CN105551990A - 太阳能电池激光背电极窗口开窗终点判断方法 - Google Patents
太阳能电池激光背电极窗口开窗终点判断方法 Download PDFInfo
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- CN105551990A CN105551990A CN201510882974.1A CN201510882974A CN105551990A CN 105551990 A CN105551990 A CN 105551990A CN 201510882974 A CN201510882974 A CN 201510882974A CN 105551990 A CN105551990 A CN 105551990A
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- cell piece
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- 238000000034 method Methods 0.000 title claims abstract description 35
- 238000005530 etching Methods 0.000 claims abstract description 40
- 238000002161 passivation Methods 0.000 claims abstract description 23
- 239000000523 sample Substances 0.000 claims description 20
- 238000000608 laser ablation Methods 0.000 claims description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000009471 action Effects 0.000 claims description 6
- 238000012360 testing method Methods 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000001514 detection method Methods 0.000 abstract description 3
- 210000004027 cell Anatomy 0.000 abstract 4
- 239000010410 layer Substances 0.000 description 16
- 230000008569 process Effects 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 238000002679 ablation Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000013532 laser treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510882974.1A CN105551990B (zh) | 2013-10-21 | 2013-10-21 | 太阳能电池激光背电极窗口开窗终点判断方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310496729.8A CN103528558B (zh) | 2013-10-21 | 2013-10-21 | 一种太阳能电池激光背电极窗口开窗终点判断方法 |
CN201510882974.1A CN105551990B (zh) | 2013-10-21 | 2013-10-21 | 太阳能电池激光背电极窗口开窗终点判断方法 |
Related Parent Applications (1)
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CN201310496729.8A Division CN103528558B (zh) | 2013-10-21 | 2013-10-21 | 一种太阳能电池激光背电极窗口开窗终点判断方法 |
Publications (2)
Publication Number | Publication Date |
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CN105551990A true CN105551990A (zh) | 2016-05-04 |
CN105551990B CN105551990B (zh) | 2017-12-05 |
Family
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Family Applications (2)
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CN201310496729.8A Expired - Fee Related CN103528558B (zh) | 2013-10-21 | 2013-10-21 | 一种太阳能电池激光背电极窗口开窗终点判断方法 |
CN201510882974.1A Expired - Fee Related CN105551990B (zh) | 2013-10-21 | 2013-10-21 | 太阳能电池激光背电极窗口开窗终点判断方法 |
Family Applications Before (1)
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CN201310496729.8A Expired - Fee Related CN103528558B (zh) | 2013-10-21 | 2013-10-21 | 一种太阳能电池激光背电极窗口开窗终点判断方法 |
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CN (2) | CN103528558B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113125854A (zh) * | 2021-04-07 | 2021-07-16 | 上海新昇半导体科技有限公司 | 硅片导电类型的判定方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104475972B (zh) * | 2014-11-25 | 2016-04-13 | 常州雷射激光设备有限公司 | 一种太阳能背钝化高效晶硅电池激光加工设备 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100294349A1 (en) * | 2009-05-20 | 2010-11-25 | Uma Srinivasan | Back contact solar cells with effective and efficient designs and corresponding patterning processes |
US20120028399A1 (en) * | 2007-10-06 | 2012-02-02 | Solexel, Inc. | Laser processing for high-efficiency thin crystalline silicon solar cell fabrication |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101840952B (zh) * | 2009-03-18 | 2012-11-14 | 中国科学院微电子研究所 | 一种制备双面pn结太阳能电池的方法 |
CN102881770B (zh) * | 2012-09-28 | 2016-02-03 | 英利能源(中国)有限公司 | 选择性发射极电池的制备方法 |
-
2013
- 2013-10-21 CN CN201310496729.8A patent/CN103528558B/zh not_active Expired - Fee Related
- 2013-10-21 CN CN201510882974.1A patent/CN105551990B/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120028399A1 (en) * | 2007-10-06 | 2012-02-02 | Solexel, Inc. | Laser processing for high-efficiency thin crystalline silicon solar cell fabrication |
US20100294349A1 (en) * | 2009-05-20 | 2010-11-25 | Uma Srinivasan | Back contact solar cells with effective and efficient designs and corresponding patterning processes |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113125854A (zh) * | 2021-04-07 | 2021-07-16 | 上海新昇半导体科技有限公司 | 硅片导电类型的判定方法 |
CN113125854B (zh) * | 2021-04-07 | 2024-05-17 | 上海新昇半导体科技有限公司 | 硅片导电类型的判定方法 |
Also Published As
Publication number | Publication date |
---|---|
CN105551990B (zh) | 2017-12-05 |
CN103528558B (zh) | 2016-01-13 |
CN103528558A (zh) | 2014-01-22 |
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Effective date of registration: 20190715 Address after: 226019 Jiangsu city of Nantong province sik Road No. 9 Patentee after: Center for technology transfer, Nantong University Address before: 226019 Jiangsu Province, Nantong City Chongchuan District sik Road No. 9 Patentee before: Nantong University |
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Effective date of registration: 20191118 Address after: No.1, floor 3, No.319, zhanggongshan Road, Yuhui District, Bengbu City, Anhui Province Patentee after: Bengbu guijiu Intellectual Property Service Co.,Ltd. Address before: 226019 Jiangsu city of Nantong province sik Road No. 9 Patentee before: Center for technology transfer, Nantong University |
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Effective date of registration: 20210508 Address after: 226000 No. 66, Lifa Avenue, Hai'an Development Zone (Chengdong town), Nantong City, Jiangsu Province Patentee after: Jiangsu fox Electric Group Co.,Ltd. Address before: 233000 No.1, third floor, No.319, zhanggongshan Road, Yuhui District, Bengbu City, Anhui Province Patentee before: Bengbu guijiu Intellectual Property Service Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171205 |