CN105548204B - Linear scanning optical system - Google Patents
Linear scanning optical system Download PDFInfo
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- CN105548204B CN105548204B CN201610059523.2A CN201610059523A CN105548204B CN 105548204 B CN105548204 B CN 105548204B CN 201610059523 A CN201610059523 A CN 201610059523A CN 105548204 B CN105548204 B CN 105548204B
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- light source
- fresnel lenses
- source group
- illumination
- line scanning
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
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- Health & Medical Sciences (AREA)
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- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The present invention discloses a kind of line scanning optics, including the first illumination, and first illumination includes the first Fresnel Lenses and first light source group；First Fresnel Lenses is set to above object under test, and acute angle is equipped between first Fresnel Lenses and object under test, and first Fresnel Lenses has the first focal plane and the first focus；The first light source group includes two or more even number first light sources, and the first light source is located on first focal plane；The line of the first light source has the first perpendicular bisector, and first perpendicular bisector passes through first focus, and first light source described in even number is arranged symmetrically about first perpendicular bisector.The beneficial effects of the invention are as follows：The environment of dark field is needed when line scanning, if determinand surface is textured or raised, the present invention can realize the dark-ground illumination (low angle) of line scanning under one group of light source, save design space and the cost of optical detection.
Description
Technical field
The invention belongs to optical system detection field, specifically a kind of linear scanning optical system.
Background technique
Optical detection apparatus such as AOI (auto optical inspection, automated optical inspection) is in linear scan
There can be the case where needing dark field, such as when there is the situation of indentation, scratch, foreign matter texture or concaveconvex structure on determinand surface, lead to
The environment that often may require that dark field, that is, need the side lighting of certain angle.
And the linear lamp source that existing linear scan uses, the intensity of positive light (perpendicular to the lamp source surface of emission) are higher, and
Lateral light is weaker.The imaging for thereby resulting in lateral light is more fuzzy, therefore in the optical detection scanned online, needs multiple sets of light sources
Carrying out cooperation can be only achieved intensity needed for lateral light, to improve imaging effect.
The linear scanning optical system of existing optical detection apparatus generally comprises linear scan lamp source, image capture unit
(such as camera), as shown in Figure 1, image capture unit is set to the top of object under test 1, light source group D is set to image capture
The side of device provides side lighting for image capture unit；For simplicity, image capture unit is not painted in figure.
It is stronger perpendicular to the positive light L1 of the surface of emission of light source group D, and lateral light L2 is weaker.Positive light L1 passes through
Reflection light after object under test 1 constitutes the principal rays of line scanning imagery, and two sides to light L2 after object under test 1
Reflection light camera imaging is contributed it is less, when causing dark-ground illumination insufficient, therefore being imaged, the reflected light institute of lateral light L2 at
Picture it is not clear enough.
Summary of the invention
The problem of for background technique, the purpose of the present invention is to provide one kind can realize under one group of light source
Line scanning dark-ground illumination (low angle), save optical detection design space and cost, improve space utilization rate it is linear
Scanning optics.
In order to achieve the above objectives, the line scanning optics that the present invention designs, it is characterised in that：Including the first illumination, institute
Stating the first illumination includes the first Fresnel Lenses and first light source group；
First Fresnel Lenses is set to above object under test, and first Fresnel Lenses and object under test it
Between be equipped with acute angle, first Fresnel Lenses have the first focal plane and the first focus；
The first light source group includes two or more even number first light sources, and the first light source is located at described
On first focal plane；
The line of the first light source has the first perpendicular bisector, and first perpendicular bisector passes through first focus, and even
Several first light sources are arranged symmetrically about first perpendicular bisector.
Preferably, first illumination further includes the first column convex lens, and it is luxuriant and rich with fragrance that the first column convex lens is located at first
Between Nie Er lens and first light source group and close to first light source group.
Preferably, first light source group passes through where the first emergent ray and the first Fresnel Lenses of the first Fresnel Lenses
The angle of plane be 30 °~60 °.
Preferably, first Fresnel Lenses is linear Fresnel lens, and the optical center of first Fresnel Lenses
Positioned at its geometric center.
Preferably, line scanning optics further includes the second illumination, and second illumination includes the second Fresnel
Lens and second light source group, second Fresnel Lenses are set to above object under test, and second Fresnel Lenses with
Acute angle is equipped between object under test, second Fresnel Lenses has the second focal plane and the second focus；Described second
Light source group includes two or more even number second light sources, and the second light source is located on the second focal plane.
Preferably, the line of the second light source has the second perpendicular bisector, and second perpendicular bisector is burnt by described second
Point, and second light source described in even number is arranged symmetrically about relatively described second perpendicular bisector.
Preferably, second illumination further includes the second column convex lens, and it is luxuriant and rich with fragrance that the second column convex lens is located at second
Between Nie Er lens and second light source group and close to second light source group.
Preferably, the second light source group passes through the second emergent ray and the second Fresnel Lenses of the second Fresnel Lenses
The angle of the plane at place is 30 °~60 °.
Preferably, second Fresnel Lenses is linear Fresnel lens, and the optical center of second Fresnel Lenses
Positioned at its geometric center.
As another preferred solution, line scanning optics further includes the second illumination, and second illumination includes second luxuriant and rich with fragrance
Nie Er lens and second light source group, second Fresnel Lenses have the second focal plane and the second focus；First focus
There is middle vertical plane with the line of the second focus, second illumination and first illumination are symmetrical about above-mentioned middle vertical plane.
The beneficial effects of the invention are as follows：The environment that dark field is needed when line scanning, if determinand surface is textured or raised,
The present invention can realize the dark-ground illumination (low angle) of line scanning under one group of light source, improve the intensity of dark-ground illumination, simultaneously
Save design space and the cost of optical detection.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the linear scanning optical system of existing optical detection apparatus；
Fig. 2 is the schematic perspective view of linear scanning optical system embodiment one of the present invention；
Fig. 3 is the schematic front view of linear scanning optical system embodiment one of the present invention；
Fig. 4 is the left view schematic diagram of Fig. 3；
Fig. 5 is the schematic perspective view of linear scanning optical system embodiment two of the present invention；
Fig. 6 is the schematic front view of linear scanning optical system embodiment two of the present invention；
Fig. 7 is the left view schematic diagram of Fig. 6；
Fig. 8 is the schematic perspective view of linear scanning optical system embodiment three of the present invention；
Fig. 9 is the schematic front view of linear scanning optical system embodiment three of the present invention；
Figure 10 is the left view schematic diagram of Fig. 9.
In figure：Object under test 1, the first Fresnel Lenses 2 (the first focal plane 2.1, the second focus 2.2), first light source 3
(the first emergent ray 3.1) first perpendicular bisector 4, second Fresnel Lenses 5 (the second focal plane 5.1, the second focus 5.2) second light
The second perpendicular bisector 7 of source 6 (the second emergent ray 6.1), middle vertical plane 8, the first column convex lens 9, the second column convex lens 10.
Specific embodiment
Below by Fig. 2~Fig. 7 and the modes of some alternative embodiments of the invention is enumerated, to technical side of the invention
Case (including optimal technical scheme) is described in further detail, any technical characteristic and any technical side in the present embodiment
Case does not limit the scope of the invention.
Linear scanning system as shown in Figures 2 and 3, including the first illumination, first illumination include that the first Fresnel is saturating
Mirror 2 and first light source group, first Fresnel Lenses 2 are set to 1 top of object under test, and first Fresnel Lenses 2
Acute angle is equipped between object under test 1, first Fresnel Lenses 2 has the first focal plane 2.1 and the second focus
2.2；The first light source group includes two or more even number first light sources 3, and the first light source 3 is located at described the
On one focal plane 2.1；The line of the first light source 3 has the first perpendicular bisector 4, and first perpendicular bisector 4 passes through described first
The focus 2.2 of Fresnel Lenses 2, and first light source 3 described in even number is arranged symmetrically about first perpendicular bisector 4.
As shown in figure 3, first light source group passes through the first emergent ray 3.1 of the first Fresnel Lenses 2 under main view angle
Angle with the plane where the first Fresnel Lenses 2 is α, specifically, throwing of first emergent ray 3.1 in the first plane
The angle of the projection of shadow and the first Fresnel Lenses 2 in the first plane is α, 30 °≤α≤60 °；Wherein, the first plane is vertical
Plane where object under test 1 and with the length direction of the first Fresnel Lenses 2 parallel through the first Fresnel Lenses 2 of adjustment
Length, the first Fresnel Lenses 2 focal length and first light source 3 between relative position, with remain α be 30 °~60 °,
It so ensure that the light of 4 two sides of the first perpendicular bisector, the i.e. light and first that the first light source 3 of 4 side of the first perpendicular bisector issues
Linear overlapping region appropriate can occur in the light that the first light source 3 of 4 other side of perpendicular bisector issues, and raising is irradiated in determinand
The uniformity of light on body 1.
As shown in figure 4, the light that first light source 3 issues after the first Fresnel Lenses 2 by forming in figure when left view angle
The first parallel light 3.1, the angle of 2 place plane of the first light 3.1 and the first Fresnel Lenses is γ at this time, specific next
It says, the angle of projection and first Fresnel Lenses 2 projection second plane in of first emergent ray 3.1 in the second plane
For γ, 20 °≤γ≤70 °；The wherein plane where the vertical object under test of the second plane 1 and vertical first Fresnel Lenses 2
Length direction.Preferably, the first Fresnel Lenses 2 is linear structure, when the light that first light source 3 issues is saturating by the first Fresnel
Linear light sorurce is formed after mirror 2, and first light source group is designed as even number with respect to the symmetrical first light source 3 of the first perpendicular bisector 4, mentions
The high uniformity of the light intensity of the linear light sorurce.The setting of first light source group and Fresnel Lenses as a result, through the invention,
Linear light sorurce required for linear scan is realized, while ensure that the intensity and the uniformity of linear light sorurce, to solve existing
There is the positive light of linear scanning light source in technology relatively strong and technical problem that lateral light is weaker.
If Fig. 5~Fig. 7 show the second embodiment of the present invention, in this example, first illumination further includes the first column
Convex lens 9, the first column convex lens 9 is between the first Fresnel Lenses 2 and first light source group and close to first light source
Group.In the main view of the present embodiment, the light of the sending of the first light source 3 of first light source group passes through the first column convex lens 9
Index path afterwards is similar with the index path in the main view of above-mentioned first embodiment, i.e., first light source group is saturating by the first Fresnel
First emergent ray 3.1 of mirror 2 and the angle of the plane where the first Fresnel Lenses 2 are β ', i.e., the first emergent ray 3.1 exists
Projection in first plane and the angle of projection of first Fresnel Lenses 2 in the first plane are β ', and 30 °≤β '≤60 °.
Similarly, under the left view visual angle in the present embodiment, the first light 3.1 and the angle of 2 place plane of the first Fresnel Lenses are
γ ', specifically, projection of first emergent ray 3.1 in the second plane is with the first Fresnel Lenses 2 in the second plane
The angle of projection is γ ', 20 °≤γ '≤70 °.And with above-described embodiment one the difference is that, under left view visual angle, this reality
The light for applying the first light source 3 of example becomes directional light after the first column convex lens 9, and the directional light is using the first phenanthrene
Nie Er lens 2 are to form the first light 3.1 assembled, so that linear light sorurce more tends to when being irradiated on object under test 1
It is linear, the linearity of linear light sorurce is improved, to improve the scanning accuracy of linear scan.
As shown in figs. 8-10, preferably, line scanning optics further includes the second illumination, second illumination
Including the second Fresnel Lenses 5 and second light source group, second Fresnel Lenses 5 is set to 1 top of object under test, and described
Acute angle is equipped between second Fresnel Lenses 5 and object under test 1, second Fresnel Lenses 5 has the second focal plane
5.1 and second focus 5.2；The second light source group includes two or more even number second light sources 6, second light
Source 6 is located on the second focal plane 5.1；The line of the second light source 6 has the second perpendicular bisector 7, and second perpendicular bisector 7 passes through
Second focus 5.2, and second light source 6 described in even number is arranged symmetrically about relatively described second perpendicular bisector 7；
As shown in Figure 9 and Figure 10, the second light source group by the second emergent ray 6.1 of the second Fresnel Lenses 5 with
The angle of plane where second Fresnel Lenses 5 is θ, i.e., under main perspective as shown in Figure 9, the second emergent ray 6.1 is the
Projection in three planes and the angle of projection of first Fresnel Lenses 5 in third plane are θ, 30 °≤θ≤60 °, wherein
Plane where the vertical object under test of the third plane 1 and length direction for being parallel to the second Fresnel Lenses 5 similarly passes through
The relative position between the length of the second Fresnel Lenses 5, the focal length and second light source 6 of the second Fresnel Lenses 5 is adjusted, with
It remains that θ is 30 °~60 °, and then guarantees that the light of 7 two sides of the second perpendicular bisector forms linear overlapping region appropriate, improve
It is irradiated in the uniformity of the light on object under test 1.
Preferably, first Fresnel Lenses 2 and the second Fresnel Lenses 5 are linear Fresnel lens；Described
The optical center of one Fresnel Lenses 2 is located at its geometric center；The optical center of second Fresnel Lenses 5 is located at its geometric center, from
And further improve the uniformity of the light intensity of linear light sorurce
As another preferred solution, it is described second illumination include the second Fresnel Lenses 5 and second light source group, described second
Fresnel Lenses 5 has the second focal plane 5.1 and the second focus 5.2；The line of first focus 2.2 and the second focus 5.2
With middle vertical plane 8, second illumination is symmetrical about above-mentioned middle vertical plane 8 with the first illumination, and the equal of linear light sorurce so can be improved
Evenness.But in practical operation, first light source group and second light source group can be not in relation to middle vertical plane 8 and be symmetrical arranged, because certain
In the case of, the defect on object under test 1 is in the case where first light source group and second light source group are about the symmetrical situation of middle vertical plane 8 can not
See, and is visible in the case where first light source group and second light source group are about the asymmetric situation of middle vertical plane 8.Therefore people from this field
Member can adjust the relative position of first light source group Yu second light source group according to actual needs.
Preferably, first illumination further includes the first column convex lens 9, and it is luxuriant and rich with fragrance that the first column convex lens is located at first
Between Nie Er lens 2 and first light source group and close to first light source group；Second illumination further includes the second column convex lens 10,
The second column convex lens 10 is such as schemed between the second Fresnel Lenses 5 and second light source group and close to second light source group
Shown in 10, in the embodiment, second light source 6 passes through the optical path and first of the second cylindrical lenses 10 and the second Fresnel Lenses 5
Light source 3 is similar by the optical path of the first cylindrical lenses 9 and the first Fresnel Lenses 2, and details are not described herein again.Compare of the invention
One embodiment and second embodiment, the embodiment further improve the light intensity of linear light sorurce, preferably solve the prior art
The weaker technical problem of middle lateral light light intensity.
Claims (9)
1. a kind of line scanning optics, it is characterised in that：Including the first illumination, first illumination includes that the first Fresnel is saturating
Mirror and first light source group；
First Fresnel Lenses is set to above object under test, and is set between first Fresnel Lenses and object under test
There is acute angle, first Fresnel Lenses has the first focal plane and the first focus；
The first light source group includes two or more even number first light sources, and the first light source is located at described first
On focal plane；
The line of the first light source has the first perpendicular bisector, and first perpendicular bisector passes through first focus, and even number
The first light source is arranged symmetrically about first perpendicular bisector；
First light source group passes through the first emergent ray of the first Fresnel Lenses and the folder of the plane where the first Fresnel Lenses
Angle is 30 °~60 °.
2. line scanning optics according to claim 1, it is characterised in that：First illumination further includes the first column
Convex lens, the first column convex lens is between the first Fresnel Lenses and first light source group and close to first light source group.
3. line scanning optics according to claim 1, it is characterised in that：First Fresnel Lenses is linear luxuriant and rich with fragrance
Nie Er lens, and the optical center of first Fresnel Lenses is located at its geometric center.
4. line scanning optics according to claim 1 to 3, it is characterised in that：It further include the second illumination, it is described
Second illumination includes the second Fresnel Lenses and second light source group, and second Fresnel Lenses is set to above object under test,
And acute angle is equipped between second Fresnel Lenses and object under test, second Fresnel Lenses has the second coke flat
Face and the second focus；The second light source group includes two or more even number second light sources, the second light source position
In on the second focal plane.
5. line scanning optics according to claim 4, it is characterised in that：The line of the second light source has second
Perpendicular bisector, second perpendicular bisector passes through second focus, and second light source described in even number is about in relatively described second
Vertical line is arranged symmetrically.
6. line scanning optics according to claim 4, it is characterised in that：Second illumination further includes the second column
Convex lens, the second column convex lens is between the second Fresnel Lenses and second light source group and close to second light source group.
7. line scanning optics according to claim 4, it is characterised in that：The second light source group passes through the second luxuriant and rich with fragrance alunite
Second emergent ray of that lens and the angle of the plane where the second Fresnel Lenses are 30 °~60 °.
8. line scanning optics according to claim 4, it is characterised in that：Second Fresnel Lenses is linear luxuriant and rich with fragrance
Nie Er lens, and the optical center of second Fresnel Lenses is located at its geometric center.
9. line scanning optics according to claim 1, it is characterised in that：Line scanning optics further includes the second photograph
Bright, second illumination includes the second Fresnel Lenses and second light source group, and second Fresnel Lenses has the second coke flat
Face and the second focus；The line of first focus and the second focus has middle vertical plane, and second illumination is shone with described first
It is bright symmetrical about above-mentioned middle vertical plane.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610059523.2A CN105548204B (en) | 2015-12-29 | 2016-01-28 | Linear scanning optical system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511018110 | 2015-12-29 | ||
| CN2015110181101 | 2015-12-29 | ||
| CN201610059523.2A CN105548204B (en) | 2015-12-29 | 2016-01-28 | Linear scanning optical system |
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| Publication Number | Publication Date |
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| CN105548204A CN105548204A (en) | 2016-05-04 |
| CN105548204B true CN105548204B (en) | 2018-11-30 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1500199A (en) * | 2001-04-03 | 2004-05-26 | �����ɷ� | Illumination device and method for illuminating object |
| CN102007513A (en) * | 2005-08-26 | 2011-04-06 | 卡姆特有限公司 | Device and method for inspecting an object |
| CN102454923A (en) * | 2010-10-29 | 2012-05-16 | 牧德科技股份有限公司 | Lighting system for automatic optic inspection and combination of lighting system and image system |
| CN103939806A (en) * | 2014-04-29 | 2014-07-23 | 康代影像科技(苏州)有限公司 | Optical illumination system for linear CCD scanning |
-
2016
- 2016-01-28 CN CN201610059523.2A patent/CN105548204B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1500199A (en) * | 2001-04-03 | 2004-05-26 | �����ɷ� | Illumination device and method for illuminating object |
| CN102007513A (en) * | 2005-08-26 | 2011-04-06 | 卡姆特有限公司 | Device and method for inspecting an object |
| CN102454923A (en) * | 2010-10-29 | 2012-05-16 | 牧德科技股份有限公司 | Lighting system for automatic optic inspection and combination of lighting system and image system |
| CN103939806A (en) * | 2014-04-29 | 2014-07-23 | 康代影像科技(苏州)有限公司 | Optical illumination system for linear CCD scanning |
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