CN105502275B - 光学芯片与惯性传感器的集成装置及其制造方法 - Google Patents
光学芯片与惯性传感器的集成装置及其制造方法 Download PDFInfo
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- CN105502275B CN105502275B CN201610004728.0A CN201610004728A CN105502275B CN 105502275 B CN105502275 B CN 105502275B CN 201610004728 A CN201610004728 A CN 201610004728A CN 105502275 B CN105502275 B CN 105502275B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 183
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 title claims abstract description 11
- 238000002834 transmittance Methods 0.000 claims abstract description 20
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000004806 packaging method and process Methods 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims description 8
- 230000000903 blocking effect Effects 0.000 claims description 5
- 238000007731 hot pressing Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 description 6
- 239000003292 glue Substances 0.000 description 6
- 238000005538 encapsulation Methods 0.000 description 5
- 238000001746 injection moulding Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
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- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15151—Shape the die mounting substrate comprising an aperture, e.g. for underfilling, outgassing, window type wire connections
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Remote Sensing (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- Led Device Packages (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610004728.0A CN105502275B (zh) | 2016-01-04 | 2016-01-04 | 光学芯片与惯性传感器的集成装置及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610004728.0A CN105502275B (zh) | 2016-01-04 | 2016-01-04 | 光学芯片与惯性传感器的集成装置及其制造方法 |
Publications (2)
Publication Number | Publication Date |
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CN105502275A CN105502275A (zh) | 2016-04-20 |
CN105502275B true CN105502275B (zh) | 2017-04-05 |
Family
ID=55710664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201610004728.0A Active CN105502275B (zh) | 2016-01-04 | 2016-01-04 | 光学芯片与惯性传感器的集成装置及其制造方法 |
Country Status (1)
Country | Link |
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CN (1) | CN105502275B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109867257A (zh) | 2017-12-04 | 2019-06-11 | 讯芯电子科技(中山)有限公司 | 芯片封装体与制造方法 |
CN112179409A (zh) * | 2020-09-22 | 2021-01-05 | 青岛歌尔智能传感器有限公司 | 组合传感器及其制作方法、以及电子设备 |
CN117029908A (zh) * | 2023-07-14 | 2023-11-10 | 武汉衡惯科技发展有限公司 | Mems传感器及其制作方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101238592A (zh) * | 2005-06-23 | 2008-08-06 | 奥斯兰姆奥普托半导体有限责任公司 | 转换波长的转换器材料,发光的光学元件以及它们的制造方法 |
JP2009120732A (ja) * | 2007-11-15 | 2009-06-04 | Sekisui Chem Co Ltd | 光半導体用樹脂組成物、光半導体素子用封止剤、光半導体素子用ダイボンド材、光半導体素子用アンダーフィル材及びそれらを用いた光半導体素子 |
CN102157512A (zh) * | 2009-11-30 | 2011-08-17 | 精材科技股份有限公司 | 芯片封装体及其形成方法 |
CN103712720A (zh) * | 2014-01-02 | 2014-04-09 | 杭州士兰集成电路有限公司 | 电容式压力传感器和惯性传感器集成器件及其形成方法 |
CN205294830U (zh) * | 2016-01-04 | 2016-06-08 | 歌尔声学股份有限公司 | 光学芯片与惯性传感器的集成装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10884551B2 (en) * | 2013-05-16 | 2021-01-05 | Analog Devices, Inc. | Integrated gesture sensor module |
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2016
- 2016-01-04 CN CN201610004728.0A patent/CN105502275B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101238592A (zh) * | 2005-06-23 | 2008-08-06 | 奥斯兰姆奥普托半导体有限责任公司 | 转换波长的转换器材料,发光的光学元件以及它们的制造方法 |
JP2009120732A (ja) * | 2007-11-15 | 2009-06-04 | Sekisui Chem Co Ltd | 光半導体用樹脂組成物、光半導体素子用封止剤、光半導体素子用ダイボンド材、光半導体素子用アンダーフィル材及びそれらを用いた光半導体素子 |
CN102157512A (zh) * | 2009-11-30 | 2011-08-17 | 精材科技股份有限公司 | 芯片封装体及其形成方法 |
CN103712720A (zh) * | 2014-01-02 | 2014-04-09 | 杭州士兰集成电路有限公司 | 电容式压力传感器和惯性传感器集成器件及其形成方法 |
CN205294830U (zh) * | 2016-01-04 | 2016-06-08 | 歌尔声学股份有限公司 | 光学芯片与惯性传感器的集成装置 |
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CN105502275A (zh) | 2016-04-20 |
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Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Applicant after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Applicant before: Goertek Inc. |
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Effective date of registration: 20200608 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |