CN105607167B - A kind of three-stage surface phasmon lens - Google Patents
A kind of three-stage surface phasmon lens Download PDFInfo
- Publication number
- CN105607167B CN105607167B CN201610177722.3A CN201610177722A CN105607167B CN 105607167 B CN105607167 B CN 105607167B CN 201610177722 A CN201610177722 A CN 201610177722A CN 105607167 B CN105607167 B CN 105607167B
- Authority
- CN
- China
- Prior art keywords
- mrow
- groove
- mtd
- layer
- surface phasmon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002184 metal Substances 0.000 claims abstract description 18
- 238000005286 illumination Methods 0.000 claims abstract description 8
- 238000005530 etching Methods 0.000 abstract description 3
- 230000010287 polarization Effects 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/008—Surface plasmon devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Polarising Elements (AREA)
Abstract
A kind of three-stage surface phasmon lens, are related to surface phasmon.Rectangular recess by three layers of etching in metal surface is constituted, under online polarized illumination, by the more small size surface phasmon focus for the diffraction limit that makes breakthroughs, recess width is λ/2, the center of every layer of groove is distributed on three line segments, for i-th layer of (i=1,2,3), the length of every layer of groove and center are by following design：I-th layer of groove or so side edge mid-points meet f+ (i 1) d+k λ/3 and f+ (i 1) d+ (k+1) λ/3 respectively to the distance of focus, k is referred to as the level of groove, the k of the two neighboring groove of same layer is set to differ 3, the Fei Nier bands that each groove corresponds in conventional wave strap；When the plane wave vertical metal surface illuminated structure polarized in the y-direction, surface phasmon will mutually be excited together on each groove, and constructive interference forms focus when traveling to focal point.
Description
Technical field
The present invention relates to surface phasmon, more particularly, to a kind of three-stage surface of achievable ultrasmall focal spot etc. from sharp
First lens.
Background technology
Surface phasmon (Surface Plasmon Polariton) is a kind of electricity of local on medium/metal surface
Magnetic field surface modes, are characterized in electromagnetic field intensity exponential damping on the direction perpendicular to metal surface；And with more than Jie
The wave number of same frequency photon is propagated along metal surface in matter.Under certain condition, it can be realized between light and surface phasmon
Energy is changed.This allows people to be grasped using surface phasmon in the range of micron or even nanoscale to light
Control.The research and correlation theory research of various functions device based on surface phasmon turn into focus in recent years, attract
The concern of numerous scientific research personnel.
In the planar photonic device of numerous surface phasmons, the lens piece research to surface phasmon is always
The focus of surface phasmon device research, because realizing that focusing is directly connected to micro-imaging, detection, optical storage, light
The application functions such as tweezer realize that the structure that two-dimensional surface phasmon is focused on mainly has following scheme at present：(1) using in metal watch
Face builds raised structures and makees wavefront regulation and control realization focusing to the surface phasmon in route of transmission；(2) nano particle structure is utilized
Into parabola and circular arc focus surface phasmon；(3) circular grating focus surface phasmon is prepared in metal surface；(4)
Surface phasmon lens of basic structural unit etc. are used as by the use of grating section.Although the core concept of this several scheme is all profit
It is concerned with enhancing completely in the phase of focal point with the electromagnetic field of surface phasmon and focuses on, but in concrete implementation slightly not
Together.Exciting with phase regulation and control for surface phasmon is two independent processes in scheme (1) and (2)：First pass through metal
On fillet projection or nanometer hole dot matrix (being used as antenna) first realize far field light to surface phasmon conversion couple；And then
Shaping is carried out to wavefront using metal surface micro-nanostructure.And in scheme (3) and (4), the phase of surface phasmon exists
Just be designed determination, i.e. surface phasmon while exciting excites coupling and phase controlling structure to unite two into one.
Most it is the round lens in scheme (3) by extensive concern in above-mentioned numerous surface phasmon lens piece, its structure is to carve
Single or multiple concentric circles annular grooves on metal film are constituted.Due to round geometrical symmetry, compared to linearly polarized light illumination, if
Excited using radial polarisation light (Radially Polarized Light), focusing effect can be significantly improved, obtain stronger
Focus and smaller focus half-breadth (G.M.Lerman, A.Yanai, and U.Levy, " Demonstration of
nanofocusing by the use of plasmonic lens illuminated with radially polarized
light”,Nano Lett.9,2139(2009)；W.Chen,D.C.Abeysinghe,R.L.Nelson,and Q.Zhan,
“Plasmonic lens made of multiple concentric metallic rings under radially
polarized illumination”,Nano Lett.9,4320(2009)).Because surface phasmon is transverse magnetic wave,
Polarized component only perpendicular to optical grating construction could be excited effectively.When radial polarisation is illuminated, light polarization direction is vertically justified everywhere
Type grating, each position can excite the surface phasmon propagated along the center of circle with intensity.And it is used as excitaton source with linearly polarized light
When, whole round optical grating construction is not fully utilized actually, particularly in the position of the parallel circular arc tangential line in polarization direction, table
The launching efficiency of face phasmon it is very low (A.V.Zayatsa, I.I.Smolyaninovb, and A.A.Maradudinc,
“Nano-optics of surface plasmon polaritons”,Phys.Reports 408,131(2005)).But
There are two large problems in the scheme excited using radial polarisation：Producing radial polarisation light first needs that linearly polarized light is made into certain place in advance
Reason, this makes troubles to practical application；Secondly there are the alignment issues of light source and structure in radial polarisation illumination, that is, need to ensure to swash
The center of luminous spot is on the center of circle of round lens.In view of the size (tens microns of~diameter) of lens, implement simultaneously
It is not easy.
The content of the invention
It is an object of the invention to provide a kind of three-stage surface phasmon lens of achievable ultrasmall focal spot.
Rectangular recess of the present invention by three layers of etching in metal surface is constituted, perpendicular to the incident linear polarization in metal surface
Under optical illumination, by the more small size surface phasmon focus for the diffraction limit that makes breakthroughs, the width W of the rectangular recess is
λ/2, wherein λ are the wavelength of surface phasmon, and the center of every layer of groove is distributed on three line segments, for i-th layer
(i=1,2,3), its track is provided by following piecewise function：
Wherein f is focal length, and d=2 λ/3 are the interlamellar spacings of horizontal line section part, and α and β are two parameters for needing to optimize, formula
(1) "+" and "-" number in correspond to x >=[f+ (i-1) d] tan α and x≤- [f+ (i-1) d] tan α respectively；The length of every layer of groove
With center according to following design：The left side of i-th layer of groove and right edge midpoint meet f+ (i- respectively to the distance of focus
1) d+k λ/3 and f+ (i-1) d+ (k+1) λ/3, wherein integer k are referred to as the level of groove, k values as follows, make same layer
The k differences 3 of two neighboring groove, i.e.,：
The Fei Nier bands (fresnel zone) that each groove corresponds in conventional wave strap.It is flat when what is polarized in the y-direction
During the ripple vertical metal surface illuminated structure of face, surface phasmon will mutually be excited together on each groove, and travel to focus
Constructive interference forms focus during place.
The present invention only needs linearly polarized light to excite and illuminates round lens identical performance with radial polarisation with regard to that can reach：Focus has
There is rotational symmetry (rotational symmetry)；Focus half-breadth is identical.
The structure of the present invention can ensure that the orientation of each groove and polarization direction can be angled, be prevented effectively from
When linear polarization illuminates round lens, the shortcoming that the surface of position phasmon of parallel circular arc tangential line is not excited in polarization direction.
The invention has the advantages that：
1st, the surface phasmon ripple of wide-angle convergence can be provided by being arranged in inclined line segment part recess, be significantly improved
The numerical aperture of mirror, therefore can make to realize that super-resolution is focused on, i.e. the full width at half maximum of focus spot in the x-direction is very small, this
Select is that conventional wave strap is not accomplished.
2nd, by adjusting the weight of each angle collection ripple to each groove " casting out " or " reservation ", can further it optimize
The size of focus.
If the 3, (referring to Fig. 3) staggered relatively above and below two same three-stage surface phasmon lens is only needed to
, will generation ultrahigh resolution and rotationally symmetrical focus, its half Gao Quan in the two directions x and y under online polarized illumination
As low as λ0/ 3, break through λ0/ 2 diffraction limit, here λ0It is the vacuum wavelength of incident light.Here two focuses are to consider at a distance of λ/2
To the phase difference from the surface phasmon that two lens are excited up and down with π.
4th, three-stage surface phasmon lens line of engagement light beam is with regard to that can reach that round lens coordinate radial polarisation light
The focusing effect that Shu Zhaoming is, while the beam center of the latter's presence and the alignment issues of structure centre are avoided, due to only needing
Linearly polarized light, reduces the cost of implementation simultaneously.
Brief description of the drawings
Fig. 1 is the structural representation of the three-stage surface phasmon lens of the present invention；
Fig. 2 is the design principle figure of the three-stage surface phasmon lens of the present invention；
Fig. 3 is two same three-stage surface phasmon lens schematic diagrames staggered relatively of the invention；
Fig. 4 is two kinds of three-stage surface phasmon lens arrangement schematic diagrames in the embodiment of the present invention；
Fig. 5 is the three-stage surface phasmon lens and round lens (individual layer, radius=5 μm) in the embodiment of the present invention
Focal intensities profiles versus schemes；
Fig. 6 is the one-dimensional intensity distribution degree in x and y directions of three-stage surface phasmon lens focus in the embodiment of the present invention
And full width at half maximum.
Embodiment
Following examples will the invention will be further described with reference to accompanying drawing.
Referring to Fig. 1, rectangular recess 2 of the present invention by three layers of etching in metal surface 4 is constituted, perpendicular to metal surface 4
Under incident linearly polarized light 1 is illuminated, by more the small size surface phasmon focus 3, the rectangle of the diffraction limit that makes breakthroughs
The width W of groove 2 is λ/2, and wherein λ is the wavelength (referring to Fig. 2) of surface phasmon, and the center of every layer of groove is divided equally
Cloth is on three line segments, and for i-th layer (i=1,2,3), its track is provided by following piecewise function：
Wherein f is focal length, and d=2 λ/3 are the interlamellar spacings of horizontal line section part, and α and β are two parameters for needing to optimize, its
Implication is shown in Fig. 2."+" and "-" number in formula (1) correspond to x >=[f+ (i-1) d] tan α and x≤- [f+ (i-1) d] tan α respectively.Often
The length of layer groove and center are according to following design：The distance of the left side of i-th layer of groove and right edge midpoint to focus
F+ (i-1) d+k λ/3 and f+ (i-1) d+ (k+1) λ/3 are met respectively, and integer k is referred to as the level of groove here, and k is as follows
Value, makes the k of the two neighboring groove of same layer differ 3, i.e.,：
The structure so designed is actually a two-dimentional surface phasmon zone plate, and each groove corresponds to tradition
Fei Nier bands (fresnel zone) in zone plate.When the vertical golden film surface illuminated structure of the plane wave polarized in the y-direction,
Surface phasmon will mutually be excited together on each groove, and constructive interference forms focus when traveling to focal point.
Two same three-stage surface phasmon lens schematic diagrames staggered relatively of the present invention are referring to Fig. 3.
Consider to prepare the three-stage lens in the thick golden films of 50nm, the depth of groove can be 20 to 40nm.For λ0
=830nm incident light, surface phasmon wavelength X=813.5nm, now w=406.75nm, d=542.3nm, design burnt
Away from f=5 μm-d=4.46 μm.α=80 degree and β=45 degree, the position of each groove and length are provided by formula (2).In order that knot
Structure is compact, and the groove being distributed on the inclined line segment of both sides is only remained into and the level level of focus.Under these parameters, entirely
The lateral length of device is about 72.6 μm, and width is about 5 μm, and structure is shown in Fig. 4 (a).The acquisition of focal intensities distribution can pass through
Maxwell equation group adds boundary condition or FDTD business softwares or the numerical computations based on surface phasmon point-source model
Obtain (C.Zhao, J.Zhang, " Plasmonic Demultiplexer and Guiding, " ACS Nano 4,6433
(2010)).Here using last a kind of, i.e. surface phasmon point-source model calculating.Found by calculating, for Fig. 4's (a)
Three-stage lens, full width at half maximum of the focus along x and y directions is 295 and 762nm respectively, and the full width at half maximum in x directions is<λ0/ 2,
Diffraction limit is broken through, ultrahigh resolution is realized.Using the advantage (2) of the design, remove k=-3, -2, -1,1,2,3 this six levels
After secondary, corresponding structure is shown in Fig. 4 (b).Full width at half maximum of its focus along x and y directions is 276 and 760nm respectively, and the former reaches
λ0/3.Physically, remove weight of this six levels equivalent to the surface phasmon ripple for improving wide-angle convergence, increase
Equivalent numerical value aperture, therefore smaller focus can be obtained.In order to obtain with the symmetrical focus of rotation direction, it is necessary to by the half of y directions
High overall with is also compressed to 1/3 λ0Left and right is this by the staggered relatively according to figure (3) mode of two Fig. 4 (a) structures.In linear polarization
Focal intensities distribution map under optical illumination is shown in Fig. 5 (b).As a comparison, Fig. 5 (a) is that a radius is 5 μm of round lens in footpath
The distribution map of lower focus is excited to polarised light.As seen from the figure, the focus spot of three-stage lens has as round lens
Rotation direction symmetry.Further analysis shows, focus x, the y full width at half maximum of round lens is all 289nm, our structure focus
X, y direction full width at half maximum are shown in figure (6) in 295nm or so.830nm in view of incident light, the half-breadth of focus close to 1/3 wavelength,
Breach the diffraction limit of 1/2 wavelength.
Claims (1)
1. a kind of three-stage surface phasmon lens, it is characterised in that by three layers of rectangular recess group etched in metal surface
Into, under the incident linearly polarized light illumination in metal surface, by the more small size surface etc. for the diffraction limit that makes breakthroughs from
Excimer focus, the width W of the rectangular recess is λ/2, and wherein λ is the wavelength of surface phasmon, the center of every layer of groove
Position is distributed on three line segments, for i-th layer, i=1, and 2,3, its track is provided by following piecewise function：
Wherein f is focal length, and d=2 λ/3 are the interlamellar spacings of horizontal line section part, and α and β are two parameters for needing to optimize, formula (1)
In "+" and "-" number respectively correspond to x >=[f+ (i-1) d] tan α and x≤- [f+ (i-1) d] tan α；The length of every layer of groove and
Center is according to following design：The left side of i-th layer of groove and right edge midpoint meet f+ (i-1) respectively to the distance of focus
D+k λ/3 and f+ (i-1) d+ (k+1) λ/3, wherein integer k are referred to as the level of groove, k values as follows, make same layer phase
The k differences 3 of adjacent two grooves, i.e.,：
<mrow>
<mi>k</mi>
<mo>=</mo>
<mfenced open = '{' close = ''>
<mtable>
<mtr>
<mtd>
<mrow>
<mn>...</mn>
<mo>,</mo>
<mo>-</mo>
<mn>7</mn>
<mo>,</mo>
<mo>-</mo>
<mn>4</mn>
<mo>,</mo>
<mo>-</mo>
<mn>1</mn>
<mo>,</mo>
<mn>2</mn>
<mo>,</mo>
<mn>5</mn>
<mo>,</mo>
<mn>8</mn>
<mo>,</mo>
<mn>...</mn>
</mrow>
</mtd>
<mtd>
<mrow>
<mo>(</mo>
<mi>i</mi>
<mo>=</mo>
<mn>1</mn>
<mo>)</mo>
</mrow>
</mtd>
</mtr>
<mtr>
<mtd>
<mrow>
<mn>...</mn>
<mo>,</mo>
<mo>-</mo>
<mn>6</mn>
<mo>,</mo>
<mo>-</mo>
<mn>3</mn>
<mo>,</mo>
<mn>0</mn>
<mo>,</mo>
<mn>3</mn>
<mo>,</mo>
<mn>6</mn>
<mo>,</mo>
<mn>9</mn>
<mo>,</mo>
<mn>...</mn>
</mrow>
</mtd>
<mtd>
<mrow>
<mo>(</mo>
<mi>i</mi>
<mo>=</mo>
<mn>2</mn>
<mo>)</mo>
</mrow>
</mtd>
</mtr>
<mtr>
<mtd>
<mrow>
<mn>...</mn>
<mo>,</mo>
<mo>-</mo>
<mn>8</mn>
<mo>,</mo>
<mo>-</mo>
<mn>5</mn>
<mo>,</mo>
<mo>-</mo>
<mn>2</mn>
<mo>,</mo>
<mn>1</mn>
<mo>,</mo>
<mn>4</mn>
<mo>,</mo>
<mn>7</mn>
<mo>,</mo>
<mn>...</mn>
</mrow>
</mtd>
<mtd>
<mrow>
<mo>(</mo>
<mi>i</mi>
<mo>=</mo>
<mn>3</mn>
<mo>)</mo>
</mrow>
</mtd>
</mtr>
</mtable>
</mfenced>
<mo>-</mo>
<mo>-</mo>
<mo>-</mo>
<mrow>
<mo>(</mo>
<mn>2</mn>
<mo>)</mo>
</mrow>
</mrow>
The Fei Nier bands that each groove corresponds in conventional wave strap；When the plane wave vertical metal surface polarized in the y-direction is shone
During bright structure, surface phasmon will mutually be excited together on each groove, and constructive interference forms Jiao when traveling to focal point
Point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610177722.3A CN105607167B (en) | 2016-03-25 | 2016-03-25 | A kind of three-stage surface phasmon lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610177722.3A CN105607167B (en) | 2016-03-25 | 2016-03-25 | A kind of three-stage surface phasmon lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105607167A CN105607167A (en) | 2016-05-25 |
| CN105607167B true CN105607167B (en) | 2017-10-17 |
Family
ID=55987241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610177722.3A Expired - Fee Related CN105607167B (en) | 2016-03-25 | 2016-03-25 | A kind of three-stage surface phasmon lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105607167B (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308964B (en) * | 2013-06-27 | 2015-07-01 | 北京邮电大学 | Efficient nanometer focusing device achieved through ladder type micron slits |
| CN104090332B (en) * | 2014-07-10 | 2017-06-30 | 南京邮电大学 | Focal length, tightly focused surface phasmon lens under a kind of radial polarisation light |
| CN104597562B (en) * | 2014-12-19 | 2017-07-07 | 鲁东大学 | Near-infrared broadband direction propagation and the surface phasmon lens for focusing on |
-
2016
- 2016-03-25 CN CN201610177722.3A patent/CN105607167B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN105607167A (en) | 2016-05-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Feng et al. | Photonic metamaterial absorbers: morphology engineering and interdisciplinary applications | |
| Qin et al. | Hybrid bilayer plasmonic metasurface efficiently manipulates visible light | |
| Liu et al. | Nanofocusing of circularly polarized Bessel-type plasmon polaritons with hyperbolic metamaterials | |
| Ding et al. | A review of unidirectional surface plasmon polariton metacouplers | |
| Nguyen-Huu et al. | Color filters featuring high transmission efficiency and broad bandwidth based on resonant waveguide-metallic grating | |
| KR102218658B1 (en) | Method for concentrating light and light concentrator | |
| US9874735B2 (en) | Resonance-shifting luminescent solar concentrators | |
| Ding et al. | Broadband Omnidirectional Diversion of Light in Hybrid Plasmonic‐Photonic Heterocrystals | |
| Mollaei et al. | Dual-metasurface superlens: A comprehensive study | |
| Waltrich et al. | High-purity single photons obtained with moderate-NA optics from SiV center in nanodiamonds on a bullseye antenna | |
| CN108363127A (en) | A kind of surface phasmon bifocal | |
| Battal et al. | Ultrahigh contrast one-way optical transmission through a subwavelength slit | |
| CN105607167B (en) | A kind of three-stage surface phasmon lens | |
| Lei et al. | Multifunctional on-chip directional coupler for spectral and polarimetric routing of Bloch surface wave | |
| CN103235417B (en) | Thin film type optical collimator on basis of surface plasmon polaritons | |
| Chen et al. | Large-area, low-cost near-infrared meta-surface reflector based on a pixelated two-dimensional silicon disk array | |
| Masouleh et al. | Performance improvement of plasmonic-based thin film assisted MSM-PDs | |
| Chuang et al. | Using direct nanoimprinting to study extraordinary transmission in textured metal films | |
| Zhang et al. | Realization of enhanced light directional beaming via a Bull's eye structure composited with circular disk and conical tip | |
| Lu et al. | All-optical logic binary encoder based on asymmetric plasmonic nanogrooves | |
| Karl et al. | Tunable infrared high absorbing polarization independent niobium nitride plasmonic perfect absorber nanowire photodetectors | |
| RM et al. | Wet-chemical etching: a novel nanofabrication route to prepare broadband random plasmonic metasurfaces | |
| Ye et al. | Transmission enhancement of subwavelength grating microlens by tapered nanostructure | |
| CN102621820A (en) | Preparation method of high-efficiency super-resolution focusing device for photoetching | |
| Li et al. | Plasmonic leak-free focusing lens under radially polarized illumination |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171017 |