CN105531580A - Multicomponent laser gas analyzer - Google Patents
Multicomponent laser gas analyzer Download PDFInfo
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- CN105531580A CN105531580A CN201480050816.3A CN201480050816A CN105531580A CN 105531580 A CN105531580 A CN 105531580A CN 201480050816 A CN201480050816 A CN 201480050816A CN 105531580 A CN105531580 A CN 105531580A
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- 238000001514 detection method Methods 0.000 claims abstract description 67
- 239000007789 gas Substances 0.000 claims description 346
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 108
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 108
- 238000010521 absorption reaction Methods 0.000 claims description 87
- 230000003287 optical effect Effects 0.000 claims description 64
- 238000012545 processing Methods 0.000 claims description 33
- 238000004611 spectroscopical analysis Methods 0.000 claims description 21
- 238000004868 gas analysis Methods 0.000 claims description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 16
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- 239000001301 oxygen Substances 0.000 claims description 16
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- 230000035945 sensitivity Effects 0.000 abstract description 15
- 230000010355 oscillation Effects 0.000 description 11
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 8
- 238000000862 absorption spectrum Methods 0.000 description 8
- 239000000567 combustion gas Substances 0.000 description 8
- 238000004020 luminiscence type Methods 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 7
- 238000010276 construction Methods 0.000 description 7
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
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- 238000003780 insertion Methods 0.000 description 2
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- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/396—Type of laser source
- G01N2021/399—Diode laser
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
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- General Health & Medical Sciences (AREA)
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Abstract
Provided is a laser gas analyzer for measuring an O2 gas concentration and a CO gas concentration simultaneously, at high speed, high precision, high sensitivity, and high stability by a single device. A multicomponent laser gas analyzer in which a first detection light passing through a broadband condensing lens and a through-hole of a parabolic mirror provided with a hole for a light emitting part in a certain period is received by a broadband light-receiving element, a second detection light passing through the broadband condensing lens and the through-hole of the parabolic mirror provided with a hole for a light emitting part in another period is received by the broadband light-receiving element, and an O2 gas concentration and a CO gas concentration are each separately measured on the basis of first and second detection signals received for each period from the broadband light receiving element.
Description
Technical field
The present invention relates to the presence or absence to the various determination object gases in space, multicomponent laser type gas analyser that concentration is analyzed.
Background technology
Laser type gas analyser such as in the heating, thermal power generation etc. of petrochemical plant for the monitoring of the fired state to high-temperature combustion gas.The parameter of the fired state O normally in exhaust gas composition
2(oxygen) gas concentration and CO (carbon monoxide) gas concentration.Reference accompanying drawing is described this point.Fig. 5 is the performance plot of the relation represented between excess air ratio in burner and gas concentration.In addition, as patent documentation 1 described later Fig. 2 and disclose this Fig. 5.By the known following situation of this performance plot.
A () increases along with the increase of excess air ratio, i.e. oxygen, the untapped oxygen of burning institute increases, O
2gas concentration also can improve.And then remaining oxygen is oxidized nitrogen, thus NOx gas concentration also can improve.Like this, by monitoring O
2gas concentration judges air excess.
B () on the contrary, along with excess air ratio reduction, i.e. oxygen reduce, become rough burning, CO gas concentration improves.And then the burning untapped fuel of institute (hydro carbons) increases, and the gas concentration of fuel also can improve.Like this, by monitoring that CO concentration judges lack of air.
Therefore, by exhaust in O
2gas concentration and CO gas concentration monitor, realize maintaining the most suitable Combustion System that complete fired state makes excess air become minimum.In addition, the efficient burning that energy loss is less is realized.In addition, the discharge of the Nox gas as environmental pollutants can also be alleviated.
Then, the prior art of the multi-component gas analysis in exhaust is described.Such as, the invention described in known patent document 1,2, the technology disclosed in non-patent literature 1.The content of each document is summarized, and with reference to accompanying drawing, these prior aries is described.
As prior art 1, there will be a known the invention described in patent documentation 1.Fig. 6 is the one-piece construction figure of the combustion system of the combustion gas analysis device comprising the laser employing prior art.Combustion system 100 has burner 102,103 in fence/wall 101.Air and fuel are supplied to these burners 102,103.Heat from the hydrocarbon in flame 104,105 pairs of pipelines 106 of burner 120,103.
Combustion gas analysis device has the two groups of TDL analytic systems comprising tunable diode laser (being expressed as TDL below) 107,109 and detecting device 108,110.These two groups of TDL analytic systems are to the water (H of carbon monoxide (CO), gas phase
2o) and the hydrocarbon of gas phase (such as comprise methane (CH
4)) measure.In addition, combustion gas analysis device comprises zirconia sensor 111,112.Zirconia sensor 111,112 couples of oxygen (O
2) measure.
Utilize optical mensuration and TDL light splitting to carry out this gas analysis.In TDL light splitting, with CO, H
2o and hydrocarbon (CH
4deng) laser is absorbed under the wavelength of relevant each absorption peak.The function of the amount gas concentration of being undertaken detecting, measuring by alternate manner of the light absorbed, pressure, temperature and optical path represents.This gas analysis is carried out according to the order of following (1) ~ (4).
(1) tunable diode laser of monomer irradiates wavelength and is adjusted to light in the scope of 2.0 ~ 2.5 μm.This light is incident upon photodetector by burning gases.Photodetector generates the absorption distribution of burning gases.
(2) digitizing is carried out in the absorption of burning gases distribution.
(3) digital machine is preserved the absorption distribution after digitizing.
(4) digital machine processes the absorption distribution after digitizing, thus to CO, the H in burning gases
2o and hydrocarbon (CH
4deng) concentration measure.
Here, due to can simultaneously to CO, H
2o and hydrocarbon (CH
4deng) measure, therefore, from following multiple candidate item, select wavelength.
When the temperature of burning gases is about 1100 DEG C, can from 2302.1; 2303.9; 2319.1; 2323.6; 2325.2; 2326.8; 2331.9; 2333.7; 2335.5; 2342.8; 2346.8; 2348.2; 2356.1; 2363.1; And 2373.1 select in these specific wavelength (nanometer).
In addition, when the temperature of burning gases is about 300 DEG C, can from 2307.8; 2320.6; 2323.6; 2331.9; 2339.3; 2353.9; 2360.8; 2368.0; 2373.1; 2389.3; And 2401.0 select in these specific wavelength (nanometer).
Best wavelength chooses depends on purposes, is decided by the experiment of appropriateness.When this mensuration, adopt multivariate model, this multivariate model utilizes measurement result at multiple wavelengths.This combustion gas analysis device utilizes multiple wavelength to carry out laser gas analysis, utilizes multivariate model to calculate the gas concentration of carbon monoxide, the water of gas phase and the hydrocarbon of gas phase in burning gases.In addition, the gas concentration of zirconia sensor to oxygen measures.That is, to the CO gas concentration in burning gases and O
2gas concentration measures.Invention described in patent documentation 1 is described above.
In addition, as prior art 2, there will be a known the invention described in patent documentation 2.Quote the content with Publication about Document and summarize, so that the present invention will be described.Fig. 7 is the use of the one-piece construction figure of the gas concentration measuring apparatus of the laser of prior art.This gas concentration measuring apparatus uses two laser diodes to measure two kinds of gas concentrations.
The light source of laser is by the first laser diode (LD
1) 201 and the second laser diode (LD
2) 202 formations.First laser diode 201 and LD
1current driving circuit 203,204 is connected, and controls temperature and electric current.Second laser diode 202 and LD
2current driving circuit 205,206 is connected, and controls temperature and electric current.
LD
1current driving circuit 203 is applied with respectively via totalizer 207 first DC current 208, harmonic wave 209, harmonic ringing 210,211, the pulse signal 212a of timesharing unit 212 and wavelength-locking signal 213.In addition, LD
2current driving circuit 205 is applied with respectively via totalizer 214 second DC current 215, harmonic wave 209, harmonic ringing 210,211, the pulse signal 212a of timesharing unit 212 and wavelength-locking signal 213.
First laser diode 201 and the second laser diode 202 replace starting of oscillation.First laser diode 201 utilizes the electric current (electric current after the first DC current 208, pulse signal 212a addition) applied, at the absorbing wavelength λ of the first gas componant
1lower starting of oscillation.In addition, the second laser diode 202 utilizes the electric current (the second DC current 215 be added with pulse signal 212a after electric current) applied, at the absorbing wavelength λ of the second gas componant
2lower starting of oscillation.
So, utilize wave multiplexer 216 to the starting of oscillation laser from the first laser diode 201 and alternately collaborate from the starting of oscillation laser of the second laser diode 202, and making it be incident upon channel-splitting filter 217 by the laser optical path of optical fiber.The laser beam irradiated from channel-splitting filter 217 passes through gas circulating area via a lens (collimating apparatus) 218, and exports another lens (condenser lens) 219 to.
The photodiode (PD) of the light receiving unit 220 be configured near another lens 219 by the laser after gas circulating area accepted.Based on the gas absorption signal that accepts by light receiving unit 220, utilize the demodulation process unit 221 of rear class, standard signal processing unit 222, AD converter 223 and computing machine 224, calculate two kinds of gas concentrations.
Wavelength X from the first laser diode 201 has been shown in Fig. 8
1starting of oscillation and wavelength X from the second laser diode 202
2the summary of starting of oscillation.Become wavelength X
1during starting of oscillation and wavelength X
2the laser alternately occurred during starting of oscillation.Can according to wavelength X
1the absorption signal of the gas in the time of starting of oscillation measures the gas concentration of the first gas, and according to wavelength X
2the absorption signal of the gas in the time of starting of oscillation measures the gas concentration of the second gas.
In addition, corresponding between the timing of time division (Δ t) and taken out gas signal, automatically calculates in computing machine 224.Thus, multiple gases concentration can be calculated simply and reliably.
So, even if first, second laser beam is by identical optical axis, also can irradiate each laser with time-sharing format alternately to light receiving unit 220, therefore, easily take out the signal corresponding with each gas.
The gas that the gas concentration measuring apparatus of such prior art produces in the closed containers such as the firing chamber of boiler, incinerator, burning office or the gas of externally discharging from this closed container are as detected object.In the prior art, first, second gas componant gas is with NH
3gas and H
2o gas is object, but comes O by the change of wavelength
2concentration and CO concentration detect.Such gas concentration measuring apparatus utilizes laser to measure these gases, thus can measure multiple gases concentration efficiently.Invention described in patent documentation 2 is described above.
In addition, the discovery described in non-patent literature 1 is had as prior art 3.This discovery is the discovery about the impact of moisture when carrying out gas analysis to CO.The record of quoting non-patent literature 1 carries out summary while be described this discovery.
The analysis made the variable-wavelength semiconductor laser optical spectroscopy (being designated as TDLAS below) of the CO gas concentration utilized in hypothesis burning gases in this non-patent literature 1 is recorded.In addition, the wavelength tuning optical spectroscopy (being designated as WMS below) improving detection sensitivity is recorded.
The absorption line of CO gas being called as R (10), R (11) is employed in the performance plot of the absorption spectrum of the expression high temperature of Fig. 9, the moisture bearing gas of high concentration and CO gas.R (10), R (11) are the absorption lines being positioned at wavelength 2.3 micron band.R (10) is at wave number 4297.7cm
-1(wavelength 2326.8nm) place has the peak value of absorption intensity, and R (11) is at wave number 4300.7cm
-1(wavelength 2325.2nm) place has the peak value of absorption intensity.
In this Fig. 9, also show the absorption spectrum of the CO gas in the wavelength region may comprising R (10), R (11), moisture.Have the absorption intensity of moisture at the wavelength periphery of R (10), R (11), therefore, the CO concentration determination under the moisture environment of high temperature, high concentration is along with moisture interference.Even so, under the wavelength of R (10), R (11), the absorption of moisture is also less.While utilize the absorption line of these R (10) or R (11) to suppress the impact of moisture, detect the absorption of CO gas.The estimating precision of CO gas concentration is decided primarily of moisture interference.
Invention described in non-patent literature 1 is described above.
Prior art document
Patent documentation
Patent documentation 1: Jap.P. spy's table 2010-519544 publication (denomination of invention " combustion gas analysis ")
Patent documentation 2: Japanese Patent Laid-Open 2012-108156 publication (denomination of invention " gas concentration measuring method and device ")
Non-patent literature
Non-patent literature 1:MeasurementScienceandTechnology (measurement science and technology), 20 (2009) 115201 (9pp) (thesis topic " AbsorptionsensorforCOincombustiongasesusing2.3 μm of tunablediodelasers (using the Absorbing Sensor of CO in the burning gases of 2.3 μm of tunable diode lasers) ")
Summary of the invention
Invent technical matters to be solved
In the prior art described in patent documentation 1, in order to utilize multivariate model to carry out gas concentration analysis, the wavelength larger to the amplitude of the wavelength comprising multiple absorption line scans.Therefore, need to obtain the time absorbing light data for carrying out scanning.In addition, wavelength-modulated optical spectroscopy is not adopted.For these reasons, be difficult at a high speed and in high sensitivity the CO gas concentration of low concentration detected.In addition, one group of delivery unit and detecting device measure CO gas, and zirconia sensor is to O
2gas measures, and therefore, must arrange multiple transparency window, sensor setting position in stove, the restriction in design is more.
In the prior art described in patent documentation 2, in order to two laser diodes 201,202 are set to same laser beam, adopt the laser optical path of wave multiplexer 216 and optical fiber.Generally, when being combined by the laser from multiple laser diode and transmitting via optical fiber, because of insertion loss and transmission loss, light quantity is reduced.Consequently, can the light quantity that accepts by photo detector reduce.Therefore, there is following problem: the signal intensity for calculating gas concentration reduces, and the stability of gas concentration measuring is impaired.
In addition, when being combined with optical fiber by the laser from laser diode, between laser diode and optical fiber, likely can produce optical interference noise.The noise that this optical interference noise can cause the detection signal calculating gas concentration to comprise increases, and in this case, also there is the problem that the stability of gas concentration measuring is impaired.
In addition, according to the discovery of non-patent literature 1, H when CO gas concentration detects must be got rid of
2the impact of O gas concentration.
Therefore, the present invention completes to solve the problem, and its object is to, the while that an a kind of table apparatus being provided, at a high speed, high precision, high sensitivity, high stability to O
2gas concentration and CO gas concentration carry out the laser type gas analyser measured.
The technological means that technical solution problem adopts
Therefore, the present invention proposes a kind of multicomponent laser type gas analyser, this multicomponent laser type gas analyser adopts Wavelength variable laser optical spectroscopy and wavelength-modulated optical spectroscopy, described Wavelength variable laser optical spectroscopy and the concentration of wavelength-modulated optical spectroscopy to a kind of i.e. the first determination object gas in the oxygen in determination object space and CO gas and another kind of i.e. the second determination object gas measure, the feature of described multicomponent laser type gas analyser is, comprise illuminating part and light accepting part
Described illuminating part comprises:
First light-emitting component, the injection of this first light-emitting component comprises the laser of the wavelength band of the light absorption frequency spectrum of the first determination object gas;
Second light-emitting component, the injection of this second light-emitting component comprises the laser of the wavelength band of the light absorption frequency spectrum of the second determination object gas;
Directional light converter section, this directional light converter section will penetrate from the first light-emitting component and the laser spread converts the first roughly directional light to, and it can be used as the first detection light and penetrate;
Band illuminating part hole parabolic mirror, this band illuminating part hole parabolic mirror have make the through hole of the first detection light transmission and for penetrate from the second light-emitting component and the laser spread reflect and convert thereof into second roughly directional light to detect the parabolic mirror that penetrates of light as second, and make first, second detect light along same optical axis to determination object space; And
Light modulated generating unit, the drive current of the laser after carrying out wavelength-modulated according to first, second determination object gas is supplied to first, second light-emitting component by this light modulated generating unit,
Described light accepting part comprises:
Focused broad-band portion, first, second along same optical axis to determination object space is detected light and focuses on together by this focused broad-band portion;
Broadband photo detector, this broadband photo detector accepts first, second detection light after being focused on by focused broad-band portion, and exports first, second detection signal; And
Light signal processing part, this light signal processing part, based on first, second detection signal received from broadband photo detector, carries out gas analysis,
The light modulated generating unit of illuminating part is synchronous with the light signal processing part of light accepting part, and measures the concentration of oxygen and CO gas individually in the different time,
The light modulated generating unit of illuminating part carries out length scanning to the first light-emitting component or the second light-emitting component, be included in the absorption line of the wavelength 2326.8nm of CO gas when CO gas is analyzed to make it and be present near wavelength 2326.8nm and the absorption line of the different moisture bearing gas of the peak wavelength of absorption intensity
The light signal processing part of light accepting part carries out computing based on the information of the absorption of CO gas and the absorption of moisture bearing gas to carbon monoxide gas concentration and moisture bearing gas concentration, and it can be used as the absorption information based on moisture bearing gas to carry out revised carbon monoxide gas concentration to the interference caused by moisture bearing gas.
In addition, the present invention proposes a kind of multicomponent laser type gas analyser, this multicomponent laser type gas analyser adopts Wavelength variable laser optical spectroscopy and wavelength-modulated optical spectroscopy, described Wavelength variable laser optical spectroscopy and the concentration of wavelength-modulated optical spectroscopy to a kind of i.e. the first determination object gas in the oxygen in determination object space and CO gas and another kind of i.e. the second determination object gas measure, the feature of described multicomponent laser type gas analyser is, comprise illuminating part and light accepting part
Described illuminating part comprises:
First light-emitting component, the injection of this first light-emitting component comprises the laser of the wavelength band of the light absorption frequency spectrum of the first determination object gas;
Second light-emitting component, the injection of this second light-emitting component comprises the laser of the wavelength band of the light absorption frequency spectrum of the second determination object gas;
Directional light converter section, this directional light converter section will penetrate from the first light-emitting component and the laser spread converts the first roughly directional light to, and it can be used as the first detection light and penetrate;
Band illuminating part hole parabolic mirror, this band illuminating part hole parabolic mirror have make the through hole of the first detection light transmission and for penetrate from the second light-emitting component and the laser spread reflect and convert thereof into second roughly directional light to detect the parabolic mirror that penetrates of light as second, and make first, second detect light along same optical axis to determination object space; And
Light modulated generating unit, the drive current of the laser after having carried out wavelength-modulated according to first, second determination object gas is supplied to first, second light-emitting component by this light modulated generating unit,
Described light accepting part comprises:
Light accepting part parabolic mirror, first, second detection light along determination object spatial on same optical axis reflects by this light accepting part parabolic mirror together;
Broadband photo detector, this broadband photo detector accepts to carry out first, second detection light after focusing on and reflecting by light accepting part parabolic mirror, and exports first, second detection signal; And
Light signal processing part, this light signal processing part, based on first, second detection signal received from broadband photo detector, carries out gas analysis,
The light modulated generating unit of illuminating part is synchronous with the light signal processing part of light accepting part, and measures the concentration of oxygen and CO gas individually in the different time,
The light modulated generating unit of illuminating part carries out length scanning to the first light-emitting component or the second light-emitting component, comprise the absorption line of the wavelength 2326.8nm of CO gas when CO gas is analyzed to make it and to be present near wavelength 2326.8nm and the absorption line of the different moisture bearing gas of the peak wavelength of absorption intensity
The light signal processing part of light accepting part carries out computing based on the information of the absorption of CO gas and the absorption of moisture bearing gas to carbon monoxide gas concentration and moisture bearing gas concentration, and it can be used as the absorption information based on moisture bearing gas to carry out revised carbon monoxide gas concentration to the interference caused by moisture bearing gas.
Invention effect
According to the present invention, the while that an a kind of table apparatus being provided, at a high speed, high precision, high sensitivity, high stability to O
2gas concentration and CO gas concentration carry out the laser type gas analyser measured.
Accompanying drawing explanation
Fig. 1 is the one-piece construction figure for implementing the multicomponent laser type gas analyser involved by embodiments of the present invention 1.
Fig. 2 is the figure line of the wavelength dependency representing typical InGaAs photodiode, light reception sensitivity.
Fig. 3 is the figure of the waveform detection representing moisture bearing gas and CO gas, Fig. 3 (a) is the figure of the waveform detection represented when there is moisture bearing gas and CO gas, the figure of Fig. 3 (b) to be the figure of the waveform detection represented when only there is moisture bearing gas, Fig. 3 (c) be waveform detection represented when only there is CO gas.
Fig. 4 is the one-piece construction figure for implementing the multicomponent laser type gas analyser involved by embodiments of the present invention 2.
Fig. 5 is the performance plot of the relation represented between excess air ratio in burner and gas concentration.
Fig. 6 is the one-piece construction figure of the combustion system of the combustion gas analysis device comprising the laser employing prior art.
Fig. 7 is the one-piece construction figure of the gas concentration measuring apparatus of prior art.
Fig. 8 is the key diagram of the timesharing light-emission operation of the gas concentration measuring apparatus of prior art.
Fig. 9 is the performance plot representing the moisture bearing gas of high temperature, high concentration and the absorption line of CO gas.
Embodiment
Then, be described for the multicomponent laser type gas analyser implemented involved by embodiments of the present invention 1 referring to accompanying drawing.Fig. 1 is the one-piece construction figure of the multicomponent laser type gas analyser of present embodiment.
The first determination object gas that the gas of multicomponent laser type gas analyser 1 to the internal circulation at wall 50a and wall 50b of present embodiment comprises and oxygen (are designated as O below
2gas) gas concentration and the gas concentration of the second determination object gas and CO gas (being designated as CO gas below) measure.In addition, if gas concentration be 0 or setting below, then for detecting gasless situation, also can detect the presence or absence of gas.
Specifically, multicomponent laser type gas analyser 1 comprises illuminating part 10, light accepting part 20, order wire 30.
Illuminating part 10 comprises light modulated generating unit 11, first light-emitting component 12a, the second light-emitting component 12b, collimator lens 13, the band illuminating part hole parabolic mirror 14 being provided with through hole 14a, illuminating part luffer boards 15, illuminating part container 16, optical axis adjustment flange 52a.
Light accepting part 20 comprises light signal processing part 21, focused broad-band lens 22, broadband photo detector 23, light accepting part luffer boards 24, light accepting part container 25, optical axis adjustment flange 52b.
Order wire 30 utilizes electric signal to communicate between illuminating part 10 with light accepting part 20, and illuminating part 10 and light accepting part 20 synchronously carry out signal transacting.Although will be explained hereinafter, when illuminating part 10 sends the laser analyzed the first determination object gas, light accepting part 20 carries out the process of analysis first determination object gas.In addition, when illuminating part 10 sends the laser analyzed the second determination object gas, light accepting part 20 carries out the process of analysis second determination object gas.In addition, wireless, that optical communication is such Department of Communication Force also can be adopted to replace order wire.The Department of Communication Force that make use of these order wires, wireless, optical communication can be adopted.
In such multicomponent laser type gas analyser 1, illuminating part 10 penetrates the first detection light 40a or second and detects light 40b.These first detection light 40a or second detect light 40b and are projected to same optical axis 41.And, only first detect any one detection in light 40b of light 40a and second is projected to the inside of wall 50a and wall 50b determination object space with time-sharing format.
Now, first a part for the light quantity of light 40a is detected by O
2gas absorbed, or, second part detecting the light quantity of light 40b absorb by CO gas.Unabsorbed remaining light and transmitted light are launched into light accepting part 20, detect its light quantity.The gas concentration of determination object is obtained according to detected light quantity.
Then, the mechanicalness structure of multicomponent laser type gas analyser 1 is described.
As shown in Figure 1, O is being comprised
2wall 50a, 50b of the pipe arrangement that the gas of gas, CO gas circulates etc. offer respectively porose.Flange 51a, 51b are fixed on this some holes by welding etc.Optical axis adjustment flange 52a, 52b is the mode of mechanicalness movement can be installed on these flanges 51a, 51b.Illuminating part 10, light accepting part 20 can utilize optical axis to adjust flange 52a, 52b to carry out position adjustment.
Therefore, optical axis adjustment flange 52a adjusts the angle of emergence that first detects light 40a and second detection light 40b.In addition, optical axis adjustment flange 52b adjusts the incident angle that first detects light 40a and second detection light 40b.Utilize optical axis to adjust flange 52a, 52b, the first detection light 40a or second accepting to penetrate from illuminating part 10 with maximum light quantity in light accepting part 20 detects light 40b.And then first detects both light 40a and second detection light 40b is positioned at same optical axis 41, is all accepted with maximum light quantity by light accepting part 20.
Illuminating part container 16 and light accepting part container 25 are built-in with light-emitting component, optical element and electric and electronic circuit in respective inside, these elements and extraneous gas are isolated, to protect these elements by wind and rain, dust and stained etc. impact.
Comprise illuminating part luffer boards 15 and light accepting part luffer boards 24, wherein, a part for illuminating part container 16 and light accepting part container 25 is offered porose, and this hole is plugged.Illuminating part luffer boards 15 and light accepting part luffer boards 24 are positioned at the light path that the first detection light 40a and second detects light 40b, make the first detection light 40a and then second detect light 40b through, while prevention comprises O
2the gas of gas, CO gas enters the inside of illuminating part 10, light accepting part 20.Thus, light-emitting component, optical element and electric and electronic circuit can not directly contact with gas, and inside is protected.Mechanicalness structure as mentioned above.
Then, optical system is described.By O
2the wavelength that gas absorbs is set to λ
1.λ
1select to the scope of wavelength 770nm from wavelength 759nm.In addition, the wavelength that CO gas absorbs is set to λ
2.λ
2select wavelength 2336.8nm.
Here, to the specific wavelength X that have selected for detecting CO gas
2(2336.8nm) reason of absorption line is described.
CO gas has absorption spectrum in wavelength 1.6 micron band, wavelength 2.3 micron band, wavelength 4.6 micron band, therefore, can measure according to the extinction of laser luminous at these wavelengths to CO gas concentration.
Here, from typical case, consider that the CO gas concentration in burning gases is 100ppm level, moisture concentration is 10% grade.In this case, in wavelength 1.6 micron band, the absorption intensity of CO gas is lower, is difficult to detect the CO gas concentration of 100ppm level.In addition, in wavelength 4.6 micron band, the absorption intensity of moisture is excessive, is difficult to get rid of moisture interference.
Therefore, in order to correctly and stably measure the CO gas concentration in burning gases, the most suitable from viewpoint wavelength 2.3 micron band of sensitivity and moisture interference.In addition, be arranged in multiple CO gas absorption spectrum lines of wavelength 2.3 micron band, be used in the absorption line that wavelength 2326.8nm place has centre wavelength in the present embodiment especially.Also illustrating in the performance plot of Fig. 9 of the discovery as non-patent literature 1 and the accompanying drawing in the application, wavelength 2326.8nm (R (10) of Fig. 9) even if among the absorption line of the CO gas in wavelength 2.3 micron band, also particularly as there is the wavelength of the less absorption line of moisture interference and known.
Use laser diode thus can measure CO gas concentration under the state that moisture interference compared with its absorption line is lower, described laser diode carries out length scanning to this absorption line under wavelength single-mode, and carries out the absorption line of wavelength-modulated to CO gas and analyze.But, shown by the discovery in non-patent literature 1, due to the interference of moisture and non-fully do not have, therefore, if do not tackle moisture, then the interference that the estimating precision of CO gas is caused by the absorption of moisture decides.
Therefore, in the present embodiment, the laser diode of Analysis for CO gas carries out length scanning, and making can simultaneously to be present near wavelength 2326.8nm and the different absorption line of CO gas of the peak wavelength of absorption intensity and the absorption line of moisture bearing gas are analyzed.Near wavelength 2326.8nm, near the peak value of CO gas absorption spectrum line, there is moisture absorption spectral line, can converge in the wavelength scanning range of a laser diode, therefore, can measure moisture bearing gas and CO gas concentration simultaneously.
Then, the optical function/signal processing function of illuminating part 10 and light accepting part 20 is described.In these illuminating parts 10 and light accepting part 20, when simultaneously luminous by the first light-emitting component 12a and the second light-emitting component 12b, cannot optically separation signal.Therefore, carry out action by the first light-emitting component 12a of illuminating part 10 and the second light-emitting component 12b with time-sharing format, by order wire 30 in light accepting part 20 synchronously and alternately carry out signal transacting.
As shown in Figure 8, in during certain, the first light-emitting component 12a of illuminating part 10 is luminous and irradiate the first detection light 40a, and the detection signal that light signal processing part 21 utilizes broadband photo detector 23 to accept comes the first determination object gas O
2the gas concentration of gas is analyzed.In addition, in during other, second light-emitting component 12b of illuminating part 10 is luminous and irradiate the second detection light 40b, and the gas concentration of the detection signal that light signal processing part 21 utilizes broadband photo detector 23 to accept to the second determination object Carbon Monoxide Gaseous is analyzed.Like this electrical resistance separation is carried out to signal.Thus, O can be calculated independently
2gas i.e. the first determination object gas and the CO gas i.e. gas concentration of the second determination object gas.Almost can detect in time simultaneously.
First, to detection O
2illuminating part 10/ light accepting part 20 during gas is described.
Light modulated generating unit 11 is signal transacting/current driving circuits.Irradiate and O
2the extinction characteristic of gas is corresponding first detects light.In addition, detect light by first to be set to according to O
2gas carries out the light modulated of wavelength-modulated.Therefore, light modulated generating unit 11 utilizes laser like this by being used for and the driving current signal of the detection light sent is supplied to the first light-emitting component 12a.
First light-emitting component 12a is laser diode, such as, be DFB laser diode (DistributedFeedbackLaserDiode: distributed feedback laser diode), VCSEL diode (VerticalCavitySurfaceEmittingLaserDiode: vertical cavity surface-emitting laser diode) or DBR laser diode (DistributedBraggReflectorLaserDiode: distributed Bragg reflector laser diode).First light-emitting component 12a can utilize electric current and temperature to carry out variable control to emission wavelength.
First light-emitting component 12a is with wavelength X
1and the wavelength of periphery carrys out luminous laser diode.First light-emitting component 12a is to comprise O
2the wavelength of gas absorption spectrum line scans.λ
1select to the scope of wavelength 770nm from wavelength 759nm.
Therefore, carry out temperature control, thus make the luminescent center wavelength of the first light-emitting component 12a become O
2the centre wavelength of the specific absorption line of gas.In addition, drive current is controlled, thus to O
2the wavelength of the centre wavelength periphery of the specific absorption line of gas carries out timeliness scanning.In addition, suitable sine wave modulation is overlapped in drive current, thus wavelength-modulated optical spectroscopy can be utilized to measure in high sensitivity.
The luminous point of the first light-emitting component 12a is configured at the near focal point of collimator lens 13.Injection light from the first light-emitting component 12a is spread while inject collimator lens 13, and converts thereof into the first detection light 40a as almost parallel light.Collimator lens 13 is in wavelength X
1and the wavelength place transmissivity of periphery is higher.In addition, in the present embodiment, the structure using collimator lens 13 to be used as directional light converter section of the present invention is illustrated, but it is not intended to be defined as collimator lens.Such as, as directional light converter section, paraboloidal mirror also can be used to replace collimator lens.
At the immediate vicinity of its paraboloidal mirror, there is through hole 14a with illuminating part hole parabolic mirror 14.Through hole 14a make the first detection light 40a through.Therefore, wish that the size in its hole and first detects the beam diameter degree of light 40a identical.As first of almost parallel light detect light 40a through illuminating part luffer boards 15 be transmitted to wall 50a, 50b inside, namely comprise O
2the space that the gas of gas, CO gas circulates.
Then, light accepting part 20 is described.Light accepting part 20 accepts to detect light 40a through first of light accepting part luffer boards 24, and to the extinction characteristic because of determination object gas, absorbed light is analyzed.First detects light 40a injects focused broad-band lens 22.Focused broad-band lens 22 are in wavelength X
1and the wavelength place transmissivity of periphery is higher.
Focused on by focused broad-band lens 22 first detects light 40a is incident upon the broadband photo detector 23 being configured with sensitive surface at the near focal point of focused broad-band lens 22.Such focused broad-band lens 22, the position relationship of broadband photo detector 23 are identical with the explanation in illuminating part 10, are suitably configured at optical axis 41, obtain the light light quantity after maximizing in broadband photo detector 23.
Broadband photo detector 23 is in wavelength X
1the wavelength place of (wavelength 759nm is to the scope of wavelength 770nm) and periphery thereof is the photo detector with sensitivity.O is comprised by light signal from broadband photo detector 23
2the absorption signal of gas, is sent to light signal processing part 21 as electric signal.Be provided with the circuit carrying out locking detection to the high frequency of the modulating frequency of the laser carried out after wavelength-modulated in light signal processing part 21, can highly sensitive gas detect be carried out.In light signal processing part 21, described electric signal is processed, thus calculates O
2the gas concentration value of gas.
Then, illuminating part 10/ light accepting part 20 when detecting CO gas is described.
Light modulated generating unit 11 is irradiated corresponding with the extinction characteristic of CO gas second and is detected light.In addition, detect light by second and be set to the light modulated of carrying out wavelength-modulated according to CO gas.Therefore, the driving current signal of the detection light being used for utilizing laser like this to send is supplied to the second light-emitting component 12b by light modulated generating unit 11.
Second light-emitting component 12b is laser diode, such as, be DFB laser diode as above, VCSEL diode or DBR laser diode.Second light-emitting component 12b can utilize electric current and temperature to carry out variable control to emission wavelength.Second light-emitting component 12b is with λ
2and the wavelength of periphery carrys out luminous laser diode.Second light-emitting component 12b scans with the wavelength comprising the absorption line of CO gas absorption spectrum line and neighbouring moisture thereof.λ
2for wavelength 2336.8nm.
Carry out temperature control, make the luminescent center wavelength of the second light-emitting component 12b become the centre wavelength of the specific absorption line of CO gas.In addition, drive current is controlled, thus timeliness scanning is carried out to the wavelength of the centre wavelength periphery of the specific absorption line of CO gas.In addition, suitable sine wave modulation is overlapped in drive current, thus wavelength-modulated optical spectroscopy can be utilized to measure in high sensitivity.
The luminous point of the second light-emitting component 12b is configured at the near focal point of the parabolic cylinder of band illuminating part hole parabolic mirror 14.Injection light from the second light-emitting component 12b is spread while inject the parabolic mirror 14 in band hole, optics portion, and convert thereof into the second detection light 40b as almost parallel light.Band illuminating part hole parabolic mirror 14 is in wavelength X
2and the wavelength place reflectivity of periphery is higher.In addition, in the present embodiment, use angle 90 degree from axle parabolic mirror, but off-axis angle also can not be set to 90 degree.
From the light that the second light-emitting component 12b sends, the light quantity injecting the part of through hole 14a is not converted into the second detection light 40b, is therefore subject to loss.In order to suppress less by this loss, the opening diameter of through hole 14a is the smaller the better.On the other hand, the beam diameter degree that the through hole 14a and above-mentioned first of band illuminating part hole parabolic mirror 14 detects light 40a is identical, is set to the minimum opening diameter that can allow.
In addition, the first beam diameter detecting light 40a must be less than the beam diameter of the second detection light 40b.To achieve these goals, it is desirable to the focusing distance of collimator lens 13 to be established enough less than the focusing distance of band illuminating part hole parabolic mirror 14.
In addition, optical axis through hole 14a being arranged to detect with second light 40b is parallel.Thus, be with illuminating part hole parabolic mirror 14 although detect light 40a with utilizing through first of through hole 14a and become second of almost parallel light to detect light 40b beam diameter different, also can coincide with on same optical axis 41.
In addition, not shown optical axis micro-regulating mechanism when being remained unchanged by almost parallel light, can carry out inching to the first injection angle detecting light 40a and second detection light 40b.Thus, the optical axis 41 of the first detection light 40a and second detection light 40b is consistent.
Be laminated with optical axis 41 as second of almost parallel light detect light 40b through illuminating part luffer boards 15 be transmitted to wall 50a, 50b inside, namely comprise O
2the space that the gas of gas, CO gas circulates.
Then, light accepting part 20 is described.Light accepting part 20 accepts second after through light accepting part luffer boards 24 and detects light 40b, and the light absorbed the extinction characteristic because of determination object gas is analyzed.
Second detects light 40b is incident upon focused broad-band lens 22.Focused broad-band lens 22 are in wavelength X
2and the wavelength place transmissivity of periphery is higher.In addition, focused broad-band lens 22 also make the first detection light 40a through, therefore, in wavelength X
1and the wavelength of periphery and wavelength X
2and the wavelength place of periphery, the material higher by transmissivity is formed.
Focused on by focused broad-band lens 22 second detects light 40b is incident upon the broadband photo detector 23 being configured with sensitive surface at the near focal point of focused broad-band lens 22.Such focused broad-band lens 22, the position relationship of broadband photo detector 23 are identical with the explanation in illuminating part 10, are suitably configured at optical axis 41, obtain the light light quantity after maximizing in broadband photo detector 23.
Broadband photo detector 23 is in wavelength X
2the wavelength place of (wavelength 2336.8nm) and periphery thereof has sensitivity.In addition, broadband photo detector 23 also detects light 40a to first and carries out light, therefore, selects in wavelength X
1the wavelength of (wavelength 759nm is to the scope of wavelength 770nm) and periphery thereof and wavelength X
2the wavelength place of (wavelength 2336.8nm) and periphery thereof all has the photo detector of sensitivity.
Above-mentioned λ
1, λ
2all be contained near infrared region (700nm ~ 2500nm).Therefore, broadband photo detector 23 can be set to the photo detector corresponding with the wavelength of near infrared region, such as shown in Figure 2, can adopt InGaAs (indium gallium arsenide) photodiode at 500nm ~ 2500nm place with sensitivity.
In addition, at below wavelength 900nm, although light reception sensitivity is little of below 0.2A/W, even such signal also can detect, by suitably amplifying detection signal, can analyze.InGaAs photodiode can detect multiple detected object gases at 500nm ~ 2500nm place with absorption, and extracts signal with a photo detector.
From the absorption signal comprising CO gas by light signal of broadband photo detector 23, be sent to light signal processing part 21 as electric signal.Be provided with the circuit carrying out locking detection to the high frequency of the modulating frequency of the laser carried out after wavelength-modulated in light signal processing part 21, can highly sensitive gas detect be carried out.In light signal processing part 21, described electric signal is processed, thus calculate the gas concentration value of CO gas.
In addition, in the present embodiment, in order to utilize the refraction effect of focused broad-band lens 22 to focus on broadband photo detector 23, can produce because of wavelength X
1with λ
2between difference and the impact of the chromatic aberation caused.Therefore, owing to alleviating the decline of the light light quantity produced because of chromatic aberation, therefore, simple lens, doublet lens, refractor etc. can be utilized to replace focused broad-band lens 22, thus alleviate the impact of chromatic aberation.In addition, the light-receiving area of broadband photo detector 23 can be increased, even if wavelength X
1with λ
2focal position generation deviation, also can carry out light.
Then, the correction of moisture is described.The light signal processing part 21 of laser type gas analyser is based on the information of the absorption of CO gas obtained by carrying out length scanning to described laser diode and the absorption of moisture bearing gas, computing is carried out to CO gas concentration and moisture bearing gas concentration, and then the absorption information based on moisture bearing gas in the computing of CO gas concentration corrects to the interference that moisture bearing gas causes.
Fig. 3 utilizes at wavelength 2326.8nm periphery to carry out length scanning while the example observed of the laser diode that the carries out wavelength-modulated absorption to moisture bearing gas and CO gas.In this explanation, the frequency being assumed to be 2 times of the frequency to wavelength-modulated carries out the situation locking detection, and therefore, the absorption waveform shown in Fig. 3 is in the akin shape of second-order differential with absorption waveform when not carrying out wavelength-modulated.
Fig. 3 (a) observes and the waveform obtained the absorption of moisture bearing gas and CO gas.Fig. 3 (b) is the waveform only observed the absorption of moisture bearing gas and obtain.Fig. 3 (c) is the waveform only observed the absorption of CO gas and obtain.The concentration of moisture bearing gas and CO gas carries out computing according to the trough of these absorption waveforms and the peak-to-peak amplitude of ripple.Such as, the difference of the VPx ' according to such as Fig. 3 (a) and the voltage of Vbx ' carries out computing to the concentration of moisture bearing gas.Meanwhile, such as according to the difference of the voltage of Vpx and Vbx, computing is carried out to the concentration of CO gas.
As the feature of the absorption spectrum of gas in this wavelength region may, the absorption line interval each other of CO gas is wider, and does not coincide with the absorption line adjacent with specific absorption line.On the other hand, moisture bearing gas, under the high-temperature high concentration state as burning gases, has the frequency spectrum existing and absorb such complexity everywhere.
Reflect such feature, can see that the moisture bearing gas of wavelength 2326.8nm periphery is separated with the crest of the absorption line of CO gas, but in fact moisture bearing gas exists absorption everywhere, therefore, even if also there is the absorption of moisture bearing gas at the absorbing wavelength place of CO gas.
Therefore, in Fig. 3 (c), there is not absorption in the crest periphery of the absorption of CO gas, therefore voltage is smooth, on the other hand, in Fig. 3 (b), also there is absorption in the crest periphery of the absorption of moisture bearing gas, therefore voltage may not be smooth, and wavelength CO gas to absorption also can impact.Consequently, as shown in Fig. 3 (a), when the absorption of moisture bearing gas and CO gas coexists, the absorption waveform of CO gas can deform because of moisture bearing gas.This causes as the moisture bearing gas interference in the mensuration of CO gas concentration and the precision of mensuration is worsened.
But the impact of this moisture interference known is directly proportional to moisture bearing gas concentration.Therefore, in the present embodiment, correct all as follows when calculating CO gas concentration at every turn:, also moisture bearing gas concentration is measured simultaneously, the corrected value obtained suitable scale-up factor is multiplied by this moisture bearing gas concentration calculates, measured CO gas concentration is deducted this corrected value to alleviate the impact of moisture interference, thus be set to obtained CO gas concentration.Thus, the precision of CO gas concentration measuring can be improved further.
Above multicomponent laser type gas analyser 1 is illustrated.In addition, various mode of texturing can be adopted in this multicomponent laser type gas analyser.Such as, in the above-described embodiment, the first light-emitting component 12a is set in wavelength X
1and the laser diode of the wavelength place luminescence of periphery, the second light-emitting component 12b is set in wavelength X
2and the laser diode of the wavelength place luminescence of periphery.But the first light-emitting component 12a also can the laser of irradiating and detecting CO gas, and in addition, the second light-emitting component 12b also can irradiating and detecting O
2the laser of gas.
In this case, the first light-emitting component 12a is set in wavelength X
2and the laser diode of the wavelength place luminescence of periphery, the second light-emitting component 12b is set in wavelength X
1and the laser diode of the wavelength place luminescence of periphery.Collimator lens 13 is by wavelength X
2the material that place's transmissivity is higher is formed.Band illuminating part hole parabolic mirror 14 is by wavelength X
1the material that place's reflectivity is higher is formed.Thus, come CO gas concentration, O with broadband photo detector 23
2gas concentration detects.If synchronously carry out signal transacting in illuminating part 10 side and light accepting part 20 side, then can measure in the same manner as explanation before.Also such embodiment can be adopted.
Then, be described with reference to the multicomponent laser type gas analyser 2 of Fig. 4 to embodiment 2.In the present embodiment, the light accepting part 20 ' after a part for the structure of light accepting part 20 in embodiment 1 is before changed is adopted.In addition, about illuminating part 10, order wire 30, check processing, identical with explanation before, therefore omit repeat specification, only difference emphasis is described.
Light accepting part 20 ' comprises light signal processing part 21, broadband photo detector 23, light accepting part luffer boards 24, light accepting part container 25, light accepting part parabolic mirror 26, optical axis adjustment flange 52b.
In the present embodiment, use the light accepting part parabolic mirror 26 of atresia to be used as focus portion, use broadband photo detector 23 to be used as photo detector, to replace the focused broad-band lens 22 of embodiment 1.Light accepting part parabolic mirror 26 is by wavelength X
1and the wavelength of periphery and wavelength X
2and all higher material of the wavelength place reflectivity of periphery is formed.
In the present embodiment, first detects light 40a and second detection light 40b is all incident upon light accepting part parabolic mirror 26, and reflect first detects light 40a and second detection light 40b carries out focusing on and is incident upon broadband photo detector 23.Owing to focusing in a reflection mode, therefore, there is the advantage that can not cause occurring because wavelength X 1 is different from λ 2 impact of chromatic aberation.
Such light accepting part 20 ' is identical with embodiment 1 before, in during certain, the first detection light 40a is irradiated in first light-emitting component 12a luminescence of illuminating part 10, and the gas concentration of the detection signal that light signal processing part 21 utilizes broadband photo detector 23 to receive to the first determination object gas is analyzed.In addition, in during other, the second detection light 40b is irradiated in second light-emitting component 12b luminescence of illuminating part 10, and the gas concentration of the detection signal that light signal processing part 21 utilizes broadband photo detector 23 to receive to the second determination object gas is analyzed.Now, in light accepting part 20, synchronously signal transacting is carried out mutually by order wire 30.Like this electrical resistance separation is carried out to signal.Thus, first, second detected object gas and O can be calculated independently
2the gas concentration of gas, CO gas.
In addition, as mode of texturing, the first light-emitting component also can the laser of irradiating and detecting CO gas, and in addition, the second light-emitting component also can irradiating and detecting O
2the laser of gas.In this case, the first light-emitting component 12a is set in wavelength X
2and the laser diode of the wavelength place luminescence of periphery, the second light-emitting component 12b is set in wavelength X
1and the laser diode of the wavelength place luminescence of periphery.Collimator lens 13 is by wavelength X
2the material that place's transmissivity is higher is formed.Band illuminating part hole parabolic mirror 14 is by wavelength X
1the material that place's reflectivity is higher is formed.If synchronously process in illuminating part 10 side and light accepting part 20 side, then can measure in the same manner as explanation before.Even if adopt such structure, also the present invention can be implemented.
More than describe the present invention.According to the present invention, adopt the easy Space Optical System not using fiber optic system, light-emitting junction from two laser diodes is bonded on same optical axis, and the light quantity of laser is sent to photo detector efficiently, improve the signal intensity of determination object gas, reduce noise, thus a kind of multicomponent laser type gas analyser can be provided, this multicomponent laser type gas analyser can reduce insertion loss, transmit loss and optical interference noise, simultaneously (in time continuously to first, second determination object gas detects instantaneously, can say it is almost simultaneously) and stably multiple gas concentration is measured.
In addition, the present invention suppresses first, second loss detecting light as laser, in addition, reduce noise, thus a kind of multicomponent laser type gas analyser can be provided, this multicomponent laser type gas analyser can improve the signal intensity of detected object gas, simultaneously and stably measure multiple gas concentration.
Therefore, according to the present invention, the while that an a kind of table apparatus being provided, at a high speed, high precision, high sensitivity, high stability to O
2gas concentration and CO gas concentration carry out the laser type gas analyser measured.
Industrial practicality
Multicomponent laser type gas analyser of the present invention is suitably used as the burning and gas-exhausting such as boiler, waste incineration mensuration, Combustion System.In addition, as iron and steel gas analysis [blast furnace, converter, heat-treatment furnace, sintering (particle device), coke oven], vegetable and fruit storage and maturation, biochemical (microorganism) [fermentation], atmospheric pollution [incinerator, discharge cigarette desulfurization/denitration], automobile, the exhaust (dedusting) of the internal combustion engine of boats and ships etc. is taken precautions against natural calamities, and [damp detects, toxic gas detection, new building material combustion gas analysis], plant cultivation is used, chemical analysis [petroleum refining factory, petrochemical plant, Gas Production factory], environment [ground concentration, concentration in tunnel, parking lot, building management], the analysis meter of the various experiment use of Physicochemical etc. is also useful.
Label declaration
1,2: multicomponent laser type gas analyser
10: illuminating part
11: light modulated generating unit
12a: the first light-emitting component
12b: the second light-emitting component
13: collimator lens
14: band illuminating part hole parabolic mirror
14a: through hole
15: illuminating part luffer boards
16: illuminating part container
20,20 ': light accepting part
21: light signal processing part
22: focused broad-band lens
23: broadband photo detector
24: light accepting part luffer boards
25: light accepting part container
26: light accepting part parabolic mirror
30: order wire
40a: the first detects light
40b: the second detects light
41: optical axis
50a, 50b: wall
51a, 51b: flange
52a, 52b: optical axis adjustment flange
Claims (2)
1. a multicomponent laser type gas analyser, this multicomponent laser type gas analyser adopts Wavelength variable laser optical spectroscopy and wavelength-modulated optical spectroscopy, described Wavelength variable laser optical spectroscopy and the concentration of wavelength-modulated optical spectroscopy to a kind of i.e. the first determination object gas in the oxygen in determination object space and CO gas and another kind of i.e. the second determination object gas measure, the feature of described multicomponent laser type gas analyser is, comprise illuminating part and light accepting part
Described illuminating part comprises:
First light-emitting component, the injection of this first light-emitting component comprises the laser of the wavelength band of the light absorption frequency spectrum of the first determination object gas;
Second light-emitting component, the injection of this second light-emitting component comprises the laser of the wavelength band of the light absorption frequency spectrum of the second determination object gas;
Directional light converter section, this directional light converter section will penetrate from the first light-emitting component and the laser spread converts the first roughly directional light to, and it can be used as the first detection light and penetrate;
Band illuminating part hole parabolic mirror, this band illuminating part hole parabolic mirror have make the through hole of the first detection light transmission and for penetrate from the second light-emitting component and the laser spread reflect and convert thereof into second roughly directional light to detect the parabolic mirror that penetrates of light as second, and make first, second detect light along same optical axis to determination object space; And
Light modulated generating unit, the drive current of the laser according to first, second determination object gas after carrying out wavelength-modulated is supplied to first, second light-emitting component by this light modulated generating unit,
Described light accepting part comprises:
Focused broad-band portion, first, second along same optical axis to determination object space is detected light and focuses on together by this focused broad-band portion;
Broadband photo detector, this broadband photo detector accepts first, second detection light after being focused on by focused broad-band portion, and exports first, second detection signal; And
Light signal processing part, this light signal processing part, based on first, second detection signal received from broadband photo detector, carries out gas analysis,
The light modulated generating unit of illuminating part is synchronous with the light signal processing part of light accepting part, and measures the concentration of oxygen and CO gas individually in the different time,
The light modulated generating unit of illuminating part carries out length scanning to the first light-emitting component or the second light-emitting component, be included in the absorption line of the wavelength 2326.8nm of CO gas when CO gas is analyzed to make it and be present near wavelength 2326.8nm and the absorption line of the different moisture bearing gas of the peak wavelength of absorption intensity
The light signal processing part of light accepting part carries out computing based on the information of the absorption of CO gas and the absorption of moisture bearing gas to carbon monoxide gas concentration and moisture bearing gas concentration, and it can be used as the absorption information based on moisture bearing gas to carry out revised carbon monoxide gas concentration to the interference caused by moisture bearing gas.
2. a multicomponent laser type gas analyser, this multicomponent laser type gas analyser adopts Wavelength variable laser optical spectroscopy and wavelength-modulated optical spectroscopy, described Wavelength variable laser optical spectroscopy and the concentration of wavelength-modulated optical spectroscopy to a kind of i.e. the first determination object gas in the oxygen in determination object space and CO gas and another kind of i.e. the second determination object gas measure, the feature of described multicomponent laser type gas analyser is, comprise illuminating part and light accepting part
Described illuminating part comprises:
First light-emitting component, the injection of this first light-emitting component comprises the laser of the wavelength band of the light absorption frequency spectrum of the first determination object gas;
Second light-emitting component, the injection of this second light-emitting component comprises the laser of the wavelength band of the light absorption frequency spectrum of the second determination object gas;
Directional light converter section, this directional light converter section will penetrate from the first light-emitting component and the laser spread converts the first roughly directional light to, and it can be used as the first detection light and penetrate;
Band illuminating part hole parabolic mirror, this band illuminating part hole parabolic mirror have make the through hole of the first detection light transmission and for penetrate from the second light-emitting component and the laser spread reflect and convert thereof into second roughly directional light to detect the parabolic mirror that penetrates of light as second, and make first, second detect light along same optical axis to determination object space; And
Light modulated generating unit, the drive current of the laser after having carried out wavelength-modulated according to first, second determination object gas is supplied to first, second light-emitting component by this light modulated generating unit,
Described light accepting part comprises:
Light accepting part parabolic mirror, first, second detection light along determination object spatial on same optical axis reflects by this light accepting part parabolic mirror together;
Broadband photo detector, this broadband photo detector accepts to carry out first, second detection light after focusing on and reflecting by light accepting part parabolic mirror, and exports first, second detection signal; And
Light signal processing part, this light signal processing part, based on first, second detection signal received from broadband photo detector, carries out gas analysis,
The light modulated generating unit of illuminating part is synchronous with the light signal processing part of light accepting part, and measures the concentration of oxygen and CO gas individually in the different time,
The light modulated generating unit of illuminating part carries out length scanning to the first light-emitting component or the second light-emitting component, be included in the absorption line of the wavelength 2326.8nm of CO gas when CO gas is analyzed to make it and be present near wavelength 2326.8nm and the absorption line of the different moisture bearing gas of the peak wavelength of absorption intensity
The light signal processing part of light accepting part carries out computing based on the information of the absorption of CO gas and the absorption of moisture bearing gas to carbon monoxide gas concentration and moisture bearing gas concentration, and it can be used as the absorption information based on moisture bearing gas to carry out revised carbon monoxide gas concentration to the interference caused by moisture bearing gas.
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| PCT/JP2014/064434 WO2015181956A1 (en) | 2014-05-30 | 2014-05-30 | Multicomponent laser gas analyzer |
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Also Published As
| Publication number | Publication date |
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| WO2015181956A1 (en) | 2015-12-03 |
| CN105531580B (en) | 2018-09-21 |
| JP6128361B2 (en) | 2017-05-17 |
| JPWO2015181956A1 (en) | 2017-04-20 |
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