CN105645107B - Sample transfer system and method applied to ultra-high vacuum environment - Google Patents
Sample transfer system and method applied to ultra-high vacuum environment Download PDFInfo
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- CN105645107B CN105645107B CN201410635930.4A CN201410635930A CN105645107B CN 105645107 B CN105645107 B CN 105645107B CN 201410635930 A CN201410635930 A CN 201410635930A CN 105645107 B CN105645107 B CN 105645107B
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- sample trolley
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Abstract
The invention discloses a kind of sample transfer system and methods applied to ultra-high vacuum environment.The Transmission system includes being distributed in vacuum interacted system to have the commutation transporting room at the selected location for turning to and requiring to sample trolley, the rotatable track for carrying sample trolley is equipped with inside the commutation transporting room, and the rotatable track can be under driving mechanism driving around transfer chamber axis any rotation, and reaches at different operating position and cooperate from the different sample trolley trapped orbits in vacuum interacted system.Further, the selected location includes the selected two vacuum pipeline junction of vacuum interacted system and/or has at the vacuum pipeline crossover node for turning to and requiring to sample trolley.The present invention can effectively complete sample trolley crossing in vacuum pipe and turning function under vacuum environment by the way that commutation transporting room is arranged in vacuum interacted system.
Description
Technical field
The present invention relates to a kind of ultra-high vacuum system, in particular to a kind of sample transfer system for ultra-high vacuum system
And method.
Background technique
Nano-device is forward position and core research field in nanosecond science and technology, can effectively push nano material, nanometer to add
The rapid development of other nano science branches such as work, nanometer detection, nanometer physics simultaneously finally will be to the production of the mankind and life side
Formula generates significant impact, promotes the transformation and upgrading of conventional industries.Vacuum interacted system is boosting nano-device study frontier
It breaks through, however sample transporting in vacuum interacted system and to convert be that the important engineering that nano vacuum interacted system is faced is asked
One of topic.Existing vacuum interacted system is mainly by Sample Room, sample transfer pipeline, transmission mechanism, sample trolley, sample magnetic force
The composition such as transmission lever, pumping system, process chamber.
Existing vacuum interacted system mostly uses linear placement, and sample, by transmission mechanism, transmits sample from Sample Room
Into transmission pipeline, the magnetic drive sample trolley being arranged in transmission pipeline can be by sample delivery to each process chamber junction, so
It is sent sample in process chamber using magnetic force transmission lever afterwards.Had using above-mentioned vacuum interacted system sample transfer scheme following great
Disadvantage:
(1) for linear placement's vacuum interacted system of longer dimension, it will usually more sample transfer trolleies be arranged with benefit
In the utilization efficiency for improving vacuum interacted system, but to be unable to complete sample in linear vacuum pipe small for Multi-example trolley travelling
" overtaking other vehicles " (the sample trolley that subsequent sample trolley crosses front) of vehicle and " meeting " (the sample trolley run in opposite directions is crossed pair
Quadrat sampling product trolley)；
(2) for the vacuum interacted system of non-linear layout, it is in stays in vacuum pipe usually to there is sample trolley
The problem of.
Summary of the invention
The purpose of the present invention is to provide a kind of sample transfer system and methods applied to ultra-high vacuum environment, to overcome
Deficiency in the prior art.
For realization aforementioned invention purpose, the technical solution adopted by the present invention includes:
A kind of sample transfer system applied to ultra-high vacuum environment, including be distributed in small to sample in vacuum interacted system
Vehicle has the commutation transporting room at the selected location for turning to and requiring, and is equipped with inside the commutation transporting room for carrying sample trolley
Rotatable track, and the rotatable track can be under driving mechanism driving around transfer chamber axis any rotation, and arrives
Cooperate at up to different operating position from the different sample trolley trapped orbits in vacuum interacted system.
Further, the selected location include vacuum interacted system selected two vacuum pipeline junction and/or
Have at the vacuum pipeline crossover node for turning to and requiring to sample trolley.
Further, the selected location includes that the main vacuum pipeline of vacuum interacted system and process chamber branch vacuum pipeline are handed over
Meet place.
Further, the operating position of the rotatable track includes being parallel to sample trolley retaining rail in main vacuum pipeline
Road position and perpendicular to sample trolley trapped orbit position in main vacuum pipeline.
Further, the sample trolley uses magnetic drive sample trolley, and is additionally provided in the vacuum interacted system
To drive the magnetic drive sliding block of the sample trolley.
Further, the magnetic drive sliding block is set to outside the vacuum pipeline in the vacuum interacted system.
A kind of sample transfer method applied to ultra-high vacuum environment, be based on any sample transfer system above-mentioned and
It realizes, this method comprises: rotating the rotatable track according to real work situation, the rotatable track is made to reach institute
It needs to cooperate at operating position with the respective sample trolley trapped orbit in vacuum interacted system, and then makes selected sample trolley
The smooth traveling in vacuum interacted system.
Further, this method comprises: having steering in two selected vacuum pipeline junctions for selecting sample trolley
The situation of operation, then, first by the operating position of the rotatable track adjust to sample trolley in a wherein vacuum pipeline
Trapped orbit direction is consistent, and the selected sample trolley in the vacuum pipeline is driven to enter commutation through the rotatable track
In transporting room, will then carry the rotatable track rotation set angle of selected sample trolley, to the rotatable track and
Sample trolley trapped orbit direction is consistent in another vacuum pipeline, and selected sample trolley is driven to enter another vacuum pipeline later
It is interior.
Further, this method comprises: for selected sample trolley in main vacuum pipeline and process chamber branch vacuum pipeline
There is the situation of steering operation in junction, then, first by the operating position of the rotatable track adjust to in main vacuum pipeline
Sample trolley trapped orbit direction is consistent, and drives selected sample trolley in main vacuum pipeline through the rotatable track
Into in commutation transporting room, the rotatable track for carrying selected sample trolley is rotated by 90 ° later, makes the rotatable track
It is consistent with sample trolley trapped orbit direction in process chamber branch vacuum pipeline, then selected sample trolley is driven to enter process chamber Zhi Zhen
Blank pipe line.
Further, this method comprises: for operation two or more sample trolley has evacuation simultaneously in a vacuum pipeline
The situation of operation is compiled in two or more the sample trolleies mutually at commutation transporting room, and makes to be located at selected sample trolley
The sample trolley in front enters commutation transporting room and runs on rotatable track, then drives the rotatable track and another true
Sample trolley trapped orbit direction in blank pipe line is consistent, and the sample trolley on rotatable track is driven to enter later
Another vacuum pipeline is temporarily parked, then the rotatable track is rotated to initial station, and selected sample trolley is driven to pass through
It is run by the rotatable track to destination.
Compared with prior art, the present invention at least has the advantages that by being arranged in commutation in vacuum interacted system
Turn room (hereinafter referred to as " transporting room "), can effectively complete sample trolley crossing in vacuum pipe under vacuum environment and turns
To function, for example, for the vacuum interacted system of linear placement, increased transporting room can be used as the temporary stop of sample trolley
To allow another sample trolley met to pass through, and for the vacuum interacted system of non-linear layout, increased transporting room leans on it
The commutation corner operation of sample trolley may be implemented in built-in rotatable track.
Detailed description of the invention
Fig. 1 shows for the structure of the sample transfer system applied to ultra-high vacuum environment a kind of in an exemplary embodiments of the invention
It is intended to；
Fig. 2 is one of the work shape body schematic diagram of sample transfer system shown in Fig. 1；
Fig. 3 is the two of the work shape body schematic diagram of sample transfer system shown in Fig. 1；
Fig. 4 is the four of the work shape body schematic diagram of sample transfer system shown in Fig. 1；
Description of symbols: main vacuum pipeline 1, process chamber branch line vacuum pipeline 2, commutation transporting room 3, rotatable track 4,
Motor-driven mechanism 5, sample trolley trapped orbit 6, magnetic drive sample trolley 7, magnetic drive sliding block 8.
Specific embodiment
Below in conjunction with exemplary embodiments and attached drawing, further description of the technical solution of the present invention.
It is an exemplary embodiments of the invention shown in refering to fig. 1, is related to a kind of sample applied to ultra-high vacuum environment
Transmission system comprising main vacuum pipeline 1, process chamber branch line vacuum pipeline 2, commutation transporting room 3, rotatable track 4, motor drive
Motivation structure 5, sample trolley trapped orbit 6, magnetic drive sample trolley 7, magnetic drive sliding block 8 etc..
It will be further the main vacuum pipeline and process chamber branch vacuum pipeline in vacuum interacted system in the present embodiment
Place, or there is setting at the vacuum pipeline crossover node for turning to and requiring to commutate transporting room (refering to Fig. 2) in sample trolley, in commutation
Turn chamber interior to be provided with rotatable track (refering to Fig. 2), the effect of rotatable track can be revolved for carrying sample trolley
The track turned is driven using motor-driven mechanism, can be around transfer chamber axis any rotation, and operating position is usual
It is to be parallel to main vacuum manifold sample trolley trapped orbit position or perpendicular to the small truck position of main vacuum manifold sample.For needing
Magnetic drive sample trolley is wanted to have the situation of steering operation in main vacuum pipeline and process chamber junction: when commutation transfer is indoor
Rotatable track is with when trapped orbit direction is consistent in main pipeline, and the magnetic drive sample trolley in main vacuum manifold is in pipe
It can enter via the indoor rotatable track of transfer under the drive of magnetic drive sliding block in transporting room outside road as shown in Figure 2.Then
The rotatable track for carrying sample trolley can be made to be rotated by 90 ° around transfer chamber axis by motor-driven structure, at this time in commutation
It is consistent with process chamber branch vacuum pipeline inner orbit direction to turn indoor rotatable track, magnetic drive sample trolley magnetic outside pipeline
It is as shown in Figure 3 that process chamber by-pass line is entered under the drive of power drive sliding block.For running more simultaneously in main vacuum pipeline
Magnetic force sample trolley has the situation (see figure 4) of avoiding operation: two or more sample trolleies are mutually compiled in first at commutation transporting room, are made
Wherein a magnetic drive sample trolley enters commutation transporting room by magnetic drive sliding block outside pipeline, then by motor driven
Mechanism is consistent the indoor rotatable track direction of transfer with the guide rail direction in branch trajectory, recycles outside pipeline later
Magnetic drive sliding block parks this sample trolley temporarily in branch line vacuum pipe；Restoring rotatable track direction at this time is
Initial direction runs another magnetic drive sample trolley to destination under magnetic drive slider-actuated outside pipeline.With this
The magnetic drive sample trolley being temporarily parked in branch line vacuum pipe can be taken out and be sent to purpose according to similar approach simultaneously
Ground.So just realize avoiding operation of the more magnetic drive sample trolleies in linear vacuum pipe.
Transmission system of the invention can effectively complete under vacuum environment sample trolley crossing in vacuum pipe and
Turning function.
It should be pointed out that the above described specific embodiments of the present invention, be not intended to limit the scope of the present invention..
Any any other various changes and modifications in accordance with the technical idea of the present invention, should be included in right of the present invention
It is required that protection scope in.
Claims (4)
1. a kind of sample transfer system applied to ultra-high vacuum environment, it is characterised in that including being distributed in vacuum interacted system
There is the commutation transporting room at the selected location for turning to and requiring to sample trolley, is equipped with inside the commutation transporting room for carrying sample
The rotatable track of product trolley, and the rotatable track can rotate random angle around transfer chamber axis under driving mechanism driving
Degree, and reach at different operating position and cooperate from the different sample trolley trapped orbits in vacuum interacted system, it is described selected
Position includes the selected two vacuum pipeline junction of vacuum interacted system and/or has the vacuum of steering requirement to sample trolley
At cross pipe-line node, the sample trolley uses magnetic drive sample trolley, and is additionally provided with use in the vacuum interacted system
To drive the magnetic drive sliding block of the sample trolley, the magnetic drive sliding block is set to true in the vacuum interacted system
Outside blank pipe line.
2. the sample transfer system according to claim 1 applied to ultra-high vacuum environment, which is characterized in that described selected
Position includes main vacuum pipeline and the process chamber branch vacuum pipeline junction of vacuum interacted system.
3. being applied to the sample transfer system of ultra-high vacuum environment described in any one of -2 according to claim 1, which is characterized in that
The operating position of the rotatable track includes being parallel in main vacuum pipeline sample trolley trapped orbit position and perpendicular to master
Sample trolley trapped orbit position in vacuum pipeline.
4. a kind of sample transfer method applied to ultra-high vacuum environment is based on sample of any of claims 1-3
Product Transmission system and realize, characterized by comprising: according to real work situation, rotate the rotatable track, make described
Cooperate at operating position needed for rotatable track reaches and with the respective sample trolley trapped orbit in vacuum interacted system, in turn
Make the smooth traveling in vacuum interacted system of selected sample trolley；
Wherein, there is the situation of steering operation in two selected vacuum pipeline junctions for selecting sample trolley, then, first will
The operating position of the rotatable track is adjusted to consistent with sample trolley trapped orbit direction in a wherein vacuum pipeline, and is driven
Enter the selected sample trolley being located in the vacuum pipeline in commutation transporting room through the rotatable track, will then carry
The rotatable track of selected sample trolley rotates set angle, until sample trolley in the rotatable track and another vacuum pipeline
Trapped orbit direction is consistent, and selected sample trolley is driven to enter in another vacuum pipeline later；
And have the situation of steering operation in main vacuum pipeline and process chamber branch vacuum pipeline junction for selected sample trolley,
Then, first by the operating position of the rotatable track adjust to sample trolley trapped orbit direction one in main vacuum pipeline
It causes, and the selected sample trolley in main vacuum pipeline is driven to enter in commutation transporting room through the rotatable track, later
The rotatable track for carrying selected sample trolley is rotated by 90 °, is made in the rotatable track and process chamber branch vacuum pipeline
Sample trolley trapped orbit direction is consistent, then selected sample trolley is driven to enter process chamber branch vacuum pipeline；And
For operation two or more sample trolley has the situation of avoiding operation simultaneously in a vacuum pipeline, then make this two first
The above sample trolley is mutually compiled at commutation transporting room, and the sample trolley for being located at the selected small front side of sample is made to enter commutation transfer
Room is simultaneously run to rotatable track, then drives the sample trolley trapped orbit in the rotatable track and another vacuum pipeline
Direction is consistent, and is driven the sample trolley on rotatable track to enter another vacuum pipeline later and is temporarily parked, then
The rotatable track is rotated to initial station, and selected sample trolley is driven to run via the rotatable track to mesh
Ground.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410635930.4A CN105645107B (en) | 2014-11-13 | 2014-11-13 | Sample transfer system and method applied to ultra-high vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410635930.4A CN105645107B (en) | 2014-11-13 | 2014-11-13 | Sample transfer system and method applied to ultra-high vacuum environment |
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| CN105645107A CN105645107A (en) | 2016-06-08 |
| CN105645107B true CN105645107B (en) | 2019-10-18 |
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| CN108061808B (en) * | 2016-11-08 | 2021-02-23 | 中国科学院苏州纳米技术与纳米仿生研究所 | Vacuum interconnection system and method for nano material experiment |
| CN106596990B (en) * | 2016-12-02 | 2018-06-19 | 南京大学 | A kind of ultrahigh vacuum sample transport system |
| CN108267609B (en) * | 2016-12-31 | 2021-11-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | Sample conveying rack for vacuum interconnection system and vacuum device |
| CN107082284A (en) * | 2017-03-29 | 2017-08-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | Device for transferring samples and ultra-high vacuum transfer equipment |
| CN107677844B (en) * | 2017-09-06 | 2019-09-27 | 清华大学 | A kind of sample transferring device and ultrahigh vacuum measuring system |
| CN107490704B (en) * | 2017-09-06 | 2019-06-18 | 清华大学 | Intersect sample transferring device and the ultrahigh vacuum measuring system with the intersection sample transferring device |
| CN108529236B (en) * | 2018-03-16 | 2023-10-03 | 四川交通职业技术学院 | Logistics pipeline system with conversion and transmission functions |
| CN110441100B (en) * | 2018-05-02 | 2022-04-01 | 南京理工大学 | Vacuum interconnection system for preparing nano powder and realizing in-situ ultrahigh pressure forming |
| CN109081119A (en) * | 2018-09-07 | 2018-12-25 | 中铁第四勘察设计院集团有限公司 | A kind of cold chain pipeline logistics cross-channel turns to remove system |
| CN110040150A (en) * | 2019-04-15 | 2019-07-23 | 南京大学 | A kind of sample transferring device between non-rectilinear interconnection vacuum pipe |
| CN110092148A (en) * | 2019-05-09 | 2019-08-06 | 同方威视技术股份有限公司 | Sample transports detection device and system |
| CN113291724A (en) * | 2021-05-12 | 2021-08-24 | 北京航空航天大学合肥创新研究院(北京航空航天大学合肥研究生院) | Electronic sample pass appearance pole of super high vacuum |
| CN114044289B (en) * | 2021-10-11 | 2023-03-14 | 中国科学院沈阳科学仪器股份有限公司 | Vacuum vertical connection sample transmission system |
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| US4042190A (en) * | 1975-11-19 | 1977-08-16 | Ueno Kohgyo Ltd. | Conveyance truck with movable seal plates |
| CN101958371A (en) * | 2010-10-13 | 2011-01-26 | 中国科学院深圳先进技术研究院 | Device for manufacturing copper indium gallium selenium (CIGS) thin-film solar cells |
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