CN105571713A - Cone diffraction frame Offner-type light-splitting device - Google Patents

Cone diffraction frame Offner-type light-splitting device Download PDF

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Publication number
CN105571713A
CN105571713A CN201610123443.9A CN201610123443A CN105571713A CN 105571713 A CN105571713 A CN 105571713A CN 201610123443 A CN201610123443 A CN 201610123443A CN 105571713 A CN105571713 A CN 105571713A
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CN
China
Prior art keywords
grating
convex spherical
dividing device
type light
spherical surface
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CN201610123443.9A
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Chinese (zh)
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潘俏
沈为民
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Suzhou University
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Suzhou University
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Priority to CN201610123443.9A priority Critical patent/CN105571713A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum

Abstract

The invention discloses a cone diffraction frame Offner-type light-splitting device, which is used for spectrum detection. An optical system adopts a total reflection structure and comprises an entrance slit, a concave spherical surface reflector, a convex spherical surface grating and an image plane. The entrance slit and the image plane are symmetrical with respect to the plane where the top points of the concave spherical surface reflector and the convex spherical surface grating locate; the entrance slit and the image plane deviate from the top point of the convex spherical surface grating; and the ratio between the curvature radius of concave spherical surface reflector and the curvature radius of the convex spherical surface grating is from 1.8:1 to 2.2:1. The adopted concave spherical surface reflector and the convex spherical surface grating are spherical, so that concentric symmetrical coaxial conditions are met, and spectral line bending distortion and trapezoidal distortion are small. The light-splitting device adopts the cone diffraction frame Offner-type light-splitting device; light beams of the incidence grating and optical grating diffraction light beams are not in a principal section of the grating; the entrance slit and the image plane have off-axis amount in two directions; and the light-splitting device is especially suitable for a short-slit and wide-dispersion range imaging spectrometer.

Description

A kind of cone diffraction shelves Offner type light-dividing device
Technical field
The present invention relates to spectral technique field, be specifically related to a kind of light-dividing device being applicable to short slit, wide dispersion range imaging spectrometer.
Background technology
There is imaging spectral technology in the eighties in last century, this technological incorporation spectral remote sensing and aerial image, greatly widened people in spacer remote sensing field, agricultural resource detection, mineral wealth and geologic prospecting, militaryly to detect, range of application in biologic medical etc.Imaging spectrometer light-dividing device structure can be divided into color dispersion-type, interfere type etc., wherein, adopts the Offner type light-dividing device of convex grating due to its excellent image quality, causes deep research, and be used widely.
Offner type light-dividing device is developed by Offner type relay system.N.C.Das proposes the secondary mirror replacing Offner type relay system with convex spherical holographic grating the earliest, thus opens the research to Offner type imaging spectrometer.The structure of centrosymmetric makes this light-dividing device have, and relative aperture is large, Spectral line bend and chromatic variation of distortion little, be easy to advantages such as debuging.Twentieth century end, Fischer and Chrisp successively proposes the Offner type imaging spectrometer improved, and afterwards, many scholars further develop again and the perfect theory of this structure.But the optimized design of this structure easily obtains when long slit, narrow dispersion range, and is difficult to obtain optimum solution when short slit, wide dispersion range.Therefore, in order to address this problem, within 2000, Reininger proposes the imagination that cone diffraction shelves Offner type light-dividing device, just until L.Lucke in 2007 provides the specific design of this structure.The light-dividing device of this structure, except having the advantage of diffraction Offner type light-dividing device in above-mentioned general face, is more suitable for short slit, large dispersion range.
Summary of the invention
In order to meet imaging spectrometer application demand widely, the object of the present invention is to provide that a kind of image quality is good, spectral resolution is high, compact conformation, be easy to processing and debug, be applicable to short slit, the New type conical diffraction of wide dispersion range shelves Offner type light-dividing device.
For achieving the above object, the technical solution adopted in the present invention is to provide a kind of cone diffraction and shelves Offner type light-dividing device, and it comprises entrance slit, concave spherical mirror, convex spherical grating and picture plane; Its structure is the plane symmetry about concave spherical mirror and their place, summit of convex spherical grating; Entrance slit and depart from the summit of convex spherical grating as plane; Concave spherical mirror is 1.8: 1 ~ 2.2: 1 with the ratio of the radius-of-curvature of convex spherical grating.
In the present invention, the incident beam of convex spherical grating and the plane at diffracted beam place are α with the principal section angle of convex spherical grating, and 0 ° of < α < 180 °.Entrance slit and picture plane spatially, about convex spherical grating summit and line place, concave spherical mirror summit plane symmetry.The incident angle of centre wavelength imaging beam on convex spherical grating is equal with angle of diffraction.
The slit length of described light-dividing device and the ratio of dispersion width are 1/30 ~ 1; The span of the F number of light-dividing device is 2.5≤F/# < 5.
In light-dividing device, the span of the radius of curvature R 1 of concave spherical mirror is-95mm < R1 <-80mm.The span of the radius of curvature R 2 of convex spherical grating is-40mm < R2 <-55mm.Convex spherical grating is the equidistant groove grating of linear pattern or shaped form.
A preferred scheme is: concave spherical mirror is 2: 1 with the ratio of the radius-of-curvature of convex spherical grating.
Cone diffraction provided by the invention is shelved Offner type light-dividing device and is made up of one piece of large concave mirror and convex grating, both are sphere, coaxial with one heart, the ratio of concave mirror and convex grating radius-of-curvature is 1.8: 1 ~ 2.2: 1, meet thing, the image space heart far away, be applicable to short slit, wide dispersion range.In the present invention, imaging beam enters from entrance slit, reflexes to convex spherical grating through concave spherical mirror, through the light beam of convex spherical optical grating diffraction again after concave spherical mirror, as spectral line plane being formed dispersion.
Compared with prior art, feature of the present invention is: this optical system slit is short, dispersion range is relatively wide; Optical system spectral resolution is high, and total optical element is few, and volume is little, compact conformation, is easy to processing and debugs.
Accompanying drawing explanation
Fig. 1 is that a kind of that the embodiment of the present invention provides bores the structural representation that diffraction shelves Offner type light-dividing device optical system;
Fig. 2 is that a kind of that the embodiment of the present invention provides bores the light path front view that diffraction shelves Offner type light-dividing device;
Fig. 3 is that a kind of that the embodiment of the present invention provides bores the light path vertical view that diffraction shelves Offner type light-dividing device;
Fig. 4 is that a kind of that the embodiment of the present invention provides bores the light path left view that diffraction shelves Offner type light-dividing device;
Fig. 5 is that a kind of that the embodiment of the present invention provides bores the structure left view that diffraction shelves Offner type light-dividing device optical system;
Fig. 6 is that a kind of that the embodiment of the present invention provides bores the ray tracing point range figure that diffraction shelves Offner type light-dividing device;
Fig. 7 is that a kind of that the embodiment of the present invention provides bores the encircled energy curve that diffraction shelves Offner type light-dividing device;
Fig. 8 is that a kind of that the embodiment of the present invention provides bores the modulation transfer function curve that diffraction shelves Offner type light-dividing device.
In figure: 1, concave spherical mirror; 2, convex spherical grating; 3, as plane, 3-1,3-2 and 3-3 are respectively the dispersion picture point of different wave length; 4, incident beam chief ray; 5, the 6 and 7 image space chief rays being respectively different wave length imaging beam; 8, vertical with grating line plane; 9, convex spherical grating summit; 10, slit and picture plane relative grating summit angle; 11, incident beam and outgoing beam and convex spherical grating summit distance in the Y direction; 12-1, outgoing beam and convex spherical grating summit are in the distance of X-direction; 12-2, incident beam and convex spherical grating summit are in the distance of X-direction; 13, entrance slit.
Embodiment
Below in conjunction with drawings and Examples, technical solution of the present invention will be further described.
Embodiment 1
See accompanying drawing 1 and accompanying drawing 2, they are that a kind of that the present embodiment provides bores structural representation and the light path front view that diffraction shelves Offner type light-dividing device optical system respectively; Cone diffraction is shelved Offner type light splitting light-dividing device and is comprised: entrance slit 13, concave mirror 1, convex spherical grating 2 and picture plane 3; 4 is object space chief rays, and 5,6 and 7 is image space chief rays of different wave length imaging beam.The length direction of entrance slit 13 and convex spherical grating 2 groove direction all along X-axis shown in Fig. 1, perpendicular to paper.Imaging beam enters system by entrance slit 13, and concave mirror 1 reflexes to convex spherical grating 2, through the light beam of convex spherical grating 2 diffraction again through concave mirror 1, as spectral line plane 3 being formed dispersion, is respectively 3-1,3-2 and 3-3.Spectral line in picture plane 3 is along Y-direction dispersion, vertical with convex spherical grating 2 groove direction with entrance slit 13 length direction.Convex spherical grating 2 is coaxial with concave mirror 1.Convex spherical grating is the equidistant groove grating of linear pattern or shaped form, and the light beam of incident grating and the light beam of optical grating diffraction be not in the plane vertical with grating line.Entrance slit 13 and be all positioned at XOY plane as plane 3, incident beam chief ray 4 and centre wavelength outgoing beam chief ray 6 are positioned at XOZ plane.Projection angle in grating incident angle and angle of diffraction YOZ face is equal.Incident beam and outgoing beam representing with 11 from axle amount in the Y direction.
See accompanying drawing 3, it is the light path vertical view of the light-dividing device that the present embodiment provides.As seen from the figure, entrance slit 13 and picture plane 3 are about convex spherical grating 2 summit and line place, concave mirror 1 summit plane, and namely YOZ face is symmetrical.The image space chief ray 5,6 and 7 of different wave length imaging beam overlaps under this view, and parallel with incident beam chief ray 4.In this plane, grating incident angle is equal with angle of diffraction projection angle.12-1 and 12-2 represents incident beam and the outgoing beam distance on X-direction and convex spherical grating summit respectively.
See accompanying drawing 4 and accompanying drawing 5, they are the light path of the light-dividing device that the present embodiment provides and the left view of system architecture respectively.In accompanying drawing 4,8 is convex spherical grating 2 groove place plane, and plane vertical is with it called grating principal section.1 is concave spherical mirror, is rectangle shown in figure, also can be circular, depending on actual requirement of engineering.The light beam 5,6 and 7 of the light beam 4 and optical grating diffraction of injecting grating by entrance slit 13 is not all in grating principal section, and for from face diffraction, cone diffraction shelves Offner type light-dividing device to claim this structure to be called.Accompanying drawing 5 is structural representation left views of system, and 9 is convex spherical grating 2 summit, and 10 is the angle α on slit and the picture relative grating summit of plane, 0 ° of < α < 180 °.Entrance slit 13 and centre wavelength light dispersion picture point 3-2 are about convex spherical grating summit 9 symmetry.
In the present embodiment, with reference to figure 2, the F number that the cone diffraction provided shelves Offner type light-dividing device is 4, and service band is 0.4 μm ~ 0.9 μm.
The present embodiment correlation parameter is as follows: detector Pixel size is 25 μm × 25 μm, and effective pixel number is 20 × 400.According to Offner type light-dividing device 1:1 imaging, entrance slit 13 is a long 0.5mm, the rectangle of wide 25 μm, and be 10mm as plane 3 spectrum dimension dispersion width, space dimension width equals slit length 0.5mm.The radius-of-curvature of concave mirror 1 is 90mm, and the radius-of-curvature of convex spherical grating 2 is 45.7mm, grating constant 437Lp/mm, and the spacing of concave mirror 1 and convex spherical grating 2 is 44mm.Incident beam and outgoing beam in the Y direction be 6.5mm from axle 11, be 14.5mm in X-direction from axle amount 12-1 and 12-2.
See accompanying drawing 6, it is the ray tracing point range figure of the optical system shown in the present embodiment.Box indicating detector Pixel size in figure 25 μm × 25 μm, black circles represents Airy disk size, and as seen from the figure, the point range figure at the different visual field place of each wavelength of this structure can concentrate near Airy disk, close to diffraction limit.
See accompanying drawing 7, it is the encircled energy curve of the optical system shown in the present embodiment, can find out, the concentration of energy of light-dividing device more than 95% is in a detector pixel.
See accompanying drawing 8, it is the modulation transfer function curve of the optical system shown in the present embodiment, and this light-dividing device is greater than 0.9 at the modulation transfer function at detector nyquist frequency 20Lp/mm place, almost reaches diffraction limit, and image quality is excellent.

Claims (10)

1. bore diffraction and shelve an Offner type light-dividing device, it is characterized in that: it comprises entrance slit (13), concave spherical mirror (1), convex spherical grating (2) and picture plane (3); Its structure is the plane symmetry about concave spherical mirror (1) and their place, summit of convex spherical grating (2); Entrance slit (13) and picture plane (3) depart from the summit of convex spherical grating (2); Concave spherical mirror (1) is 1.8: 1 ~ 2.2: 1 with the ratio of the radius-of-curvature of convex spherical grating (2).
2. one cone diffraction according to claim 1 shelves Offner type light-dividing device, it is characterized in that: the incident beam of convex spherical grating and the plane at diffracted beam place, be α with the principal section angle of convex spherical grating, and 0 ° of < α < 180 °.
3. according to claim 1 one cone diffraction shelve Offner type light-dividing device, it is characterized in that: entrance slit and picture plane spatially, about convex spherical grating summit and line place, concave spherical mirror summit plane symmetry.
4. one cone diffraction according to claim 1 shelves Offner type light-dividing device, it is characterized in that: the incident angle of centre wavelength imaging beam on convex spherical grating is equal with angle of diffraction.
5. one cone diffraction according to claim 1 shelves Offner type light-dividing device, it is characterized in that: the slit length of described light-dividing device and the ratio of dispersion width are 1/30 ~ 1.
6. one cone diffraction according to claim 1 shelves Offner type light-dividing device, it is characterized in that: the span of described light-dividing device F number is 2.5≤F/# < 5.
7. one cone diffraction according to claim 1 shelves Offner type light-dividing device, it is characterized in that: the span of the radius of curvature R 1 of concave mirror is-95mm < R1 <-80mm.
8. one cone diffraction according to claim 1 shelves Offner type light-dividing device, it is characterized in that: the span of the radius of curvature R 2 of convex spherical grating is-40mm < R2 <-55mm.
9. one cone diffraction according to claim 1 shelves Offner type light-dividing device, it is characterized in that: convex spherical grating is the equidistant groove grating of linear pattern or shaped form.
10. one cone diffraction according to claim 1 shelves Offner type light-dividing device, it is characterized in that: concave spherical mirror is 2: 1 with the ratio of the radius-of-curvature of convex spherical grating.
CN201610123443.9A 2016-03-06 2016-03-06 Cone diffraction frame Offner-type light-splitting device Pending CN105571713A (en)

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CN108007570A (en) * 2017-11-28 2018-05-08 北京云端光科技术有限公司 Spectrometer and spectral detection system
CN110535008A (en) * 2019-08-26 2019-12-03 中国科学院上海光学精密机械研究所 Compensate the achromatism grating stretcher of configuration off axis based on total reflection telescopic system

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Publication number Priority date Publication date Assignee Title
CN108007570A (en) * 2017-11-28 2018-05-08 北京云端光科技术有限公司 Spectrometer and spectral detection system
CN110535008A (en) * 2019-08-26 2019-12-03 中国科学院上海光学精密机械研究所 Compensate the achromatism grating stretcher of configuration off axis based on total reflection telescopic system

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Application publication date: 20160511