CN1055594A - Unit-construction water cooler for radio-frequency discharge electrodes - Google Patents
Unit-construction water cooler for radio-frequency discharge electrodes Download PDFInfo
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- CN1055594A CN1055594A CN91102076A CN91102076A CN1055594A CN 1055594 A CN1055594 A CN 1055594A CN 91102076 A CN91102076 A CN 91102076A CN 91102076 A CN91102076 A CN 91102076A CN 1055594 A CN1055594 A CN 1055594A
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- metal tube
- water
- electrode
- cooling
- tube
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
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Abstract
The present invention relates to unit-construction water cooler for radio-frequency discharge electrodes, belong to International Classification of Patents F25, it is a Kelvin effect of utilizing radio frequency, metal tube passes top electrode and bottom electrode, presses two kinds of associated modes of serial type and parallel connection type and insulation tube sealing-in, and water flows into from the metal tube water inlet, by top electrode, bottom electrode, insulation tube, flow out from the metal tube delivery port, realized the bipolar electrode water cooling, improved CO
2The power output of laser instrument and CO laser instrument and improve laser beam quality.The technology of the present invention is simple, easily realize, cost is low.
Description
The present invention relates to unit-construction water cooler for radio-frequency discharge electrodes, belong to the 25 classes cooling of F portion.
Existing technology is for closed RF excited CO
2Laser instrument generally adopts the method for water cooling ground connection bottom electrode to realize the cooling of operation material.But when laser power was big, the single electrode type of cooling is the cooling work material effectively, also can not get laser output parameter preferably, because top electrode is a firewire electrode, how to adopt water cooling is a problem always.
Purpose of the present invention is exactly to provide a kind of water-cooled problem that solves top electrode in the radio frequency discharge for fear of the above-mentioned weak point of prior art, realizes the bipolar electrode cooling.
Because radio frequency discharge is a capacitive discharge, laterally radio frequency discharge resistance is less, is generally about 1K Ω.Thereby we adopt capacitive partition method water as the capacitive medium, carry out the cooling of the upper and lower electrode of radio frequency discharge.Experiment test, the alternating-current resistance of water is bigger, and diameter is 0.4cm, and length is that the water column resistance of 5cm is about 20M Ω.For radio frequency, electrode has Kelvin effect, though thereby top electrode be firewire electrode, also can adopt the associated mode method that cooling water is directly fed top electrode, thereby realize the bipolar electrode cooling.
The present invention implements with following method:
With radio frequency discharge bipolar electrode associated mode water-cooled, it has serial type water cooling plant and two kinds of methods of parallel connection type water cooling plant.The serial type associated mode is respectively by metal tube 6 in the middle of top electrode 5 and bottom electrode 4 the two poles of the earth, insulation tube 3 sealing-ins between this two metal tubes, one end and the two poles of the earth, the length of this insulation tube can not be less than 3 centimetres, the other end and insulation tube 3 sealing-ins of the metal tube by top electrode 5, water flows into from metal tube water inlet 1, by insulation tube 3, top electrode 5, insulation tube 3 and bottom electrode 4, flow out by metal tube delivery port 2, parallel connection type associated mode water cooling plant is all to have metal tube 6 to pass in top electrode 5 and the bottom electrode 4, metal tube on top electrode respectively with insulation tube 3 sealing-ins, water is metal tube water inlet 1 inflow of the utmost point and bottom electrode from power on respectively, flow out from metal tube delivery port 2, no matter be serial type or parallel connection type water-cooling pattern, the metal tube of bottom electrode is passed in requirement and the parallel with it space D of top electrode between two insulation tubes of passing should be greater than the spacing B of two interpolars.
Description of drawings:
Fig. 1 .1 serial connection associated mode water cooling mode schematic diagram
Fig. 1 .2 parallel connection type associated mode water cooling mode schematic diagram
1. cooling water inlet 2. coolant outlets 3. insulation tubes
4. bottom electrode 5. top electrodes
Fig. 2 .1 " U " shape passage tandem type associated mode cooling device
Fig. 2 .2 " U " shape passage parallel connection type associated mode cooling device
1. cooling water inlet 2. coolant outlets 3. insulation tubes
4. top electrode 5. ground connection bottom electrodes 6. water flowing metallic conduits
8. seal weld interface
Embodiment:
Fig. 2 .1 and Fig. 2 .2 are U-shaped passage tandem type and parallel connection type associated mode cooling device, and it is directly punching on top electrode and lower electrode plate, and waterway outlet of " U " shape and inlet and metallic conduit sealing connect.Insulation tube adopts vacuum ceramic (as Al
2O
3Porcelain tube), but also can adopt glass tube and modes such as the sealing-in of valve pipe, polyfluortetraethylene pipe and round section joint ring sealing-in with the metal tube sealing-in.The metal tube gateway can be directly and the vacuum chamber housing sealing connect.
The present invention carries out two electrode water coolings up and down, because water column and discharge resistance parallel connection, the percentage that the radio-frequency power loss in the water column accounts for total power consumption is:
P = (V
2/r)/(V
2/r + V
2/R) = (R)/(r + R) = (10
3)/(2 ×10
7+ 10
3) ＜ 1/10000
In the formula, P is a power consumption percentage, and V is a radio-frequency voltage root-mean-square value between two electrodes, and r is the water column alternating-current resistance, and R is a radio frequency discharge resistance, to RF excited CO
2The laser output power ratio improves 10%～30% when only cooling off bottom electrode.Experimental results show that radio frequency discharge power from 100 watts to 2000 watts in the scope, die opening from 2mm to 8mm and rf frequency from 27MHZ in the 150MHZ scope, all do not have the significant change of finding matching condition.This shows that this device has improved CO
2The power output of laser instrument and CO laser instrument and improve laser beam quality.It is to RF excited CO
2Laser instrument and other class RF exiting laser have carried out effective cooling, and the closed laser instrument of high power is had better cooling effect.The technology of the present invention is simple, easily realize, cost is low.
Claims (1)
1, a kind of radio frequency discharge electrode water-cooling device is realized the cooling of operation material with the bottom electrode of water cooling ground connection, and it is characterized in that has following two kinds of devices with bipolar electrode associated mode water-cooling method:
A. serial type associated mode water cooling plant:
In the middle of top electrode 5 and bottom electrode 4 the two poles of the earth, pass through metal tube 6 respectively, insulation tube 3 sealing-ins between this two metal tubes, one end and the two poles of the earth, the length of this insulation tube can not be less than 3 centimetres, the other end and insulation tube 3 sealing-ins of the metal tube by top electrode 5, water flows into from metal tube water inlet 1, by insulation tube 3, top electrode 5, insulation tube 3 and bottom electrode 4, flow out by metal tube delivery port 2;
B. parallel connection type associated mode water cooling plant:
All have metal tube 6 to pass in top electrode 5 and the bottom electrode 4, the metal tube on top electrode respectively with insulation tube 3 sealing-ins, water respectively from power on the metal tube water inlet 1 of the utmost point and bottom electrode flow into, flow out from metal tube delivery port 2;
Serial type and parallel connection type associated mode water-cooling pattern pass the metal tube of bottom electrode and the parallel with it space D of top electrode between two insulation tubes of passing should be greater than the spacing B of two interpolars.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN91102076A CN1055594A (en) | 1991-04-05 | 1991-04-05 | Unit-construction water cooler for radio-frequency discharge electrodes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN91102076A CN1055594A (en) | 1991-04-05 | 1991-04-05 | Unit-construction water cooler for radio-frequency discharge electrodes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1055594A true CN1055594A (en) | 1991-10-23 |
Family
ID=4905401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN91102076A Pending CN1055594A (en) | 1991-04-05 | 1991-04-05 | Unit-construction water cooler for radio-frequency discharge electrodes |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1055594A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101910755B (en) * | 2007-10-24 | 2013-05-29 | 裘德·鲍威尔 | Cooling device |
| CN104577649A (en) * | 2014-12-29 | 2015-04-29 | 苏州凯锝微电子有限公司 | Slab laser device |
-
1991
- 1991-04-05 CN CN91102076A patent/CN1055594A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101910755B (en) * | 2007-10-24 | 2013-05-29 | 裘德·鲍威尔 | Cooling device |
| CN104577649A (en) * | 2014-12-29 | 2015-04-29 | 苏州凯锝微电子有限公司 | Slab laser device |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| AD01 | Patent right deemed abandoned | ||
| C20 | Patent right or utility model deemed to be abandoned or is abandoned |