CN1056005C - Simple and practical method for manufacturing electrodes - Google Patents

Abstract

The present invention relates to a simple and practical method for manufacturing electrodes, particularly to a method for manufacturing electrodes on transparent ferroelectric ceramics, which belongs to the field of electrode manufacture. The present invention is characterized in that a mechanical mask is in tight contact with ferroelectric ceramic sheets by magnets. The method provided by the present invention can be applied to all the materials to be used for manufacturing electrodes, and the present invention has the characteristics of strong practicability, simplicity and feasibility.

Description

A kind of method for making its electrode

The invention relates to the method for on thin slice, making electrode, on transparent ferroelectric ceramics, make the method for electrode more precisely, belong to the method for making its electrode field.As everyone knows, transparent ferroelectric ceramics has excellent electro-optical properties, can be used for aspects such as electrooptical modulation, electrooptical shutter, electric light demonstration, but corresponding the sort of purposes no matter, the transparent ferroelectric ceramics town of porcelain is to work under electric field action, therefore, must on the ferroelectric ceramics sheet, make various difform electrodes as required.For example in the electrooptical shutter device, need on crisp and thin potsherd, make thin and long interdigital electrode.

In actual applications, particularly at photoelectronic applications, potsherd generally all has only tens to the hundreds of micron thickness.And the potsherd physical strength is low, so often cause that easily potsherd is cracked in making electrode process.Since the seventies crystalline ceramics was heard generation, corresponding electrode manufacture craft generally had two kinds: (1) photoetching.The technological process of this method is long, and potsherd need bear multiple working procedures such as plated film, gluing, whirl coating, preceding baking, development, photographic fixing, corrosion.Particularly after excessive erosion, electrode pattern is easy to generate a mao defect, and stays the remains of multiple solvent and metal electrode on potsherd, so be difficult to realize that crystalline ceramics has the surface of ＂ cleaning ＂; Simultaneously, the hair defect can cause non-uniform electric, so under electric field action, not only make the device performance deterioration but also cause lead rupture consequently finally to make component failure easily.(2) fluting.For the inside of realizing potsherd all places under the identical electric field action with the surface,, electrode is embedded in the potsherd surface, to reach electric field equally distributed from top to down purpose in potsherd so adopt grooving processes on the surface of potsherd.But in grooving process, will introduce a large amount of stress in potsherd, in use stress can constantly discharge again, and device performance also constantly changes thereupon, and grooving processes needs the specific process equipment of a cover again, the cost height, and yield rate is also low.

The object of the invention is to propose a kind of new making electrode method.This method not only can overcome the shortcoming of above-mentioned common method, and has the advantages that simple, actual effect, general operation personnel can both be operated.

Method of the present invention is to implement by method shown in Figure 1.1 is the mechanical mask sheet among the figure, and this is that a slice flatness is good, and the physical strength height is carved with the thin carbon steel of electrod-array; 2 is the teflon supporting plate, and it can be the garden sheet, also can the side's of being sheet, specifically decide on the shape of the sample of waiting to make electrode; The 3rd, magnet; 4 for waiting to make material such as transparent ferroelectric ceramics ceramic material, the organic material etc. of electrode.The key of making electrode new method provided by the invention is to make closely pasting mutually of mechanical mask sheet and sample.Sample is placed on the teflon supporting plate, and the teflon supporting plate only plays the support effect.Can carve rectangle or circular shallow hole (seeing embodiment for details) on the teflon supporting plate by rectangle or circular specimen, the hole generally can slightly be shallower than the thickness of sample deeply, the about 0.3mm of normally transparent ferroelectric ceramics sheet thickness, and then the shallow hole degree of depth only is 0.2mm.Electrode on the sample is implemented by vacuum evaporation, utilizes the interconnected support of electrode, respectively two pairs of electrode finger tips is coupled together by vacuum evaporation again.

For mechanical mask is closely pasted mutually with sample, can realize with methods such as anchor clamps, but be difficult to reach the degree of closely pasting mutually.Subsides method mutually provided by the invention is to place a magnet below the teflon supporting plate, its magnetic field intensity needn't be very strong, magnet is by the teflon supporting plate and be placed on sample absorption mechanical mask on the supporting plate, sample on making mechanical mask and being placed on the teflon supporting plate closely pastes mutually, with vacuum evaporation method electrode is fabricated on the sample at last, forms needed electrode pattern.

Method for making its electrode provided by the present invention not only can be used for transparent ferroelectric ceramics, and can expand to remain to be made on the stupalith and other materials of electrode, so have the characteristics of practical and simple possible.Can on sample, can make the on all four electrode pattern of figure by the method for making electrode provided by the invention with mask plate.That needs only a pair of conjugation electrode of making on thin carbon steel as will all making identical electrodes at the tow sides of material, can realize with said method.So just, can reach electric field in sample surfaces and the inner purpose that is evenly distributed.

Further specify substantive progressive and outstanding feature of the present invention below by embodiment.

The method for making of embodiment 1. round ceramic sheet positive electrodes

In order on the round ceramic sheet, to make interdigital electrode, on the thin carbon steel that thickness is 0.03 millimeter, flatness is good, physical strength is high, make circular interdigital electrode earlier, as shown in Figure 2.Fig. 2-the 1st is carved with the circular mechanical mask plate of interdigital electrode array, and Fig. 2-the 2nd has the mechanical mask plate of Fig. 2-1 conjugation electrode, and when making electrode, potsherd is placed on diameter for (on 1 the circular teflon supporting plate, as shown in Figure 3.Being carved with diameter on supporting plate is that φ 2 (being slightly larger than the diameter of potsherd), the degree of depth are the shallow hole of b (being slightly larger than the thickness of potsherd).Adopt vacuum evaporation method to make interdigital electrode.Make complete electrode with mechanical lamina membranacea that has Fig. 2-1 conjugation electrode shown in Fig. 2-2 and the interconnected support of corresponding electrode by vacuum evaporation method then, promptly be made into a pair of identical electrode at the sample tow sides.

The method for making of embodiment 2. rectangle ceramic electrodes

Fig. 4-1 and Fig. 4 the-the 2nd, for make the mechanical mask sheet of interdigital electrode on the rectangle potsherd.Fig. 4-the 1st is carved with the rectangle mechanical mask plate of interdigital electrode array, and Fig. 4-the 2nd, has the mechanical mask plate of 4-1 conjugation electrode.Fig. 5 is a rectangle teflon supporting plate, and being carved with area on the supporting plate is a * b (being slightly larger than the size of potsherd), and thickness is the shallow hole of δ (being slightly thicker than the thickness of potsherd).Then potsherd is rested in the shallow hole, utilize the complete electrode of the interconnected rack making of corresponding electrode, the method for the making of concrete electrode is with embodiment 1.

Claims (4)

1. method for making its electrode, its spy is to attract mechanical mask sheet (1) with magnet (3) by teflon supporting plate (2) and the ceramics sample (4) that is placed on the supporting plate, makes mechanical mask sheet and closely subsides mutually of ceramics sample; Deposit on the teflon supporting plate that sample uses and be carved with the shallow slot that the degree of depth slightly is shallower than the thickness of sample playing the support effect; With vacuum evaporation method interdigital electrode is produced on the potsherd then, the connection of electrode is implemented by the interconnected support of electrode.

2. by the described method for making its electrode of claim 1, it is characterized in that described mechanical mask sheet is that thin carbon steel good by flatness, that physical strength is high is made, the etching electrode can be that circle also can be square thereon.

3. by the described method for making its electrode of claim 1, it is characterized in that the support effect deposits the teflon supporting plate that sample is used, can be carved with circle or rectangular shallow slot according to specimen shape, its degree of depth slightly is shallower than the thickness of sample.

4. by the described method for making its electrode of claim 1, it is characterized in that making a pair of identical electrode at the sample tow sides by making a pair of mechanical mask diaphragm with conjugation electrode.

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