CN105549139B - A kind of preparation method of counter infrared ray light microscopic piece - Google Patents

A kind of preparation method of counter infrared ray light microscopic piece Download PDF

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Publication number
CN105549139B
CN105549139B CN201610025104.7A CN201610025104A CN105549139B CN 105549139 B CN105549139 B CN 105549139B CN 201610025104 A CN201610025104 A CN 201610025104A CN 105549139 B CN105549139 B CN 105549139B
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coating
infrared ray
evaporation
ray light
thickness
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CN105549139A (en
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吴天恕
简志仰
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XINGHUI OPTICS (XIAMEN) CO Ltd
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XINGHUI OPTICS (XIAMEN) CO Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
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Abstract

The present invention relates to a kind of preparation method of counter infrared ray light microscopic piece, the first coating, the second coating and the 3rd coating is deposited successively on substrate i.e. by the way of vacuum evaporation, described substrate is glass lens or high polymer material eyeglass, the first described coating is silicon oxide layer, the second described coating is one or more kinds of combinations in plated copper film, golden plated film, platinum plated film, silver coating, and the 3rd described coating is alundum (Al2O3) layer.The eyeglass being prepared according to the method described in the present invention reaches 99.5% ± 1% to the attenuating of infrared light, and has heat-blocking action;Lens surface is alundum (Al2O3), has anti-oxidant, wear-resisting function, and eyeglass is durable, can anti-scratch, have good practical function, and its production cost is relatively low, has very high market popularization value.

Description

A kind of preparation method of counter infrared ray light microscopic piece
Technical field
The present invention relates to a kind of preparation method of eyeglass, more particularly to a kind of preparation method of counter infrared ray light microscopic piece.
Background technology
During production operation, often at high temperature and spread all in the working environment of infrared ray, as electric welding field, high-temperature smelting pot, High-voltage arc operation, scientific experiment etc.;Because infrared ray has strong penetration power to human body skin, hypodermis, thus it is related Practitioner needs effective P.P, the especially protection to eyes, it is necessary to wears the eyepiece with specific function.
Existing similar protection glass utilizes adds counter infrared ray light microscopic piece made of color masterbatch injection, such as hair in lens materials Bright patent CN 102692731B, its material color masterbatch smell weight used, influence wearer comfort;And lens materials do not possess Heat conduction and radiating effect, influence wearer comfort;3rd, the optimal operating temperature of color masterbatch is 230 degrees Celsius when producing the product To 250 degrees Celsius, the counter infrared ray factor survival rate more than 90% of color masterbatch under optimal operating temperature, due to needing to be molded, And the operating temperature being molded can cause color masterbatch to be carbonized generally at 260-280 degrees Celsius, it is easy to cause the counter infrared ray factor to fail, Stain is formed, fraction defective is up to 20% or so.
The U of utility model patent CN 203101752 disclose a kind of lens structure, comprising blue light filter layer and prevent infrared The impedance layer of harmful light intrusion such as line, ultraviolet, suitable for the crowd of long-term viewing TV, computer screen, is not suitable for but High temperature and the worker for spreading all over infrared ray working environment.Utility model patent CN204694934U disclose it is a kind of have aeroge every The work glasses of Thermal protection film layer, playing a part of thermal insulation protection using the heat conductivility difference of aeroge, it makes trouble, and not Infrared light can effectively be stopped.
The content of the invention
Problem to be solved by this invention is to overcome the shortcomings of the prior art, there is provided one kind has counter infrared ray light effect Eyeglass preparation method, the eyeglass also has the heat-insulated and function of anti-scratch simultaneously.
The eyeglass substrate can use the eyeglass of the eyeglass either high polymer material of glass material, such as polycarbonate, gather Methyl methacrylate PMMA, nylon PA etc..
It is to improve surface property to carry out intensive treatment to substrate so that the first coating is easier to plate.
Silica (SiO) layer of first coating can improve the adhesive force of substrate, be advantageous to the generation of the second coating.It is plated Film operation is specifically:LP-1200EBA vacuum coating equipments are set in a manner of time control (to should be in equipment operating manual Method x2) plated film is carried out, set device operating condition is:Duration is set to 30 seconds (S), and the electric current for resisting heating is set to 125 amperes (A), oxygenation capacity is set to 0, and vacuum coefficient is set to 1.0 × 10 in furnace chamber-4Torr.The evaporation of the silicon oxide layer of the first layer is used and supported Anti- heating is realized, suitable thickness of coating, thickness 0.5-1um are reached by control time.
Second coating plays the effect for absorbing infrared ray, realizes the effect of counter infrared ray light, and because metal not only has The effect of reflection light, and good heat conductivity, good heat absorption conductive and radiating can be played a part of.
3rd coating primarily serves anti-scratch, protection product does not fall off, prevents from being oxidized, the effect of heat resistanceheat resistant, is the eyeglass The core technology of plated film.
The thickness of the second film layer of strict monitoring and the 3rd coating is needed during operation, the second coating thickness is 1200 ± 50nm, 3rd coating thickness is 600 ± 50nm.3rd thickness of coating can cause the second plating tunic of plating easily to come off less than 550nm, high In 650nm, its own also can easily come off;Second thickness of coating higher than 1250nm and can all cause infrared resistant less than 1150nm Effect is had a greatly reduced quality or even failed.
The depth scratched during eyeglass use, the generally thickness not over coating oxide-film, so being not enough to be corrupted to mirror Piece, therefore the eyeglass is provided simultaneously with the function of anti-scratch.
Second coating is plated copper film, or gold, platinum, silvering, plated film operation concrete operations are:Set vacuum coating Machine is deposited in a manner of optical thickness monitor by the way of the tungsten boat of heating evaporation source, and set device operating condition is:Instead Ejected wave length is set to 500 nanometers, and Thickness Monitoring is set to 0.25QWOT, 315 type tungsten boats, and electric current is initially 250 amperes, is up to 300 Ampere, oxygenation capacity are set to 0sccm, and vacuum coefficient is set to 8 × 10- in furnace chamber5Torr。
3rd coating is alundum (Al2O3) layer, and plated film operation concrete operations are:Setting vacuum coating equipment is supervised with blooming Prosecutor formula is deposited using electron gun, and set device operating condition is:Reflection wavelength is set to 500 nanometers, and Thickness Monitoring is set to 1.90QWOT, the electric current of electron gun are set to 380 amperes, and oxygenation capacity is set to 0, and vacuum coefficient is set to 8 × 10- in furnace chamber5Torr。
The counter infrared ray light microscopic piece of the present invention is to carry out evaporation stratified film to eyeglass substrate using vacuum coating equipment, so as to Eyeglass of the wavelength in 780--2000nm light that can decay is made, its attenuation rate to infrared light reaches 99.5% ± 1%, And possess absorption heat, comfort level is improved, there can be certain commercial use in some application of special occasions.
Concrete scheme is as follows:
A kind of preparation method of counter infrared ray light microscopic piece, comprises the following steps:Strengthen:Substrate is cleaned, after normal temperature dries, immersion In liquid medicine polysiloxane solution is strengthened, drying is taken out;Evaporation:The coating of vacuum evaporation first, the second coating successively on substrate With the 3rd coating, the first described coating is silicon oxide layer, and the second described coating is plated copper film, golden plated film, platinum plated film, silver plating One or more kinds of combinations in film, the 3rd described coating are alundum (Al2O3) layer.
Its further technical scheme is that the method for the described coating of evaporation first is:Plated film duration is set to 30 seconds, resistance The electric current of heating is set to 125 amperes, and oxygenation capacity is set to 0, and vacuum coefficient is set to 1.0 × 10 in furnace chamber-4Torr。
Its further technical scheme is that the method for the described coating of evaporation second is:Using the side of heating evaporation tungsten boat Formula, reflection wavelength are set to 500 nanometers, and Thickness Monitoring is set to 0.25QWOT, 315 type tungsten boats, and electric current is initially 250 amperes, maximum For 300 amperes, oxygenation capacity is set to 0sccm, and vacuum coefficient is set to 8 × 10 in furnace chamber-5Torr。
Its further technical scheme is that the method for the described coating of evaporation the 3rd is:Using electronics marksmanship, reflection wavelength It is set to 500 nanometers, Thickness Monitoring is set to 1.90QWOT, and the electric current of electron gun is set to 380 amperes, and oxygenation capacity is set to 0, true in furnace chamber Duty factor is set to 8 × 10-5Torr。
Beneficial effect:(1) eyeglass prepared by the present invention has the function of counter infrared ray light, its attenuating to infrared light Reach 99.5% ± 1%, protection effect is excellent;(2) eyeglass prepared by the present invention, which has, absorbs external heat and progressively radiates Effect, effectively prevent heat be passed further to human eye, play thermal insulation protection effect;(3) lens surface involved in the present invention For alundum (Al2O3), there is anti-oxidant, wear-resisting function, eyeglass is durable, can anti-scratch, have good practical function;(4) this hair Bright production cost is relatively low, has very high market popularization value.
Brief description of the drawings
Fig. 1 is a kind of structural representation of counter infrared ray light microscopic piece provided in an embodiment of the present invention;
Fig. 2 is a kind of optical performance test figure of counter infrared ray light microscopic piece provided in an embodiment of the present invention.
Embodiment
Technical solution of the present invention is further elaborated with reference to the accompanying drawings and examples.Unreceipted specific skill in embodiment Art or condition person, carried out according to the technology described by document in the art or condition or according to product description.Examination used Agent or the unreceipted production firm person of instrument, being can be by the conventional products of acquisition purchased in market.
Fig. 1 is a kind of structural representation of counter infrared ray light microscopic piece, 1 is substrate, and 2 be the first coating, and 3 be the second coating, 4 For the 3rd coating.
Embodiment 1
Intensive treatment is carried out to substrate:Cleaned with clear water, hang over normal temperature on utensil and dry, be immersed in and strengthen liquid medicine (poly- silicon Oxygen alkane solution) in forced fluid is dried after 120 seconds.Reinforcing is to improve surface property so that the first coating is easier to plate On.
The model LP- that vacuum coating equipment is produced using auspicious continent vacuum machine (share) company, Long Pian Industrial Co., Ltd.s 1200EBA vacuum coating equipment, to carry out evaporation operation to eyeglass substrate.Evaporation mode in equipment can select electron gun to steam Hair and heating tungsten boat evaporation.The embodiment is to carry out vacuum evaporation successively on a surface of eyeglass substrate, is respectively:First plating Layer is silica, and the second coating is copper, and the 3rd coating is alundum (Al2O3) layer.
The vacuum coating operation of eyeglass is well known coating technique in the industry, and only different piece is described in detail below, Undeclared part is realized using usual technology in the industry, be may be referred to existing related data, is no longer repeated in this Property explanation.
First coating silicon oxide film operation concrete operations are:LP-1200EBA vacuum coating equipments are set in a manner of time control Plated film is carried out (to method x2 that should be in equipment operating manual), set device operating condition is:Duration is set to 30 seconds (S), The electric current of resistance heating is set to 125 amperes (A), and oxygenation capacity is set to 0, and vacuum coefficient is set to 1.0 × 10 in furnace chamber-4Torr。
Second coating plated copper film operation concrete operations are:The LP-1200EBA vacuum coating equipments are set with optical thickness monitor Mode (to method x1 or x2 that should be in equipment operating manual), and be deposited by the way of the tungsten boat of heating evaporation source, Set device operating condition is:Reflection wavelength is set to 420 nanometers (nm), and Thickness Monitoring is set to the 0.25QWOT (thickness of 1/4 wavelength For 1QWOT), the electrode current of 315 type tungsten boats (315 be a kind of model of size) is 250-300 amperes, specifically, at the beginning Electric current is arranged to 250 amperes, and burning is stage casing, and stage casing tungsten boat is burnt down, and can burn the tungsten boat at both ends, and the electric current at this time needed is just Greater, maximum is arranged to 300 amperes.Oxygenation capacity is set to 0sccm (standard-state cubic centimeter Per minute, every point of mark condition milliliter), vacuum coefficient is set to 8 × 10 in furnace chamber-5Torr, so as to the eyeglass substrate plated the The physical film thickness of two layers of layers of copper is closely monitored as 1200 ± 50 nanometers (nm).
Second coating can also be one kind in gold, platinum, silver, Huo Zhetong, gold, platinum, the composite deposite of silver.
The evaporation of second coating is realized by the way of the tungsten boat of heating evaporation source, is a kind of vacuum of strict Thickness Monitoring Plated film production process, suitable for the thickness to being monitored requirement it is higher in the case of use.
The plated film operation of 3rd coating alundum (Al2O3) layer is specifically:The LP-1200EBA vacuum coating equipments are set with optics Film thickness monitoring mode carries out plated film (to method x1 or x2 that should be in equipment operating manual), and set device operating condition is: Reflection wavelength is set to 500 nanometers (nm), and Thickness Monitoring is set to 1.90QWOT (thickness of 1/4 wavelength is 1QWOT), the electricity of electron gun Stream is set to 380 amperes, and oxygenation capacity is set to 0, and vacuum coefficient is set to 8 × 10 in furnace chamber-5Torr, so as to the eyeglass substrate plated the The physical film thickness of the alundum (Al2O3) layer of two coating is closely monitored as 600 ± 50 nanometers (nm).Three oxidations of the 3rd coating The evaporation of two aluminium laminations using EB electronics marksmanship realize, be a kind of vacuum coating production process of strict Thickness Monitoring, suitable for pair Used in the case that the requirement of the thickness monitored is higher.
Decay (780---2000NM) wavelength light (mainly infrared light portion can be made by above-mentioned vacuum evaporation operation Point) 99.5% ± 1% counter infrared ray light microscopic piece, as shown in figure 1, the counter infrared ray light microscopic piece includes:Substrate (1), the first coating (2), the second coating (3), the 3rd coating (4), wherein, the second coating thickness is 1200 ± 50 nanometers (nm), the 3rd coating thickness For 600 ± 50 nanometers (nm).
Two counter infrared ray light microscopic pieces that method described above is made, carry out optical performance test, using Sunglasses lenses sun clips CE respectively Valuation Standard (standard:EN 1836:2005(A1:2007)) tested, test result is shown in Fig. 2.
Figure it is seen that the counter infrared ray light microscopic piece prepared by the present invention can reach decay 780---2000NM wavelength The effect of light, according to IR5 standard logarithmics according to carrying out analysis calculating, it goes out to have decayed 99.5% ± 1% to infrared portions, it is seen that The positive effect of the eyeglass counter infrared ray, available for infrared light is protected, there is certain commercial use.
Because metal not only has the function that reflection light, and good heat conductivity, good heat absorption conductive can be played With the effect of radiating, so eyeglass also has a heat-insulated function, and the depth scratched during eyeglass use, generally not over coating The thickness of oxide-film, so be not enough to be corrupted to eyeglass, therefore the eyeglass is provided simultaneously with the function of anti-scratch.
Although embodiments of the invention have been shown and described above, it is to be understood that above-described embodiment is example Property, it is impossible to limitation of the present invention is interpreted as, one of ordinary skill in the art is not departing from the principle and objective of the present invention In the case of above-described embodiment can be changed within the scope of the invention, change, replace and modification.

Claims (4)

1. a kind of preparation method of counter infrared ray light microscopic piece, its spy are:Comprise the following steps:
Strengthen:Substrate is cleaned, after normal temperature dries, is immersed in and strengthens in liquid medicine polysiloxane solution, take out drying;
Evaporation:The coating of vacuum evaporation first, the second coating and the 3rd coating, the first described coating are thickness successively on substrate For 0.5-1um silicon oxide layer, the second described coating be thickness be 1200 ± 50nm plated copper film, golden plated film, platinum plated film, silver One or more kinds of combinations in plated film, the 3rd described coating are the alundum (Al2O3) layer that thickness is 600 ± 50nm.
A kind of 2. preparation method of counter infrared ray light microscopic piece according to claim 1, it is characterised in that:Described evaporation first The method of coating is:Plated film duration is set to 30 seconds, and the electric current for resisting heating is set to 125 amperes, and oxygenation capacity is set to 0, true in furnace chamber Duty factor is set to 1.0 × 10-4Torr。
A kind of 3. preparation method of counter infrared ray light microscopic piece according to claim 1, it is characterised in that:Described evaporation second The method of coating is:By the way of heating evaporation tungsten boat, reflection wavelength is set to 500 nanometers, and Thickness Monitoring is set to 0.25QWOT, 315 type tungsten boats, electric current are initially 250 amperes, are up to 300 amperes, and oxygenation capacity is set to 0sccm, and vacuum coefficient is set to 8 in furnace chamber ×10-5Torr。
A kind of 4. preparation method of counter infrared ray light microscopic piece according to claim 1, it is characterised in that:Described evaporation the 3rd The method of coating is:Using electronics marksmanship, reflection wavelength is set to 500 nanometers, and Thickness Monitoring is set to 1.90QWOT, the electricity of electron gun Stream is set to 380 amperes, and oxygenation capacity is set to 0, and vacuum coefficient is set to 8 × 10 in furnace chamber-5Torr。
CN201610025104.7A 2016-01-15 2016-01-15 A kind of preparation method of counter infrared ray light microscopic piece Active CN105549139B (en)

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CN100543499C (en) * 2006-10-24 2009-09-23 北京航空航天大学 A kind of solar energy selective absorption coating
CN201917731U (en) * 2010-10-28 2011-08-03 北京金吉奥梦科技有限公司 Anti-infrared spectacle glass
JP2012189683A (en) * 2011-03-09 2012-10-04 Nitto Denko Corp Infrared ray reflection film
CN103029371A (en) * 2012-12-31 2013-04-10 郭射宇 Solar selective absorption membrane and preparation method thereof

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