CN105549190A - Intelligent refraction and reflection projection objective lens - Google Patents
Intelligent refraction and reflection projection objective lens Download PDFInfo
- Publication number
- CN105549190A CN105549190A CN201610028582.3A CN201610028582A CN105549190A CN 105549190 A CN105549190 A CN 105549190A CN 201610028582 A CN201610028582 A CN 201610028582A CN 105549190 A CN105549190 A CN 105549190A
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- CN
- China
- Prior art keywords
- sample
- objective lens
- object lens
- objective
- lens
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
- G02B21/04—Objectives involving mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/365—Control or image processing arrangements for digital or video microscopes
Abstract
The invention discloses an intelligent refraction and reflection projection objective lens, and the objective lens comprises an objective table, a sample, an electronic illumination part, an imaging amplification part, and a video recording part. The electronic illumination part comprises an electronic gun and a collecting lens. The imaging amplification part comprises a first objective lens, a second objective lens, a projection mirror, and a sample. The video recording part comprises an image storage mechanism, a miniature processing structure, an X-ray analysis display part, and a video image display part. The objective table is provided with a sample and a light condensation layer disposed at the top of the sample. The light condensation layer enables an object field of the sample to be imaged in an image field of an image plane. The projection mirror enables the object field to be imaged to the second objective lens, and the second objective lens enables the object field to be imaged to the first objective lens. The second objective lens is provided with a concave mirror, and is provided with a refraction and reflection objective lens of two groups of lenses. The objective lens provided by the invention is high in intelligentization, is good in imaging effect, is diversified in functions, and greatly improving the work efficiency.
Description
Technical field
The present invention relates to projection objective technical field, be specially turning back of a kind of intelligence and penetrate projection objective.
Background technology
At present, object lens are the most important opticses of microscope, light is utilized to make the first time imaging of tested object, thus direct relation and affect the quality of imaging and every smooth object lens and to learn a skill parameter, it is the primary standard of a measurement microscope quality, the complex structure of object lens, make accurate, usually all combined by lens combination, certain distance is separated by between each eyeglass, to reduce difference, often organize lens all by different materials, one or the several piece lens gummed of different parameters forms, object lens have many concrete requirements, as sympodium, parfocalization, modern microcobjective has reached highly perfect, its numerical aperture is close to the limit, the resolution of field of view center and the difference of theoretical value very little, but continue increase microcobjective visual field and improve being still within the bounds of possibility of field of view edge image quality, this research work, so far still carrying out.In addition, existingly turn back that to penetrate projection objective functional poor, imaging effect is not good, often causes certain work difficulty to staff.Therefore, good, functional the turning back and penetrate projection objective and become those skilled in the art's technical matters urgently to be resolved hurrily by force of imaging effect how is designed.
Summary of the invention
The object of the present invention is to provide turning back of a kind of intelligence to penetrate projection objective, projection objective is penetrated in turning back of this intelligence, by force intelligent, and imaging effect is good, and function is many, greatly improves the work efficiency of projection objective, to solve the problem proposed in above-mentioned background technology.
For achieving the above object, the invention provides following technical scheme: projection objective is penetrated in turning back of a kind of intelligence, comprise objective table, sample, electrical lighting part, imaging amplifier section and video recording part, described electrical lighting part comprises electron gun and condenser, described imaging amplifier section comprises the first object lens, second object lens, projection lens and sample, described video recording part comprises image storage mechanism, microprocessor structure, x-ray analysis display and video image display, described objective table is provided with sample and is arranged on the light collecting layer at sample top, thing field in sample is imaged onto on the image field in image planes by described light collecting layer, thing field is imaged onto the second object lens by described projection lens, thing field is imaged onto the first object lens by described second object lens again, described second object lens have a concave mirror and have the catadioptric objective of two groups of lens, described first object lens top is provided with electron gun and is arranged on the condenser on electron gun.
Preferably, described sample side is provided with electron detector, and described electron detector is connected by electric signal with microprocessor structure with described image storage mechanism.
Preferably, described sample opposite side is provided with loose look electron detector, and described loose look electron detector is shown with described video image and is connected by electric signal.
Preferably, described loose look electron detector side is provided with X-ray detector, and described X-ray detector and described loose look electron detector are electrical connected, and described X-ray detector is shown with described x-ray analysis and is connected by electric signal.
Preferably, described objective table is provided with coating.
Compared with prior art, the invention has the beneficial effects as follows: due to the setting of image storage mechanism and microprocessor structure, sample observed image can be collected, and carry out Treatment Analysis, due to the setting that video image display and x-ray analysis show, strengthen the functional of projection objective, improve the afunction of original technology, due to the first object lens, the combination of the second object lens and projection lens, and the second object lens have a concave mirror and have the catadioptric objective of two groups of lens, improve the deficiency of original technology imaging, due to objective table being provided with coating, the loss of sample light source in imaging process can be avoided.
Accompanying drawing explanation
Fig. 1 is that turning back of intelligence of the present invention penetrates projection objective one-piece construction schematic diagram.
Fig. 2 is that turning back of intelligence of the present invention penetrates projection objective system architecture schematic diagram.
In figure: 1 electron gun, 2 condensers, 3 first object lens, 4 image storage mechanisms, 5 second object lens, 6 projection lenses, 7 electron detectors, 8 microprocessor structures, 9 samples, 10 objective tables, the display of 11X line analysis, 12 light collecting layers, 13X ray detector, 14 loose look electron detectors, 15 video image displays, 16 electrical lighting parts, 17 imaging amplifier sections, 18 video recording parts.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Refer to Fig. 1-2, the invention provides a kind of technical scheme: projection objective is penetrated in turning back of a kind of intelligence, comprise objective table 10, sample 9, electrical lighting part 16, imaging amplifier section 17 and video recording part 18, described electrical lighting part 16 comprises electron gun 1 and condenser 2, described imaging amplifier section 17 comprises the first object lens 3, second object lens 5, projection lens 6 and sample 9, described video recording part 18 comprises image storage mechanism 4, microprocessor structure 8, x-ray analysis display 11 and video image display 15, described objective table 10 is provided with sample 9 and is arranged on the light collecting layer 12 at sample 9 top, thing field in sample 9 is imaged onto on the image field in image planes by described light collecting layer 12, thing field is imaged onto the second object lens 5 by described projection lens 6, thing field is imaged onto the first object lens 3 by described second object lens 5 again, described second object lens 5 have a concave mirror and have the catadioptric objective of two groups of lens, described first object lens 3 top is provided with electron gun 1 and is arranged on the condenser 2 on electron gun 1.
The present invention improves and is: projection objective is penetrated in turning back of this intelligence, described sample 9 side is provided with electron detector 7, described electron detector 7 is connected by electric signal with microprocessor structure 8 with described image storage mechanism 4, described sample 9 opposite side is provided with loose look electron detector 14, described loose look electron detector 14 is shown 15 with described video image and is connected by electric signal, described loose look electron detector 14 side is provided with X-ray detector 13, described X-ray detector 13 is electrical connected with described loose look electron detector 14, described X-ray detector 13 and described x-ray analysis are shown 11 and are connected by electric signal, described objective table 10 is provided with coating, due to the setting of image storage mechanism 4 and microprocessor structure 8, sample observed image can be collected, and carry out Treatment Analysis, because video image display 15 and x-ray analysis show the setting of 11, strengthen the functional of projection objective, improve the afunction of original technology, due to the first object lens 3, the combination of the second object lens 5 and projection lens 6, and the second object lens 5 have a concave mirror and have the catadioptric objective of two groups of lens, improve the deficiency of original technology imaging, due to objective table 10 being provided with coating, the loss of sample light source in imaging process can be avoided, projection objective is penetrated in turning back of this intelligence, by force intelligent, imaging effect is good, function is many, greatly improve the work efficiency of projection objective.
Although illustrate and describe embodiments of the invention, for the ordinary skill in the art, be appreciated that and can carry out multiple change, amendment, replacement and modification to these embodiments without departing from the principles and spirit of the present invention, scope of the present invention is by claims and equivalents thereof.
Claims (5)
1. projection objective is penetrated in intelligent turning back, comprise objective table (10), sample (9), electrical lighting part (16), imaging amplifier section (17) and video recording part (18), it is characterized in that: described electrical lighting part (16) comprises electron gun (1) and condenser (2), described imaging amplifier section (17) comprises the first object lens (3), second object lens (5), projection lens (6) and sample (9), described video recording part (18) comprises image storage mechanism (4), microprocessor structure (8), x-ray analysis display (11) and video image display (15), described objective table (10) is provided with sample (9) and is arranged on the light collecting layer (12) at sample (9) top, thing field in sample (9) is imaged onto on the image field in image planes by described light collecting layer (12), thing field is imaged onto the second object lens (5) by described projection lens (6), thing field is imaged onto the first object lens (3) by described second object lens (5) again, described second object lens (5) have a concave mirror and have the catadioptric objective of two groups of lens, described first object lens (3) top is provided with electron gun (1) and is arranged on the condenser (2) on electron gun (1).
2. turning back of a kind of intelligence according to claim 1 penetrates projection objective, it is characterized in that: described sample (9) side is provided with electron detector (7), described electron detector (7) is connected by electric signal with microprocessor structure (8) with described image storage mechanism (4).
3. turning back of a kind of intelligence according to claim 1 penetrates projection objective, it is characterized in that: described sample (9) opposite side is provided with loose look electron detector (14), described loose look electron detector (14) is shown (15) and is connected by electric signal with described video image.
4. the turning back of a kind of intelligence according to claim 1 or 3 penetrates projection objective, it is characterized in that: described loose look electron detector (14) side is provided with X-ray detector (13), described X-ray detector (13) and described loose look electron detector (14) are electrical connected, and described X-ray detector (13) is shown (11) and is connected by electric signal with described x-ray analysis.
5. turning back of a kind of intelligence according to claim 1 penetrates projection objective, it is characterized in that: described objective table (10) is provided with coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610028582.3A CN105549190A (en) | 2016-01-15 | 2016-01-15 | Intelligent refraction and reflection projection objective lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610028582.3A CN105549190A (en) | 2016-01-15 | 2016-01-15 | Intelligent refraction and reflection projection objective lens |
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| Publication Number | Publication Date |
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| CN105549190A true CN105549190A (en) | 2016-05-04 |
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| CN201610028582.3A Pending CN105549190A (en) | 2016-01-15 | 2016-01-15 | Intelligent refraction and reflection projection objective lens |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060077370A1 (en) * | 2004-10-12 | 2006-04-13 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method |
| JP2010538328A (en) * | 2007-09-05 | 2010-12-09 | カール・ツァイス・エスエムティー・アーゲー | Color-corrected catadioptric objective and projection exposure apparatus including the same |
| CN102870031A (en) * | 2010-04-28 | 2013-01-09 | 佳能株式会社 | Catadioptric optical system and image-pickup apparatus having the same |
| CN102955235A (en) * | 2011-08-22 | 2013-03-06 | 上海微电子装备有限公司 | Refraction and reflection projection optical system with large view field |
| CN104040676A (en) * | 2012-01-06 | 2014-09-10 | 株式会社日立高新技术 | Charged particle beam device and inclined observation image display method |
| CN104897700A (en) * | 2015-06-10 | 2015-09-09 | 北京工业大学 | Device and method for transmission-scattering imaging of nanometer liquid sample in scanning electron microscope |
-
2016
- 2016-01-15 CN CN201610028582.3A patent/CN105549190A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060077370A1 (en) * | 2004-10-12 | 2006-04-13 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method |
| JP2010538328A (en) * | 2007-09-05 | 2010-12-09 | カール・ツァイス・エスエムティー・アーゲー | Color-corrected catadioptric objective and projection exposure apparatus including the same |
| CN102870031A (en) * | 2010-04-28 | 2013-01-09 | 佳能株式会社 | Catadioptric optical system and image-pickup apparatus having the same |
| CN102955235A (en) * | 2011-08-22 | 2013-03-06 | 上海微电子装备有限公司 | Refraction and reflection projection optical system with large view field |
| CN104040676A (en) * | 2012-01-06 | 2014-09-10 | 株式会社日立高新技术 | Charged particle beam device and inclined observation image display method |
| CN104897700A (en) * | 2015-06-10 | 2015-09-09 | 北京工业大学 | Device and method for transmission-scattering imaging of nanometer liquid sample in scanning electron microscope |
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Application publication date: 20160504 |