610200329.1A Active CN105655239B (zh) | 2016-03-31 | 2016-03-31 | 硅晶片清洗工艺 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105655239B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107240546A (zh) * | 2017-06-20 | 2017-10-10 | 山西潞安太阳能科技有限责任公司 | 一种金刚线切割后的硅片清洗方法 |
CN109647782A (zh) * | 2018-12-12 | 2019-04-19 | 中国电子科技集团公司第四十六研究所 | 一种硅研磨片清洗工艺 |
CN110047736A (zh) * | 2019-04-22 | 2019-07-23 | 成都晶宝时频技术股份有限公司 | 一种晶片清洗方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5954885A (en) * | 1995-01-06 | 1999-09-21 | Ohmi; Tadahiro | Cleaning method |
US6699330B1 (en) * | 1999-09-30 | 2004-03-02 | Nomura Micro Science Co., Ltd. | Method of removing contamination adhered to surfaces and apparatus used therefor |
CN103658096A (zh) * | 2012-08-31 | 2014-03-26 | 浙江昱辉阳光能源有限公司 | 一种金刚线切割硅片的清洗方法 |
CN103794682A (zh) * | 2012-10-30 | 2014-05-14 | 王红亚 | 一种新的清洗工艺 |
-
2016
- 2016-03-31 CN CN201610200329.1A patent/CN105655239B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5954885A (en) * | 1995-01-06 | 1999-09-21 | Ohmi; Tadahiro | Cleaning method |
US6699330B1 (en) * | 1999-09-30 | 2004-03-02 | Nomura Micro Science Co., Ltd. | Method of removing contamination adhered to surfaces and apparatus used therefor |
CN103658096A (zh) * | 2012-08-31 | 2014-03-26 | 浙江昱辉阳光能源有限公司 | 一种金刚线切割硅片的清洗方法 |
CN103794682A (zh) * | 2012-10-30 | 2014-05-14 | 王红亚 | 一种新的清洗工艺 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107240546A (zh) * | 2017-06-20 | 2017-10-10 | 山西潞安太阳能科技有限责任公司 | 一种金刚线切割后的硅片清洗方法 |
CN109647782A (zh) * | 2018-12-12 | 2019-04-19 | 中国电子科技集团公司第四十六研究所 | 一种硅研磨片清洗工艺 |
CN110047736A (zh) * | 2019-04-22 | 2019-07-23 | 成都晶宝时频技术股份有限公司 | 一种晶片清洗方法 |
Also Published As
Publication number | Publication date |
---|---|
CN105655239B (zh) | 2018-05-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101593693B (zh) | 制作高压双向触发二极管的方法 | |
CN101876088B (zh) | 多晶硅片制绒方法 | |
CN108231540A (zh) | 一种应用于太阳能电池制绒的后清洗工艺 | |
CN105655239A (zh) | 硅晶片清洗工艺 | |
CN104009122B (zh) | 一种丝网印刷返工硅片的处理方法 | |
CN108010841B (zh) | 一种二极管的制造方法及由此制得的二极管 | |
CN101989533A (zh) | 芯片封装块解封装的方法及装置 | |
CN104377119A (zh) | 一种锗单晶抛光片的清洗方法 | |
CN103480598A (zh) | 一种用于制备高效太阳电池的硅片清洗方法及清洗设备 | |
CN104009125B (zh) | 多晶硅片的制绒工艺 | |
CN103614754A (zh) | 一种片式铁氧体产品在电镀前的处理方法 | |
CN104073883A (zh) | 多晶硅太阳能电池片的制绒工艺 | |
CN103878145B (zh) | 一种对硅酸镓镧晶片进行清洗的方法 | |
CN102237275B (zh) | 一种新型贴片二极管的制造方法 | |
CN107516693A (zh) | 一种晶硅太阳能电池抛光片的加工方法 | |
CN102214570A (zh) | 一种高稳定触发二极管的制造方法 | |
CN109755099B (zh) | 一种硅片扩散后清洗工艺 | |
CN103646871A (zh) | 一种提高非晶硅表面氧化层均匀性的方法 | |
CN107240546A (zh) | 一种金刚线切割后的硅片清洗方法 | |
CN102623332A (zh) | 一种硅单晶片的二氧化硅薄膜的剥离装置及其方法 | |
CN102129987B (zh) | 双向触发二极管刀刮玻璃钝化工艺 | |
CN104393094A (zh) | 一种用于hit电池的n型硅片清洗制绒方法 | |
CN104103716A (zh) | 一种实现多晶硅太阳能电池蜂窝陷光绒面的方法 | |
CN103489819A (zh) | 一种用于半导体制程中的薄片临时键合与解键合方法 | |
CN107354513B (zh) | 一种高效稳定的锗单晶片腐蚀工艺 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: 215614 Jingying Photoelectricity of Shuanglong Village, Fenghuang Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee after: SUZHOU JINGYING PV-TECH CO.,LTD. Address before: 215614 Jingying Photoelectricity of Shuanglong Village, Fenghuang Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee before: SUZHOU JINGYING PV-TECH CO.,LTD. |
|
CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190617 Address after: 225000 Lingbo Road, Gaoyou Economic Development Zone, Yangzhou City, Jiangsu Province, 86 Patentee after: YANGZHOU JINGYING PHOTOELECTRIC TECHNOLOGY Co.,Ltd. Address before: 215614 Jingying Photoelectricity of Shuanglong Village, Fenghuang Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee before: SUZHOU JINGYING PV-TECH CO.,LTD. |
|
TR01 | Transfer of patent right |