CN105576115A - Fabrication method of double-sided junction and high-temperature super-conduction Bi<2>Sr<2>CaCu<2>O<8+Delta> (BSCCO) terahertz source - Google Patents
Fabrication method of double-sided junction and high-temperature super-conduction Bi<2>Sr<2>CaCu<2>O<8+Delta> (BSCCO) terahertz source Download PDFInfo
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- CN105576115A CN105576115A CN201510983562.7A CN201510983562A CN105576115A CN 105576115 A CN105576115 A CN 105576115A CN 201510983562 A CN201510983562 A CN 201510983562A CN 105576115 A CN105576115 A CN 105576115A
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- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 title abstract description 8
- 229910004247 CaCu Inorganic materials 0.000 title abstract 2
- 238000002207 thermal evaporation Methods 0.000 claims abstract description 8
- 238000001259 photo etching Methods 0.000 claims abstract description 6
- 239000002887 superconductor Substances 0.000 claims description 26
- 238000002360 preparation method Methods 0.000 claims description 21
- 229920002120 photoresistant polymer Polymers 0.000 claims description 12
- 238000003776 cleavage reaction Methods 0.000 claims description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 9
- 239000010931 gold Substances 0.000 claims description 9
- 229910052737 gold Inorganic materials 0.000 claims description 9
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 9
- 239000000395 magnesium oxide Substances 0.000 claims description 9
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 9
- 230000007017 scission Effects 0.000 claims description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 235000010627 Phaseolus vulgaris Nutrition 0.000 claims description 6
- 244000046052 Phaseolus vulgaris Species 0.000 claims description 6
- 239000002390 adhesive tape Substances 0.000 claims description 6
- 239000003292 glue Substances 0.000 claims description 6
- 238000001459 lithography Methods 0.000 claims description 4
- 244000247747 Coptis groenlandica Species 0.000 claims description 3
- 235000002991 Coptis groenlandica Nutrition 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000007517 polishing process Methods 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 238000000992 sputter etching Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- 238000010025 steaming Methods 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 abstract description 4
- 238000005530 etching Methods 0.000 abstract description 3
- 230000005855 radiation Effects 0.000 abstract 2
- 239000013078 crystal Substances 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 9
- 230000007306 turnover Effects 0.000 description 3
- 230000005668 Josephson effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
The invention discloses a fabrication method of a double-sided junction and high-temperature super-conduction Bi<2>Sr<2>CaCu<2>O<8+Delta> (BSCCO) terahertz source. A sample with a thickness reaching several micrometers can be fabricated by respective thermal evaporation of an upper electrode and a lower electrode by taking BSCCO single crystals and then carrying out one-time photoetching and ion beam etching. The fabrication method is simple and can be operated, the sample fabrication period can be shortened, the sample fabrication success rate can be improved, and an ultra-thick sample is favorably fabricated. The sample fabricated according to the fabrication process has the advantages of continuous wave sending, tunability, high monochromaticity, high power and the like. When the sample thickness is greater than 2 micrometers, relative high terahertz radiation power is generated and can reach dozens of microwatts; and compared with a traditional double-sided junction sample, the highest radiation power can be improved by one order of magnitude, and the adjustable frequency range of the sample can reach 500 Ghz.
Description
Technical field
The present invention relates to BSCCO THz source technical field, particularly relate to a kind of preparation method of two-sided knot high-temperature superconductor BSCCO THz source.
Background technology
Terahertz (terahertz is called for short THz usually) ripple refers to that frequency is 1mm ~ 0.03mm at 0.3THz ~ 10THz(wavelength) electromagnetic wave in scope.THz wave has that photon energy is low, temporal and spatial coherence is high, time-domain spectral signal to noise ratio advantages of higher, and therefore, it has a wide range of applications in the scientific domain such as astronomy, biology, computer, communication.But owing to lacking effective terahertz emission source and detection means, make this wave band fail to be studied fully and utilize.
Electronic energy, by the quantum tunneling effect of thin dielectric layer between two pieces of superconductors, is called Josephson effect.According to ac josephson effect, the direct voltage of 1mV can produce the vibration of frequency up to 484GHz, the frequency of super stream vibration in knot just can be regulated continuously by the direct voltage changing knot two ends, therefore Josephson junction is a kind of desirable voltage-frequency converter, may be used for manufacturing THz source.Within 2007, the U.S., Turkey cooperate with the researcher of Japan, high-temperature superconductor Bi2Sr2CaCu2O8+ δ (BSCCO) defines through micro fabrication the Josephson junction battle array of 600 knot series connection of platform-like, tandem junction battle array is made to be in low current bias state, and detected by bolometer the THz signal (L.Ozyuzeretal. that extension power reaches several microwatt magnitude, Science318,1291 (2007)).
Through development in recent years, a kind of New Solid THz source of continuous wave tunable has been developed in BSCCO terahertz emission source, there is easy-to-use, continuous wave, tunable, monochromaticjty good, power advantages of higher (Wangetal., Phys.Rev.Lett.105,057002 (2010)).The radiant power improving BSCCO THz source is the hot topic of research always, theoretical research (L.N.BulaevskiiandA.E.Koshelev, Phys.Rev.Lett.99,057002 (2007) shows, within the specific limits, square being directly proportional of the radiant power of sample and the number tied in knot battle array, therefore increasing thickness of sample is one of effective ways improving radiant power.Because traditional two-sided knot sample preparation technology needs Twi-lithography, twice ion beam milling, be therefore difficult to prepare the two-sided knot sample that thickness reaches several microns, this creates very large obstruction to the raising of the radiant power of BSCCO THz source.
Summary of the invention
Goal of the invention: for the deficiencies in the prior art, the object of this invention is to provide a kind of preparation method of two-sided knot high-temperature superconductor BSCCO THz source, has that technique is simple, success rate is high, thickness can reach the features such as several microns.
Technical scheme: in order to realize foregoing invention object, the technical solution used in the present invention is as follows:
A kind of preparation method of two-sided knot high-temperature superconductor BSCCO THz source: after getting the preliminary treatment of high-temperature superconductor BSCCO monocrystalline, puts into rapidly and steams golden instrument thermal evaporation one deck gold film as hearth electrode; Then transfer at magnesium oxide-based the end, have the one side of golden film to be pasted by polyimide glue and the one side at the magnesium oxide-based end, and be placed in that to dry baking on platform fixing; And then put into steaming golden instrument thermal evaporation one deck gold film as top electrode; Again by uv-exposure photoetching technique, top electrode makes rectangular graph by lithography; Then put into ion bean etcher, argon ion milling is until etch into hearth electrode gold film; Cover part hearth electrode with photoresist by the method for hand resist coating again, dry photoresist, again putting into ion bean etcher removal does not have hearth electrode covered by photoresist; Remove the photoresist on surface, draw upper/lower electrode with elargol and gold thread, form final high-temperature superconductor Josephson terahertz emission source.
Described preliminary treatment is the monocrystalline plane going out fresh clean by adhesive tape cleavage.
The golden thickness 100nm of described hearth electrode.
Described magnesium oxide substrate thickness is 0.5mm, and through twin polishing process.
Described be placed in dry baking on platform be fixed as be placed in 90 DEG C baking platform on baking 1 hour, glue is solidified completely.
The preparation method of described two-sided knot high-temperature superconductor BSCCO THz source, the high-temperature superconductor BSCCO monocrystalline fixed need use adhesive tape cleavage again, until cleavage goes out smooth, fresh BSCCO monocrystalline plane.
The thickness of the golden film of described top electrode is 100nm.
Described rectangular graph area is 280*80 μm
2.
The present invention is based on the two-sided knot preparation technology of maturation, and this preparation technology is the ripe two-sided knot technology of preparing of BSCCO, and the sample power prepared can reach tens microwatts, and frequency can reach 1THz.Use upper and lower surface to steam the BSCCO monocrystalline of gold, the high-temperature superconductor BSCCO terahertz emission source sample of ideal thickness can be obtained by a photoetching and ion beam etching.Meanwhile, this technology manually mechanical turn-over substitutes the gluing turn-over in original two-sided knot technology, can improve sample success rate, shorten the sample making cycle.
Beneficial effect: compared with prior art, the preparation method of two-sided knot high-temperature superconductor BSCCO THz source of the present invention, to BSCCO monocrystalline thermal evaporation upper/lower electrode respectively, again by a photoetching and ion beam etching, the sample that thickness can reach several microns can be produced, this preparation technology is simple, can operate, and can shorten the sample preparation cycle and improve sample preparation success rate, being conducive to making super thick specimens.The sample prepared by this preparation technology has a continuous wave, tunable, monochromaticjty good, power advantages of higher.
Accompanying drawing explanation
Fig. 1 is the structural representation of two-sided knot high-temperature superconductor BSCCO THz source prepared by the present invention.
Embodiment
Below in conjunction with specific embodiment, the present invention is described further.
Embodiment 1
Choose one block of high-temperature superconductor BSCCO monocrystalline 1, the monocrystalline plane of fresh clean is gone out by adhesive tape cleavage, put into rapidly and steam the thick golden film of golden instrument thermal evaporation one deck 100nm as hearth electrode 3, choose smooth BSCCO monocrystalline and transfer at clean the magnesium oxide-based end 2, magnesium oxide substrate thickness is 0.5mm, and through twin polishing process, there is good conductive coefficient at low temperatures, be conducive to low temperature and be transmitted to sample from refrigeration machine cold head.Manually operation makes sample turn-over, there being the one side of golden film to be pasted together by polyimide glue and the one side at the magnesium oxide-based end, and the baking platform being placed in 90 DEG C toasts 1 hour, glue is solidified completely.The sample fixed is used adhesive tape cleavage again, until cleavage goes out smooth, fresh BSCCO monocrystalline plane, and then once using sample put into steam golden instrument thermal evaporation a layer thickness be 100nm gold film as top electrode 4.Again by uv-exposure photoetching technique, top electrode makes a 280*80 μm by lithography
2rectangular graph; Then sample is put into ion bean etcher, argon ion milling sample is until etch into hearth electrode gold film; Cover a part of hearth electrode with photoresist by the method for hand resist coating again, dry photoresist, again putting into ion bean etcher removal does not have hearth electrode covered by photoresist.Remove the photoresist of sample surfaces, draw upper/lower electrode with elargol and gold thread 6, form final high-temperature superconductor Josephson terahertz emission source, as shown in Figure 1.
Said method is adopted to prepare the sample of thickness 0.6-3.5 μm, in experiment measuring, recording the sample that thickness is greater than 2 μm has larger terahertz emission power, can reach tens microwatts, compared to traditional two-sided knot sample, radiant power is the highest improves an order of magnitude.The frequency-adjustable scope of sample can reach 500GHz.
Claims (8)
1. a preparation method for two-sided knot high-temperature superconductor BSCCO THz source, is characterized in that: after getting the preliminary treatment of high-temperature superconductor BSCCO monocrystalline, puts into rapidly and steams golden instrument thermal evaporation one deck gold film as hearth electrode; Then transfer at magnesium oxide-based the end, have the one side of golden film to be pasted by polyimide glue and the one side at the magnesium oxide-based end, and be placed in that to dry baking on platform fixing; And then put into steaming golden instrument thermal evaporation one deck gold film as top electrode; Again by uv-exposure photoetching technique, top electrode makes rectangular graph by lithography; Then put into ion bean etcher, argon ion milling is until etch into hearth electrode gold film; Cover part hearth electrode with photoresist by the method for hand resist coating again, dry photoresist, again putting into ion bean etcher removal does not have hearth electrode covered by photoresist; Remove the photoresist on surface, draw upper/lower electrode with elargol and gold thread, form final high-temperature superconductor Josephson terahertz emission source.
2. the preparation method of two-sided knot high-temperature superconductor BSCCO THz source according to claim 1, is characterized in that: described preliminary treatment is the monocrystalline plane going out fresh clean by adhesive tape cleavage.
3. the preparation method of two-sided knot high-temperature superconductor BSCCO THz source according to claim 1, is characterized in that: the golden thickness 100nm of described hearth electrode.
4. the preparation method of two-sided knot high-temperature superconductor BSCCO THz source according to claim 1, is characterized in that: described magnesium oxide substrate thickness is 0.5mm, and through twin polishing process.
5. the preparation method of two-sided knot high-temperature superconductor BSCCO THz source according to claim 1, is characterized in that: described be placed in dry baking on platform be fixed as be placed in 90 DEG C baking platform on baking 1 hour, glue is solidified completely.
6. the preparation method of two-sided knot high-temperature superconductor BSCCO THz source according to claim 1, is characterized in that: the high-temperature superconductor BSCCO monocrystalline fixed need use adhesive tape cleavage again, until cleavage goes out smooth, fresh BSCCO monocrystalline plane.
7. the preparation method of two-sided knot high-temperature superconductor BSCCO THz source according to claim 1, is characterized in that: the thickness of the golden film of described top electrode is 100nm.
8. the preparation method of two-sided knot high-temperature superconductor BSCCO THz source according to claim 1, is characterized in that: described rectangular graph area is 280*80 μm
2.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107123730A (en) * | 2017-04-12 | 2017-09-01 | 南京大学 | A kind of Bi2Sr2CaCu2O8The preparation method of single Josephson surface knot |
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