CN105594077A - Radio-frequency excited gas laser and preparation method therefor - Google Patents
Radio-frequency excited gas laser and preparation method therefor Download PDFInfo
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- CN105594077A CN105594077A CN201480037791.3A CN201480037791A CN105594077A CN 105594077 A CN105594077 A CN 105594077A CN 201480037791 A CN201480037791 A CN 201480037791A CN 105594077 A CN105594077 A CN 105594077A
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- sealing flange
- reflecting mirror
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- deformation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
Abstract
A radio-frequency excited gas laser and a preparation method therefor. The gas laser comprises: a sealing cavity (1) in which a gas as a laser medium is filled, wherein an optical reflection mirror surface (5) is formed on the inner side of a front sealing flange (4) of the cavity (1), an optical reflection mirror surface (3) is formed on the inner side of a rear sealing flange (2) of the cavity (1), a resonant cavity is formed by the optical reflection mirror surface (5) formed on the inner side of the front sealing flange (4) and the optical reflection mirror surface (3) formed on the inner side of the rear sealing flange (2), and wherein deformation absorption troughs (11) are formed on the inner side of the front sealing flange (4) of the cavity (1) and/or the inner side of the rear sealing flange (2) of the cavity (1).
Description
Specification
A kind of gas laser of RF excited and preparation method thereof technical field
The present invention relates to field of laser device technology, in particular it relates to gas laser of RF excited and preparation method thereof.
Background technology
Laser is one of essential core component in Modern Laser system of processing.With the development of laser processing technology, laser is also constantly advancing, and occurs in that many new lasers.The gas laser of RF excited is one of most commonly used laser of current application, such as including carbon dioxide radio frequency laser and carbon monoxide radio frequency laser, its small-power type can be applied on laser marking device, high-power to can be applied on laser cutting device.
In the gas laser field of existing RF excited, the front and rear optical reflecting lens of cavity interior resonance chamber are separately machined to be formed, and is then fixed to by fixed seat on the inside of the sealing flange at cavity two ends.
Fig. 1 shows the partial side, cross-sectional view of the gas laser example of the RF excited of prior art.As shown in Figure 1, the laser includes seal cavity Γ, the two ends of cavity have preceding sealing flange 4 ' and rear sealing flange 2 ' respectively, the preceding optical reflecting lens 5 ' and rear optical reflecting lens 3 ' of the interior resonance chamber of seal cavity 1 ' are separately machined to be formed, then the inner side of the sealing flange at discharge tube two ends is fixed to by fixed seat 20, fixed seat 20 is fixed to the sealing flange at discharge tube two ends by screw 21.
But, this complicated structure can cause the generation of unreliable factor, for example, because the physical property for the material for constituting front and rear optical reflecting lens, fixed seat, screw and sealing flange is different, their thermal coefficient of expansion is also differed, during the prolonged use of laser, the change of temperature, Re Zhang Leng Shrink repeatedly etc. can cause the connection loosing of each part of laser, deformation, so that influence to constitute the angle of the optical reflecting lens of seal cavity interior resonance chamber, cause laser output power to decline etc..In addition, in the transportation of laser, due to vibrations
Caused by the angle of the loosening optical reflecting lens that also result in cavity interior resonance chamber of screw change so that laser output power declines.
The present inventor proposes a kind of gas laser of improved RF excited in patent application PCT/CN2014/000358, wherein, the optical reflecting mirror of resonator is formed directly on the sealing flange at discharge tube two ends, so as to need not individually fix the optical reflecting lens of resonator, unreliable factor caused by the difference due to complicated, each component materials is reduced.The content of the patent application is hereby incorporated herein by.The content of the invention
The present invention is intended to provide a kind of gas laser of further improved RF excited, it can reduce the distortion of the curature variation and face type for the optical reflecting mirror for causing resonator due to the deformation of sealing flange.
According to an aspect of the present invention there is provided a kind of gas laser of RF excited, including：Seal cavity filled with the gas as laser medium（1), wherein, cavity（1) preceding sealing flange（4) optical reflecting mirror is formed with inner side（5), cavity（1) rear sealing flange（2) optical reflecting mirror is formed with inner side（3), preceding sealing flange（4) optical reflecting mirror formed on inner side（5) with rear sealing flange（2) optical reflecting mirror formed on inner side（3) resonator is constituted, and wherein, in cavity（1) on the inner side of preceding sealing flange (4) and/or in cavity（1) rear sealing flange（2) deformation is formed with inner side and absorbs groove（11) .
Preferably, in cavity（1) preceding sealing flange（4) on outside and/or in cavity（1) rear sealing flange（2) deformation is also formed with outside and absorbs groove（11) .
Preferably, deformation absorbs groove（11) it is formed annular, polygon, shaped form or fold-line-shaped.
Preferably, deformation absorbs groove（11) in sealing flange（4,2) the areal extent covering region of discharge surrounded on（9) in sealing flange（4,2) the projected area scope on.
Preferably, deformation absorbs groove（11) in sealing flange（4,2) the areal extent covering optical reflecting mirror surrounded on（5th, 3) effectively use scope.
Preferably, preceding sealing flange（And optical reflecting mirror 4)（5) it is integrated.
Preferably, rear sealing flange（And optical reflecting mirror 2)（3) it is integrated.
According to another aspect of the present invention there is provided a kind of preparation method of the gas laser of RF excited, the gas laser includes being filled with the seal cavity of the gas as laser medium, and methods described includes：In preceding sealing flange（4) optical reflecting mirror is formed on side（5)；In rear sealing flange（2) optical reflecting mirror is formed on side（3) ；There is optical reflecting mirror in the formation of preceding sealing flange (4)（5) deformation is formed on side and absorbs groove（11) and
/ or in rear sealing flange（2) formation has optical reflecting mirror（3) deformation is formed on side and absorbs groove（11) ；By preceding sealing flange（4) front end of discharge tube is fixed to, by rear sealing flange（2) rear end of discharge tube is fixed to, so as to form seal cavity（1), to cause optical reflecting mirror（5,3) it is located at cavity（1) inside, wherein, preceding sealing flange（4) optical reflecting mirror formed on（5) with rear sealing flange（2) optical reflecting mirror formed on（3) resonator is constituted.
According in the gas laser of the RF excited of the present invention, groove is absorbed due to foring deformation on the preceding sealing flange of the seal cavity in gas laser and/or the inner side of rear sealing flange, so as to make optical reflecting mirror from protruding from sealing flange, so, when forming seal cavity sealing flange is installed on into discharge tube two ends, optical reflecting mirror will not be directly delivered to the deformation force of sealing flange, but groove is absorbed by deformation and absorbed, so as to effectively ensure that the curvature and face type of optical reflecting mirror are constant.In addition, deformation is formed on the outside of preceding sealing flange and/or rear sealing flange absorbs groove, it more effectively ensure that the curvature and face type of optical reflecting mirror are constant.Brief description of the drawings
Accompanying drawing is that, for providing a further understanding of the present invention, it constitutes a part for specification, and for explaining the present invention together with following specific embodiment, but be not construed as limiting the invention.In accompanying drawing：
Fig. 1 shows the partial side, cross-sectional view of the gas laser example of the RF excited of prior art；
Fig. 2 shows the partial side, cross-sectional view of the gas laser of the RF excited according to the first embodiment of the present invention；
Fig. 3 shows the partial top sectional view of the gas laser of the RF excited according to the first embodiment of the present invention；
Fig. 4 shows the end-view of the rear sealing flange of the gas laser of the RF excited according to the first embodiment of the present invention；
Fig. 5 shows the partial side, cross-sectional view of the gas laser of RF excited according to the second embodiment of the present invention；
Fig. 6 shows the partial top sectional view of the gas laser of RF excited according to the second embodiment of the present invention；
Fig. 7 shows the end-view of the rear sealing flange of the gas laser of RF excited according to the second embodiment of the present invention；
Fig. 8 shows the flow chart of the preparation method of the gas laser of RF excited according to the third embodiment of the invention.Embodiment
The specific embodiment of the present invention is described in detail below in conjunction with accompanying drawing.It should be appreciated that specific embodiment described herein is merely to illustrate and explain the present invention, it is not intended to limit the invention.First embodiment
Fig. 2 shows the partial side, cross-sectional view of the gas laser of the RF excited according to the first embodiment of the present invention.
As shown in Fig. 2 the laser includes seal cavity（1), seal cavity（1) it is filled with and is used as laser medium（That is, working gas）Gas, such as having carbon dioxide or CO gas.Cavity（1) rear and front end has preceding sealing flange respectively（4) with rear sealing flange（2), preceding sealing flange（4) optical reflecting mirror is formed with inner side（5), rear sealing flange（2) optical reflecting mirror is formed with inner side（3), optical reflecting mirror（And optical reflecting mirror 5)（3) resonator, and preceding sealing flange are constituted（4) on inner side and in rear sealing flange（2) deformation is formed with inner side and absorbs groove（11) .
Wherein, preceding sealing flange（And optical reflecting mirror 4)（5) it is integrated, rear sealing flange（And optical reflecting mirror 2)（3) it is integrated.
In addition, seal cavity（1) be internally provided with positive electrode plate（And negative electrode plate 6)（7), cavity（1) introducing electrode is provided with upper side（8), positive electrode plate（And negative electrode 6)
Plate（7) region of discharge is formed between（9) .
When laser tube works, by introducing electrode（8) to positive electrode plate（6) radio-frequency current, positive electrode plate are injected（And negative electrode plate 6)（7) region of discharge between（9) glow discharge can be produced in, so that encourage what working gas entered plasma state and produced energy level to move jump, and in optical reflecting mirror（3) vibration, is produced under the limitation of (5), then from optical reflecting mirror（5) side laser channeling output laser, the laser penetration is coated with the outgoing mirror (12) of true permeable membrane and outwardly outgoing laser beam（13) .
For example, cavity can be used as（1) two ends of the discharge tube of side wall set seal groove (10), and it is located at front and rear sealing flange（2), (4) are between the two ends of discharge tube.Seal groove（10) soft metal such as indium silk can be pressed with, to play vacuum sealing.
Fig. 3 shows the partial top sectional view of the gas laser of the RF excited according to the first embodiment of the present invention.
As shown in figure 3, in cavity（1) preceding sealing flange（4) laser channeling is provided with the position of optical reflecting mirror (5) side on（14), the laser channeling（14) the outer end outgoing mirror for being coated with true permeable membrane（12) seal, laser is from laser channeling（14) export, then penetrate outgoing mirror（12) and outwardly outgoing laser beam（13) .
Fig. 4 shows the end-view of the rear sealing flange of the gas laser of the RF excited according to the first embodiment of the present invention.
As shown in figure 4, deformation absorbs groove（11) it is formed annular, outgoing mirror（12) it is located at deformation and absorbs groove（11) inner side.
In fact, deformation absorbs groove（11) it can be formed that annular, polygon, shaped form or fold-line-shaped etc. are variously-shaped, those skilled in the art can select the deformation for forming suitable shape to absorb groove as needed（11) .
Preferably, in preceding sealing flange（4) on inner side and in rear sealing flange（2) deformation formed on inner side absorbs groove（11) in front and rear sealing flange（4,2) the areal extent covering region of discharge surrounded on（9) in front and rear sealing flange（4,2) the projected area scope on.For example, in preceding sealing flange（4) on inner side and in rear sealing flange（2) deformation formed on inner side absorbs groove（11) can be with region of discharge（9) and battery lead plate（6,7) annular centered on parallel axle, the annular annular ring areal extent covering region of discharge（9) in sealing flange（4,2) the projected area scope on.Thus, it is possible to ensure laser just
Often work.
Generally, due to optical reflecting mirror（5th, effective use scope 3) preferably covers region of discharge（9) in front and rear sealing flange（4,2) the projected area scope on.Therefore, it is further preferred that in preceding sealing flange（4) on inner side and in rear sealing flange（2) deformation formed on inner side absorbs groove（11) in front and rear sealing flange（4,2) the areal extent covering optical reflecting mirror surrounded on（5th, 3) effectively use scope.Thus, it is possible to ensure optical reflecting mirror（5th, normal work 3), and then ensure the normal work of laser.
In addition, in preceding sealing flange（4) deformation formed on inner side absorbs groove（11) can with rear sealing flange（2) deformation formed on inner side absorbs groove（11) identical or different, those skilled in the art can be configured as needed.
According in the laser of the embodiment, due in cavity（1) preceding sealing flange（4) with rear sealing flange（2) deformation is formed with inner side and absorbs groove（11), so as to when forming seal cavity preceding sealing flange and rear sealing flange are installed on into discharge tube two ends, optical reflecting mirror will not be directly delivered to the deformation force of sealing flange, but groove is absorbed by deformation and absorbed, it can effectively ensure that the curvature and face type of optical reflecting mirror are constant.Second embodiment
Fig. 5 shows the partial side, cross-sectional view of the gas laser of RF excited according to the second embodiment of the present invention.Fig. 6 shows the partial top sectional view of the gas laser of RF excited according to the second embodiment of the present invention.Fig. 7 shows the end-view of the rear sealing flange of the gas laser of RF excited according to the second embodiment of the present invention.
As shown in figure 5, compared with the gas laser according to the RF excited of the first embodiment of the present invention, the difference of the gas laser of RF excited according to the second embodiment of the present invention is：In cavity（1) preceding sealing flange（4) on outside and in cavity（1) rear sealing flange（2) deformation is also formed with outside and absorbs groove（11) .
As shown in fig. 7, deformation absorbs groove（11) it is formed annular, outgoing mirror（12) it is located at deformation and absorbs groove（11) inner side.
In practice, in preceding sealing flange（4) on outside and in rear sealing flange（2) deformation formed on outside absorbs groove（11) can with preceding sealing flange（4) on inner side and in rear sealing flange（2) deformation formed on inner side absorbs groove（It is 11) identical or different,
And in preceding sealing flange（4) deformation formed on outside absorbs groove（11) can also with rear sealing flange（2) deformation formed on outside absorbs groove（11) it is identical or different.In preceding sealing flange（4) on outside and in rear sealing flange（2) deformation formed on outside absorbs groove（11) it can also be formed that annular, polygon, shaped form or fold-line-shaped etc. are variously-shaped, those skilled in the art can select the deformation for forming suitable shape to absorb groove as needed（11) .
In addition, those skilled in the art can also cause in preceding sealing flange as needed（4) on outside and in rear sealing flange（2) deformation formed on outside absorbs groove（11) in front and rear sealing flange（4,2) the areal extent covering region of discharge surrounded on（9) in front and rear sealing flange（4,2) the projected area scope on, or cause in preceding sealing flange（4) on outside and in rear sealing flange（2) deformation formed on outside absorbs groove（11) in front and rear sealing flange（4,2) the areal extent covering optical reflecting mirror surrounded on（5th, 3) effectively use scope.For example, deformation absorbs groove（11) can be with region of discharge（9) and battery lead plate（6,7) annular centered on parallel axle, the annular annular ring areal extent covering region of discharge（9) in sealing flange（4,2) the projected area scope on, or covering optical reflecting mirror（5th, 3) effectively use scope.
According in the laser of the embodiment, groove is absorbed due to also forming deformation on the outside of front and rear sealing flange, so as to more effectively ensure that the curvature and face type of optical reflecting mirror are constant.3rd embodiment
Fig. 8 shows the flow chart of the preparation method of the gas laser of RF excited according to the third embodiment of the invention.
As shown in figure 8, first, optical reflecting mirror is formed on the side of preceding sealing flange, optical reflecting mirror is formed on the side of rear sealing flange.Optical reflecting mirror of the sealing flange with being formed on its side is integrated before can making, and can also be integrated optical reflecting mirror of the rear sealing flange with being formed on its side.For example, the side of preceding sealing flange can be processed into including optical reflecting mirror, and the side of rear sealing flange is processed into including optical reflecting mirror.
For example, being processed with single-point diamond lathe to the side of front and rear sealing flange（That is,
Polishing）, to reach that the resonator of laser, to the smoothness required by optical reflecting mirror, face type and curvature etc., then plates high-reflecting film on the surface formed is processed（For example, can be golden film or other multilayer dielectric films）, thus form optical reflecting mirror on the side of front and rear sealing flange respectively.Certainly, according to circumstances, it directly can also process to form optical reflecting mirror without plated film.If for example, the material of sealing flange is material (such as copper, silver, the gold big to infrared reflectivity）, can not also plated film and sealing flange side formed optical reflecting mirror.
Wherein, it is polished using single-point diamond lathe（That is, single-point is polished）Better than using tradition polishing.Tradition polishing is ground with polishing powder finished surface, can only typically process sphere.And single-point polishing is the ultrahigh precision machining in numerical control, it can reach nano level precision, and aspherical Surfaces of Unusual Shape can be processed.
Then, there is formation deformation on the side of optical reflecting mirror to absorb groove in the formation of preceding sealing flange, and have formation deformation absorption groove on the side of optical reflecting mirror in the formation of rear sealing flange.
Groove is absorbed for example, having respectively in the formation of front and rear sealing flange with Digit Control Machine Tool and deformation being formed on the side of optical reflecting mirror.Absorbing groove in preceding sealing flange and the deformation formed on rear sealing flange can be with identical or different.Furthermore, it is possible to which deformation is absorbed, flute profile is variously-shaped as annular, polygon, shaped form or fold-line-shaped etc., and those skilled in the art can select the deformation for forming suitable shape to absorb groove as needed.There can be the deformation absorption flute profile formed on the side of optical reflecting mirror effectively to use scope as its areal extent covering optical reflecting mirror surrounded by having in the formation of preceding sealing flange on the side of optical reflecting mirror and in the formation of rear sealing flange.
Then, preceding sealing flange is fixed to the front end of discharge tube, rear sealing flange is fixed to the rear end of discharge tube, so as to form sealed laser cavity structure, to cause optical reflecting mirror to be located at the inside of laser cavity, wherein, the optical reflecting mirror formed on preceding sealing flange constitutes resonator with the optical reflecting mirror formed on rear sealing flange.
For example, high-precision numerical control cutting can be carried out to the rear and front end of discharge tube, the depth of parallelism angle of its rear and front end cutting surface is set to be more preferably less than 7 seconds, in order to ensure that front and rear sealing flange constitutes the setting angle error of two optical reflecting mirrors of resonator in scope of design after installing.The reliable and stable setting angle of the two optical reflecting mirrors causes luminous energy to have
It is limited between the two optical reflecting mirrors to effect, and vibrates the controllable spilling in backward side, so as to exports laser energy.In addition, ensure that the rear and front end cutting surface of discharge tube is vertical with the upper and lower battery lead plate inside discharge tube simultaneously, its vertical angle error is more preferably less than 60 seconds, purpose is in order to ensure the region of discharge between positive and negative electrode plate does not deviate by its design angle and is in the Center region between two optical reflecting mirrors, so that when light vibrates between the two optical reflecting mirrors, whole region of discharge can be penetrated and occurred without light-baffling phenomena.For example, the deformation formed on the inner side of preceding sealing flange and on the inner side of rear sealing flange can be caused to absorb groove centered on the axle parallel with positive-negative electrode plate of region of discharge, and the areal extent that deformation absorption groove is surrounded on front and rear sealing flange covers projected area scope of the region of discharge on front and rear sealing flange.
For example, front and rear sealing flange can be fixed into discharge tube two ends with screw etc..Seal groove is set on front and rear sealing flange or on the two ends of discharge tube, to press wherein such as indium silk, so as to play vacuum sealing.
Further, it is also possible to which deformation is formed on the outside of the preceding sealing flange of cavity and on the outside of the rear sealing flange of cavity absorbs groove.
Wherein, the deformation formed on the outside of preceding sealing flange and on the outside of rear sealing flange absorbs groove, and can to absorb groove with the deformation that is formed on the inner side of preceding sealing flange and on the inner side of rear sealing flange identical or different, moreover, the deformation absorption groove formed on the outside of preceding sealing flange and on the outside of rear sealing flange can be with identical or different.
Then, discharge tube is exhausted, and is filled with working gas.
In the gas laser of the RF excited prepared using the embodiment, groove is absorbed due to being formed with deformation on the inner side of sealing flange before and after cavity, so as to front and rear sealing flange is installed on discharge tube two ends and when forming seal cavity, optical reflecting mirror will not be directly delivered to the deformation force of sealing flange, but groove is absorbed by deformation and absorbed, it can effectively ensure that the curvature and face type of optical reflecting mirror are constant.In addition, deformation is also formed on the outside of front and rear sealing flange absorbs groove, it can more effectively ensure that the curvature and face type of optical reflecting mirror are constant.Although illustrate only in above example the example that deformation absorbs groove is respectively formed in preceding sealing flange and rear sealing flange, but, in fact, those skilled in the art can be formed as needed and only on preceding sealing flange or rear sealing flange deformation absorb groove, the present invention to this not
Specifically limited.
It is understood that the principle that above-described embodiment is intended to be merely illustrative of the present and the exemplary embodiment that uses, but the invention is not limited in this.Embodiments of the invention can omit some technical characteristics in above-mentioned technical characteristic, partial technical problems present in prior art only be solved, moreover, disclosed technical characteristic can be combined.For those skilled in the art, without departing from the spirit and substance in the present invention, various changes and modifications can be made therein, and these variations and modifications are also considered as protection scope of the present invention.Protection scope of the present invention is defined by the following claims.
Claims (1)
1. a kind of gas laser of RF excited, including：
Seal cavity filled with the gas as laser medium（1), wherein,
Cavity（1) preceding sealing flange（4) optical reflecting mirror is formed with inner side（5), cavity（1) rear sealing flange（2) optical reflecting mirror is formed with inner side（3), preceding sealing flange（4) optical reflecting mirror formed on inner side（5) with rear sealing flange（2) optical reflecting mirror formed on inner side（3) resonator is constituted, and
Wherein, in cavity（1) preceding sealing flange（4) on inner side and/or in cavity（1) rear sealing flange（2) deformation is formed with inner side and absorbs groove（11) .
2. gas laser according to claim 1, wherein, in cavity（1) preceding sealing flange（4) on outside and/or in cavity（1) rear sealing flange（2) deformation is also formed with outside and absorbs groove（11) .
3. gas laser according to claim 1 or 2, wherein, deformation absorbs groove (11) and is formed annular, polygon, shaped form or fold-line-shaped.
4. gas laser according to claim 3, wherein, deformation absorbs groove（11) in sealing flange（4,2) the areal extent covering region of discharge surrounded on（9) in sealing flange（4,2) the projected area scope on.
5. gas laser according to claim 3, wherein, deformation absorbs groove（11) in sealing flange（4,2) the areal extent covering optical reflecting mirror surrounded on（5th, 3) effectively use scope.
6. gas laser according to claim 1, wherein, preceding sealing flange（And optical reflecting mirror 4)（5) it is integrated.
7. gas laser according to claim 1, wherein, rear sealing flange（And optical reflecting mirror 2)（3) it is integrated.
8. a kind of preparation method of the gas laser of RF excited, the gas laser includes being filled with the seal cavity of the gas as laser medium, methods described includes：
In preceding sealing flange（4) optical reflecting mirror is formed on side（5) ；
In rear sealing flange（2) optical reflecting mirror is formed on side（3) ；
In preceding sealing flange（4) formation has optical reflecting mirror（5) deformation is formed on side and absorbs groove（11) and/or in rear sealing flange（2) formation has optical reflecting mirror（3) deformation is formed on side and absorbs groove（11) ；
By preceding sealing flange（4) front end of discharge tube is fixed to, by rear sealing flange（2) rear end of discharge tube is fixed to, so as to form seal cavity（1), to cause optical reflecting mirror（5,3) it is located at cavity（1) inside,
Wherein, preceding sealing flange（4) optical reflecting mirror formed on（5) with rear sealing flange（2) optical reflecting mirror formed on（3) resonator is constituted.
9. method according to claim 8, in addition to：
In cavity（1) preceding sealing flange（4) on outside and/or in cavity（1) rear sealing flange（2) deformation is formed on outside and absorbs groove（11) .
10. method according to claim 8 or claim 9, wherein, deformation is absorbed into groove（11) annular, polygon, shaped form or fold-line-shaped are formed as.
11. method according to claim 10, wherein so that deformation absorbs groove（U) in sealing flange（4,2) the areal extent covering region of discharge surrounded on（9) in sealing flange（4,2) the projected area scope on.
12. method according to claim 10, wherein so that deformation absorbs groove（11) in sealing flange（4,2) the areal extent covering optical reflecting mirror surrounded on（5th, 3) effectively use scope.
13. method according to claim 8, wherein, by preceding sealing flange（And optical reflecting mirror 4)（5) form as one.
14. gas laser according to claim 8, wherein, by rear sealing flange (2) and optical reflecting mirror（3) form as one.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2014/000489 WO2015172263A1 (en) | 2014-05-12 | 2014-05-12 | Radio-frequency excited gas laser and preparation method therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105594077A true CN105594077A (en) | 2016-05-18 |
Family
ID=54479100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480037791.3A Pending CN105594077A (en) | 2014-05-12 | 2014-05-12 | Radio-frequency excited gas laser and preparation method therefor |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN105594077A (en) |
| WO (1) | WO2015172263A1 (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6298785A (en) * | 1985-10-25 | 1987-05-08 | Matsushita Electric Ind Co Ltd | Gas laser tube |
| JP2000204788A (en) * | 1999-01-07 | 2000-07-25 | Sumitomo Metal Ind Ltd | Steel earthquake damper and damping device using the same |
| US20020061045A1 (en) * | 2000-11-21 | 2002-05-23 | Access Laser Company | Portable low-power gas discharge laser |
| CN101854023A (en) * | 2010-05-24 | 2010-10-06 | 中国科学院长春光学精密机械与物理研究所 | Optical resonator of high-power CO2 gas laser |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1034253C (en) * | 1994-06-03 | 1997-03-12 | 中国科学院上海光学精密机械研究所 | Metallic tube gas laser and its power distribution system |
| JP4180830B2 (en) * | 2002-02-05 | 2008-11-12 | カルソニックカンセイ株式会社 | Heat exchanger |
| CN202246805U (en) * | 2011-09-21 | 2012-05-30 | 天津赛瑞机器设备有限公司 | Crystallizer of electroslag furnace |
-
2014
- 2014-05-12 WO PCT/CN2014/000489 patent/WO2015172263A1/en active Application Filing
- 2014-05-12 CN CN201480037791.3A patent/CN105594077A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6298785A (en) * | 1985-10-25 | 1987-05-08 | Matsushita Electric Ind Co Ltd | Gas laser tube |
| JP2000204788A (en) * | 1999-01-07 | 2000-07-25 | Sumitomo Metal Ind Ltd | Steel earthquake damper and damping device using the same |
| US20020061045A1 (en) * | 2000-11-21 | 2002-05-23 | Access Laser Company | Portable low-power gas discharge laser |
| CN101854023A (en) * | 2010-05-24 | 2010-10-06 | 中国科学院长春光学精密机械与物理研究所 | Optical resonator of high-power CO2 gas laser |
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| Publication number | Publication date |
|---|---|
| WO2015172263A1 (en) | 2015-11-19 |
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Application publication date: 20160518 |