CN105636329B - A kind of plasma generating device for small space - Google Patents
A kind of plasma generating device for small space Download PDFInfo
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- CN105636329B CN105636329B CN201410601089.7A CN201410601089A CN105636329B CN 105636329 B CN105636329 B CN 105636329B CN 201410601089 A CN201410601089 A CN 201410601089A CN 105636329 B CN105636329 B CN 105636329B
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- container
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Abstract
The invention belongs to plasma-generating technologies fields, more particularly to a kind of plasma generating device for small space, the device includes container, electrode and magnet, container is the cavity structure made of the nonmetallic materials without halogen, and electrode is placed in container, connect with external power supply, magnet is arranged symmetrically in container, and discharge gas is filled in container.When external power supply is that electrode is powered, strong electrical field is formed between the electrodes, strong electrical field ionizes discharge gas, and plasma is formed in container；Present invention could apply to Small-scale Space, it can generate and stablize, be evenly distributed and highdensity plasma, discharging efficiency is higher.
Description
Technical field
The invention belongs to plasma-generating technologies field, in particular to a kind of plasma for small space generates dress
It sets.
Background technique
The time-varying control of plasma has a very wide application value for stealthy, antenna etc., and small scale, height
The generation technology of density plasma is the key core of time-varying control plasma, has extensive military and civilian value.
Existing plasma-generating technologies include direct-current discharge, radio frequency capacitive discharge, radio frequency induction electric discharge, microwave discharge,
Microwave ECR electric discharge, Helical wave discharge, surface wave discharge etc., these methods are generally directed to industrial use, at plasma surface
Reason, plated film, semiconductor technology etc., for time-varying control application, generally existing electric discharge Source size is larger, discharging efficiency is lower, etc.
The problems such as gas ions are unevenly distributed, it is difficult to be applied to the generation of small area of space plasma.
Summary of the invention
For the above-mentioned prior art, the purpose of the present invention is to provide a kind of plasmas for small space to generate dress
It sets, for overcoming in the prior art, electric discharge Source size is larger, discharging efficiency is lower, plasma is unevenly distributed, and is difficult to answer
The shortcomings that being generated for small space plasma.
In order to achieve the above object, the present invention uses following technical scheme.
A kind of plasma generating device for time-varying control of the present invention, the device include container, electrode and magnet, electricity
Pole is placed in container, is connect with external power supply, and magnet is arranged symmetrically in container, and discharge gas is filled in container.
The container is the cavity structure made of the nonmetallic materials without halogen, is cube of regular shape
The characteristic length of body or cylindrical body, container is greater than 2mm.
The shape of the container is cylindrical cavity structure, and radius 5mm is highly 10mm, wall thickness 2mm.
The quantity of the electrode is more than or equal to 2, when electrode is when container bottoms horizontal parallel is placed, between electrode between
Away between the 1/5-2/3 of container bottoms characteristic size；When electrode is placed in parallel perpendicular to bottom surface, the height of electrode be should be less than
The 1/2 of container characteristics height dimension.
The electrode arranges 2 in the bottom surface horizontal parallel of container, and the spacing between electrode is 3mm.
Magnet is electromagnet or permanent magnet, and magnet is arranged symmetrically in container.
The discharge gas is the gas of easily ionizable, and after discharge gas is ionized, the electron density in container is greater than
Equal to 1010cm-3；
The discharge gas be inert gas simple substance, inert gas simple substance and Hg steam combination, inert gas simple substance with
Combination or air between the combination of vapour of an alkali metal, inert gas, when discharge gas be inert gas simple substance and Hg steam or
When the combination of vapour of an alkali metal, the weight percent of inert gas is not less than 80%.
The discharge gas inert gas simple substance and Hg steam combination includes the Ar and weight hundred of weight percent 99%
Divide the Hg steam than 1%.
The external power supply is DC power supply excitation or low-frequency power excitation, and direct current power source voltage should be not less than 50V, low
The frequency range of frequency power excitation is 0.1kHz-1MHz.
Technical solution provided in an embodiment of the present invention has the benefit that
Present invention could apply to Small-scale Space, it can generate and stablize, be evenly distributed and highdensity plasma, discharge
It is more efficient.
Detailed description of the invention
Fig. 1 is a kind of plasma generating device schematic diagram for small space of the present invention；
In figure: 1- container, 2- electrode, 3- magnet.
Specific embodiment
It elaborates with reference to the accompanying drawings and detailed description to the present invention.
As shown in Fig. 1, a kind of plasma generating device for small space of the present invention, which includes container 1, electricity
Pole 2 and magnet 3, electrode 2 are placed in container 1, connect with external power supply, and magnet 3 is arranged in container 1, and electric discharge is filled in container 1
Gas.
The cavity structure made of the nonmetallic materials without halogen of container 1, container 1 should be in negative pressure in inside
There is good air-tightness, the shape of container 1 is determined according to concrete application situation, preferably cube, cylindrical body etc. when state
Regular shape, the characteristic length of container 1 should be greater than 2mm, and the shape for the container 1 that the present embodiment provides is cylindrical cavity structure,
Its radius is 5mm, is highly 10mm, wall thickness 2mm.
The quantity for being placed in electrode 2 in container 1 should at least 2, cannot contact with each other between electrode 2, best between electrode 2
Parallel arrangement, to reach best discharge effect；Electrode 2 can be placed in 1 bottom surface horizontal parallel of container, when 2 horizontal parallel of electrode
When placement, spacing is preferably between the 1/5-2/3 of 1 bottom surface characteristic size of container between electrode 2；Electrode 2 can also be perpendicular to bottom surface
It places, when 2 vertical bottom face of electrode is placed, the height of electrode 2 should be less than the 1/2 of 2 feature height size of container.The present embodiment is given
The modes of emplacement of electrode 2 out is to arrange 2 electrodes in 1 bottom surface horizontal parallel of container, and the spacing between electrode 2 is 3mm.
The magnet 3 being arranged in container 1 can be electromagnet or permanent magnet, and magnet 3 is arranged symmetrically in container 1, is used for
The fixed stabilizing magnetic field of magnetic direction is formed in container 1；The magnet 3 that the present embodiment provides uses permanent magnet, in 1 bottom surface of container
It is circular layout, for forming the stabilizing magnetic field being distributed along short transverse in 1 cavity of container.
Discharge gas should be the gas of easily ionizable, and after being ionized, the electron density in container 1 should be not less than
1010cm-3；Discharge gas can be inert gas simple substance, inert gas simple substance and Hg steam combination, inert gas simple substance and alkali
Combination or air between the combination of metallic vapour, inert gas etc., when discharge gas be inert gas simple substance and Hg steam or
When the combination of vapour of an alkali metal, the weight percent of inert gas should be not less than 80%.The discharge gas that the present embodiment provides is
The combination of inert gas simple substance and vapour of an alkali metal, component include the Ar and 1% (weight percent) of 99% (weight percent)
Hg steam.
External power supply can be DC power supply excitation or low-frequency power excitation, when external power supply is DC power supply excitation,
Direct current power source voltage should be not less than 50V, and when external power supply is that low-frequency power motivates, supply frequency range is 0.1kHz-1MHz.
The external power supply that the present embodiment provides is 50V DC power supply.
When external power supply is that electrode 2 is powered, strong electrical field is formed between electrode 2, strong electrical field ionizes discharge gas,
Plasma is formed in container 1.
Claims (4)
1. a kind of plasma generating device for small space, it is characterised in that: the device includes container (1), electrode (2) and
Magnet (3), electrode (2) are placed in container (1), connect with external power supply, and magnet (3) is arranged symmetrically in container (1), container
(1) discharge gas is filled in；
The container (1) is the cylindrical cavity structure made of the nonmetallic materials without halogen, and radius is
5mm is highly 10mm, wall thickness 2mm；
The quantity of the electrode (2) be more than or equal to 2, when electrode (2) container (1) bottom surface horizontal parallel place when, electrode
(2) spacing is between the 1/5-2/3 of container (1) bottom surface characteristic size between；When electrode (2) is placed in parallel perpendicular to bottom surface,
The height of electrode (2) should be less than the 1/2 of container (1) feature height size；
The electrode (2) arranges 2 in the bottom surface horizontal parallel of container (1), and the spacing between electrode (2) is 3mm；
Magnet (3) is electromagnet or permanent magnet, and magnet (3) is arranged symmetrically in container (1)；
The discharge gas is the gas of easily ionizable, after discharge gas is ionized, the electron density in container (1) is greater than etc.
In 1010cm-3。
2. the plasma generating device according to claim 1 for small space, it is characterised in that: the electric discharge gas
Body is inert gas simple substance, inert gas simple substance and Hg steam combination, the combination of inert gas simple substance and vapour of an alkali metal, inertia
Combination or air between gas, it is lazy when discharge gas is the combination of inert gas simple substance and Hg steam or vapour of an alkali metal
Property gas weight percent be not less than 80%.
3. the plasma generating device according to claim 2 for small space, it is characterised in that: the electric discharge gas
Body inert gas simple substance and Hg steam combination include the Ar of weight percent 99% and the Hg steam of weight percent 1%.
4. the plasma generating device according to claim 1 for small space, it is characterised in that: the external electrical
Source is DC power supply excitation or low-frequency power excitation, and direct current power source voltage should be not less than 50V, the frequency range of low-frequency power excitation
For 0.1kHz-1MHz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410601089.7A CN105636329B (en) | 2014-10-30 | 2014-10-30 | A kind of plasma generating device for small space |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410601089.7A CN105636329B (en) | 2014-10-30 | 2014-10-30 | A kind of plasma generating device for small space |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105636329A CN105636329A (en) | 2016-06-01 |
| CN105636329B true CN105636329B (en) | 2019-05-17 |
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| CN201410601089.7A Active CN105636329B (en) | 2014-10-30 | 2014-10-30 | A kind of plasma generating device for small space |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101855138A (en) * | 2007-09-14 | 2010-10-06 | 塔莱斯电子设备有限公司 | Actuating device in the space vehicle |
| JP4599100B2 (en) * | 2004-07-06 | 2010-12-15 | 株式会社東芝 | Discharge gas processing equipment |
| CN102187743A (en) * | 2008-10-17 | 2011-09-14 | 国家科学研究中心 | Low-power gaseous plasma source |
| CN102693893A (en) * | 2012-04-28 | 2012-09-26 | 北京工业大学 | Method for improving uniformity of high-frequency discharge plasma through frequency modulation |
| CN103796407A (en) * | 2014-01-23 | 2014-05-14 | 电子科技大学 | Device for relieving influence on high-speed aircraft reentry communication by space plasma |
-
2014
- 2014-10-30 CN CN201410601089.7A patent/CN105636329B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4599100B2 (en) * | 2004-07-06 | 2010-12-15 | 株式会社東芝 | Discharge gas processing equipment |
| CN101855138A (en) * | 2007-09-14 | 2010-10-06 | 塔莱斯电子设备有限公司 | Actuating device in the space vehicle |
| CN102187743A (en) * | 2008-10-17 | 2011-09-14 | 国家科学研究中心 | Low-power gaseous plasma source |
| CN102693893A (en) * | 2012-04-28 | 2012-09-26 | 北京工业大学 | Method for improving uniformity of high-frequency discharge plasma through frequency modulation |
| CN103796407A (en) * | 2014-01-23 | 2014-05-14 | 电子科技大学 | Device for relieving influence on high-speed aircraft reentry communication by space plasma |
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| Publication number | Publication date |
|---|---|
| CN105636329A (en) | 2016-06-01 |
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