CN105588772A - Pressure sensitive material strain factor testing device and method - Google Patents
Pressure sensitive material strain factor testing device and method Download PDFInfo
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- CN105588772A CN105588772A CN201610150467.3A CN201610150467A CN105588772A CN 105588772 A CN105588772 A CN 105588772A CN 201610150467 A CN201610150467 A CN 201610150467A CN 105588772 A CN105588772 A CN 105588772A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/32—Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
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Abstract
The invention discloses a pressure sensitive material strain factor testing device and method. The device comprises a vibration isolation table, a cantilever beam testing component, a modal vibrator, a vibrator signal source, a laser non-contact vibration measuring instrument, a universal meter, a digital oscilloscope and a computer; the cantilever beam testing component is placed on the modal vibrator and vibrates at certain frequency under the action of the vibrator signal source, and the universal meter is connected with a sensitive structure composed of a pressure sensitive material on a cantilever through an interconnecting wire and used for measuring the resistance value of the pressure sensitive material and calculating the relative variable quantity of the resistance value; a probe of the laser non-contact vibration measuring instrument can emit lasers to the top end of a cantilever beam, the output end of the laser non-contact vibration measuring instrument is connected with the digital oscilloscope and used for recording analog signal output of the laser non-contact vibration measuring instrument, data can be input into the computer for data analysis, and strain and strain factors are obtained. The pressure sensitive material strain factor testing device is simple in structure, high in detection stability and capable of meeting the requirement for high-precision detection.
Description
Technical field
The present invention relates to the test of material strain factorial experiment, particularly a kind of pressure-sensitive materialMaterial strain factor testing arrangement and method of testing thereof.
Background technology
Along with the development of modern science and technology, pressure sensitive (as: diffuse silicon electricityResistance, polysilicon resistance, carborundum resistance etc.) strain factor as weigh material pressure-sensitiveA kind of important parameter of performance quality, its application is more and more extensive. But strain at presentIn calculating, there is more problem in the measurement of the factor, as: many factors in measuring processThe problems such as the error of bringing, make, in the calculating of strain factor, to be difficult to actual measurement.
Therefore, needing a kind of pressure sensitive simple to operate, that measure error is little of research and development badly shouldVariable factor measurement mechanism and measuring method.
Summary of the invention
In order to address the above problem, the inventor has carried out research with keen determination, designs onePlant and can accurately measure the testing arrangement of pressure sensitive strain factor and test accordinglyMethod.
The object of the present invention is to provide following aspect:
(1) testing arrangement for pressure sensitive strain factor, wherein, described testDevice comprises: vibration isolators 1, cantilever beam test member 2, modality vibration exciter 3, excitingDevice signal source 4, with probe 6 laser noncontact vibration measuring set 5, universal meter 7,Digital oscilloscope 8 and computer 9.
(2) according to the testing arrangement above-mentioned (1) Suo Shu, wherein,
Described cantilever beam test member 2 is placed on modality vibration exciter 3; And/or
Described modality vibration exciter 3 vibrates under the effect of vibrator signal source 4, preferably withCertain frequency vibrates; And/or
The probe 6 of laser noncontact vibration measuring set 5 can Emission Lasers, preferably its wavelengthFor 632.8nm, more preferably this laser can incide cantilever beam top 21, described laserComprise incident light 61 and reverberation 62, preferably incident light 61 and reverberation 62 wavelength X phasesDeng; And/or
The pressure that universal meter 7 consists of interconnection line 27 and the pressure sensitive 26 on overarm armSensing structure is connected, for measuring pressure-sensitive material resistance resistance under different excited frequencies, andCalculate piezo-resistance resistance relative variation, the preferred aluminum interconnecting of described interconnection line; With/Or
Output and the digital oscilloscope 8 of laser noncontact vibration measuring set 5 join, and useIn the analog signal output of recording laser noncontact vibration measuring set 5, or for surveyingThe output signal of determining laser noncontact vibration measuring set 5, data can be input to computer9, computer 9 is preferred for carrying out data analysis processing, calculates under certain excited frequencyCantilever beam strain.
(3) according to the testing arrangement above-mentioned (1) or (2) Suo Shu, wherein, described cantilever beamTest member 2 comprises silicon supporter 23, cantilever beam 24, cantilever beam top mass 25,Preferably do pressure sensitive 26 resistor stripes at cantilever beam root 22, and draw interconnection line 27,Or preferably at cantilever beam root 22 buried regions interconnection lines 27.
(4) according to above-mentioned (1) to the testing arrangement one of (3) Suo Shu, wherein,
Described pressure sensitive is prepared on the root 22 of cantilever beam test member 2, directlyForm piezo-resistance; And/or
Described modality vibration exciter 3 can receive vibrator signal source 4 signals, and with certain frequencyRate vibration, is out of shape cantilever beam test member 2 and pressure sensitive 26.
(5) according to above-mentioned (1) to the testing arrangement one of (4) Suo Shu, wherein,
The probe 6 of described laser noncontact vibration measuring set 5 can transmit and receive wavelengthEqual laser; And/or
Described digital oscilloscope 8 can receive vibration measuring set 5 output signals, and data can be defeatedEnter to computer 9, carry out data analysis processing, and calculate strain.
(6) a cantilever beam test member, is preferred for above-mentioned (1) to described in one of (5)Testing arrangement, wherein, this member comprises silicon supporter 23, cantilever beam 24, cantileverBack end mass 25, preferably at cantilever beam root 22 buried regions interconnection lines 27.
(7) according to the member above-mentioned (6) Suo Shu, wherein, at described silicon supporter 23 1Side has cantilever beam 24, has a mass 25 on the top of cantilever beam 24, preferably can beCantilever beam root 22 does pressure sensitive 26 resistor stripes, and draws interconnection line 27.
(8) according to the manufacture craft of the cantilever beam test member above-mentioned (6) or (7) Suo Shu,Wherein, comprise the following steps:
Twin polishing<100>crystal orientation high resistant monocrystalline silicon piece, electronics cleaning fluid cleans, theOnce oxidation, positive growth oxide layer, thickness 500-600nm, monocrystalline silicon piece frontGrowth aluminium lamination, thickness 400-500nm, photoetching for the first time, etching front aluminium lamination formsAluminium electrode, grown silicon nitride, thickness 150-200nm, photoetching for the second time, etching nitrogenSiClx layer, forms resistor stripe and aluminium electrode window through ray, piezo-resistance to be prepared; For the third timePhotoetching, by dual surface lithography technology, the photoetching monocrystalline silicon piece back side, forms silicon cup window,Four mask, photoetching monocrystalline silicon piece front, deep etching fabrication techniques structure of silicon cup,Deep etching technology discharges cantilever beam test structure, forms and carries mass block structure cantileverBeam can be made piezo-resistance in this cantilever beam test member.
(9) method of testing for pressure sensitive strain factor, preferably adopts above-mentioned (1)To the testing arrangement one of (5) Suo Shu or above-mentioned (6) or (7) described cantilever beam test structurePart is tested, and wherein, the method comprises the following steps:
1) the each parts of connecting test device, are produced on cantilever beam test structure by pressure sensitiveOn part 2;
2) adjusting vibration exciter signal source 4, makes vibrator vibrate with certain frequency, causesCantilever beam test member 2 is vibrated;
3) universal meter 7 records pressure-sensitive material resistance resistance under different excited frequencies, calculatesGo out pressure-sensitive material resistance resistance relative variation under different excited frequencies;
4) laser noncontact vibration measuring set 5 signal under 6 reception different frequencies of popping one's head in;
5) analog signal of digital oscilloscope 8 recording laser noncontact vibration measuring sets 5Export and be input to computer 9 and carry out data analysis processing, realize strain and calculate;
6), according to strain and resistance variations, calculate strain factor.
The beneficial effect that the present invention has comprises:
1, pressure sensitive is prepared in special cantilever beam test member, directly forms and pressesQuick resistance, has reduced test error;
2, modality vibration exciter drives sample to vibrate with certain frequency, has realized strainControllability, and easy and simple to handle;
3, adopt the laser noncontact vibration measuring set of band probe to record piezo-resistance shapeBecome, precision is high, and accuracy is good;
4, universal meter is connected with cantilever beam root buried regions interconnection line, has realized different sharpUnder vibration frequency, pressure-sensitive material resistance resistance is measured;
5, apparatus of the present invention good stability, strain factor accuracy in detection is high.
Brief description of the drawings
Fig. 1 is pressure sensitive strain factor testing arrangement schematic diagram of the present invention;
Fig. 2 is cantilever beam test member schematic diagram of the present invention;
Fig. 3 is that forces are applied that rear suspension beam occurs for the cantilever beam test member of Fig. 2Schematic diagram when elastic deformation.
Drawing reference numeral explanation
1-vibration isolators;
2-cantilever beam test member;
21-cantilever beam top;
22-cantilever beam root;
23-silicon supporter;
24-cantilever beam;
25-mass;
26-pressure sensitive;
27-interconnection line;
3-modality vibration exciter;
4-vibrator signal source;
5-laser noncontact vibration measuring set;
6-Laser Non-contact Probe;
61-incident light;
62-reverberation;
7-universal meter;
8-digital oscilloscope;
9-computer.
Detailed description of the invention
Below by the present invention is described in detail, the features and advantages of the invention willBecome more clear, clear and definite along with these explanations.
Here special word " exemplary " means " as example, embodiment or explanationProperty ". Here needn't be interpreted as being better than as " exemplary " illustrated any embodiment orBe better than other embodiment. Although the various aspects of embodiment shown in the drawings,Be unless otherwise indicated, needn't draw in proportion accompanying drawing.
According to a kind of preferred embodiment provided by the invention, as shown in Figure 1, pressure-sensitiveMaterial strain factor testing arrangement comprises vibration isolators (preferably model is POT-G10-08)1, cantilever beam test member 2, modality vibration exciter (preferably model is JZK-220N) 3,Vibrator signal source (preferably model is YE1311) 4, laser noncontact vibration measurement(preferred model is Agilent for instrument (preferably model is V1002) 5, universal meter34401A) 7, digital oscilloscope (preferably model is TDS3032) 8 and computer 9.
In further preferred embodiment, described cantilever beam test member 2 is placedOn modality vibration exciter 3, modality vibration exciter 3 under the effect of vibrator signal source 4 withCertain frequency vibrates, and frequency is controlled; Universal meter 7 is by interconnection line 27 and overarmThe pressure sensitive structural that pressure sensitive 26 on arm forms is connected, for measuring different excitings frequentlyPressure-sensitive material resistance resistance under rate, and calculate piezo-resistance resistance relative variation; SwashThe probe 6 of light noncontact vibration measuring set 5 can Emission Lasers to cantilever beam top 21, swashOutput and the digital oscilloscope 8 of light noncontact vibration measuring set 5 join, for recordThe analog signal output of laser noncontact vibration measuring set 5, or for measuring laserThe output signal of noncontact vibration measuring set 5, data can be input to computer 9, carry outData analysis processing, calculates the strain of certain excited frequency Analysis of A Cantilever Beam Under. The above pressureEquipment in quick material strain factor testing arrangement is placed on vibration isolators 1, to reduceThe impact of external environment. Adopt the laser noncontact vibration measuring set record of band probe to pressQuick resistance deformation, precision is high, and accuracy is good; Universal meter and cantilever beam root buried regionsInterconnection line is connected, and has realized pressure-sensitive material resistance resistance under different excited frequencies and has measured.
Further preferred embodiment in, the pressure that described pressure sensitive 26 formsSensing structure is prepared on the root 22 of cantilever beam test member 2, directly forms pressure-sensitive electricityResistance, described modality vibration exciter 3 can receive vibrator signal source 4 signals, and with certain frequencyRate vibration, becomes the pressure sensitive structural that cantilever beam test member 2 and pressure sensitive 26 formShape. The probe 6 of described laser noncontact vibration measuring set 5 can Emission Lasers, its wavelengthFor 632.8nm, this laser can incide cantilever beam top 21, and described laser includesPenetrate light 61 and reverberation 62, incident light 61 equates with reverberation 62 wavelength X. Described numberWord oscillograph 8 can receive the output signal of laser noncontact vibration measuring set 5, and data canBe input to computer 9, carry out data analysis processing, and calculate strain, according to resistanceResistance, change in resistance amount and strain etc. calculate strain factor.
One preferred embodiment in, described for strain factor measurement mechanismCantilever beam test member 2, as shown in Figure 2, it comprises silicon supporter 23, cantilever beam 24With cantilever beam top mass 25; Cantilever beam test structure 2 is based on microelectron-mechanicalThe test chip that process technology (MEMS technology) is made, does at cantilever beam root 22Pressure sensitive 26 resistor stripes, and draw interconnection line 27, or at cantilever beam root 22Buried regions interconnection line 27.
In further preferred embodiment, have outstanding in described silicon supporter 23 1 sidesArm beam 24, has a mass 25 on the top of cantilever beam 24, can be at cantilever beam root22 do pressure sensitive resistor stripe 26, and draw interconnection line 27.
In embodiment further, described cantilever beam test member 2 be based onThe test chip that microelectron-mechanical process technology (MEMS technology) is made, describedThe manufacture craft of cantilever beam test member 2, comprises the following steps:
Twin polishing<100>crystal orientation high resistant monocrystalline silicon piece, electronics cleaning fluid cleans, theOnce oxidation, positive growth oxide layer, thickness 500-600nm, monocrystalline silicon piece frontGrowth aluminium lamination, thickness 400-500nm, photoetching for the first time, etching front aluminium lamination formsAluminium electrode, grown silicon nitride, thickness 150-200nm, photoetching for the second time, etching nitrogenSiClx layer, forms resistor stripe and aluminium electrode window through ray, piezo-resistance to be prepared; For the third timePhotoetching, by dual surface lithography technology, the photoetching monocrystalline silicon piece back side, forms silicon cup window,Four mask, photoetching monocrystalline silicon piece front, deep etching fabrication techniques structure of silicon cup,Deep etching technology discharges cantilever beam test structure, forms and carries mass block structure cantileverBeam; According to the preparation technology of tested pressure sensitive, piezo-resistance is produced on to cantileverIn beam test member 2. Adopt microelectron-mechanical process technology to make, cantilever beam testComponent volume is little, and cost is low.
One preferred embodiment in, adopt described testing arrangement or described cantileverBeam test member is tested, and this method of testing comprises the following steps:
1) the each parts of connecting test device, are produced on cantilever beam test structure by pressure sensitiveOn part 2;
2) adjusting vibration exciter signal source 4, makes modality vibration exciter 3 with certain frequency vibration,Cause that cantilever beam test member 2 vibrates;
3) universal meter 7 records pressure-sensitive material resistance resistance under different excited frequencies, calculatesGo out pressure-sensitive material resistance resistance relative variation under different excited frequencies;
4) laser noncontact vibration measuring set 5 signal under 6 reception different frequencies of popping one's head in;
5) analog signal of digital oscilloscope 8 recording laser noncontact vibration measuring sets 5Export and be input to computer 9 and carry out data analysis processing, realize strain and calculate;
6), according to strain and resistance variations, calculate strain factor.
In further preferred embodiment, cantilever beam test member 2 is placed onOn modality vibration exciter 3, under the effect of vibrator signal source 4, modality vibration exciter 3 withCertain frequency vibration, causes that cantilever beam test member 2 vibrates; As shown in Figure 3,Under vibrator effect, cantilever beam top 21 masses 25 are subject to power F, cantilever beam 24Elastic deformation occurs, and based on piezoresistive effect, root pressure sensitive 26 resistances occurChange, measure pressure-sensitive material resistance resistance under different excited frequencies with universal meter 7, countCalculate pressure-sensitive material resistance resistance relative variation under different excited frequencies. Adopt laserProbe 6 Emission Lasers (wavelength the is 632.8nm) incident of noncontact vibration measuring set 5To cantilever beam top 21, laser comprises incident light 61 and reverberation 62, its wavelength X phaseDeng, before and after cantilever beam structures is subject to exciting, probe 6 receives signal and changes,The analog signal output of digital oscilloscope 8 recording laser noncontact vibration measuring sets 5,Afterwards the data obtained is input to computer 9 and carries out the analyzing and processing of data, comprehensively above-mentioned,Pressure sensitive strain factor is calculated.
Wherein, described MEMS technology refer to microelectron-mechanical system of processing (MEMS,Micro-Electro-MechanicalSystem), be also called microelectromechanical systems,Micro-system, micromechanics etc., be a kind of advanced person's manufacturing technology platform, is at microelectronicsOn technology (semiconductor fabrication) basis, grow up, merged photoetching, corruptionThe skills such as erosion, film, LIGA, the micro-processing of silicon, the micro-processing of non-silicon and precision optical machinery processingArt make high-tech electronic mechanical devices, wherein, LIGA refer to diversified photoetching,Electroforming and injection moulding; The device volume prepared by MEMS technology is little, lightweight,Low in energy consumption, durability good, cheap, stable performance, integrated height, wherein,LIGA refers to photoetching, electroforming and injection moulding; The feature of MEMS technology can be summarized asSmall size, variation, the device volume of preparing by MEMS technology is little, integratedHigh.
In conjunction with detailed description of the invention and exemplary example, the present invention is carried out in detail aboveIllustrate, but these explanations can not be interpreted as limitation of the present invention. This area skillArt personnel understand, in the situation that not departing from spirit and scope of the invention, and can be to thisInvention technical scheme and embodiment thereof carry out multiple replacement of equal value, modify or improve,These all fall within the scope of the present invention. Protection scope of the present invention is wanted with appended rightAsk and be as the criterion.
Claims (9)
1. a testing arrangement for pressure sensitive strain factor, is characterized in that, described inTesting arrangement comprises: vibration isolators (1), cantilever beam test member (2), modality vibration exciter (3),Vibrator signal source (4), with probe (6) laser noncontact vibration measuring set (5),Universal meter (7), digital oscilloscope (8) and computer (9).
2. testing arrangement according to claim 1, is characterized in that,
Cantilever beam test member (2) is placed on modality vibration exciter (3); And/or
Modality vibration exciter (3) vibrates under the effect of vibrator signal source (4), preferably with oneDetermining frequency vibrates; And/or
The probe (6) of laser noncontact vibration measuring set (5) can Emission Lasers, preferably its rippleLong is 632.8nm, and more preferably this laser can incide cantilever beam top (21), described inLaser comprises incident light (61) and reverberation (62), preferably incident light (61) and reverberation(62) wavelength X equates; And/or
Universal meter (7) consists of interconnection line (27) and the pressure sensitive (26) on overarm armPressure sensitive structural be connected, for measuring pressure-sensitive material resistance resistance under different excited frequencies,And calculate piezo-resistance resistance relative variation; And/or
The output of laser noncontact vibration measuring set (5) and digital oscilloscope (8) join,For the analog signal output of recording laser noncontact vibration measuring set (5) (or forMeasure the output signal of laser noncontact vibration measuring set (5)), data can be input to meterCalculation machine (9), computer (9) is preferred for carrying out data analysis processing, calculates certain excitingThe strain of frequency Analysis of A Cantilever Beam Under.
3. testing arrangement according to claim 1 and 2, is characterized in that, described inCantilever beam test member (2) comprises silicon supporter (23), cantilever beam (24), cantilever backEnd mass (25), preferably does pressure sensitive (26) resistor stripe at cantilever beam root (22),And draw interconnection line (27) (or preferably at cantilever beam root (22) buried regions interconnection line(27))。
4. according to the testing arrangement one of claims 1 to 3 Suo Shu, it is characterized in that,
Described pressure sensitive preparation is upper at the root (22) of cantilever beam test member (2), straightConnect formation piezo-resistance; And/or
Described modality vibration exciter (3) can receive vibrator signal source (4) signal, and with necessarilyFrequency vibration, makes cantilever beam test member (2) and pressure sensitive (26) distortion.
5. according to the testing arrangement one of claim 1 to 4 Suo Shu, it is characterized in that,
The probe (6) of described laser noncontact vibration measuring set (5) can transmit and receive rippleThe laser of appearance etc.; And/or
Described digital oscilloscope (8) can receive vibration measuring set (5) output signal, and data canBe input to computer (9), carry out data analysis processing, and calculate strain.
6. a cantilever beam test member, is preferred for described in one of claim 1 to 5Testing arrangement, it is characterized in that, this member comprises silicon supporter (23), cantilever beam(24), cantilever beam top mass (25), preferably interconnect at cantilever beam root (22) buried regionsLine (27).
7. member according to claim 6, is characterized in that, props up at described siliconSupport body (23) one sides have cantilever beam (24), have a mass on the top of cantilever beam (24)(25), preferably can do pressure sensitive (26) resistor stripe in cantilever beam root (22), and drawGo out interconnection line (27).
8. according to the manufacture craft of the cantilever beam test member described in claim 6 or 7,It is characterized in that, comprise the following steps:
Twin polishing<100>crystal orientation high resistant monocrystalline silicon piece, electronics cleaning fluid cleans, theOnce oxidation, positive growth oxide layer, thickness 500-600nm, monocrystalline silicon piece frontGrowth aluminium lamination, thickness 400-500nm, photoetching for the first time, etching front aluminium lamination formsAluminium electrode, grown silicon nitride, thickness 150-200nm, photoetching for the second time, etching nitrogenSiClx layer, forms resistor stripe and aluminium electrode window through ray, piezo-resistance to be prepared; For the third timePhotoetching, by dual surface lithography technology, the photoetching monocrystalline silicon piece back side, forms silicon cup window,Four mask, photoetching monocrystalline silicon piece front, deep etching fabrication techniques structure of silicon cup,Deep etching technology discharges cantilever beam test structure, forms and carries mass block structure cantileverBeam can be made piezo-resistance in this cantilever beam test member.
9. a method of testing for pressure sensitive strain factor, preferably adopts claimCantilever beam test described in one of 1 to 5 described testing arrangement or claim 6 or 7Member is tested, and it is characterized in that, the method comprises the following steps:
1) the each parts of connecting test device, are produced on cantilever beam test structure by pressure sensitiveOn part (2);
2) adjusting vibration exciter signal source (4), makes vibrator vibrate with certain frequency, drawsPlaying cantilever beam test member (2) vibrates;
3) universal meter (7) records pressure-sensitive material resistance resistance under different excited frequencies, meterCalculate pressure-sensitive material resistance resistance relative variation under different excited frequencies;
4) laser noncontact vibration measuring set (5) probe (6) receives under different frequency and believesNumber;
5) simulation of digital oscilloscope (8) recording laser noncontact vibration measuring set (5) letterNumber export and be input to computer (9) and carry out data analysis processing, realize strain and calculate;
6), according to strain and resistance variations, calculate strain factor.
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| CN108469407A (en) * | 2018-03-16 | 2018-08-31 | 中国石油大学(华东) | A kind of device and method of detection clean surface degree |
| CN113702281A (en) * | 2021-08-25 | 2021-11-26 | 重庆齿轮箱有限责任公司 | Solid-liquid interface adhesion force testing method and system |
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| CN113702281A (en) * | 2021-08-25 | 2021-11-26 | 重庆齿轮箱有限责任公司 | Solid-liquid interface adhesion force testing method and system |
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| CN105588772B (en) | 2018-01-30 |
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