CN105517353A - Hanging basket and manufacture method of circuit board - Google Patents

Hanging basket and manufacture method of circuit board Download PDF

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Publication number
CN105517353A
CN105517353A CN201510854454.XA CN201510854454A CN105517353A CN 105517353 A CN105517353 A CN 105517353A CN 201510854454 A CN201510854454 A CN 201510854454A CN 105517353 A CN105517353 A CN 105517353A
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CN
China
Prior art keywords
hanging basket
wiring board
positioning filament
framework
plate space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510854454.XA
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Chinese (zh)
Other versions
CN105517353B (en
Inventor
车世民
陈子形
李晋峰
谢继敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Founder Holdings Development Co ltd
Zhuhai Founder Technology High Density Electronic Co Ltd
Original Assignee
Zhuhai Founder Technology High Density Electronic Co Ltd
Peking University Founder Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201510854454.XA priority Critical patent/CN105517353B/en
Publication of CN105517353A publication Critical patent/CN105517353A/en
Application granted granted Critical
Publication of CN105517353B publication Critical patent/CN105517353B/en
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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0017Etching of the substrate by chemical or physical means
    • H05K3/002Etching of the substrate by chemical or physical means by liquid chemical etching
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0147Carriers and holders

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Packages (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

The invention provides a hanging basket and a manufacture method of a circuit board. The hanging basket comprises an accommodating frame and board insertion spaces which are used for accommodating circuit boards and are located in the accommodating frame, wherein the plurality of board insertion spaces are arranged along the width or length direction of the accommodating frame, and each board insertion space extends along the height direction of the accommodating frame. The hanging basket further comprises positioning wires which extend from the tops of the board insertion spaces to the bottoms of the board insertion spaces; and the positioning wires are arranged between every two adjacent board insertion spaces and the outer side surfaces of the outmost board insertion spaces. After the circuit boards are inserted into the board insertion spaces, every two adjacent circuit boards are separated from each other through the positioning wires, and the positioning wires can provide supporting forces for the circuit boards, and therefore, the probability of being bent of the circuit boards due to transverse deviation caused by the impact of a circularly-flowing solution on the circuit boards can be decreased, the probability of being damaged of the circuit boards can be decreased, the yield rate of the circuit boards can be improved, and production cost of the circuit boards can be reduced.

Description

The manufacture method of Hanging Basket and wiring board
Technical field
The present invention relates to technical field of semiconductors, be specifically related to the manufacture method of a kind of Hanging Basket and wiring board.
Background technology
Along with electronic product is to lightening development, wiring board is also continuous towards thinner trend development.At present, the copper-clad base plate thickness for the production of wiring board reaches 0.05mm, even thinner.In wiring board (particularly high density interconnect circuit board) production process, it need carry out different PROCESS FOR TREATMENT, as the process of immersion Ni/Au surface treatment, and vertical blackening process before laser drill, the heavy Copper treatment of plating etc.
In above-mentioned production technology, wiring board all needs to hang with Hanging Basket dress, is then placed in production line medicine cylinder and produces.And because production line is full liquid production line, production equipment adopts immersion operation, and production liquid medicine is circulation overflow, and wiring board is inserted in Hanging Basket can produce certain concussion.
Common line plate due to thickness of slab thicker, weight is comparatively large, needs to arrange separation draw-in groove in the bottom of wiring board Hanging Basket and a sidepiece, and arranges the rear catch of a band draw-in groove in the other side, just can reach dress hanging strip part in the mode of three fixing circuit boards.But, adopt snap close to fix and easily make wiring board edge impaired, affect the production of successive process, and affect the yields of wiring board.
Thin plate wiring board dress is partially light due to the thinner and weight of thickness of slab, when vertical dress hangs up into the liquid in Hanging Basket, easily under the impact circulated of liquid, produces bending, even occurs the situation that adjacent two panels plate is fitted also affecting the yields of wiring board.
Summary of the invention
Therefore, the technical problem to be solved in the present invention to be to overcome in prior art Hanging Basket in wiring board production process can affect the technological deficiency of the production yields of wiring board.
Present invention also offers a kind of Hanging Basket, comprising: hold framework; Plate space, for holding wiring board, is positioned at the inside of described accommodation framework, and be multiple along the Width of described accommodation framework or length direction spread configuration, each plate space extends along the short transverse of described accommodation framework; It is characterized in that, also comprise several extend to bottom positioning filament from the top in described plate space, described positioning filament is arranged between adjacent two described plate spaces, and on the lateral surface in plate space described in outermost.
Preferably, several balls be located on described positioning filament are also comprised.
Preferably, each described ball on adjacent described positioning filament is dislocation type arrangement.
Preferably, described ball packaged type is arranged on described positioning filament.
Preferably, the material of described positioning filament and described ball is nonmetallic materials.
Preferably, described positioning filament is plastics positioning filament, and described ball is plastic bead.
Preferably, the same side in plate space described in each all arranges multiple described positioning filament.
Preferably, draw-in groove is several, is positioned on the bottom surface of described accommodation framework, and parallel and interval is arranged; Divider, be positioned at the top of described accommodation framework, parallel and interval arranges multiple, and its bearing of trend is identical with the bearing of trend of described draw-in groove, and with described draw-in groove one by one just to setting; Draw-in groove described in several and divider described in several form plate space described in several at described accommodation lower portion.
Preferably, also comprise the oblique pull positioning filament being positioned at each plate space, described oblique pull positioning filament is crossed between the multiple described positioning filament of the same side, and its two ends are connected respectively with the one end of dividing strip and one end of described draw-in groove being positioned at same vertical plane.
Preferably, described draw-in groove is discontinuously arranged on the bottom surface of described accommodation framework.
Preferably, described accommodation framework is the square frame that some plates connect and compose, and the long margin frame of described accommodation frame roof is spill.
Preferably, also comprise hook, its one end is connected to the center of the short end of described accommodation frame roof, and the other end is inverted L-shaped.
Preferably, also comprise multiple rigid bar, its one end is connected to the bottom of described hook, and the other end is connected on described accommodation framework.
Present invention also offers a kind of manufacture method of wiring board, comprising: the Hanging Basket that wiring board is housed is placed in the medicine cylinder with liquid medicine and carries out PROCESS FOR TREATMENT; Wherein, described Hanging Basket is Hanging Basket provided by the invention.
Preferably, before the Hanging Basket that wiring board is housed being placed in the medicine cylinder with liquid medicine, wiring board is inserted in the plate space of described Hanging Basket; Ball in described Hanging Basket is uniformly distributed in the two sides of described wiring board.
Preferably, described PROCESS FOR TREATMENT is the heavy Copper treatment of immersion Ni/Au process, surperficial Darkening process or plating.
Technical solution of the present invention, tool has the following advantages:
1. Hanging Basket provided by the invention, in the Width or the multiple plate space of length direction spread configuration that hold framework, and between adjacent two plate spaces and the lateral surface in outermost plate space positioning filament is set, after wiring board being inserted in plate space, adjacent two panels wiring board is kept apart by positioning filament, and positioning filament also can provide support power to wiring board, thus the probability that reduction wiring board bends because there is lateral shift under the impact circulated of liquid, namely the damaged probability of wiring board is reduced, and then improve the production yield of wiring board, and reduce its production cost.
2. Hanging Basket provided by the invention, positioning filament wears several balls, and be point cantact between ball and wiring board, compared with the linear contact lay between positioning filament with wiring board, contact area between itself and wiring board is less, make its wearing and tearing that wiring board is caused and scratch degree less, be conducive to the damaged probability reducing wiring board further, and improve the production yield of wiring board further.
3. Hanging Basket provided by the invention, the material of positioning filament and ball is nonmetallic materials, and it has lighter weight compared with metal material, makes it be not easy to cause scratch to wiring board, be conducive to the damaged probability reducing wiring board further, and improve the production yield of wiring board further.
4. the manufacture method of wiring board provided by the invention is owing to have employed above-mentioned Hanging Basket, and therefore obtained wiring board also has above-mentioned advantage.
Accompanying drawing explanation
In order to be illustrated more clearly in the specific embodiment of the invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the stereogram of a kind of execution mode of Hanging Basket provided by the invention;
Fig. 2 is the front view of a kind of execution mode of Hanging Basket provided by the invention;
Fig. 3 is the left view of a kind of execution mode of Hanging Basket provided by the invention;
Fig. 4 is the profile of a kind of execution mode of Hanging Basket provided by the invention.
Description of reference numerals:
1-basket holder; 2-links up with; 3-draw-in groove; 4-divider; 5-positioning filament; 6-ball;
7-plate space.
Embodiment
Be clearly and completely described technical scheme of the present invention below in conjunction with accompanying drawing, obviously, described embodiment is the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
In describing the invention, it should be noted that, orientation or the position relationship of the instruction such as term " " center ", " on ", D score, "left", "right", " vertically ", " level ", " interior ", " outward " they be based on orientation shown in the drawings or position relationship; be only the present invention for convenience of description and simplified characterization; instead of instruction or imply the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as limitation of the present invention.In addition, term " first ", " second ", " the 3rd " only for describing object, and can not be interpreted as instruction or hint relative importance.
Embodiment 1
Present embodiments provide a kind of embodiment of Hanging Basket, as shown in Figure 1, comprising:
Hold framework 1;
Plate space 7, for holding wiring board, is positioned at the inside of described accommodation framework 1, and be multiple along the Width of described accommodation framework 1 or length direction spread configuration, each plate space 7 extends along the short transverse of described accommodation framework 1;
Several extend to the positioning filament 5 of bottom from the top in described plate space 7, described positioning filament 5 is arranged between adjacent two described plate spaces 7, and on the lateral surface in plate space described in outermost.
Above-mentioned Hanging Basket, in the Width or the multiple plate space of length direction spread configuration that hold framework, and between adjacent two plate spaces and the lateral surface in outermost plate space positioning filament is set, after wiring board being inserted in plate space, adjacent two panels wiring board is kept apart by positioning filament, and positioning filament also can provide support power to wiring board, thus the probability that reduction wiring board bends because there is lateral shift under the impact circulated of liquid, namely the damaged probability of wiring board is reduced, and then improve the production yield of wiring board, and reduce its production cost.
The implementation in above-mentioned plate space 7 has a variety of.As one preferred embodiment, as shown in Figure 1 and Figure 4, Hanging Basket also comprises: draw-in groove 3, is several, is positioned on the bottom surface of described accommodation framework 1, and parallel and interval is arranged; Divider 4, be positioned at the top of described accommodation framework 1, parallel and interval arranges multiple, and its bearing of trend is identical with the bearing of trend of described draw-in groove 3, and with described draw-in groove 3 one by one just to setting; Draw-in groove 3 described in several and divider 4 described in several form plate space 7 described in several in described accommodation framework 1 inside.
Above-mentioned draw-in groove 3 and divider 4 for fixing circuit board, and form described plate space 7.And draw-in groove 3 and divider 4 are also for stationary positioned silk 5, and positioning filament 5 is distributed in the both sides of the Width of draw-in groove 3.Namely one end of positioning filament 5 is connected to draw-in groove 3, and the other end is connected on divider 4, and positioning filament 5 is arranged along the direction perpendicular to the bottom surface holding framework 1.Preferably, described draw-in groove 3 is discontinuously arranged on the bottom surface of described accommodation framework 1.
Certainly, as the execution mode of distortion, draw-in groove can be omitted, and directly adopt dividing strip 4 to form described plate space, and this setup, positioning filament 5 needs the more crypto set of design, thus passing through guiding and the supporting role of positioning filament 5, mode wiring board bends.
As shown in Figure 2, as further preferred embodiment, above-mentioned Hanging Basket also comprises the oblique pull positioning filament 8 being positioned at each plate space 7, described oblique pull positioning filament 8 is crossed between the multiple described positioning filament 5 of the same side, and its two ends are connected respectively with the one end of dividing strip 4 and one end of described draw-in groove 3 being positioned at same vertical plane.
Network structure is formed between oblique pull positioning filament 8 and positioning filament 5, oblique pull positioning filament 8 makes the contact between the multiple positioning filaments 5 on same vertical plane more tight, reliable, thus improve the stability of positioning filament 5, the probability that further reduction wiring board bends because there is lateral shift under the impact circulated of liquid, and then improve the production yield of wiring board, a step-down of going forward side by side its production cost low.
As shown in Figures 1 to 4, as one preferred embodiment, Hanging Basket also comprises several balls 6 be located on described positioning filament 5.
Owing to being point cantact between ball and wiring board, compared with the linear contact lay between positioning filament with wiring board, contact area between itself and wiring board is less, make its wearing and tearing that wiring board is caused and scratch degree less, be conducive to the damaged probability reducing wiring board further, and improve the production yield of wiring board further.
As further preferred embodiment, the arrangement in dislocation type of each described ball 6 on adjacent described positioning filament 5, the same side in plate space 7 described in each all arranges multiple described positioning filament 5.
Above-mentioned set-up mode makes ball more uniformly be distributed in two surfaces of wiring board, make the whole support force being uniformly distributed with ball of wiring board, be conducive to preventing wiring board from bending because of gravity or rocking of liquid medicine, thus reduce the damaged probability of wiring board further, and improve the production yield of wiring board further.
Preferred further, described ball 6 packaged type is arranged on described positioning filament 5.That is, fastening a little between ball 6 and positioning filament 5, but it is not exclusively fixing, both relative positions are movable, like this can for the circuit board of different size (such as thickness), move ball 6 targetedly, make the whole support force being uniformly distributed with ball of wiring board, and avoid ball 6 pairs of circuit board surfaces to cause fixing point impression.
As further preferred embodiment, the material of described positioning filament 5 and described ball 6 is nonmetallic materials.Nonmetallic materials have lighter weight compared with metal material, make it be not easy to cause scratch to wiring board, are conducive to the damaged probability reducing wiring board further, and improve the production yield of wiring board further.
Nonmetallic materials can be material common in this area, such as rubber, pottery etc.As more preferred embodiment, described positioning filament 5 is plastics positioning filament, and described ball 6 is plastic bead.Plastics positioning filament and ball have lighter weight, are beneficial to and reduce its scratch caused wiring board further.
As depicted in figs. 1 and 2, as preferred embodiment, described accommodation framework 1 is the square frame that some plates connect and compose, and the long margin frame at described accommodation framework 1 top is spill.Above-mentioned spill frame is for the formation of plate space 7.
It should be noted that, the size holding framework 1 is greater than the size of largest production wiring board, to meet the production that this device can be used for different size wiring board, and ensure that wiring board dress hangs rear board upper end higher than accommodation framework 1 top matrix line position, conveniently pick and place wiring board.
As shown in Figure 3, as preferred embodiment, the Hanging Basket that the present embodiment provides also comprises hook 2, and its one end is connected to the center of the short end at described accommodation framework 1 top, and the other end is inverted L-shaped.The upstanding portion of hook 2 is according to the setting of medicine cylinder height
Preferred further, Hanging Basket also comprises multiple rigid bar, and its one end is connected to the bottom of described hook 2, and the other end is connected on described accommodation framework 1.Rigid bar is the form setting of A-frame, for increasing the connectivity between hook 2 and accommodation framework 1.
Embodiment 2
The present embodiment provides a kind of embodiment of manufacture method of wiring board, comprising: the Hanging Basket that wiring board is housed is placed in the medicine cylinder with liquid medicine and carries out PROCESS FOR TREATMENT; Wherein, described Hanging Basket is the Hanging Basket of any one execution mode that the embodiment of the present invention 1 is recorded.
The manufacture method of above-mentioned wiring board is owing to have employed the Hanging Basket of any one execution mode recorded in embodiment 1, and therefore obtained wiring board also has the advantage of the Hanging Basket that the embodiment of the present invention provides.
As preferred embodiment, before the Hanging Basket that wiring board is housed being placed in the medicine cylinder with liquid medicine, wiring board is inserted in the plate space 7 of described Hanging Basket, and the ball 6 in described Hanging Basket is uniformly distributed in the two sides of described wiring board, to make the whole support force being uniformly distributed with ball 6 of wiring board.
It should be noted that, above-mentioned PROCESS FOR TREATMENT can be the heavy Copper treatment of immersion Ni/Au process, surperficial Darkening process or plating.Certainly, state PROCESS FOR TREATMENT and be not limited to above-mentioned example.
Obviously, above-described embodiment is only for clearly example being described, and the restriction not to execution mode.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all execution modes.And thus the apparent change of extending out or variation be still among the protection range of the invention.

Claims (16)

1. a Hanging Basket, comprising:
Hold framework (1);
Plate space (7), for holding wiring board, be positioned at the inside of described accommodation framework (1), be multiple along the Width of described accommodation framework (1) or length direction spread configuration, each plate space (7) extends along the short transverse of described accommodation framework (1);
It is characterized in that, also comprise several extend to bottom positioning filament (5) from the top of described plate space (7), described positioning filament (5) is arranged between adjacent two described plate spaces (7), and on the lateral surface in plate space described in outermost.
2. Hanging Basket according to claim 1, is characterized in that, also comprises several balls (6) be located on described positioning filament (5).
3. Hanging Basket according to claim 2, is characterized in that, each described ball (6) on adjacent described positioning filament (5) arranges in dislocation type.
4. Hanging Basket according to claim 2, is characterized in that, described ball (6) packaged type is arranged on described positioning filament (5).
5. the Hanging Basket according to any one of claim 2 to 4, is characterized in that, the material of described positioning filament (5) and described ball (6) is nonmetallic materials.
6. Hanging Basket according to claim 5, is characterized in that, described positioning filament (5) is plastics positioning filament, and described ball (6) is plastic bead.
7. Hanging Basket according to any one of claim 1 to 6, is characterized in that, the same side of plate space (7) described in each all arranges multiple described positioning filament (5).
8. Hanging Basket according to any one of claim 1 to 7, is characterized in that, also comprises
Draw-in groove (3) is several, is positioned on the bottom surface of described accommodation framework (1), and parallel and interval is arranged;
Divider (4), be positioned at the top of described accommodation framework (1), parallel and interval arranges multiple, and its bearing of trend is identical with the bearing of trend of described draw-in groove (3), and with described draw-in groove (3) one by one just to setting;
Draw-in groove described in several (3) and divider (4) described in several form plate space (7) described in several in described accommodation framework (1) inside.
9. Hanging Basket according to claim 8, it is characterized in that, also comprise the oblique pull positioning filament (8) being positioned at each plate space (7), described oblique pull positioning filament (8) be crossed on be positioned at the same side multiple described positioning filament (5) between, its two ends are connected respectively with the one end of described dividing strip (4) and one end of described draw-in groove (3) being positioned at same vertical plane.
10. Hanging Basket according to claim 8, is characterized in that, described draw-in groove (3) is discontinuously arranged on the bottom surface of described accommodation framework (1).
11. Hanging Baskets according to any one of claim 1 to 10, is characterized in that, the square frame that described accommodation framework (1) connects and composes for some plates, and the long margin frame at described accommodation framework (1) top is spill.
12. Hanging Baskets according to any one of claim 1 to 10, is characterized in that, also comprise hook (2), and its one end is connected to the center of the short end at described accommodation framework (1) top, and the other end is inverted L-shaped.
13. Hanging Baskets according to claim 12, is characterized in that, also comprise multiple rigid bar, and its one end is connected to the bottom of described hook (2), and the other end is connected on described accommodation framework (1).
The manufacture method of 14. 1 kinds of wiring boards, is characterized in that, comprising:
The Hanging Basket that wiring board is housed is placed in the medicine cylinder with liquid medicine and carries out PROCESS FOR TREATMENT;
Wherein, the Hanging Basket of described Hanging Basket according to any one of claim 1 to 13.
15. manufacture methods according to claim 14, is characterized in that,
Before the Hanging Basket that wiring board is housed being placed in the medicine cylinder with liquid medicine, wiring board is inserted in the plate space (7) of described Hanging Basket;
Ball (6) in described Hanging Basket is uniformly distributed in the two sides of described wiring board.
16. manufacture methods according to claims 14 or 15, is characterized in that, described PROCESS FOR TREATMENT is the heavy Copper treatment of immersion Ni/Au process, surperficial Darkening process or plating.
CN201510854454.XA 2015-11-30 2015-11-30 The production method of Hanging Basket and wiring board Active CN105517353B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN201510854454.XA CN105517353B (en) 2015-11-30 2015-11-30 The production method of Hanging Basket and wiring board

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CN105517353A true CN105517353A (en) 2016-04-20
CN105517353B CN105517353B (en) 2018-08-07

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112105151A (en) * 2019-06-18 2020-12-18 群翊工业股份有限公司 Substrate processing apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009026963A (en) * 2007-07-19 2009-02-05 C Uyemura & Co Ltd Basket, held body removing device and removing method
CN201781693U (en) * 2010-07-14 2011-03-30 深圳市深联电路有限公司 Hanging basket for vertical brown oxide treatment line of PCB (printed circuit board)
CN201942774U (en) * 2010-12-23 2011-08-24 北大方正集团有限公司 Hanging basket for bearing plurality of board parts
CN203333790U (en) * 2013-07-25 2013-12-11 西安金百泽电路科技有限公司 Circuit board gold plating hanging basket

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009026963A (en) * 2007-07-19 2009-02-05 C Uyemura & Co Ltd Basket, held body removing device and removing method
CN201781693U (en) * 2010-07-14 2011-03-30 深圳市深联电路有限公司 Hanging basket for vertical brown oxide treatment line of PCB (printed circuit board)
CN201942774U (en) * 2010-12-23 2011-08-24 北大方正集团有限公司 Hanging basket for bearing plurality of board parts
CN203333790U (en) * 2013-07-25 2013-12-11 西安金百泽电路科技有限公司 Circuit board gold plating hanging basket

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112105151A (en) * 2019-06-18 2020-12-18 群翊工业股份有限公司 Substrate processing apparatus

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