CN1034253C - Metallic tube gas laser and its power distribution system - Google Patents
Metallic tube gas laser and its power distribution system Download PDFInfo
- Publication number
- CN1034253C CN1034253C CN 94112187 CN94112187A CN1034253C CN 1034253 C CN1034253 C CN 1034253C CN 94112187 CN94112187 CN 94112187 CN 94112187 A CN94112187 A CN 94112187A CN 1034253 C CN1034253 C CN 1034253C
- Authority
- CN
- China
- Prior art keywords
- electrode
- extradition
- discharge
- metal tube
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Lasers (AREA)
Abstract
The present invention relates to a metallic tube gas laser with extradition electrodes and a power distribution system of the metallic-tube gas laser. The present invention is mainly suitable for a variety of lasers excited by gas discharge. The laser comprises a discharging metallic tube which can be used as a shell and a public cathode, and the discharging metallic tube is made of metallic materials. An inner tube sustained by a supporting frame is arranged in the discharging metallic tube. N (N =2, 3..., n) extradition electrodes in pair and main discharge electrodes in pair are fixed on the inner tube. The distribution system connected with the extradition electrodes and the main discharge electrodes comprises an auxiliary discharge resistor, a current limiter, an auxiliary discharge capacitor and an interrupter which are connected correspondingly to each pair of extradition electrodes and main discharge electrodes.
Description
The present invention is a kind of multi-electrode extradition discharging metal pipe gas laser and distribution system thereof, is applicable to the laser that all gases excites.
Middle low power gas laser such as He-Ne, CO, CO
2, Ar
+And Kr
+Usually constitute discharge tube by a pair of electrode that is sealed in the glass shell in laser, have only the hollow cathode type metal ion laser just to use multiple electrode structure [EP0178810 (Prio.:12.10.84.JP212667/84)].This in the glass shell hollow cathode of sealing and can only be used for metal ion laser to the structure that a plurality of anodes discharge, to gas atom, molecule-type laser such as He-Ne or CO
2Discharge excitation be disadvantageous.Also have to be used in the laser aid that segmentation in the insulated tube shell is provided with metal cylinder, as patent EP241191 (Prio.:09.04.86 GB8608610).It with the reignition of control electrode with evaporation and the metal and provide pump power to reach the purpose of laser output is arranged of dissociating.This structure is not suitable for CO equally
2, gas laser such as CO and He-Ne.The above-mentioned prior art of putting it briefly has following shortcoming: 1. adopt glass tube shell structure intensity difference, damage easily, be unfavorable for producing, install and transportation; 2. the thermal conductivity of glass tube is low, and is poor to the cooling effect of gas medium, especially for resembling CO
2Laser, this molecular laser of CO laser are even more serious because of the bad influence of heat dispersion; 3. the structure of above-mentioned electrode configuration is unfavorable for increasing in order to improve laser output power the situation of discharge tube length especially, since the increase of laser length, stability decreases.As if the folding structure of employing multitube, though can improve the stability of laser, very difficult again stable each section while of acquisition of power supply discharges equably, and discharges and evenly need take quite numerous and diverse circuit structure, and the laser cost will increase greatly for this reason; 4. the laser discharge tube of said structure is difficult to series, parallel or connection in series-parallel mixing use simply, bring many difficulties because this can give evenly to discharge simultaneously.Therefore folding device is difficult to compactization; 5. the laser of above-mentioned multiple electrode structure discharge positive column is very short, and it is unfavorable that low E/P value gas molecule is excited, and launching efficiency is low.
Purpose of the present invention is that the shortcoming that overcomes above-mentioned prior art adopts multi-electrode extradition discharging metal pipe as laser tube the firing voltage of laser tube is reduced greatly, helps reducing power supply and dielectric strength requirement, improves whole electrical efficiency.Adopt Can, not only can improve mechanical strength, and can improve the heat-sinking capability of laser working gas greatly, simplify discharge tube structure, several arbitrarily series, parallel or string and series-parallel connections of discharge tube can not exert an influence between each discharge tube, and this will be particularly conducive to laser and amplify, improve laser power, the spatial volume of compression Laser Devices.Can form array laser or folded laser.
Description of drawings:
Fig. 1 is the structural representation of multi-electrode extradition discharge metal tube gas laser of the present invention.
Fig. 2 is the winding diagram of multi-electrode extradition discharge metal tube of the present invention between distribution system and power supply.
Fig. 3 is the multi-electrode extradition discharging metal pipe gas laser schematic diagram that places 2 road laser output that pipe 6 in two is arranged in the same discharge metal tube 1.
Fig. 4 is the collapsible multi-electrode extradition of a two-way discharging metal pipe gas laser schematic diagram.
Fig. 5 is the multi-electrode extradition discharging metal pipe gas laser schematic diagram of extradition electrode 7 asymmetric distribution.
Fig. 6 is that interior pipe 6 places discharge metal tube 1 one sides, both out-of-alignment multi-electrode extradition discharging metal pipe gas laser schematic diagrames.
The structure of the metal tube gas laser of multi-electrode extradition discharge of the present invention is such as Fig. 1 Shown in, contain the shell that multi-electrode is extradited the discharge metal tube laser instrument, hold concurrently and do the public of discharge Negative electrode, hereinafter to be referred as discharge metal tube 1, it is better by mechanical strength, thermal conductivity height, electricity Conductance is good, and the metal material that air-tightness is good such as copper, aluminium, stainless steel, kovar alloy etc. are made . Discharge metal tube 1 two ends but by the end made from discharge metal tube 1 same material Face seal cover board 2,2 double pedestals of making total reflection mirror 4 of seal cover board, another piece is held concurrently Make the pedestal of output coupling speculum 5. Gas between seal cover board 2 and the discharge metal tube 1 Dense envelope can lead welding, rubber seal or flange seal. Discharge metal tube 1 is interior by bracing frame 3 That supports has an inner tube 6, and bracing frame 3 vacuum available metal materials or nonmetallic materials are done Become. Inner tube 6 can be by quartz, glass (including the pipe of coolant jacket), aluminium oxide, oxidation The ceramic material such as beryllium is made, inner tube 6 in order to limit discharge channel and fix N (N=2,3, , n) the extradition electrode 7,8 of individual paired storing, and main discharge electrode 9. Extradition electrode 7,8 Reach discharge metal tube with main discharge electrode 9 by the side opening 10 on the discharge metal tube 1 Outside 1, the extradition electrode 7,8 and main discharge electrode 9 and discharge metal tube 1 between the gap Be electric insulation and keep the vacuum sealing. The extradition electrode 7,8 and main discharge electrode 9 by The conductive materials such as tungsten, molybdenum, aluminium, silver, gold, copper are made, and its shape can be needle-like, sheet, ring Shape etc. The extradition electrode 7,8 and the relative position of main discharge electrode 9 on inner tube 6 can as Lower definite: the length L of first pair of degree of drawing electrode 7 trisection inner tube 6, the symmetrical storing, namely The die opening of extradition electrode 7 is d1d
2=L/3, the spacing d between first pair of extradition of second pair of extradition electrode 8 trisection electrode 71d
2, namely the die opening of second pair of extradition electrode 8 is d3d
4=d
1d
2/ 3, other analogize successively, namely n is d to the die opening of extradition electroden-1d
n=d
n-3d
n-2/ 3, when being main discharge electrode 9 for the 3rd pair, the spacing d of second pair of extradition of its trisection electrode 83d
4, namely the anode-cathode distance of main discharge electrode 9 is D1D
2=d
3d
4/ 3, to extradition during electrode, the anode-cathode distance of main discharge electrode is D as n1D
2=d
n-1d
n/ 3. The central point of the anode-cathode distance of extradition electrode and main discharge electrode All the central point with inner tube 6 total length L is identical, that is to say extradition electrode and main discharge Electrode is paired symmetry centered by the central point of the length L of 1/2nd inner tubes 6 all Ground is put and a middle couple is main discharge electrode 9. Increase extradition electrode logarithm, be In order to dwindle discharge " dead band ", select the quantity of extradition electrode, should look the length of inner tube L and deciding. The internal diameter of inner tube 6 can be according to specific optical maser wavelength, pattern and power output etc. Parameter request is determined.
Wiring between multi-electrode extradition discharging metal pipe gas laser and the power supply as shown in Figure 2, distribution system 12 contains and is connected to each between the extradition electrode 7,8 and auxiliary discharge resistance 13 between extradition electrode 8 and the main discharge electrode 9 and the flow restricter 14,15,16 of each grade, also have every auxiliary discharge electric capacity 17 straight or that cause, and be serially connected in every pair of cutout 18 of extraditing between electrode 7,8 and extradition electrode 8 and the main discharge electrode 9, but the input of distribution system 12 links to each other with the output of pressure regulation constant voltage source 11.Be described below particularly: but pressure regulation constant voltage (or voltage stabilizing) power supply 11.Output is connected to the distribution system 12 of multi-electrode extradition discharge, has auxiliary discharge resistance 13 to be connected to each between extradition electrode and extradition electrode and the main discharge electrode in the distribution system 12, and first order flow restricter 14 and first pair of extradition electrode 7 join.Second level flow restricter 15 and second pair of extradition electrode 8 join.Third level flow restricter 16 and main discharge electrode 9 join.Flow restricter can be resistance, inductance coil, potentiometer and their sub-assembly.Also have auxiliary discharge electric capacity 17 and cutout 18 as partiting dc capacitor or conduct initiation electric capacity, cutout 18 can be appliance switch, circuit breaker, rheostat.Cutout 18 is serially connected in first pair of extradition electrode 7 respectively and extradites between electrode 8 and the main discharge electrode 9 with second pair of extradition electrode 8 and second pair.
It is recited above that to place the interior pipe 6 of discharge metal tube 1 and discharge metal tube 1 be coaxial, as shown in Figure 1, or out-of-alignment, as shown in Figure 6.Placing the interior pipe 6 in the discharge metal tube 1 can be one, shown in Fig. 1,2,5,6; Or two, shown in Fig. 3,4.Be in same discharge metal tube 1, to be equipped with in two to manage 6 among Fig. 4, middle light path stringed together with two 45 ° of completely reflecting mirrors 19.Perhaps be built in interior pipe 6 more than two at discharge metal tube.
Above said be that the center symmetry of internally managing 6 length L is mutually put by the fixing extradition electrode 7,8 of interior pipe 6 with main discharge electrode 9, or do not put as symmetric points, as shown in Figure 5 with the central point of interior pipe 6 length L.
Be the working condition of example explanation multi-electrode extradition discharging metal pipe gas laser and distribution system thereof now with Fig. 2.Discharge metal tube 1 is ground connection generally, in order that safety.And but discharge metal tube 1 is connected with the negative pole of pressure regulation constant voltage source 11, but the output of the high pressure of pressure regulation constant voltage source 11 is joined with third level flow restricter 16.Cutout 18 is in normal open state.But give the pressure regulation constant voltage source 11 power supplies, make its output voltage increase gradually, firing voltage V between output voltage E is greater than discharge metal tube 1 and extradition electrode 7
I1The time, glow discharge takes place between discharge metal tube 1 and the extradition electrode 7, the voltage between them drops to operating voltage V thereupon
01Voltage difference (E-V
01) fall on first order flow restricter 14, if make (E-V
01) greater than the firing voltage V between the extradition electrode 7,8
I2, extradite so between electrode 8 and 7 and discharge.Disconnect the cutout 18 between the extradition electrode 7 and 8 this moment, discharge is just only carried out between extradition electrode 8 and discharge metal tube 1.Its operating voltage is V
02Voltage drop (E-V is just arranged on second level flow restricter 15
02), make (E-V
02) greater than the firing voltage V between extradition electrode 8 and the main discharge electrode 9
I3, then discharge between main discharge electrode 9 and the discharge metal tube 1 ... discharge extradition gradually successively, the main discharge electrode to the centre approaches.The process of certain this multi-electrode extradition discharge is carried out very soon, especially when applying sufficiently high constant voltage at the very start.Auxiliary discharge electric capacity 17 and auxiliary discharge resistance 13 play stable ignition voltage V
iAnd the effect of reduction outfield interference.
The present invention makes full use of firing voltage V in the Paschen curve of gas discharge
iThe character that changes with electrode spacing d; Along with the reducing of electrode spacing, firing voltage also reduces in constant air pressure, and therefore V is arranged
I1＞V
I2＞V
I3＞...＞V
InThe relative length of the discharge between main discharge electrode " dead band " can be represented i.e. (1/3) by the level n of extradition discharge
N+1, n 〉=1.
Advantage of the present invention: (1) is to use multi-electrode extradition discharging metal pipe to greatly reduce discharge excited working voltage as the discharge tube of laser (to comprise firing voltage V
iAnd operating voltage V
0).Reduce power loss on the current-limiting resistance, improve whole electro-optical efficiency.So above-mentioned distribution system has improved the uniformity of discharges at different levels, improve because discharge inhomogeneities and the antijamming capability that the difference of interior pipe 6 electrode manufacturings causes.Reduce specification requirement simultaneously to power supply.(2) multi-electrode extradition discharging metal pipe gas laser of the present invention, can make the shell of discharge tube with metal material, not only improved mechanical strength but also helped working gas, reduced gas temperature, thereby improve the operating efficiency of laser by metal material (high heat conductance) heat radiation.(3) another advantage of multi-electrode extradition discharge metal tube gas laser of the present invention is can realize reaching the parallel discharge of multichannel multi-path laser and export simultaneously, as shown in Figure 3 in same discharge metal tube 1.Also can in same discharge metal tube 1, realize the parallel discharge excitation of multitube and laser optical path serial connection to improve laser output power and directivity, compact device design size simultaneously, the stability that improves device work as shown in Figure 4.Can save muffler in the above-mentioned prior art with the laser system of symmetrical multi-electrode extradition discharge metal tube in addition, this is to be very advantageous in free convection, realize that gas is changed and cooling, favourable laser power improves, and for further developing the mobile cooling system condition of providing convenience of forcing.
Embodiment:
Utilize multi-electrode extradition discharging metal pipe gas laser illustrated in figures 1 and 2, embodiments of the invention are described.
Number N=4 of extradition electrode, discharge metal tube 1 is the water cooled double-layered cylinder of being made by oxygen-free copper, long 1250mm, external diameter Φ 60mm, internal diameter Φ 50mm is the cooling water layer between the ectonexine, sidewall has 10 side openings 10, two cooling water interfaces on two of two ends cooling water outlet and inlet holes that side opening is a metal discharge pipe self wherein, the position of all the other 8 side openings 10 and size and interior pipe 6 and 4 extradite electrodes and two main discharge electrodes corresponding.Interior pipe 6 is double-deck water-cooled discharge tubes of being made by GG17 glass, total length 1200mm, and two ends are provided with cooling water outlet and inlet, and each 400mm is provided with first pair of extradition electrode 7, its anode-cathode distance d apart from two ends
1d
2=400mm, each 530mm apart from two ends is provided with second pair of extradition electrode 8, its anode-cathode distance d
3d
4=d
1d
2/ 3 ≈ 140mm, each 575mm place is provided with main discharge electrode 9 apart from two ends, distance D between its two main discharge electrode
1D
2=50mm.In pipe 6 and discharge metal tube 1 coaxial installation, cooling water nozzle and extradition electrode and main discharge electrode all through side opening 10 stretches out discharge metal tube 1 outside and and and discharge metal tube 1 vacuum insulation seal.Two seal cover boards 2 vertical with optical axis and and discharge metal tube 1 airtight lead welding, make the optical resonator of completely reflecting mirror 4 and coupling output reflector 5 formation lasers.In interior pipe 6, fill (the CO about 3000 handkerchiefs
2: N
2: He: Xe) mist.Connect distribution system 12 as Fig. 2.But give the pressure regulation constant voltage source 11 power supplies then.When but the output voltage of pressure regulation constant voltage source 11 reaches about 16KV, the extradition of full pipe discharge finishes, and has only the aura dark space that has between the main discharge electrode 9 about 50mm in interior pipe 6.Under this good operation condition, 60～70W can be arranged.Laser output, laser than the prior art under the same laser work condition, power output has improved, and improved the discharge uniformity, reduced discharge " dead band ", significantly reduce the electrical power that is consumed on the prior art gas laser discharge current-limiting resistance, therefore improved the gross efficiency of laser greatly.
Manage 6 when being provided with in four parallel discharges in same discharge metal tube 1, the internal diameter of interior pipe 6 is 16mm, extradites the same example that is provided with of electrode, and adjustment completely reflecting mirror 4 positions and coupled mirrors 5 make and manage 6 in four discharges is the optics series connection, the formation laserresonator.But give pipe 6 power supplies in four symmetry extradition discharges by pressure regulation constant voltage source 11 and distribution system 12, make pipe 6 parallel discharges simultaneously in four, under the condition of work of the same example, can produce the laser output about 200W.The external diameter of discharge metal tube 1 is got the same example of 200mm water-cooling structure.
Claims (5)
1. a multi-electrode is extradited the discharging metal pipe gas discharge device.It is characterized in that containing the double as laser public cathode made by metal material and the discharge metal tube (1) of shell, place discharge metal tube (1) both ends of the surface that two seal cover boards (2) are arranged, the pedestal of cover plate sealing together (2) double as completely reflecting mirror (4), the pedestal of another piece seal cover board (2) double as laser beam output coupled mirrors (5), place in the discharge metal tube (1) by what bracing frame (3) supported interior pipe (6) arranged, on interior pipe (6), be fixed with N (N=2,3, n) the extradition electrode (7) of individual paired storing, (8), at extradition electrode (7), (8) middle electrode is main discharge electrode (9) in, be fixed on the extradition electrode (7) on the interior pipe (6), (8) all stretch out discharge metal tube (1) with main discharge electrode (9) but the continuous distribution system (12) of outer and input and pressure regulation constant voltage source (11) output is connected, distribution system (12) is included in every pair of extradition electrode (7), (8) be connected with auxiliary discharge resistance (13) between and between main discharge electrode (9) and the extradition electrode (8), and with every pair the extradition electrode (7), (8) flow restricter (14) of corresponding each grade and between extradition electrode (8) and the main discharge electrode (9), (15), (16), also have the auxiliary discharge electric capacity (17) of stopping direct current or initiation, and be serially connected in every pair of extradition electrode (7), (8) and the cutout (18) between extradition electrode (8) and the main discharge electrode (9).
2. according to the described a kind of multi-electrode extradition discharging metal pipe gas discharge device of claim 1, it is characterized in that discharge metal tube (1) and interior pipe (6) all have double-layer tube wall, is water-cooled layer between the two-layer tube wall.
3. according to claim 1 or 2 described a kind of multi-electrode extradition discharging metal pipe gas discharge devices, it is characterized in that placing the interior pipe (6) in the discharge metal tube (1) is coaxial with discharge metal tube (1), or out-of-alignment.
4. according to the described a kind of multi-electrode extradition discharging metal pipe gas discharge device of claim 1, it is characterized in that placing the interior pipe (6) in the discharge metal tube (1) is one, or two, or many.
5. according to the described a kind of multi-electrode extradition discharging metal pipe gas discharge device of claim 1, the extradition electrode (7), (8) and the main discharge electrode (9) that it is characterized in that being fixed on the interior pipe (6) are that the central point of internally managing (6) length L is mutually put, or do not put as symmetric points with the central point of interior pipe (6) length L.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94112187 CN1034253C (en) | 1994-06-03 | 1994-06-03 | Metallic tube gas laser and its power distribution system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 94112187 CN1034253C (en) | 1994-06-03 | 1994-06-03 | Metallic tube gas laser and its power distribution system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1100845A CN1100845A (en) | 1995-03-29 |
| CN1034253C true CN1034253C (en) | 1997-03-12 |
Family
ID=5035982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 94112187 Expired - Fee Related CN1034253C (en) | 1994-06-03 | 1994-06-03 | Metallic tube gas laser and its power distribution system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1034253C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015172263A1 (en) * | 2014-05-12 | 2015-11-19 | 徐海军 | Radio-frequency excited gas laser and preparation method therefor |
-
1994
- 1994-06-03 CN CN 94112187 patent/CN1034253C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1100845A (en) | 1995-03-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3978385B2 (en) | Apparatus and method for generating extreme ultraviolet radiation based on gas discharge | |
| EP0463815B1 (en) | Vacuum ultraviolet light source | |
| US20020061045A1 (en) | Portable low-power gas discharge laser | |
| NO149055B (en) | HOUSING MANUAL GAS WASTER WITH HIGH-FREQUENCY TRANSMISSION EXHAUST | |
| JPH02288061A (en) | High power emitter | |
| CN102025094B (en) | Transverse discharge device for pulsed gas laser | |
| JPH1056220A (en) | Corona generator | |
| KR101870467B1 (en) | Rfexcited laser assembly | |
| US3670256A (en) | Laser guide construction | |
| CN1034253C (en) | Metallic tube gas laser and its power distribution system | |
| GB2098389A (en) | Apparatus for producing laser radiation | |
| US4677637A (en) | TE laser amplifier | |
| US4449220A (en) | Apparatus and method for deposition of electrical power in an electric discharge laser | |
| US20080061669A1 (en) | Dielectric barrier discharge excimer light source | |
| CN2595021Y (en) | Radio frequency excited CO2 waveguide laser | |
| CA1088618A (en) | Stabilized repetitively pulsed flashlamps | |
| CN85100563A (en) | High power he-ne laser | |
| US5067135A (en) | Gas laser apparatus | |
| CN101849331B (en) | Laser having distributed inductances | |
| US4260958A (en) | Apparatus and method for deposition of electrical power in an electric discharge laser | |
| JP3168848B2 (en) | Dielectric barrier discharge lamp device | |
| JP2877573B2 (en) | Electric circuit of metal vapor laser device | |
| US3829732A (en) | Gas-dynamic discharge light | |
| JPS61240690A (en) | Gas laser oscillator | |
| US5033059A (en) | Gas laser apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |