CN105628188A - Raster interference vibration measurement method - Google Patents
Raster interference vibration measurement method Download PDFInfo
- Publication number
- CN105628188A CN105628188A CN201610011533.9A CN201610011533A CN105628188A CN 105628188 A CN105628188 A CN 105628188A CN 201610011533 A CN201610011533 A CN 201610011533A CN 105628188 A CN105628188 A CN 105628188A
- Authority
- CN
- China
- Prior art keywords
- light
- polarization
- splitting prism
- polarization splitting
- prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H17/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the preceding groups
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a raster interference vibration measurement method. On the basis of the raster interference, interference signals of various phases of multiple paths are obtained through spatial polarization phase shift; and high accuracy vibration measurement resolution is obtained through difference operation on multi-path light intensity signals obtained by a photoelectric receiver. The measurement accuracy is high, the structure is simple and the cost is low.
Description
Technical field
The invention belongs to vibration measurement technique field.
Background technology
Vibration measurement has very important effect in micro mechanical system and fine processing technique. At present, the method for vibration measurement, electrical measuring method and optical method can be divided into according to the conversion regime of vibration signal. Electrical measuring method mainly has magneto-electric, piezoelectric type and strain chip, and vibration signal is converted to the signal of telecommunication by such method, signal of telecommunication turnover is processed, and then obtains vibration parameters. This kind of sensor is lightweight, and volume is little, and cost is low, but is susceptible to on-the-spot electromagnetic noise interference, and microvibration occasion is by the impact of centrifugal force and self loading, and reliability reduces, and Measurement Resolution is limited. Optical measuring method typical method has holographic optics vibration measuring technology, Doppler shift measurement technology. Optical measuring method is non-cpntact measurement, and vibrated environmental effect is little, and certainty of measurement is high, but current measuring method, and its systematic comparison is big, expensive, is not suitable for being installed to and does long-time vibration monitoring in real time on vibration object. Therefore, research high accuracy, low cost, anti-interference, can be used as the vibration measurement method of monitoring in real time and there is realistic meaning.
Summary of the invention
The present invention is directed to the demand in vibration measurement, utilize grating interference signal resolution high, the feature that capacity of resisting disturbance is strong, design diffraction grating interferes vibration measurement method. This method is to interfere on basis at phase grating, the polarization interference signal of multichannel out of phase is obtained by spatial polarization phase shift, photelectric receiver is utilized to obtain out of phase interference signal intensity, further strength signal is carried out calculus of differences and phase solution, thus obtaining high-precision amplitude measurement.
A kind of grating interference vibration measurement method, comprises the following steps:
Step one, is cemented in the bottom surface of diffraction grating 14 vibration and position occurs. Grating pitch direction is perpendicular to cement plane; Give off laser beam vertical incidence grating surface with semiconductor device 15.
Step 2, in+1 order diffraction light reflected at diffraction grating and the light path of-1 order diffraction light, place reflecting mirror 1 and reflecting mirror 2 respectively, change the direction of two-beam, it is ensured that be reflected the two-beam after mirror 1 and reflecting mirror 2 reflection and intersect at space a bit with vertical angle. Before reflection light intersection, utilize polaroid 3 and polaroid 4 respectively two bundle reflection light to be carried out Polarization Modulation, adjust the placed angle of polaroid 3 and polaroid 4; Make two bundle reflection light become polarization phase and differ the line polarized light of 90 degree.
Step 3, at plotted point place, utilizes depolarization Amici prism 5 that two bunch polarized light are carried out light splitting; Adjusting the angles of depolarization Amici prism 5, make two bunch polarized light each be split becomes orthogonal a branch of reflection light through Beam simultaneously.
Step 4, places 1/4 slide 6 and 1/4 slide 7 respectively in two emergent ray directions of depolarization Amici prism 5, restraints emergent light to two and carries out Polarization Modulation; Adjust the placed angle of 1/4th slide 6 and 1/4 slides 7 so that two bundle emergent lights all become circularly polarized light.
Step 5, is utilized respectively polarization splitting prism 8 and polarization splitting prism 9 and two bundle outgoing circularly polarized lights is carried out light splitting and Polarization Modulation; The angles of polarization splitting prism 8 and polarization splitting prism 9 to ensure that two bundle circularly polarized lights are each split and become orthogonal a branch of reflection light through Beam; Simultaneously so that polarization splitting prism 8 becomes angle, 45 degree of space with the light splitting surface of polarization splitting prism 9.
Step 6, use photelectric receiver 10, photelectric receiver 11, photelectric receiver 12, photelectric receiver 13 to receive the four road light beams penetrated by polarization splitting prism 8 and polarization splitting prism 9 respectively, record the interference strength respectively I1 (t) of four road light beams at moment t, I2 (t), I3 (t), I4 (t); Thus can obtain vibration source at amplitude Z (t) of moment t is:
Z(t)=arctan{[I1(t)-I3(t)]/[I2(t)-I4(t)]}*(d/4��)
Wherein d is diffraction grating pitch.
It is an advantage of the current invention that optical texture is succinct, promote vibration measurement method to develop to miniaturization, low cost direction; Grating is easy for installation is that the present invention can as the effective ways of the real-time vibration monitoring in a kind of scene; High by phase solution precision after polarizing the interference signal difference that synchronization phase shift obtains, it is possible to meet high-precision vibration measurement demand.
Accompanying drawing explanation
Fig. 1 is principles of the invention figure.
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated. Should be appreciated that specific embodiment described herein is only in order to explain the present invention, is not intended to limit the present invention.
Embodiment of the present invention one grating interference vibration measurement method, comprises the following steps:
Step one, is cemented in the bottom surface of diffraction grating 14 vibration and position occurs. Grating pitch direction is perpendicular to cement plane; Give off laser beam vertical incidence grating surface with semiconductor device 15.
Step 2, in+1 order diffraction light reflected at diffraction grating and the light path of-1 order diffraction light, place reflecting mirror 1 and reflecting mirror 2 respectively, change the direction of two-beam, it is ensured that be reflected the two-beam after mirror 1 and reflecting mirror 2 reflection and intersect at space a bit with vertical angle. Before reflection light intersection, utilize polaroid 3 and polaroid 4 respectively two bundle reflection light to be carried out Polarization Modulation, by adjusting the angle of polaroid 3 and polaroid 4, make two bundle reflection light become polarization phase and differ the line polarized light of 90 degree.
Polarization phase differ 90 degree in order that make this+1 order diffraction light and-1 order diffraction light light beam after light splitting, can pass through during in step 4 by 1/4 slide 6 and 1/4 slide 7 to adjust the circularly polarized light that generation is oppositely oriented.
Step 3, at plotted point place, utilizes depolarization Amici prism 5 that two bunch polarized light are carried out light splitting; Adjusting the angles of depolarization Amici prism 5, make two bunch polarized light each be split becomes orthogonal a branch of reflection light through Beam simultaneously.
Step 4,1/4 slide 6 and 1/4 slide 7 is placed respectively in two emergent ray directions of depolarization Amici prism 5, restraint emergent light to two and carry out Polarization Modulation, it is characterized in that, adjust the placed angle of 1/4 slide 6 and 1/4 slide 7, two bundle emergent lights are made all to become circularly polarized light, and now oppositely oriented.
Step 5, is utilized respectively polarization splitting prism 8 and polarization splitting prism 9 and two bundle outgoing circularly polarized lights is carried out light splitting and Polarization Modulation; The angles of polarization splitting prism 8 and polarization splitting prism 9 to ensure that two bundle circularly polarized lights are each split and become orthogonal a branch of reflection light through Beam; Simultaneously so that polarization splitting prism 8 becomes angle, 45 degree of space with the light splitting surface of polarization splitting prism 9.
The principle that this step utilizes is, two oppositely oriented bundle circularly polarized lights are after polarizer, and the size of the two bunch polarized light initial phases obtained is identical with the polarization phase of polarizer, but symbol is contrary; Can draw further according to light superposition principle of wave, can there is the phase shift of initial phase 2 times in the interference signal intensity of final two bunch polarized light. Therefore, polarization splitting prism 8 becomes angle, 45 degree of space, the respective transmission of two such polarization splitting prism and reflection light spatially just to have four polarization phases with the light splitting surface of polarization splitting prism 9;
In the present embodiment, the light splitting surface of polarization splitting prism 8 is perpendicular to paper, with paper normal orientation for 90 degree; Then respectively 0 degree of four spatial polarization phase places, 45 degree, 90 degree, 135 degree; The four road interference signals obtained just there occurs 0 degree, four phase shift of 90 degree, 180 degree, 270 degree.
Step 6, uses photelectric receiver 10, photelectric receiver 11, photelectric receiver 12, photelectric receiver 13 to receive by the four road light beams by polarization splitting prism 8 and polarization splitting prism 9 outgoing respectively; Record the interference strength respectively I1 (t) of four road light beams of generation phase shift at moment t, I2 (t), I3 (t), I4 (t); Thus can obtain vibration source at amplitude Z (t) of moment t is:
Z(t)=arctan{[I1(t)-I3(t)]/[I2(t)-I4(t)]}*(d/4��)
Wherein d is diffraction grating pitch.
Claims (1)
1. a grating interference vibration measurement method, it is characterised in that comprise the following steps:
Step one, is cemented in the bottom surface of diffraction grating 14 vibration and position occurs, it is characterised in that grating pitch direction is perpendicular to cement plane; Give off laser beam vertical incidence grating surface with semiconductor device 15;
Step 2, in+1 order diffraction light reflected at diffraction grating and the light path of-1 order diffraction light, place reflecting mirror 1 and reflecting mirror 2 respectively, change the direction of two-beam, it is characterized in that, be reflected the two-beam after mirror 1 and reflecting mirror 2 reflection and intersect at space a bit with vertical angle; Before reflection light intersection, polaroid 3 and polaroid 4 is utilized respectively two bundle reflection light to be carried out Polarization Modulation, it is characterised in that to adjust the angles of polaroid 3 and polaroid 4; Make two bundle reflection light become polarization phase and differ the line polarized light of 90 degree;
Step 3, at plotted point place, utilize depolarization Amici prism 5 that two bunch polarized light are carried out light splitting, be characterised by, adjusting the angles of depolarization Amici prism 5, make two bunch polarized light each be split becomes orthogonal a branch of reflection light through Beam simultaneously;
Step 4, place 1/4 slide 6 and 1/4 slide 7 in two emergent ray directions of depolarization Amici prism 5 respectively, restraint emergent light to two and carry out Polarization Modulation, it is characterised in that, adjust the placed angle of 1/4th slides so that two bundle emergent lights all become circularly polarized light;
Step 5, is utilized respectively polarization splitting prism 8 and polarization splitting prism 9 and two bundle outgoing circularly polarized lights is carried out light splitting and Polarization Modulation; It is characterized in that, adjusting the angles of polarization splitting prism 8 and polarization splitting prism 9, making two bundle circularly polarized lights each be split becomes orthogonal a branch of reflection light through Beam; Simultaneously, it is ensured that polarization splitting prism 8 becomes angle, 45 degree of space with the light splitting surface of polarization splitting prism 9;
Step 6, use photelectric receiver 10, photelectric receiver 11, photelectric receiver 12, photelectric receiver 13 to receive the four road light beams by polarization splitting prism 8 and polarization splitting prism 9 outgoing respectively, record the interference strength respectively I1 (t) of four road light beams at moment t, I2 (t), I3 (t), I4 (t); Thus can calculate vibration source at amplitude Z (t) of moment t is:
Z(t)=arctan{[I1(t)-I3(t)]/[I2(t)-I4(t)]}*(d/4��)
Wherein d is diffraction grating pitch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610011533.9A CN105628188B (en) | 2016-01-11 | 2016-01-11 | A kind of grating interference vibration measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610011533.9A CN105628188B (en) | 2016-01-11 | 2016-01-11 | A kind of grating interference vibration measurement method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105628188A true CN105628188A (en) | 2016-06-01 |
| CN105628188B CN105628188B (en) | 2018-10-23 |
Family
ID=56043334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610011533.9A Active CN105628188B (en) | 2016-01-11 | 2016-01-11 | A kind of grating interference vibration measurement method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105628188B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114414530A (en) * | 2022-01-28 | 2022-04-29 | 福州大学 | Biomolecule self-reference detection method and device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0244827A3 (en) * | 1986-05-06 | 1989-01-18 | Wai-Hon Lee | Improved optical head |
| JPH07167679A (en) * | 1994-07-08 | 1995-07-04 | Canon Inc | Encoder |
| CN1498342A (en) * | 2001-03-22 | 2004-05-19 | ������ʱ����ʽ���� | Angle-of-rotation measuring device and angle-of-rotation measuring method |
| CN201540156U (en) * | 2009-07-30 | 2010-08-04 | 中国计量科学研究院 | Laser interferometer for vibration calibration |
| CN104390694A (en) * | 2014-11-10 | 2015-03-04 | 西北大学 | Cladded optical fiber grating vibration sensor |
-
2016
- 2016-01-11 CN CN201610011533.9A patent/CN105628188B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0244827A3 (en) * | 1986-05-06 | 1989-01-18 | Wai-Hon Lee | Improved optical head |
| JPH07167679A (en) * | 1994-07-08 | 1995-07-04 | Canon Inc | Encoder |
| JP2629606B2 (en) * | 1994-07-08 | 1997-07-09 | キヤノン株式会社 | encoder |
| CN1498342A (en) * | 2001-03-22 | 2004-05-19 | ������ʱ����ʽ���� | Angle-of-rotation measuring device and angle-of-rotation measuring method |
| CN201540156U (en) * | 2009-07-30 | 2010-08-04 | 中国计量科学研究院 | Laser interferometer for vibration calibration |
| CN104390694A (en) * | 2014-11-10 | 2015-03-04 | 西北大学 | Cladded optical fiber grating vibration sensor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114414530A (en) * | 2022-01-28 | 2022-04-29 | 福州大学 | Biomolecule self-reference detection method and device |
| CN114414530B (en) * | 2022-01-28 | 2023-07-28 | 福州大学 | Biomolecule self-reference detection method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105628188B (en) | 2018-10-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7402868B2 (en) | Descan correction in scanning LIDAR | |
| US9879979B2 (en) | Heterodyne grating interferometer displacement measurement system | |
| CN109579694B (en) | High-tolerance two-degree-of-freedom heterodyne grating interferometry method and system | |
| CN109883362B (en) | Straightness measurement system based on grating interference principle | |
| JP2007052022A (en) | System for measuring object, and method for measuring vertical displacement | |
| CN104949630A (en) | Point diffraction interference device with adjustable large-numerical-aperture fringe contrast | |
| CN111536882B (en) | Reading head, two-dimensional displacement measurement system and measurement method | |
| CN101566459B (en) | Dual-frequency laser interferometer | |
| CN106767395A (en) | One kind is used for six efficient measuring systems of geometric error high resolution of line slideway and method | |
| CN112504131B (en) | Heterodyne one-dimensional grating displacement measuring device | |
| CN114877811B (en) | One-dimensional grating displacement measuring device | |
| WO2020051088A1 (en) | Polarization encoded beam delivery and collection | |
| CN104142123A (en) | Three-degree of freedom laser measuring system applied to mechanical equipment geometric error measurement | |
| CN207487813U (en) | A kind of sound and image acquiring device based on wireless laser technology | |
| CN105300274B (en) | A kind of heterodyne interferometry system convenient for adjusting splitting ratio | |
| CN112097647B (en) | Heterodyne grating displacement measuring device | |
| JP2002213913A (en) | Laser length measuring machine, and laser length measuring method | |
| CN105628188A (en) | Raster interference vibration measurement method | |
| CN101769950B (en) | Full-optical fiber difference stream measuring device based on faraday effect | |
| CN106643478B (en) | A kind of displacement measurement optical system | |
| KR101206061B1 (en) | Device and Method for Measuring Motion Error of Linear Stage | |
| CN110426397B (en) | Optical detection system, device and method | |
| CN109856943B (en) | Phase shift interference fringe generation system and generation method thereof | |
| CN107655411B (en) | The grating displacement measuring system of long stroke, high-acruracy survey | |
| AU2021104387A4 (en) | Two-dimensional measurement method and system of anti-optical aliasing of heterodyne grating interference |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |