CN105651163A - Image measuring instrument with high measurement precision - Google Patents
Image measuring instrument with high measurement precision Download PDFInfo
- Publication number
- CN105651163A CN105651163A CN201511004891.9A CN201511004891A CN105651163A CN 105651163 A CN105651163 A CN 105651163A CN 201511004891 A CN201511004891 A CN 201511004891A CN 105651163 A CN105651163 A CN 105651163A
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- CN
- China
- Prior art keywords
- platform
- glass platform
- measuring instrument
- image measuring
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses an image measuring instrument with high measurement precision. The image measuring instrument comprises a CCD sensor, a glass platform and a guide rail stroke supporting platform. The image measuring instrument further comprises an air bearing. A to-be-measured workpiece is placed above the middle part of the glass platform. The CCD sensor is mounted above the to-be-measured workpiece. The glass platform is placed above a guiderail stroke supporting platform through supporting legs at four corners. The air bearing is mounted on the guiderail stroke supporting platform below the middle part of the glass platform. The distance between the air bearing and the glass platform is 3-8 [mu]m. The image measuring instrument has advantages of simple structure and convenient use. The image measuring instrument overcomes a problem of glass platform deformation of a large-stroke image measuring instrument caused by self gravity and weight of the to-be-measured workpiece, so that the flatness of the glass platform of the large-stroke image measuring instrument is kept consistent in measurement, thereby improving measurement precision.
Description
Technical field
The present invention relates to a kind of glass platform, the image measurer that specifically a kind of measuring accuracy is high.
Background technology
As shown in Figure 1, because needing the application end light during image application instrument measuring workpieces size, so the platform of image instrument is all based on glass table top, also owing to having end light below glass platform, so the point of suppon of glass platform all can only design on limit to prevent to the interference of end light, if glass table top is too big, owing to middle portion does not support, then the middle portion of glass platform will due to notch distortion under own wt, platform is more big or workpiece is more heavy then sagging more serious, make planeness excessive, the plane of glass platform cannot be parallel with guide rail stroke face, have impact on the accuracy of measurement.
Also not having solution at present, majority all takes software correction to maintain precision reluctantly.
Summary of the invention
It is an object of the invention to provide the image measurer that the measuring accuracy of a kind of structure sagging deflections simple, anti-is high, to solve in above-mentioned background technology the problem proposed.
For achieving the above object, the present invention provides following technical scheme:
The image measurer that a kind of measuring accuracy is high, comprise ccd sensor, glass platform and guide rail stroke and support platform, also comprise air-bearing, it is placed with workpiece to be measured above the middle position of described glass platform, described ccd sensor is arranged on the top of workpiece to be measured, described glass platform is placed on, by the feet of corner, the top that guide rail stroke supports platform, and described air-bearing is arranged on the guide rail stroke below the middle position of glass platform and supports on platform.
As the present invention's further scheme: the distance between described air-bearing and glass platform is 3-8 ��m.
Compared with prior art, the invention has the beneficial effects as follows:
Present configuration is simple, easy to use, the glass platform overcoming the especially image measurer of Long Distances is subject to the impact of self gravitation and workpiece weight to be measured and the problem be out of shape, the planeness of the glass platform of Long Distances image measurer is consistent when measuring, thus improves measuring accuracy.
Accompanying drawing explanation
Fig. 1 is the structural representation of prior art.
Fig. 2 is the structural representation of the present invention.
Embodiment
Below in conjunction with embodiment, the technical scheme of this patent is described in more detail.
Refer to Fig. 2, the image measurer that a kind of measuring accuracy is high, comprise ccd sensor 1, glass platform 2 and guide rail stroke and support platform 3, also comprise air-bearing 4, workpiece 5 to be measured it is placed with above the middle position of described glass platform 2, described ccd sensor 1 is arranged on the top of workpiece 5 to be measured, described glass platform 2 is placed on, by the feet 6 of corner, the top that guide rail stroke supports platform 3, described air-bearing 4 is arranged on the guide rail stroke below the middle position of glass platform 2 and supports on platform 3, and the distance between described air-bearing 4 and glass platform 2 is 3-8 ��m.
The high image measurer of described measuring accuracy is operationally, owing to the reactive force holder of air-bearing 4 is in the lower section of glass platform 2, glass platform 2 the gravity sag effect of glass platform 2 is eased, so that can not make sagging or distortion because of the weight of own wt or workpiece to be measured 5; Simultaneously owing to air-bearing 4 and glass platform 2 self-inspection exist the distance of 3-8 ��m, so the one-piece construction of survey meter and the work-ing life of glass platform 2 can not be affected, but air-bearing 4 plays a part support glass platform 2 discord glass platform 2 to be contacted, when platform rail moves, glass platform 2 is support but can not be worn.
Present configuration is simple, easy to use, the glass platform 2 overcoming the especially image measurer of Long Distances is subject to the impact of self gravitation and workpiece to be measured 5 weight and the problem be out of shape, the planeness of the glass platform 2 of Long Distances image measurer is consistent when measuring, thus improves measuring accuracy.
Above the better embodiment of this patent is explained in detail, but this patent is not limited to above-mentioned enforcement mode, in the ken that one skilled in the relevant art possesses, it is also possible under the prerequisite not departing from this patent objective, make various change.
Claims (2)
1. the image measurer that a measuring accuracy is high, it is characterized in that, comprise ccd sensor (1), glass platform (2) and guide rail stroke support platform (3), also comprise air-bearing (4), workpiece to be measured (5) it is placed with above the middle position of described glass platform (2), described ccd sensor (1) is arranged on the top of workpiece to be measured (5), described glass platform (2) is placed on, by the feet (6) of corner, the top that guide rail stroke supports platform (3), described air-bearing (4) is arranged on the guide rail stroke below the middle position of glass platform (2) and supports on platform (3).
2. the image measurer that measuring accuracy according to claim 1 is high, it is characterised in that, the distance between described air-bearing (4) and glass platform (2) is 3-8 ��m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511004891.9A CN105651163A (en) | 2015-12-28 | 2015-12-28 | Image measuring instrument with high measurement precision |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511004891.9A CN105651163A (en) | 2015-12-28 | 2015-12-28 | Image measuring instrument with high measurement precision |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105651163A true CN105651163A (en) | 2016-06-08 |
Family
ID=56477049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511004891.9A Pending CN105651163A (en) | 2015-12-28 | 2015-12-28 | Image measuring instrument with high measurement precision |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105651163A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108050950A (en) * | 2017-12-22 | 2018-05-18 | 合肥工业大学 | For the glass substrate device for detecting deformation of air supporting transmission |
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| CN1580875A (en) * | 2003-08-08 | 2005-02-16 | 光子动力学公司 | High precision air-float bearing split-axle table of conveying and restraining large flat flexible medium |
| CN202614184U (en) * | 2012-05-18 | 2012-12-19 | 东莞市德鑫光学仪器有限公司 | Ultrahigh-precision full-automatic image coordinate measuring machine |
| CN202648619U (en) * | 2012-05-30 | 2013-01-02 | 西安爱德华测量设备股份有限公司 | Moving bridge type coordinate measuring machine added with bottom portion light source moving part |
| CN103343588A (en) * | 2013-07-05 | 2013-10-09 | 苏州金螳螂幕墙有限公司 | Large-width unit plate block curtain wall |
| CN103573815A (en) * | 2012-07-31 | 2014-02-12 | 上海微电子装备有限公司 | Micropositioner and gas bearing |
| CN103979185A (en) * | 2013-02-08 | 2014-08-13 | 象牙弗隆泰克株式会社 | Glass substrate loading cassette with reinforcement structure preventing deformation |
| CN104085179A (en) * | 2014-07-24 | 2014-10-08 | 湖州佳宁印刷有限公司 | Printing platform of screen printer |
| CN204359276U (en) * | 2014-10-29 | 2015-05-27 | 陕西彩虹电子玻璃有限公司 | A kind of glass substrate wrapping image automatic on-line pick-up unit |
| CN105758317A (en) * | 2016-05-12 | 2016-07-13 | 青岛麦科三维高新技术有限公司 | Three-coordinate measuring machine capable of machining soft materials |
| CN205482786U (en) * | 2015-12-28 | 2016-08-17 | 威申精密仪器(上海)有限公司 | Image measuring instrument that measurement accuracy is high |
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2015
- 2015-12-28 CN CN201511004891.9A patent/CN105651163A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1580875A (en) * | 2003-08-08 | 2005-02-16 | 光子动力学公司 | High precision air-float bearing split-axle table of conveying and restraining large flat flexible medium |
| CN202614184U (en) * | 2012-05-18 | 2012-12-19 | 东莞市德鑫光学仪器有限公司 | Ultrahigh-precision full-automatic image coordinate measuring machine |
| CN202648619U (en) * | 2012-05-30 | 2013-01-02 | 西安爱德华测量设备股份有限公司 | Moving bridge type coordinate measuring machine added with bottom portion light source moving part |
| CN103573815A (en) * | 2012-07-31 | 2014-02-12 | 上海微电子装备有限公司 | Micropositioner and gas bearing |
| CN103979185A (en) * | 2013-02-08 | 2014-08-13 | 象牙弗隆泰克株式会社 | Glass substrate loading cassette with reinforcement structure preventing deformation |
| CN103343588A (en) * | 2013-07-05 | 2013-10-09 | 苏州金螳螂幕墙有限公司 | Large-width unit plate block curtain wall |
| CN104085179A (en) * | 2014-07-24 | 2014-10-08 | 湖州佳宁印刷有限公司 | Printing platform of screen printer |
| CN204359276U (en) * | 2014-10-29 | 2015-05-27 | 陕西彩虹电子玻璃有限公司 | A kind of glass substrate wrapping image automatic on-line pick-up unit |
| CN205482786U (en) * | 2015-12-28 | 2016-08-17 | 威申精密仪器(上海)有限公司 | Image measuring instrument that measurement accuracy is high |
| CN105758317A (en) * | 2016-05-12 | 2016-07-13 | 青岛麦科三维高新技术有限公司 | Three-coordinate measuring machine capable of machining soft materials |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108050950A (en) * | 2017-12-22 | 2018-05-18 | 合肥工业大学 | For the glass substrate device for detecting deformation of air supporting transmission |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160608 |
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| RJ01 | Rejection of invention patent application after publication |