CN105643395A - Grinding forming method for optical free-form surface - Google Patents

Grinding forming method for optical free-form surface Download PDF

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CN105643395A
CN105643395A CN201610004135.4A CN201610004135A CN105643395A CN 105643395 A CN105643395 A CN 105643395A CN 201610004135 A CN201610004135 A CN 201610004135A CN 105643395 A CN105643395 A CN 105643395A
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代雷
崔庆龙
徐乐
隋永新
杨怀江
闫丰
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00Computer-aided design [CAD]
    • G06F30/10Geometric CAD
    • G06F30/17Mechanical parametric or variational design

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  • General Engineering & Computer Science (AREA)
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  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

本发明公开了一种光学自由曲面磨削成型方法,采用数控磨削加工中心与球形砂轮进行磨削成型,S1:将设计的目标曲面采用点云矩阵进行描述,得点云设计矩阵Mdesign;S2:依据所述点云设计矩阵Mdesign对待加工曲面进行磨削工作,并对磨削后所得曲面进行检测,得点云检测矩阵Mmeasure;S3:将所述点云检测矩阵Mmeasure与所述点云设计矩阵Mdesign进行比较,获得点云误差矩阵Merr;S4:依据所述点云误差矩阵Merr对磨削后曲面进行补偿磨削加工。该成型方法可以有效提高数控磨削中心的磨削精度,具有适用范围广,加工成本低等优点。

The invention discloses a method for grinding and forming an optical free-form surface, which adopts a numerically controlled grinding center and a spherical grinding wheel for grinding and forming. S1: describe the designed target surface using a point cloud matrix to obtain a point cloud design matrix M design ; S2 : Grinding the curved surface to be processed according to the point cloud design matrix Mdesign , and detecting the surface obtained after grinding to obtain the point cloud detection matrix M measure ; S3: combining the point cloud detection matrix M measure with the point Comparing the cloud design matrix M design to obtain a point cloud error matrix M err ; S4: performing compensation grinding on the ground surface according to the point cloud error matrix M err . The forming method can effectively improve the grinding precision of the numerical control grinding center, and has the advantages of wide application range, low processing cost and the like.

Description

一种光学自由曲面磨削成型方法A grinding method for optical free-form surface

技术领域technical field

本发明涉及光学加工领域,特别提供了一种光学自由曲面磨削成型方法。The invention relates to the field of optical processing, and in particular provides an optical free-form surface grinding forming method.

背景技术Background technique

将自由曲面引入光学系统中,可极大提高光学系统的成像质量和能量的传输效率。现代光学系统中自由曲面的应用,可以针对系统的特殊像差设计特定的自由曲面,补偿系统像差,提高系统成像质量。由于自由曲面的多自由度特性,通常可以在保证光学系统成像质量的条件下,进一步减少光学系统中的元件数量,减小光学系统的尺寸,因此被越发广泛的应用于医疗,军事,航天等领域。Introducing a free-form surface into an optical system can greatly improve the imaging quality and energy transmission efficiency of the optical system. The application of free-form surfaces in modern optical systems can design specific free-form surfaces for the special aberrations of the system, compensate system aberrations, and improve system imaging quality. Due to the multi-degree-of-freedom characteristics of the free-form surface, it is usually possible to further reduce the number of components in the optical system and reduce the size of the optical system under the condition of ensuring the imaging quality of the optical system, so it is more and more widely used in medical, military, aerospace, etc. field.

先进数控超精密制造技术加工自由曲面光学元件,可有效解决自由曲面光学元件加工的技术瓶颈,但一般的自由曲面磨削成型方法所涉及使用的数控磨削加工中心直接影响光学自由曲面的加工质量,提高加工精度往往意味着更高的加工成本,例如引进超精密的液压或气浮加工中心,其对使用环境,加工材料均有很大的限制。Advanced CNC ultra-precision manufacturing technology for processing free-form optical elements can effectively solve the technical bottleneck of free-form optical element processing, but the general free-form surface grinding method involves the use of CNC grinding processing centers that directly affect the processing quality of optical free-form surfaces , Improving processing accuracy often means higher processing costs, such as the introduction of ultra-precision hydraulic or air-floating processing centers, which have great restrictions on the use environment and processing materials.

因此,如何解决上述问题,成为人们亟待解决的问题。Therefore, how to solve the above problems has become an urgent problem to be solved.

发明内容Contents of the invention

鉴于此,本发明的目的在于提供一种光学自由曲面磨削成型方法,以解决以往在进行自由曲面加工时,需要使用超精密的数控中心,对于使用环境和加工材料均由很大限制,而且加工成本高等问题。In view of this, the object of the present invention is to provide a kind of optical free-form surface grinding forming method, to solve the need to use ultra-precise numerical control center when performing free-form surface processing in the past, all have very big restriction to use environment and processing material, and High processing costs and other issues.

本发明提供的技术方案,具体为,一种光学自由曲面磨削成型方法,采用数控磨削加工中心与球形砂轮进行磨削成型,其特征在于:The technical solution provided by the present invention is specifically a method for grinding and forming an optical free-form surface, which adopts a numerically controlled grinding center and a spherical grinding wheel for grinding and forming, and is characterized in that:

S1:将设计的目标曲面采用点云矩阵进行描述,得点云设计矩阵MdesignS1: Describe the designed target surface using a point cloud matrix to obtain a point cloud design matrix M design ;

S2:依据所述点云设计矩阵Mdesign对待加工曲面进行磨削工作,并对磨削后所得曲面进行检测,得点云检测矩阵MmeasureS2: Grinding the curved surface to be processed according to the point cloud design matrix M design , and detecting the curved surface obtained after grinding to obtain the point cloud detection matrix M measure ;

S3:将所述点云检测矩阵Mmeasure与所述点云设计矩阵Mdesign进行比较,获得点云误差矩阵MerrS3: Comparing the point cloud detection matrix M measure with the point cloud design matrix M design to obtain a point cloud error matrix M err ;

S4:依据所述点云误差矩阵Merr对磨削后曲面进行补偿磨削加工。S4: Perform compensation grinding on the ground surface according to the point cloud error matrix M err .

优选,所述步骤S4包括:Preferably, said step S4 includes:

S401:将所述点云误差矩阵Merr与阈值进行比较;S401: Comparing the point cloud error matrix M err with a threshold;

S402:当所述点云误差矩阵Merr大于阈值时,依据所述点云误差矩阵Merr,计算获得点云修正矩阵Mdesign_1S402: When the point cloud error matrix M err is greater than a threshold, calculate and obtain a point cloud correction matrix M design_1 according to the point cloud error matrix M err ;

S403:依据所述点云修正矩阵Mdesign_1对磨削后曲面进行补偿磨削加工,对补偿磨削后曲面进行点云检测,并将检测所得的点云检测矩阵与点云设计矩阵Mdesign比较,再次获得点云误差矩阵MerrS403: Perform compensation grinding on the ground surface according to the point cloud correction matrix M design_1 , perform point cloud detection on the compensation ground surface, and compare the detected point cloud detection matrix with the point cloud design matrix M design , get the point cloud error matrix M err again;

S404:重复步骤S401~S403,直至点云误差矩阵Merr小于等于阈值。S404: Repeat steps S401-S403 until the point cloud error matrix M err is less than or equal to the threshold.

进一步优选,所述步骤S402中,依据所述点云误差矩阵Merr,计算获得点云修正矩阵Mdesign_1的公式为:Further preferably, in the step S402, according to the point cloud error matrix M err , the formula for calculating and obtaining the point cloud correction matrix M design_1 is:

Mdesign_1=Mdesign+MerrM design — 1 =M design +M err .

进一步优选,Further preferably,

步骤S2中检测磨削后所得曲面的方法为接触式检测;The method of detecting the curved surface obtained after grinding in step S2 is contact detection;

步骤S403中检测补偿磨削后曲面的方法为接触式检测。The method of detecting and compensating the ground surface in step S403 is contact detection.

进一步优选,步骤S2和步骤S403中的检测点位置与目标曲面的点云设计矩阵采样点位置相同。Further preferably, the positions of the detection points in step S2 and step S403 are the same as the sampling point positions of the point cloud design matrix of the target curved surface.

进一步优选,所述点云设计矩阵Mdesign和所述点云检测矩阵Mmeasure中均包括曲面在X、Y、Z三维坐标数据。Further preferably, both the point cloud design matrix M design and the point cloud detection matrix M measure include three-dimensional coordinate data of a curved surface in X, Y, and Z.

本发明提供的光学自由曲面磨削成型方法,采用点云的方式对于自由曲面进行评价与测量,计算得到点云误差矩阵,以点云误差矩阵进行补偿加工,以修正加工结果,使用该磨削成型方法进行磨削工作,可以有效提高数控磨削中心的磨削精度,无需引用超精密的数控中心,降低加工成本,有利于自由曲面光学元件的制造与应用。The optical free-form surface grinding forming method provided by the present invention uses a point cloud method to evaluate and measure the free-form surface, calculates the point cloud error matrix, and performs compensation processing with the point cloud error matrix to correct the processing results. The forming method for grinding can effectively improve the grinding accuracy of the CNC grinding center without using an ultra-precision CNC center, which reduces processing costs and is conducive to the manufacture and application of free-form optical components.

本发明提供的光学自由曲面磨削成型方法,具有以下优点:The optical free-form surface grinding forming method provided by the present invention has the following advantages:

1、通过点云的方式进行曲面设计与检测描述,可适用于大部分自由曲面光学元件,有效扩展其适用范围;1. Carry out surface design and detection description through point cloud, which can be applied to most free-form surface optical components, effectively expanding its scope of application;

2、通过补偿加工的柔性加工方式,降低了对加工中心的要求,可有效降低自由曲面光学元件的制造成本。2. Through the flexible processing method of compensation processing, the requirements on the processing center are reduced, which can effectively reduce the manufacturing cost of free-form surface optical elements.

附图说明Description of drawings

图1为球形砂轮的结构示意图;Fig. 1 is the structural representation of spherical emery wheel;

图2为自由曲面光学元件的磨削成型加工示意图。Fig. 2 is a schematic diagram of the grinding and forming process of the free-form surface optical element.

具体实施方式detailed description

下面结合具体的实施方案,对本发明进行进一步解释,但是并不用于限制本发明的保护范围。The present invention will be further explained below in conjunction with specific embodiments, but it is not intended to limit the protection scope of the present invention.

为了解决以往在进行自由曲面光学元件加工时,需要使用超精密的加工中心,对于使用环境和加工材料均有很多的限制,而且成本高的问题,本实施方案提供一种光学自由曲面磨削成型方法,其可以适用于普通的数控中心,能够提高普通数控中心的加工精度,进而可以采用普通数控磨削加工中心和球形砂轮进行光学自由曲面的加工,降低了自由曲面加工的成本,而且对于使用环境和加工材料均无苛刻的要求。In order to solve the problem that in the past, when processing free-form optical elements, it is necessary to use ultra-precision machining centers, there are many restrictions on the use environment and processing materials, and the problem of high cost, this embodiment provides an optical free-form surface grinding forming The method, which can be applied to ordinary numerical control centers, can improve the machining accuracy of ordinary numerical control centers, and then can use ordinary numerical control grinding machining centers and spherical grinding wheels to process optical free-form surfaces, reducing the cost of free-form surface processing, and for the use of There are no strict requirements on the environment and processing materials.

下面以一个具体的实施方案对本发明进行详细说明:The present invention is described in detail with a specific embodiment below:

采用数控磨削加工中心与球形砂轮,通过单点磨削的方式进行自由曲面z=a1x2+a2y2+a3x3+a4y3磨削成型,该光学元件的口径为D,由于该自由曲面的方程中包括了三次项,因此为一个非回转对称的自由曲面。Using CNC grinding machining center and spherical grinding wheel, the free-form surface z=a 1 x 2 +a 2 y 2 +a 3 x 3 +a 4 y 3 is ground and shaped by single-point grinding. The aperture of the optical element is D, since the equation of the free-form surface includes a cubic term, it is a non-rotationally symmetric free-form surface.

其中,球形砂轮的结构可参见图1,包括圆柱形砂轮刀柄1,与圆柱形砂轮刀柄1固定连接的圆柱形砂轮基体2,在砂轮基体2的外周设置有砂轮磨料层3,砂轮磨料层3的磨削工作面为圆弧性,且其曲率变径为砂轮口径,即砂轮基体2与砂轮磨料层3可看作是球体的一个截片。这样的优势在于实际磨削过程是砂轮磨料层3的圆弧形磨削工作面进行磨削,可提高表面的光洁度与加工效率,由于实际砂轮接触位置是球形的一部分,因此在一定程度上可以弥补加工中心运动精度与动态特性对于实际加工的影响。其中球形砂轮的口径小于被加工自由曲面最佳拟合球的曲率半径。Wherein, the structure of spherical grinding wheel can refer to Fig. 1, comprises cylindrical grinding wheel shank 1, and the cylindrical grinding wheel substrate 2 that is fixedly connected with cylindrical grinding wheel shank 1, is provided with grinding wheel abrasive layer 3 on the periphery of grinding wheel substrate 2, and grinding wheel abrasive material The grinding surface of layer 3 is arc-shaped, and its curvature changes to the diameter of the grinding wheel, that is, the grinding wheel base 2 and the grinding wheel abrasive layer 3 can be regarded as a section of a sphere. The advantage of this is that the actual grinding process is the grinding of the arc-shaped grinding working surface of the grinding wheel abrasive layer 3, which can improve the surface finish and processing efficiency. Since the actual grinding wheel contact position is a part of the spherical shape, it can be used to a certain extent. Make up for the impact of machining center motion accuracy and dynamic characteristics on actual machining. The caliber of the spherical grinding wheel is smaller than the radius of curvature of the best fitting sphere of the processed free-form surface.

将自由曲面z=a1x2+a2y2+a3x3+a4y3口径D内曲面离散化,设采样间隔为d,可以得到该曲面面形点云设计矩阵Mdesign Discretize the free-form surface z=a 1 x 2 +a 2 y 2 +a 3 x 3 +a 4 y 3 internal surface of caliber D, set the sampling interval as d, the surface shape point cloud design matrix M design of the surface can be obtained

Mm dd ee sthe s ii gg nno == xx 11 ythe y 11 zz 11 xx 22 ythe y 22 zz 22 xx 33 ythe y 33 zz 33 .. .. .. .. .. .. .. .. .. xx nno ythe y nno zz nno

其中,点云设计矩阵中包括X,Y,Z三维坐标数据;Wherein, the point cloud design matrix includes X, Y, Z three-dimensional coordinate data;

依据点云设计矩阵Mdesign与上述球形砂轮的具体参数,选择合适的加工路径,生成加工程序导入数控磨削加工中心进行加工,加工示意图如图2所示,其中,A为球形砂轮,B为待加工曲面,加工完成后使用接触式检测方法,检测点位置与自由曲面点云采样点位置相同,检测后得到点云测量矩阵MmeasureAccording to the point cloud design matrix M design and the specific parameters of the above-mentioned spherical grinding wheel, select the appropriate processing path, generate the processing program and import it into the CNC grinding machining center for processing. The processing schematic diagram is shown in Figure 2, where A is the spherical grinding wheel and B is the For the surface to be processed, the contact detection method is used after the processing is completed. The detection point position is the same as the point cloud sampling point position of the free-form surface, and the point cloud measurement matrix M measure is obtained after detection;

Mm mm ee aa sthe s uu rr ee == xx 11 ythe y 11 zz ′′ 11 xx 22 ythe y 22 zz ′′ 22 xx 33 ythe y 33 zz ′′ 33 .. .. .. .. .. .. .. .. .. xx nno ythe y nno zz ′′ nno

分析点云测量矩阵Mmeasure与点云设计矩阵Mdesign的偏差,得到点云误差矩阵MerrAnalyze the deviation between the point cloud measurement matrix M measure and the point cloud design matrix M design to obtain the point cloud error matrix M err ,

Mm ee rr rr == xx 11 ythe y 11 ΔzΔz 11 xx 22 ythe y 22 ΔzΔz 22 xx 33 ythe y 33 ΔzΔz 33 .. .. .. .. .. .. .. .. .. xx nno ythe y nno ΔzΔz nno

这个误差可认为包括加工中心性能,加工参数,加工环境,砂轮磨损等因素综合引起的加工误差,因此若能补偿这个误差即可有效降低加工误差;This error can be considered to include the processing error caused by the combination of machining center performance, processing parameters, processing environment, grinding wheel wear and other factors. Therefore, if this error can be compensated, the processing error can be effectively reduced;

将点云误差矩阵Merr对齐位置加入到点云设计矩阵Mdesign,得到点云修正矩阵Mdesign_1,计算公式如下:Add the alignment position of the point cloud error matrix M err to the point cloud design matrix M design to obtain the point cloud correction matrix M design_1 , the calculation formula is as follows:

Mdesign_1=Mdesign+Merr M design_1 = M design + M err

基于新的点云设计矩阵Mdesign_1与球形砂轮的具体参数,重新选择合适的加工路径,生成加工程序导入数控磨削加工中心进行加工,加工完成后再使用接触式检测方法进行检测,并将检测所得的点云检测矩阵再与设计矩阵进行比较,获得点云误差矩阵,如果点云误差矩阵大于设定的阈值,再生成点云修正矩阵,再进行加工,如此迭代加工,逐步减小加工误差,使点云误差矩阵降低,直至使加工的曲面面形点云矩阵满足设计要求为止,即点云误差矩阵小于阈值,其中的阈值可以根据不同的需要进行实际设定。Based on the new point cloud design matrix M design_1 and the specific parameters of the spherical grinding wheel, re-select the appropriate processing path, generate a processing program and import it into the CNC grinding machining center for processing, and then use the contact detection method for detection after processing is completed, and the detection The obtained point cloud detection matrix is compared with the design matrix to obtain the point cloud error matrix. If the point cloud error matrix is greater than the set threshold, the point cloud correction matrix is regenerated, and then processed. This iterative processing gradually reduces the processing error. , to reduce the point cloud error matrix until the processed surface point cloud matrix meets the design requirements, that is, the point cloud error matrix is smaller than the threshold, and the threshold can be actually set according to different needs.

上述实施方案提出的光学自由曲面磨削成型方法,所涉及使用为通用的数控磨削加工中心,可有效降低加工及维护成本,采用球形砂轮单点磨削的方式提高了磨削效率,并降低对于主轴最高转速的要求,采用点云的方式对于自由曲面进行评价与测量,计算得到点云误差矩阵,补偿加工数据以修正加工结果,如此迭代加工,逐步减小加工误差,最终得到满足设计要求的自由曲面面形的光学元件。该方法可以有效提高自由曲面的加工精度,降低加工成本,有利于自由曲面光学元件的制造与应用。The optical free-form surface grinding forming method proposed in the above embodiment involves the use of a general-purpose CNC grinding machining center, which can effectively reduce processing and maintenance costs, and the single-point grinding method of spherical grinding wheels improves the grinding efficiency and reduces For the requirement of the maximum spindle speed, the point cloud method is used to evaluate and measure the free-form surface, and the point cloud error matrix is calculated, and the processing data is compensated to correct the processing results. In this way, iterative processing gradually reduces the processing error, and finally meets the design requirements. free-form optical elements. The method can effectively improve the processing precision of the free-form surface, reduce the processing cost, and is beneficial to the manufacture and application of the free-form surface optical element.

该方法同样适用于不可用方程描述的但可以用点云矩阵描述的自由曲面加工,下面以一个具体的实施例对本发明进行更进一步的说明。This method is also applicable to the free-form surface processing that cannot be described by equations but can be described by a point cloud matrix. The present invention will be further described with a specific embodiment below.

实施例1Example 1

被加工光学自由曲面如图2所示,其中A为磨削加工使用的砂轮,口径为150mm,刃口半径为75mm,B为被加工光学自由曲面元件。该光学自由曲面元件B不可用方程进行描述,只可以采用下点云矩阵Mdesign描述,其中每行包括不同位置的x,y,z坐标,共有70个坐标,如下给出前20个坐标:The processed optical free-form surface is shown in Figure 2, where A is the grinding wheel used for grinding, with a diameter of 150 mm and a cutting edge radius of 75 mm, and B is the processed optical free-form surface component. The optical free-form surface element B cannot be described by equations, but can only be described by the following point cloud matrix M design , where each row includes x, y, and z coordinates of different positions, and there are 70 coordinates in total. The first 20 coordinates are given as follows:

根据点云矩阵Mdesign与所用砂轮计算磨削加工路径,后处理生成数控加工程序,导入数控磨削加工进行磨削加工,加工后使用接触式检测方式进行测量,得到测量矩阵Mmeasure,如下只给出前20个坐标:The grinding path is calculated according to the point cloud matrix M design and the grinding wheel used, and the NC machining program is generated after post-processing, which is imported into the NC grinding process for grinding processing. After processing, the contact detection method is used for measurement to obtain the measurement matrix M measure , as follows Given the first 20 coordinates:

由点云矩阵Mdesign与测量点云矩阵Mmeasure计算得到误差点云矩阵Merr,如下只给出前20个坐标,其中坐标Z最大偏差0.066mm,这个偏差大于阈值,是可以通过数控磨削中心进行修正。计算Mdesign_1=Mdesign+Merr,并重新生成加工路径,后处理生成加工程序,导入数控磨削加工进行磨削加工,循环迭代,最终误差点云矩阵Merr满足设计要求。The error point cloud matrix M err is calculated by the point cloud matrix M design and the measurement point cloud matrix M measure . Only the first 20 coordinates are given as follows, and the maximum deviation of the coordinate Z is 0.066mm. This deviation is greater than the threshold and can be passed through the CNC grinding center. Make corrections. Calculate M design_1 = M design + M err , and regenerate the machining path, post-process to generate the machining program, import the CNC grinding process for grinding, cycle iterations, and finally the error point cloud matrix M err meets the design requirements.

以上仅是本发明的优选实施方式,应当指出的是,上述优选实施方式不应视为对本发明的限制,本发明的保护范围应当以权利要求所限定的范围为准。对于本技术领域的普通技术人员来说,在不脱离本发明的精神和范围内,还可以做出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。The above are only preferred implementations of the present invention, and it should be noted that the above preferred implementations should not be regarded as limiting the present invention, and the scope of protection of the present invention should be based on the scope defined in the claims. For those skilled in the art, without departing from the spirit and scope of the present invention, some improvements and modifications can also be made, and these improvements and modifications should also be regarded as the protection scope of the present invention.

Claims (6)

1. a freeform optics surface grinding-shaping method, adopts numerical control grinding machining center and spherical emery wheel to carry out grinding-shaping, it is characterised in that:
S1: the target surface of design adopts some cloud matrix be described, invocation point cloud design matrix Mdesign;
S2: according to described some cloud design matrix MdesignTreat processing curve and carry out grinding work, and gained curved surface after grinding is detected, invocation point cloud detection matrix Mmeasure;
S3: by described some cloud detection matrix MmeasureWith described some cloud design matrix MdesignCompare, it is thus achieved that some cloud error matrix Merr;
S4: according to described some cloud error matrix MerrGrinding rear curved surface is compensated grinding.
2. freeform optics surface grinding-shaping method described in claim 1, it is characterised in that described step S4 includes:
S401: by described some cloud error matrix MerrCompare with threshold value;
S402: as described some cloud error matrix MerrDuring more than threshold value, according to described some cloud error matrix Merr, calculate and obtain some cloud correction matrix Mdesign_1;
S403: according to described some cloud correction matrix Mdesign_1Grinding rear curved surface is compensated grinding, carries out a cloud detection to compensating grinding rear curved surface, and by the some cloud detection matrix of detection gained and some cloud design matrix MdesignRelatively, some cloud error matrix M is again obtainederr;
S404: repeat step S401��S403, until some cloud error matrix MerrLess than or equal to threshold value.
3. freeform optics surface grinding-shaping method described in claim 2, it is characterised in that: in described step S402, according to described some cloud error matrix Merr, calculate and obtain some cloud correction matrix Mdesign_1Formula be:
Mdesign_1=Mdesign+Merr��
4. freeform optics surface grinding-shaping method described in claim 2, it is characterised in that:
In step S2, after detection grinding, the method for gained curved surface is contact measurement;
In step S403, detection compensates the method for grinding rear curved surface is contact measurement.
5. freeform optics surface grinding-shaping method described in claim 4, it is characterised in that: step S2 is identical with the some cloud design matrix sampling point position of target surface with the test point position in step S403.
6. freeform optics surface grinding-shaping method described in claim 1, it is characterised in that: described some cloud design matrix MdesignWith described some cloud detection matrix MmeasureIn all include curved surface at X, Y, Z three-dimensional coordinate data.
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