CN105628188B - A kind of grating interference vibration measurement method - Google Patents
A kind of grating interference vibration measurement method Download PDFInfo
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- CN105628188B CN105628188B CN201610011533.9A CN201610011533A CN105628188B CN 105628188 B CN105628188 B CN 105628188B CN 201610011533 A CN201610011533 A CN 201610011533A CN 105628188 B CN105628188 B CN 105628188B
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- light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H17/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups
Abstract
The invention discloses a kind of grating interference vibration measurement methods.On the basis of grating interference, the interference signal of multichannel out of phase is obtained by spatial polarization phase shift, by the calculus of differences and phase solution of the multichannel light intensity signal obtained to photelectric receiver, obtains high-precision vibration measurement resolution ratio.The present invention has high certainty of measurement, feature simple in structure, at low cost etc..
Description
Technical field
The invention belongs to vibration measurement technique fields.
Background technology
Vibration measurement has very important effect in micro mechanical system and fine processing technique.Currently, vibration measurement side
Method can be divided into electrical measuring method and optical method according to the conversion regime of vibration signal.Electrical measuring method mainly has magneto-electric, piezoelectric type and strain
Vibration signal is converted to electric signal by chip, such method, is handled electric signal disengaging, and then obtain vibration parameters.This kind of biography
Sensor is light-weight, small, at low cost, but is susceptible to live electromagnetic noise interference, microvibration occasion by centrifugal force and
The influence of itself loading, reliability reduce, and Measurement Resolution is limited.Optical measuring method typical method has holographic optics vibration measuring skill
Art, Doppler shift measurement technology.Optical measuring method is non-cpntact measurement, and vibrated environment influences small, high certainty of measurement, still
Current measuring method, systematic comparison is big, expensive, is not suitable for being installed to doing on vibration object and shake in real time for a long time
Dynamic monitoring.Therefore, research high-precision, low cost is anti-interference, and can be used as the vibration measurement method monitored in real time, there is reality to anticipate
Justice.
Invention content
The present invention is directed to the demand in vibration measurement, high using grating interference signal resolution, strong antijamming capability
The characteristics of, design diffraction grating interferes vibration measurement method.This method is to pass through spatial polarization on the basis of phase grating is interfered
Phase shift obtains the polarization interference signal of multichannel out of phase, and out of phase interference signal intensity is obtained using photelectric receiver, into
One step carries out calculus of differences and phase solution to strength signal, to obtain high-precision amplitude measurement.
A kind of grating interference vibration measurement method, includes the following steps：
The bottom surface of diffraction grating (14) is cemented in vibration and position occurs by step 1, and grating pitch direction is perpendicular to cementing
Face；With semiconductor device（15）Send out laser beam vertical incidence grating surface.
Step 2 places first respectively in the light path of+1 order diffraction light and -1 order diffraction light that diffraction grating reflects
Speculum（1）With the second speculum（2）, change the direction of two-beam, ensure through the first speculum（1）With the second speculum（2）
Two-beam after reflection intersects at space a bit with vertical angle.Before reflected light intersection, the first polarizing film is utilized（3）With
Two polarizing films（4）Polarization Modulation is carried out to two beam reflected lights respectively, adjusts the first polarizing film（3）With the second polarizing film（4）Pendulum
Angle is put, two beam reflected lights is made to become the linearly polarized light that polarization phase differs 90 degree.
Step 3 utilizes depolarization Amici prism at plotted point（5）Two bunch polarised lights are divided, adjustment disappears
Polarization splitting prism（5）Placement angle, make two bunch polarised lights while being respectively split as orthogonal a branch of reflection
Light through Beam.
Step 4, in depolarization Amici prism（5）Two emergent ray directions place the one 1/4 slide respectively（6）With
2nd 1/4 slide（7）, Polarization Modulation is carried out to two beam emergent lights；Adjust the one 1/4 slide（6）With the 2nd 1/4 slide（7）'s
Placed angle so that two beam emergent lights all become circularly polarized light.
Step 5 is utilized respectively the first polarization splitting prism（8）With the second polarization splitting prism（9）It is inclined to two beams outgoing circle
The light that shakes carries out light splitting and Polarization Modulation；By adjusting the first polarization splitting prism（8）With the second polarization splitting prism（9）Put
Angle, it is ensured that two beam circularly polarized lights are respectively split as orthogonal a branch of reflected light through Beam；Simultaneously so that
First polarization splitting prism（8）With the second polarization splitting prism（9）Light splitting surface at 45 degree of space angle.
Step 6 uses the first photelectric receiver（10）, the second photelectric receiver（11）, third photelectric receiver（12）,
4th photelectric receiver（13）It is received respectively by the first polarization splitting prism（8）With the second polarization splitting prism（9）The four of outgoing
Road light beam, the interference strength measured in the four road light beams of moment t is respectively I1 (t), I2 (t), I3 (t), I4 (t)；Thus it obtains
Vibration source is in the amplitude Z (t) of moment t：
Z(t)=arctan{ [I1(t)- I3(t)]/[I2(t)- I4(t)]* (d/4)
Wherein d is diffraction grating pitch.
The advantage of the invention is that optical texture is succinct, vibration measurement method is pushed to develop to miniaturization, inexpensive direction；
Grating easy for installation is that the present invention can be as a kind of effective ways of the real-time vibration monitoring in scene；It is obtained by the synchronous phase shift of polarization
Phase solution precision is high after the interference signal difference arrived, disclosure satisfy that high-precision vibration measurement demand.
Description of the drawings
Fig. 1 is the principle of the present invention figure.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
A kind of grating interference vibration measurement method of the embodiment of the present invention, includes the following steps：
Position occurs for step 1, the vibration that the bottom surface of diffraction grating (14) is cemented in, and grating pitch direction is perpendicular to glue
Junction；With semiconductor device（15）Send out laser beam vertical incidence grating surface.
Step 2 places first respectively in the light path of+1 order diffraction light and -1 order diffraction light that diffraction grating reflects
Speculum（1）With the second speculum（2）, change the direction of two-beam, ensure through the first speculum（1）With the second speculum（2）
Two-beam after reflection intersects at space a bit with vertical angle.Before reflected light intersection, the first polarizing film is utilized（3）With
Two polarizing films（4）Polarization Modulation is carried out to two beam reflected lights respectively, adjusts the first polarizing film（3）With the second polarizing film（4）Pendulum
Angle is put, two beam reflected lights is made to become the linearly polarized light that polarization phase differs 90 degree；
The purpose that polarization phase differs 90 degree is in order to enable should+1 order diffraction light and light of -1 order diffraction light after light splitting
Beam passes through the one 1/4 slide in step 4（6）With the 2nd 1/4 slide（7）When can be inclined by adjusting oppositely oriented circle is generated
Shake light.
Step 3 utilizes depolarization Amici prism at plotted point（5）Two bunch polarised lights are divided；Adjustment disappears
Polarization splitting prism（5）Placement angle, make two bunch polarised lights while being respectively split as orthogonal a branch of reflection
Light through Beam.
Step 4, in depolarization Amici prism（5）Two emergent ray directions place the one 1/4 slide respectively（6）With
2nd 1/4 slide（7）, Polarization Modulation is carried out to two beam emergent lights；It is characterized in that, the one 1/4 slide of adjustment（6）With the 2nd 1/
4 slides（7）Placed angle so that two beam emergent lights all become circularly polarized light, and oppositely oriented at this time.
Step 5 is utilized respectively the first polarization splitting prism（8）With the second polarization splitting prism（9）It is inclined to two beams outgoing circle
The light that shakes carries out light splitting and Polarization Modulation；First polarization splitting prism（8）With the second polarization splitting prism（9）Placement angle to protect
Two beam circularly polarized lights are demonstrate,proved respectively to be split as orthogonal a branch of reflected light through Beam；Simultaneously so that the first polarization
Amici prism（8）With the second polarization splitting prism（9）Light splitting surface at 45 degree of space angle；
The principle that this step utilizes is that two oppositely oriented beam circularly polarized lights are in two beams after polarizer, obtained
The size of linearly polarized light initial phase is identical as the polarization phase of polarizer, but symbol is opposite；Further according to light wave principle of stacking
It obtains, the phase shift of 2 times of initial phase can occur for the interference signal intensity of final two bunch polarised light.Therefore, polarization spectro
The light splitting surface of prism 8 and polarization splitting prism 9 is at 45 degree of space angle, the respective transmission of two such polarization splitting prism and reflection
Spatially just there are four polarization phases for light.
In the present embodiment, the light splitting surface of polarization splitting prism 8 is perpendicular to paper, with paper normal orientation for 90 degree；Then four
A spatial polarization phase is respectively 0 degree, 45 degree, 90 degree, 135 degree；Four obtained road interference signals just have occurred 0 degree, 90 degree,
180 degree, the four of 270 degree phase shifts.
Step 6 uses the first photelectric receiver（10）, the second photelectric receiver（11）, third photelectric receiver（12）,
4th photelectric receiver（13）It is received respectively by the first polarization splitting prism（8）With the second polarization splitting prism（9）The four of outgoing
Road light beam, measure the interference strength in four road light beams of the generation phase shift of moment t be respectively I1 (t), I2 (t), I3 (t),
I4(t)；Thus obtain vibration source is in the amplitude Z (t) of moment t：
Z(t)=arctan{ [I1(t)- I3(t)]/[I2(t)- I4(t)]* (d/4)
Wherein d is diffraction grating pitch.
Claims (1)
1. a kind of grating interference vibration measurement method, which is characterized in that include the following steps：
The bottom surface of diffraction grating (14) is cemented in vibration and position occurs by step 1, and grating pitch direction is perpendicular to cement plane；With
Semiconductor device（15）Send out laser beam vertical incidence grating surface；
Step 2 places the first reflection respectively in the light path of+1 order diffraction light and -1 order diffraction light that diffraction grating reflects
Mirror（1）With the second speculum（2）, change the direction of two-beam, through the first speculum（1）With the second speculum（2）After reflection
Two-beam intersects at space a bit with vertical angle；Before reflected light intersection, the first polarizing film is utilized（3）With the second polarizing film
（4）Polarization Modulation is carried out to two beam reflected lights respectively, adjusts the first polarizing film（3）With the second polarizing film（4）Placement angle, make
Two beam reflected lights become the linearly polarized light that polarization phase differs 90 degree；
Step 3 utilizes depolarization Amici prism at plotted point（5）Two bunch polarised lights are divided, depolarization is adjusted
Amici prism（5）Placement angle, make two bunch polarised lights while being respectively split as orthogonal a branch of reflected light one
Beam transmitted light；
Step 4, in depolarization Amici prism（5）Two emergent ray directions place the one 1/4 slide respectively（6）With second
1/4 slide（7）, Polarization Modulation is carried out to two beam emergent lights；Adjust the one 1/4 slide（6）With the 2nd 1/4 slide（7）Placement
Angle so that two beam emergent lights all become circularly polarized light；
Step 5 is utilized respectively the first polarization splitting prism（8）With the second polarization splitting prism（9）Circularly polarized light is emitted to two beams
Carry out light splitting and Polarization Modulation；By adjusting the first polarization splitting prism（8）With the second polarization splitting prism（9）Putting angle
Degree, makes two beam circularly polarized lights respectively be split as orthogonal a branch of reflected light through Beam；Ensure first simultaneously partially
Shake Amici prism（8）With the second polarization splitting prism（9）Light splitting surface at 45 degree of space angle；
Step 6 uses the first photelectric receiver（10）, the second photelectric receiver（11）, third photelectric receiver（12）, the 4th
Photelectric receiver（13）It is received respectively by the first polarization splitting prism（8）With the second polarization splitting prism（9）Four road light of outgoing
Beam, the interference strength measured in the four road light beams of moment t is respectively I1 (t), I2 (t), I3 (t), I4 (t)；Thus vibration is calculated
Source is in the amplitude Z (t) of moment t：
Z(t)=arctan{ [I1(t)- I3(t)]/[I2(t)- I4(t)]* (d/4)
Wherein d is diffraction grating pitch.
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| US4794585A (en) * | 1986-05-06 | 1988-12-27 | Lee Wai Hon | Optical head having a hologram lens and polarizers for use with magneto-optic medium |
| JP2629606B2 (en) * | 1994-07-08 | 1997-07-09 | キヤノン株式会社 | encoder |
| JP4559650B2 (en) * | 2001-03-22 | 2010-10-13 | シチズンホールディングス株式会社 | Optical rotation measuring device and optical rotation measuring method |
| CN201540156U (en) * | 2009-07-30 | 2010-08-04 | 中国计量科学研究院 | Laser interferometer for vibration calibration |
| CN104390694B (en) * | 2014-11-10 | 2017-08-29 | 西北大学 | Cladded-fiber grating vibration senses instrument |
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