CN105629559A - Manufacturing method of color filter substrate - Google Patents

Manufacturing method of color filter substrate Download PDF

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Publication number
CN105629559A
CN105629559A CN201610019265.5A CN201610019265A CN105629559A CN 105629559 A CN105629559 A CN 105629559A CN 201610019265 A CN201610019265 A CN 201610019265A CN 105629559 A CN105629559 A CN 105629559A
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CN
China
Prior art keywords
substrate
membrane substrates
color membrane
manufacture method
color
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610019265.5A
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Chinese (zh)
Inventor
赵国涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan China Star Optoelectronics Technology Co Ltd
Original Assignee
Wuhan China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan China Star Optoelectronics Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Technology Co Ltd
Priority to CN201610019265.5A priority Critical patent/CN105629559A/en
Publication of CN105629559A publication Critical patent/CN105629559A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • G02F1/133516Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • G02F1/133519Overcoatings

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Optical Filters (AREA)

Abstract

The invention provides a manufacturing method of a color filter substrate. The manufacturing method of the color filter substrate comprises the following steps of first, depositing a protective film of a metal material on a surface of an incoming substrate, and then enabling the surface, on which the protective film is formed, on the substrate to be in contact with a bearing platform in a subsequent manufacturing process, forming a black matrix, a color resistive layer, an outer coating layer and the like on another surface of the substrate, afterwards, removing the protective film on the surface of the substrate by using an acid solution of hydrochloric acid and the like before the substrate is thinned, finally, thinning the substrate, and completing the manufacturing of the color filter substrate, so as to obtain the color filter substrate. The protective film can effectively protect the surfaces of the substrate, and prevents devices from causing damage to the surfaces of the substrate to result in the generation of concave and convex points on the surface in a manufacturing process, thereby avoiding the further aggravation of the poorness of the concave and convex points when the substrate is thinned; the yield of display panels is promoted.

Description

The manufacture method of color membrane substrates
Technical field
The present invention relates to the manufacture field of display floater, particularly relate to the manufacture method of a kind of color membrane substrates.
Background technology
Liquid crystal indicator (LCD, LiquidCrystalDisplay) has that fuselage is thin, power saving, the many merits such as radiationless, be widely used. Liquid crystal indicator major part on existing market is backlight liquid crystal indicator, and it includes display panels and backlight module (backlightmodule). Usual display panels is by color membrane substrates (CFSubstrate, ColorFilterSubstrate), thin-film transistor array base-plate (TFTArraySubstrate, ThinFilmTransistorArraySubstrate) liquid crystal (LC, LiquidCrystal) between color membrane substrates and thin-film transistor array base-plate and sealing frame glue (Sealant) composition, it are sandwiched in; Its moulding process generally comprises: leading portion array (Array) processing procedure (thin film, gold-tinted, etching and stripping), stage casing become box (Cell) processing procedure (TFT substrate and CF baseplate-laminating) and back segment module group assembling processing procedure (driving IC and printed circuit board (PCB) pressing); Wherein, leading portion Array processing procedure mainly forms TFT substrate, in order to control the motion of liquid crystal molecule; Stage casing Cell processing procedure mainly adds liquid crystal between TFT substrate and CF substrate; Back segment module group assembling processing procedure mainly drives the integration of IC pressing and printed circuit board (PCB), and then drives liquid crystal molecule to rotate, and shows image.
CF substrate is LCD for realizing the main devices of colored display, and its basic comprising generally includes: glass substrate, black matrix" (BlackMatrix, BM), colored color blocking layer etc. The light that backlight sends incides CF substrate through the modulation of liquid crystal molecule, the filtration of the red color resistance of color blocking layer, green color blocking and the blue color blocking of being enameled by CF substrate, show red respectively, green, blue three kinds of light, the light of the respectively transmitted corresponding color wave band of color blocking of different colours, thus realizing the colored display of display.
The development trend increasingly thinner for complying with liquid crystal display, the also progressively thinning of the thickness of the glass in current TFTLCD display floater. Generally after completing the processing procedures such as Array/CF/Cell, glass to be carried out thinning process. The sags and crests of glass surface, is called Dimple. The Dimple of CF substrate-side is due to the naked eyes directly facing beholder, so namely diameter (��) 1.5 ��m is considered bad, need to carry out demoting or reprocessing. And the main cause that Dimple produces is, in Array/CF/Cell processing procedure, plummer (Stage) surface irregularity or roller (Roller) are unsmooth, glass surface is caused to there is less sags and crests, in thinning process, due to the erosion of thinning liquid, make little sags and crests, become be relatively large in diameter, sags and crests that the degree of depth is bigger.
Generally speaking, milled processed can be used for Dimple is bad, but adopting the shortcoming of milled processed is the risk of risk and the understrressing (Fail) that improve and grinds broken bright spot, especially for the higher large scale screen of stress requirement (such as 8.6 cun, 10.1 cun etc.).
Therefore, it is necessary to provide the manufacture method of a kind of color membrane substrates, to solve the problems referred to above.
Summary of the invention
It is an object of the invention to provide the manufacture method of a kind of color membrane substrates; form protecting film on a surface of a substrate; can effectively prevent the damage that in processing procedure, substrate surface is caused by each equipment; prevent the generation of substrate surface sags and crests; cause during to avoid thinning that sags and crests is bad to be increased the weight of further, thus promoting the yield of display floater.
For achieving the above object, the present invention provides the manufacture method of a kind of color membrane substrates, comprises the steps:
Step 1, offer substrate, set two surfaces respectively first surface and the second surface of opposite sides on described substrate, form the protecting film of metal material on the first surface of described substrate;
Step 2, being positioned on plummer by substrate, now, first surface is towards plummer, and the protecting film on first surface contacts with plummer, forms black matrix", color blocking layer and outer coating on the second surface of substrate;
Step 3, offer acid solution, dispose the protecting film on first surface;
Step 4, offer thinning liquid, utilize thinning liquid, from the first surface of substrate, substrate is carried out thinning, obtain color membrane substrates.
Described protecting film includes the first protective layer and the second protective layer that are sequentially formed on described first surface.
The material of described first protective layer is aluminum, and the material of described second protective layer is ferrum.
Described protecting film is formed by physical gas-phase deposition.
Described acid solution is hydrochloric acid solution.
Described substrate is glass substrate.
Described thinning liquid is hydrofluoric acid solution.
In described step 2, it is additionally included on the second surface of substrate and forms common electrode layer and polyimide layer.
Described color blocking layer includes red color resistance layer, green color blocking layer and blue color blocking layer.
The described color membrane substrates display floater for being sized larger than 8.6 cun.
Beneficial effects of the present invention: the present invention provides the manufacture method of a kind of color membrane substrates, first on a surface of supplied materials substrate, deposit protecting film, then the surface being formed with the protecting film of metal material on this substrate is made to contact with plummer in successive process, another surface of substrate is formed black matrix", color blocking layer, and outer coating etc., the protecting film on substrate surface was removed with acid solutions such as hydrochloric acid afterwards before thinning, finally substrate is carried out thinning, complete the making of color membrane substrates, thus obtaining color membrane substrates, this protecting film can the surface of effective protective substrate, prevent each equipment in processing procedure from substrate surface causing damage cause the generation of concave-convex surface point, thus avoiding causing when substrate is carried out thinning, sags and crests is bad to be increased the weight of further, promote the yield of display floater.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, by the specific embodiment of the present invention is described in detail, technical scheme and other beneficial effects will be made apparent.
In accompanying drawing,
Fig. 1 is the schematic flow sheet of the manufacture method of the color membrane substrates of the present invention;
Fig. 2 is the schematic diagram of the step 1 of the manufacture method of the color membrane substrates of the present invention;
Fig. 3 is the schematic diagram of the step 2 of the manufacture method of the color membrane substrates of the present invention;
Fig. 4 is the schematic diagram of the step 3 of the manufacture method of the color membrane substrates of the present invention.
Detailed description of the invention
For further setting forth the technological means and effect thereof that the present invention takes, it is described in detail below in conjunction with the preferred embodiments of the present invention and accompanying drawing thereof.
Referring to Fig. 1, the present invention provides the manufacture method of a kind of color membrane substrates, comprises the steps:
Step 1, as shown in Figure 2, it is provided that substrate 10, is set two surfaces of opposite sides respectively first surface 11 and second surface 12 on described substrate 10, is deposited the protecting film 20 of metal material by physical gas-phase deposition on the first surface 11 of described substrate 10;
Concrete, described substrate 10 is glass substrate.
Concrete, described protecting film 20 is double-decker, including the first protective layer 21 and the second protective layer 22 being sequentially formed on described first surface 11.
Preferably, the material of described first protective layer 21 is aluminum (Al), and the material of described second protective layer 22 is ferrum (Fe), and namely described protecting film 20 is aluminum film and the superposing of ferrum film.
Step 2, as shown in Figure 3, substrate 10 is positioned on plummer 100, now, first surface 11 is towards plummer 100, protecting film 20 on first surface 11 contacts with plummer 100, then on the second surface 12 of substrate 10, form black matrix" 30, color blocking layer 40 and outer coating (OverCoat, OC) 50;
Concrete, described color blocking layer 40 includes red color resistance layer, green color blocking layer and blue color blocking layer.
Concrete, in described step 2, it is additionally included on the second surface 12 of substrate 10 and forms the processing procedure such as common electrode layer and polyimide layer.
Step 3, as shown in Figure 4, it is provided that acid solution, disposes the protecting film 20 on first surface 11;
Concrete, described acid solution is other acid solutions such as hydrochloric acid solution.
Step 4, offer thinning liquid, utilize thinning liquid, from the first surface 11 of substrate 10, substrate 10 is carried out thinning, obtain color membrane substrates.
Concrete, described thinning liquid is hydrofluoric acid solution.
The manufacture method of the color membrane substrates of the present invention is in the improvement of the sags and crests to large-size display floater, more competitive.
Concrete, the described color membrane substrates display floater for being sized larger than 8.6 cun.
In sum, the present invention provides the manufacture method of a kind of color membrane substrates, first on a surface of supplied materials substrate, deposit the protecting film of metal material, then the surface being formed with protecting film on this substrate is made to contact with plummer in successive process, another surface of substrate is formed black matrix", color blocking layer, and outer coating etc., the protecting film on substrate surface was removed with acid solutions such as hydrochloric acid afterwards before thinning, finally substrate is carried out thinning, complete the making of color membrane substrates, thus obtaining color membrane substrates, this protecting film can the surface of effective protective substrate, prevent each equipment in processing procedure from substrate surface causing damage cause the generation of concave-convex surface point, thus avoiding causing when substrate is carried out thinning, sags and crests is bad to be increased the weight of further, promote the yield of display floater.
The above; for the person of ordinary skill of the art; can conceive according to technical scheme and technology and make other various corresponding changes and deformation, and all these change and deform the protection domain that all should belong to appended claims of the present invention.

Claims (10)

1. the manufacture method of a color membrane substrates, it is characterised in that comprise the steps:
Step 1, offer substrate (10), set two surfaces respectively first surface (11) and the second surface (12) of the upper opposite sides of described substrate (10), the upper protecting film (20) forming metal material of the first surface (11) in described substrate (10);
Step 2, substrate (10) is positioned on plummer (100), now, first surface (11) is towards plummer (100), protecting film (20) on first surface (11) contacts with plummer (100), forms black matrix" (30), color blocking layer (40) and outer coating (50) on the second surface (12) of substrate (10);
Step 3, offer acid solution, dispose the protecting film (20) on first surface (11);
Step 4, offer thinning liquid, utilize thinning liquid, from the first surface (11) of substrate (10), substrate (10) is carried out thinning, obtain color membrane substrates.
2. the manufacture method of color membrane substrates as claimed in claim 1; it is characterized in that, described protecting film (20) includes the first protective layer (21) and the second protective layer (22) that are sequentially formed on described first surface (11).
3. the manufacture method of color membrane substrates as claimed in claim 2, it is characterised in that the material of described first protective layer (21) is aluminum, and the material of described second protective layer (22) is ferrum.
4. the manufacture method of color membrane substrates as claimed in claim 1, it is characterised in that described protecting film (20) is formed by physical gas-phase deposition.
5. the manufacture method of color membrane substrates as claimed in claim 1, it is characterised in that described acid solution is hydrochloric acid solution.
6. the manufacture method of color membrane substrates as claimed in claim 1, it is characterised in that described substrate (10) is glass substrate.
7. the manufacture method of color membrane substrates as claimed in claim 5, it is characterised in that described thinning liquid is hydrofluoric acid solution.
8. the manufacture method of color membrane substrates as claimed in claim 1, it is characterised in that in described step 2, be additionally included on the second surface (12) of substrate (10) and form common electrode layer and polyimide layer.
9. the manufacture method of color membrane substrates as claimed in claim 1, it is characterised in that described color blocking layer (40) includes red color resistance layer, green color blocking layer and blue color blocking layer.
10. the manufacture method of color membrane substrates as claimed in claim 1, it is characterised in that the described color membrane substrates display floater for being sized larger than 8.6 cun.
CN201610019265.5A 2016-01-12 2016-01-12 Manufacturing method of color filter substrate Pending CN105629559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070060810A (en) * 2005-12-09 2007-06-13 삼성전자주식회사 Method for manufacturing liquid crystal display panel
CN101201490A (en) * 2007-12-04 2008-06-18 友达光电股份有限公司 Method for thinning display panel device
CN101377582A (en) * 2008-09-28 2009-03-04 友达光电股份有限公司 Flexible liquid crystal display panel and manufacturing method thereof
CN101950924A (en) * 2006-10-16 2011-01-19 三菱电机株式会社 The manufacture method of semiconductor optical device
CN102044427A (en) * 2009-10-09 2011-05-04 中芯国际集成电路制造(上海)有限公司 Forming method of copper interconnecting wire and electroplating device
CN102237460A (en) * 2010-04-23 2011-11-09 Lg伊诺特有限公司 Light emitting diode
CN102902093A (en) * 2012-09-05 2013-01-30 京东方科技集团股份有限公司 Flexible substrate, carrier platform, flexible display and manufacturing method of flexible display
CN103000660A (en) * 2012-12-12 2013-03-27 京东方科技集团股份有限公司 Array substrate and white organic light-emitting diode display device
CN103373733A (en) * 2012-04-12 2013-10-30 中国科学院化学研究所 Rod-shaped material with multiple surface properties and preparation method thereof
CN104114288A (en) * 2012-02-16 2014-10-22 罗伯特·博世有限公司 Sound transducer arrangement

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070060810A (en) * 2005-12-09 2007-06-13 삼성전자주식회사 Method for manufacturing liquid crystal display panel
CN101950924A (en) * 2006-10-16 2011-01-19 三菱电机株式会社 The manufacture method of semiconductor optical device
CN101201490A (en) * 2007-12-04 2008-06-18 友达光电股份有限公司 Method for thinning display panel device
CN101377582A (en) * 2008-09-28 2009-03-04 友达光电股份有限公司 Flexible liquid crystal display panel and manufacturing method thereof
CN102044427A (en) * 2009-10-09 2011-05-04 中芯国际集成电路制造(上海)有限公司 Forming method of copper interconnecting wire and electroplating device
CN102237460A (en) * 2010-04-23 2011-11-09 Lg伊诺特有限公司 Light emitting diode
CN104114288A (en) * 2012-02-16 2014-10-22 罗伯特·博世有限公司 Sound transducer arrangement
CN103373733A (en) * 2012-04-12 2013-10-30 中国科学院化学研究所 Rod-shaped material with multiple surface properties and preparation method thereof
CN102902093A (en) * 2012-09-05 2013-01-30 京东方科技集团股份有限公司 Flexible substrate, carrier platform, flexible display and manufacturing method of flexible display
CN103000660A (en) * 2012-12-12 2013-03-27 京东方科技集团股份有限公司 Array substrate and white organic light-emitting diode display device

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Application publication date: 20160601