CN105492129B - 双模式cmut换能器 - Google Patents

双模式cmut换能器 Download PDF

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Publication number
CN105492129B
CN105492129B CN201480047271.0A CN201480047271A CN105492129B CN 105492129 B CN105492129 B CN 105492129B CN 201480047271 A CN201480047271 A CN 201480047271A CN 105492129 B CN105492129 B CN 105492129B
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CN
China
Prior art keywords
cmut
unit
bias voltage
membrane
frequency
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Active
Application number
CN201480047271.0A
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English (en)
Chinese (zh)
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CN105492129A (zh
Inventor
A·V·帕蒂尔
J·宋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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Publication of CN105492129A publication Critical patent/CN105492129A/zh
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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4411—Device being modular
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4438—Means for identifying the diagnostic device, e.g. barcodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/06—Influence generators
    • H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Molecular Biology (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Veterinary Medicine (AREA)
  • Medical Informatics (AREA)
  • Physics & Mathematics (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Mechanical Engineering (AREA)
  • Gynecology & Obstetrics (AREA)
  • Power Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
CN201480047271.0A 2013-08-27 2014-08-14 双模式cmut换能器 Active CN105492129B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361870276P 2013-08-27 2013-08-27
US61/870,276 2013-08-27
EP13187234 2013-10-03
EP13187234.3 2013-10-03
PCT/EP2014/067400 WO2015028314A1 (en) 2013-08-27 2014-08-14 Dual mode cmut transducer

Publications (2)

Publication Number Publication Date
CN105492129A CN105492129A (zh) 2016-04-13
CN105492129B true CN105492129B (zh) 2019-07-02

Family

ID=49322229

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480047271.0A Active CN105492129B (zh) 2013-08-27 2014-08-14 双模式cmut换能器

Country Status (5)

Country Link
US (1) US20160199030A1 (https=)
EP (1) EP3038764A1 (https=)
JP (1) JP6513674B2 (https=)
CN (1) CN105492129B (https=)
WO (1) WO2015028314A1 (https=)

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CA2962785A1 (en) 2014-10-07 2016-04-14 Butterfly Network, Inc. Ultrasound signal processing circuitry and related apparatus and methods
CN106794001B (zh) 2014-10-08 2021-09-07 蝴蝶网络有限公司 用于超声探头的参数加载器及相关设备和方法
EP3206748B1 (en) * 2014-10-17 2024-04-17 Koninklijke Philips N.V. An ultrasound patch for ultrasound hyperthermia and ablation therapy
KR20160056614A (ko) * 2014-11-12 2016-05-20 삼성전자주식회사 영상 처리 장치, 영상 처리 장치 제어 방법 및 초음파 영상 장치
CN106999163B (zh) * 2014-12-11 2021-01-26 皇家飞利浦有限公司 具有交错列的微加工超声换能器的导管换能器
JP6759209B2 (ja) * 2014-12-15 2020-09-23 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 直接同軸取付けを備えるコンパクトな超音波変換器
JP6925286B2 (ja) * 2015-06-30 2021-08-25 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波システム及び超音波パルス送信方法
US11213855B2 (en) * 2015-08-11 2022-01-04 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with increased patient safety
EP3347735B1 (en) 2015-09-10 2021-06-02 Koninklijke Philips N.V. An ultrasound system with wide depth and detailed viewing
EP3371624B1 (en) 2015-11-02 2019-06-19 Koninklijke Philips N.V. An ultrasound system for providing ultrasound images at variable frequencies of a volumetric region comprising an interferer analyzer
WO2017216139A1 (en) * 2016-06-13 2017-12-21 Koninklijke Philips N.V. Broadband ultrasound transducer
US10856840B2 (en) * 2016-06-20 2020-12-08 Butterfly Network, Inc. Universal ultrasound device and related apparatus and methods
US11712221B2 (en) 2016-06-20 2023-08-01 Bfly Operations, Inc. Universal ultrasound device and related apparatus and methods
US10955536B2 (en) 2016-10-27 2021-03-23 Koninklijke Philips N.V. Ultrasound system with a tissue type analyzer
WO2018094118A1 (en) * 2016-11-16 2018-05-24 Teratech Corporation Portable ultrasound system
US11039814B2 (en) * 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
CN110325293B (zh) * 2016-12-22 2021-06-22 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
EP3366221A1 (en) 2017-02-28 2018-08-29 Koninklijke Philips N.V. An intelligent ultrasound system
EP3482835A1 (en) * 2017-11-14 2019-05-15 Koninklijke Philips N.V. Capacitive micro-machined ultrasound transducer (cmut) devices and control methods
WO2019034500A1 (en) * 2017-08-15 2019-02-21 Koninklijke Philips N.V. INTRALUMINAL ULTRASONIC DEVICE WITH ADJUSTABLE FREQUENCY
DE102017223869B4 (de) * 2017-12-29 2021-09-02 Infineon Technologies Ag MEMS-Bauelement und mobiles Gerät mit dem MEMS-Bauelement
FR3077163B1 (fr) * 2018-01-22 2021-08-27 Soitec Silicon On Insulator Procedes de conception et de fabrication d'un dispositif comprenant un reseau d'elements micro-usines, dispositif obtenu a l'issu de tels procedes
EP3527140A1 (en) * 2018-02-15 2019-08-21 Koninklijke Philips N.V. Ultrasound imaging system using an array of transducer elements and an imaging method
US10656007B2 (en) * 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
US12076186B2 (en) 2018-10-03 2024-09-03 Otonexus Medical Technologies, Inc. Methods and devices for membrane characterization with ultrasound and optical illumination
WO2021195826A1 (zh) 2020-03-30 2021-10-07 京东方科技集团股份有限公司 声波换能器及其制备方法
US11904357B2 (en) 2020-05-22 2024-02-20 GE Precision Healthcare LLC Micromachined ultrasonic transducers with non-coplanar actuation and displacement
FR3114255B1 (fr) * 2020-09-18 2023-05-05 Moduleus Transducteur CMUT
CN112452695B (zh) 2020-10-29 2023-02-17 北京京东方技术开发有限公司 声波换能结构及其制备方法和声波换能器
US11911792B2 (en) 2021-01-12 2024-02-27 GE Precision Healthcare LLC Micromachined ultrasonic transources with dual out-of-plane and in-plane actuation and displacement
CN113647990A (zh) * 2021-07-15 2021-11-16 深圳市赛禾医疗技术有限公司 一种心腔内二维超声成像导管及其系统
CN114160399B (zh) * 2021-12-02 2022-12-02 中国科学院苏州纳米技术与纳米仿生研究所 同频异构的压电超声波换能器及其制备方法
CN114886467B (zh) * 2022-05-26 2025-05-27 青岛海信医疗设备股份有限公司 一种校准超声设备通道一致性的方法和超声设备
US12115019B2 (en) * 2022-07-20 2024-10-15 SoundCath, Inc. Ultrasonic imaging system and method
US12599360B2 (en) 2022-10-24 2026-04-14 Boston Scientific Scimed, Inc. Ultrasonic imaging ablation catheter system and method
CN116293473B (zh) * 2022-12-08 2025-08-01 海鹰企业集团有限责任公司 一种改进型管道声纳湿端处理装置
US12599361B2 (en) 2023-02-14 2026-04-14 Boston Scientific Scimed, Inc. Ultrasonic imaging system and method

Citations (4)

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US20050219953A1 (en) * 2004-04-06 2005-10-06 The Board Of Trustees Of The Leland Stanford Junior University Method and system for operating capacitive membrane ultrasonic transducers
US20060004289A1 (en) * 2004-06-30 2006-01-05 Wei-Cheng Tian High sensitivity capacitive micromachined ultrasound transducer
US20080259725A1 (en) * 2006-05-03 2008-10-23 The Board Of Trustees Of The Leland Stanford Junior University Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers in immersion
CN101888809B (zh) * 2007-12-13 2012-11-28 株式会社日立医疗器械 超声波诊断装置和超声波探头

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US10092270B2 (en) * 2007-09-17 2018-10-09 Koninklijke Philips Electronics N.V. Pre-collapsed CMUT with mechanical collapse retention
WO2009073562A1 (en) * 2007-12-03 2009-06-11 Kolo Technologies, Inc. Dual-mode operation micromachined ultrasonic transducer
JP5473579B2 (ja) * 2009-12-11 2014-04-16 キヤノン株式会社 静電容量型電気機械変換装置の制御装置、及び静電容量型電気機械変換装置の制御方法
US20120250454A1 (en) * 2011-04-04 2012-10-04 Robert Nicholas Rohling Method and system for shaping a cmut membrane
IN2014CN03656A (https=) * 2011-11-17 2015-10-16 Koninkl Philips Nv

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
US20050219953A1 (en) * 2004-04-06 2005-10-06 The Board Of Trustees Of The Leland Stanford Junior University Method and system for operating capacitive membrane ultrasonic transducers
US20060004289A1 (en) * 2004-06-30 2006-01-05 Wei-Cheng Tian High sensitivity capacitive micromachined ultrasound transducer
US20080259725A1 (en) * 2006-05-03 2008-10-23 The Board Of Trustees Of The Leland Stanford Junior University Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers in immersion
CN101888809B (zh) * 2007-12-13 2012-11-28 株式会社日立医疗器械 超声波诊断装置和超声波探头

Also Published As

Publication number Publication date
CN105492129A (zh) 2016-04-13
WO2015028314A1 (en) 2015-03-05
JP2016533825A (ja) 2016-11-04
JP6513674B2 (ja) 2019-05-15
US20160199030A1 (en) 2016-07-14
EP3038764A1 (en) 2016-07-06

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