CN105588776A - Fine particulate matter adsorption device and adsorption method thereof - Google Patents
Fine particulate matter adsorption device and adsorption method thereof Download PDFInfo
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- CN105588776A CN105588776A CN201510917568.4A CN201510917568A CN105588776A CN 105588776 A CN105588776 A CN 105588776A CN 201510917568 A CN201510917568 A CN 201510917568A CN 105588776 A CN105588776 A CN 105588776A
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- fine particle
- electric field
- adsorbent equipment
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- drive electrode
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
- G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
Abstract
The embodiment of the invention relates to a fine particulate matter adsorption device and an adsorption method thereof. The fine particulate matter adsorption device comprises a unipolar charger for producing unipolar electric ions adsorbed on fine particulate matter and driving electrodes for producing a driving electric field, wherein the fine particulate matter is stably adsorbed on the adsorption device after the fine particulate matter adsorbed with the electric ions enters the driving electric field. According to the fine particulate matter adsorption device and the adsorption method, the unipolar electric ions are produced by the unipolar charger, the produced unipolar electric ions are adsorbed on fine particulate matter, meanwhile the driving electrodes are added for the adsorption device, the driving electric field is formed between the driving electrodes, the electriferous fine particulate matter is stably adsorbed on the adsorption device under the effect of an electric field force after entering the driving electric field by controlling the voltages at the two ends of each electrode, and accordingly the adsorption capacity of the adsorption device to the fine particulate matter is effectively improved.
Description
Technical field
The embodiment of the present invention relates to MEMS Manufacture and application field, relates in particular to a kind of fine particleAdsorbent equipment and adsorption method thereof.
Background technology
Micromechanical resonator based on MEMS technique is the pass of realizing the microminiaturization of PM2.5 monitoring equipmentKey device. The oscillating mass of micro-resonator possesses sensitiveness to the frequency of resonance, before and after depositing by detectionDifference on the frequency, can calculate the quality of adhering to fine particle, then calculate in air sample to be measured correspondingThe concentration of PM2.5 fine particle. Existing research lays particular emphasis on and detects mechanism research and mass-sensitive deviceManufacturing process, gas treatment, peripheral driver and testing circuit are continued to use macroscopical equipment more, and device is being grownThe Study on Problems of the practical application scene under the conditions such as phase fine particle deposition, gas disturbance, air humidityComparatively deficient.
But fine particle deposits on micro-resonator and the ability of adhering to is embodiment device microminiaturization, realityNow install the key that high accuracy and high reliability detect. Based on above analysis, need a kind of effectively stableFine particle deposition, absorption and the Design and implementation device of discharging, to realize high accuracy, small size, movingThe detection of the continuous PM2.5 fine particle of state.
Summary of the invention
The object of the embodiment of the present invention is to propose a kind of fine particle adsorbent equipment and adsorption method thereof,Be used for solving existing particle adsorbent equipment absorption affinity little, particle is easily de-from adsorbent equipmentFrom, affect the problem of certainty of measurement.
For achieving the above object, the embodiment of the present invention provides a kind of fine particle adsorbent equipment, described dressPut and comprise: one pole charge electric appliance, for generation of the unipolarity electron ion being adsorbed on fine particle; DriveElectrode, for generation of driving electric field, enters described driving when described absorption has electro-ionic fine particleAfter electric field, under the effect of electric field force, what described fine particle was stable is adsorbed on described adsorbent equipment.
The embodiment of the present invention also provides a kind of adsorption method of fine particle adsorbent equipment, described methodSpecifically comprise the steps: to discharge unipolarity electron ion by described one pole charge electric appliance, make described thinOn particle, absorption has sufficient electric charge; Thereby apply described in driving voltage generation to described drive electrodeDrive electric field; By described micropump driving device, described fine particle is sent in described driving electric field,Under the effect of electric field force, described fine particle moves to resonator, is finally adsorbed on resonator;The voltage of reversion drive electrode produces reverse driving electric field, makes described fine particle depart from described absorptionDevice.
Fine particle adsorbent equipment and adsorption method thereof that the embodiment of the present invention proposes, charged by one poleDevice produces unipolarity electron ion, and the unipolarity electron ion of generation is adsorbed on fine particle. Inhaling simultaneouslyOn adsorption device, increase drive electrode, between drive electrode, be formed with driving electric field, drive electricity by controlThe voltage at utmost point two ends, is entering after driving electric field, in the effect of electric field force charged fine particleUnder, stable is adsorbed on adsorbent equipment, thereby has effectively increased adsorbent equipment to fine particleAdsorption capacity, makes measurement result more accurate.
Brief description of the drawings
In order to be illustrated more clearly in the technical scheme in the embodiment of the present invention, below will be to embodiment or existingThere is the accompanying drawing of required use in technical description to be briefly described, apparently, in the following describesAccompanying drawing be only some embodiments of the present invention, for those of ordinary skill in the art, notPay under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of the fine particle adsorbent equipment of the embodiment of the present invention;
Fig. 2 is the adsorption method flow chart of embodiment of the present invention fine particle adsorbent equipment.
Detailed description of the invention
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
The embodiment of the present invention has proposed a kind of fine particle adsorbent equipment, produces single by one pole charge electric appliancePolarity electron ion, the unipolarity electron ion of generation is adsorbed on fine particle. Simultaneously on adsorbent equipmentIncrease drive electrode, between drive electrode, be formed with driving electric field, by controlling drive electrode two endsVoltage, makes charged fine particle entering after driving electric field, under the effect of electric field force, stableBe adsorbed on adsorbent equipment, thereby effectively increased the adsorption capacity of adsorbent equipment to fine particle,Make measurement result more accurate.
Fig. 1 is the structural representation of the fine particle adsorbent equipment of the embodiment of the present invention, as shown in Figure 1,The fine particle adsorbent equipment 1 of the embodiment of the present invention comprise one pole charge electric appliance 10, drive electrode 20,Drive electric field 30 and micro-resonator 40.
Fine particle 50 by the opening 60 of fine particle adsorbent equipment 1 enter adsorbent equipment inPortion.
One pole charge electric appliance 10 can produce the unipolarity electron ion 11 being adsorbed on fine particle 50,Concrete, on one pole charge electric appliance 10, be provided with spray point 12. The diameter of spray point 12 is 20 microns,Length is 500 microns, and spray point 12 is by using high-aspect-ratio dry method to carve on silicon substrate materialEtching technique, and two-sided plated metal copper production forms. Because spray point 12 tip dimensions are in micron amountLevel, and two sides metal distance is very near, only need to use the small-power power just can be at spray point 12 endsEnd forms electrion effect, at the effective corona discharge of the interior formation of cavity 13, by vertical spray point 12Be placed in the middle of cavity 13, under voltage drive, discharge enough unipolarity electron ion 11, unipolarity ionizationThe carrying capacity of son 11 can raise and be promoted with voltage. When fine particle 50 through cavitys 13 withAfter, adsorb a large amount of unipolarity electron ion 11.
The fine particle adsorbent equipment of the embodiment of the present invention also comprises filter 14, for to fine grainedThe diameter of thing is filtered. A part of particle larger diameter can be filtered out, only allow straightThe less particle in footpath passes through. For example, the fine particle that only allows particle diameter to be less than PM2.5 leads toCross. Filter 14 can be arranged on one pole charge electric appliance 10, also can be arranged on separately absorption dressOther positions of putting.
Fine particle 50 will enter drive electrode 20 inside, drive electrode 20 after cavity 13Can produce and drive electric field 30, enter when described absorption has the fine particle 50 of unipolarity electron ion 11Enter to drive after electric field 30, can be subject to downward electric field force, under the effect of electric field force, fine particle30 to micro-resonator 40 accelerated motions, final stable being adsorbed on micro-resonator 40.
Concrete, drive electrode 20 comprises the first drive electrode 21 and the second drive electrode 22, theBetween one drive electrode 21 and the second drive electrode 22, apply voltage, drive electric field 30 thereby produce.Drive the direction of electric field 30 by adjustment, make absorption have the fine particle 50 of unipolarity electron ion 11Be subject to downward electric field force, under the effect of electric field force, fine particle 30 accelerates to micro-resonator 40Motion, final stable being adsorbed on micro-resonator 40, thus effectively increase adsorbent equipment pairThe absorption affinity of fine particle.
The fine particle adsorbent equipment of the embodiment of the present invention also comprises micropump driving device, and Micropump drives dressPut external force can be provided, fine particle is sent in described driving electric field. Micropump driving device can arrangeOn the first drive electrode 21, also can be arranged on separately other positions of adsorbent equipment.
The fine particle adsorbent equipment of the embodiment of the present invention, after having tested, can pass through firstDrive electrode 21 and the second drive electrode 22 apply reversal voltage and produce reverse driving electric field, make instituteState fine particle and depart from described adsorbent equipment. Thereby fine particle effectively can be discharged to adsorbent equipment,Do not affect the precision of follow-up measurement.
The fine particle adsorbent equipment of the embodiment of the present invention, produces unipolarity ionization by one pole charge electric applianceSon, the unipolarity electron ion of generation is adsorbed on fine particle. On adsorbent equipment, increase and drive simultaneouslyElectrode, is formed with driving electric field between drive electrode, by controlling the voltage at drive electrode two ends, makeObtain charged fine particle and entering after driving electric field, under the effect of electric field force, stable is adsorbed onOn adsorbent equipment, thereby effectively increase the adsorption capacity of adsorbent equipment to fine particle, made to surveyAmount result is more accurate. After test completes, produce reverse driving electric field by reversal voltage, makeFine particle is subject to rightabout electric field force and departs from described adsorbent equipment, thereby can be by fine grainedThing is effectively discharged adsorbent equipment, does not affect the precision of follow-up measurement.
The embodiment of the present invention has also proposed a kind of adsorption method of fine particle adsorbent equipment, and Fig. 2 is thisThe adsorption method flow chart of inventive embodiments fine particle adsorbent equipment, as shown in Figure 2, the method toolBody comprises the steps:
Step 201, discharges unipolarity electron ion by described one pole charge electric appliance, makes described fine grainedOn thing, absorption has sufficient electric charge;
Concrete, produce unipolarity electron ion 11 by one pole charge electric appliance 10, concrete, one pole lotusOn electrical equipment 10, be provided with spray point 12. The diameter of spray point 12 is 20 microns, and length is 500 micro-Rice, by use high-aspect-ratio dry etch process on silicon substrate material, and two-sided plated metal copperManufacture forms. Because spray point 12 tip dimensions are in micron dimension, and two sides metal distance is very near,Only need to use small-power power just can form electrion effect at spray point 12 ends, at cavityThe effective corona discharge of 13 interior formation, is vertically placed in spray point 12 in the middle of cavity 13, swashs at voltageEncourage the enough unipolarity electron ion 11 of lower release, the carrying capacity of unipolarity electron ion 11 can raise with voltageAnd promoted. When fine particle 50 is after cavity 13, adsorb a large amount of unipolarity ionizationSon 11.
Step 202, produces described driving electric field thereby apply driving voltage to described drive electrode;
Concrete, between the first drive electrode 21 and the second drive electrode 22, apply voltage, therebyProduce and drive electric field 30.
Step 203, sends described fine particle into described driving electric field by described micropump driving deviceIn, under the effect of electric field force, described fine particle moves to resonator, is finally adsorbed on resonatorOn;
Concrete, apply external force by micropump driving device to fine particle 50, by fine particle 50Send into and drive in electric field 30, enter driving when absorption has the fine particle 50 of unipolarity electron ion 11After electric field 30, can be subject to downward electric field force, under the effect of electric field force, fine particle 30 is to micro-Resonator 40 accelerated motions, final stable being adsorbed on micro-resonator 40.
Step 204, the voltage of reversion drive electrode produces reverse driving electric field, makes described fine grainedThing departs from described adsorbent equipment.
Concrete, after completing, test can pass through at the first drive electrode 21 and the second drive electrode22 apply reversal voltage produces reverse driving electric field, the reverse electricity that described fine particle 50 is subject toField force, thus described adsorbent equipment departed from.
Above-described detailed description of the invention, enters object of the present invention, technical scheme and beneficial effectGone further description, institute it should be understood that and the foregoing is only the specific embodiment of the present inventionOnly, the protection domain being not intended to limit the present invention, within the spirit and principles in the present invention all, instituteAny amendment of making, be equal to replacement, improvement etc., within protection scope of the present invention all should be included in.
Claims (7)
1. a fine particle adsorbent equipment, is characterized in that, described device comprises:
One pole charge electric appliance, for generation of the unipolarity electron ion being adsorbed on fine particle;
Drive electrode, for generation of driving electric field, enters when described absorption has electro-ionic fine particleAfter described driving electric field, under the effect of electric field force, what described fine particle was stable is adsorbed on described suctionOn adsorption device.
2. fine particle adsorbent equipment according to claim 1, is characterized in that, described one poleCharge electric appliance is provided with spray point, and described spray point is used for discharging unipolarity electron ion.
3. fine particle adsorbent equipment according to claim 1, is characterized in that, described drivingElectrode specifically comprises the first drive electrode and the second drive electrode, and described the first drive electrode and second drivesBetween moving electrode, produce described driving electric field.
4. fine particle adsorbent equipment according to claim 1, is characterized in that, described deviceAlso comprise filter, filter for the diameter to fine particle.
5. fine particle adsorbent equipment according to claim 1, is characterized in that, described deviceAlso comprise micropump driving device, for fine particle being sent in described driving electric field.
6. fine particle adsorbent equipment according to claim 1, is characterized in that, described drivingElectrode produces reverse driving electric field by reversal voltage, makes described fine particle depart from described absorption dressPut.
7. according to the adsorption method of fine particle adsorbent equipment described in claim 1-6, it is characterized in that,Described method specifically comprises the steps:
Discharge unipolarity electron ion by described one pole charge electric appliance, absorption on described fine particle is hadSufficient electric charge;
Thereby apply driving voltage to described drive electrode and produce described driving electric field;
By described micropump driving device, described fine particle is sent in described driving electric field, at electric fieldUnder the effect of power, described fine particle moves to resonator, is finally adsorbed on resonator;
The voltage of reversion drive electrode produces reverse driving electric field, makes described in described fine particle disengagingAdsorbent equipment.
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| CN201510917568.4A CN105588776A (en) | 2015-12-10 | 2015-12-10 | Fine particulate matter adsorption device and adsorption method thereof |
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| CN201510917568.4A CN105588776A (en) | 2015-12-10 | 2015-12-10 | Fine particulate matter adsorption device and adsorption method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109351709A (en) * | 2018-10-09 | 2019-02-19 | 清华大学深圳研究生院 | A kind of crystal cleaning device based on piezo-electric measurement and crystal clean method |
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| CN104390901A (en) * | 2014-11-17 | 2015-03-04 | 成都柏森松传感技术有限公司 | Monitoring method and system of concentration of micro-particle in air |
| CN104819918A (en) * | 2015-05-04 | 2015-08-05 | 东南大学 | Detection device and detection method of dust concentration |
| CN205317609U (en) * | 2015-12-10 | 2016-06-15 | 中国电子科技集团公司信息科学研究院 | Fine particles adsorption equipment |
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| CN1869648A (en) * | 2006-06-12 | 2006-11-29 | 中国科学院合肥物质科学研究院 | System for investigating harmful nano-particle in air |
| US20110155565A1 (en) * | 2009-12-31 | 2011-06-30 | National Chung Cheng University | Microfluidic driving system |
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| CN109351709A (en) * | 2018-10-09 | 2019-02-19 | 清华大学深圳研究生院 | A kind of crystal cleaning device based on piezo-electric measurement and crystal clean method |
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