CN105463584A - Method, system, solid-liquid conversion time point determination method and device for crystal growth - Google Patents
Method, system, solid-liquid conversion time point determination method and device for crystal growth Download PDFInfo
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- CN105463584A CN105463584A CN201410452521.0A CN201410452521A CN105463584A CN 105463584 A CN105463584 A CN 105463584A CN 201410452521 A CN201410452521 A CN 201410452521A CN 105463584 A CN105463584 A CN 105463584A
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Abstract
The invention provides a solid-liquid conversion time point determination method for crystal growth. The method comprises the following steps: (11) acquiring images of materials in a crucible in real time; (12) determining boundary shape features corresponding to adjacent two material images; (13) computing areas, i.e., a first feature area and a second feature area of the boundary shape features of the adjacent two material images; (14) judging whether the absolute value of difference between the first feature area and the second feature area is greater than a set value or not; and (15) when the absolute value of the difference is greater than the set value, taking a shoot time point corresponding to the material image, which is shot later, of the adjacent two material images as a solid-liquid conversion time point. The invention also provides a solid-liquid conversion time point determination device for crystal growth as well as a crystal growth system and method. According to the scheme, the problem in the background art that the accuracy of determining subjects to experience, melt sloshing is caused and failed observation is easy due to the fact that the solid-liquid conversion time point is determined through artificial observation can be solved.
Description
Technical field
The present invention relates to technical field of crystal growth, more specifically, relate to a kind of crystal growth solid-liquid Conversion years defining method and device, the invention still further relates to a kind of crystal growth system comprising this device, and adopt the growing method of above-mentioned defining method.
Background technology
The method of direction growing crystal (such as sapphire) has multiple from bottom to top, such as heat-exchanging method, falling crucible method, warm terraced method etc.Wherein, heat-exchanging method is high with its level of automation, thermal field is stablized, the life-span is grown, rely on to artificial the main method that the advantage such as lower becomes crystal growth.
Please refer to accompanying drawing 1, Fig. 1 is that a kind of typical case adopts heat-exchanging method to carry out the crystal growth system schematic diagram of crystal growth.Crystal growth system shown in Fig. 1 comprises body of heater 1, upper thermal insulation layer 2, heating element 3, side thermal insulation layer 4, lower thermal insulation layer 5, heat exchange tube 6, crucible 7, observes through hole 8 and viewing window 9.Wherein, upper thermal insulation layer 2, lower thermal insulation layer 5 and side thermal insulation layer 4 form the heating chamber for holding crucible 7.Heating element 3 is arranged in heating chamber, and between the inwall and the sidewall of crucible 7 of side thermal insulation layer 4, for heating crucible 7.Heat exchange tube 6 directes reach the bottom of crucible 7 successively through body of heater 1 and lower thermal insulation layer 5 from the bottom of described body of heater 1, heat exchange tube 6 forms to form hot switching path by two mutually sheathed pipelines.Wherein, hot switching path comprises induction trunk 61, outlet passageway 62 and the heat exchange chamber (space contacted with crucible 7 in Fig. 1) both connection.Cooling gas (such as helium) by induction trunk 61 enter into after heat exchange chamber with crucible 7 bottom heat exchange, then discharge from outlet passageway 62.Above-mentioned crystal growth system takes away by the cooling effect of cooling gas the latent heat that crystal growth discharges, thus promote crystal do not stop growth, until long crystalline substance completes.In the process of crystal growth, operator can observe the crystal growth condition of crucible 7 by the observation through hole 8 be positioned on the viewing window 9 at body of heater 1 top and upper thermal insulation layer 2.
In the process of high temperature crystal growth, because temperature is high, conventional thermocouples accurate temperature measurement is very difficult, usually adopts infrared pyrometer test in-furnace temperature.But because the focus point of infrared pyrometer between different table and different heat is different, the thickness of infra-red transmitting window mouth is different with surface clearness, and many-sided reason such as infrared individual difference, cause the absolute accuracy of infrared pyrometer thermometric between different table and different heat and repeatability poor, sometimes temperature departure can reach ten several times and even tens of degree, and this has very large impact to crystal growth. using the temperature corresponding to the infrared pyrometer that this time point is corresponding as temperature reference point.Temperature corresponding when raw material starts to melt in crucible equals melting temperature substantially, using infrared temperature corresponding to this solid-liquid transformation point as temperature reference point, then in temperature reference point, relatively-stationary seed crystal fusing equalising temp is added again, to improve melt temperature, and then accurately can control seed crystal and be melted to suitable size, the final stability ensureing suitable crystal growth temperature and crystal growth.Judge in crucible, when fluid surface starts crystallization for improving crystal growth quality and determining that crystal growth cycles is extremely important exactly.Just enter annealing stage when crystal does not also have growth to complete can cause lattice defect or break, have a strong impact on the utilization ratio of crystal.After crystal completes, for a long time enter annealing stage more also still can cause the waste of cooling gas in cooling due to cooling gas.Visible, detection is melted time point (namely starting the time point melted) and is solidified time point (namely starting the time point of crystallization) and has directive significance to the subsequent technique of crystal growth exactly.
At present, the situation that staff observes material in crucible 7 by viewing window 9 determines solid-liquid Conversion years (namely melt time point and solidify time point), and the material changing conditions namely needing professional to be observed in crucible 7 by the viewing window 9 of furnace roof is artificially determined.There is following defect in aforesaid way: the first, is limited to experience to the judgement of the material changing conditions in crucible 7, and precision is different finally to cause solid-liquid Conversion years to judge, causes consistence and the less stable of crystal; The second, need professional to climb to the top view of body of heater 1 continually, frequently climb to body of heater carries out observing and easily cause melt to rock, and then disturbance crystal growth interface, finally affect crystal growth quality, and inefficiency.Aforesaid way easily misses solid-liquid Conversion years simultaneously, finally causes observing unsuccessfully.3rd, because needs manual observation confirms, cause whole process of growth cannot realize the growth of automatization completely.
Summary of the invention
The invention provides a kind of crystal growth solid-liquid Conversion years defining method, determine that the determination precision existing for solid-liquid Conversion years is limited to experience, causes melt to rock and easily observes failed problem to solve in background technology by artificially observing, and the full-automation of crystal growth can be realized.
In order to solve the problems of the technologies described above, the invention provides following technical scheme:
Crystal growth solid-liquid Conversion years defining method, comprises the following steps:
11) material image in Real-time Obtaining crucible;
12) the boundary shape feature that two adjacent described material images are corresponding is determined;
13) calculate the area of adjacent two described material image boundary shape facilities, be respectively fisrt feature area and second feature area;
14) judge whether the absolute value of described fisrt feature area and described second feature area difference is greater than set(ting)value;
15) when the absolute value of described difference is greater than set(ting)value, the shooting time point corresponding to a described material image of more late shooting in two adjacent described material images is got as described solid-liquid Conversion years.
Preferably, in above-mentioned crystal growth solid-liquid Conversion years defining method, step 12) comprising:
21) gray-scale value of each pixel of described material image is detected;
22) described gray-scale value is selected to be greater than the pixel of default gray-scale value, to form described boundary shape feature.
Preferably, in above-mentioned crystal growth solid-liquid Conversion years defining method, step 12) comprising:
31) gray-scale value of each pixel of described material image is detected;
32) difference of the gray-scale value of all adjacent two pixels is calculated;
33) absolute value getting the difference of described gray-scale value is greater than the pixel that in default gray value differences, gray-scale value is larger, as boundary pixel point;
34) using the region that all described boundary pixel point are formed as described boundary shape feature.
Preferably, in above-mentioned crystal growth solid-liquid Conversion years defining method, step 11) and step 12) between also comprise:
Noise reduction process and/or smoothing processing are implemented to described material image.
Preferably, in above-mentioned crystal growth solid-liquid Conversion years defining method, step 15) also comprise afterwards:
Detect the in-furnace temperature that described solid-liquid Conversion years is corresponding.
Growing method, adopts the crystal growth solid-liquid Conversion years defining method determination solid-liquid Conversion years described in above-mentioned any one.
Crystal growth solid-liquid Conversion years determining device, for crystal growth system, comprising:
Image acquisition unit, for material image in the crucible of crystal growth system described in Real-time Obtaining;
Determining unit, for determining the boundary shape feature that two adjacent described material images are corresponding;
First computing unit, for calculating the area of adjacent two described material image boundary shape facilities, the area of adjacent two described material image boundary shape facilities is respectively fisrt feature area and second feature area;
Judging unit, for judging whether the absolute value of described fisrt feature area and described second feature area difference is greater than set(ting)value;
Value unit, for when the absolute value of described difference is greater than set(ting)value, gets the shooting time point corresponding to a described material image of more late shooting in adjacent two described material images as described solid-liquid Conversion years.
Preferably, in above-mentioned crystal growth solid-liquid Conversion years determining device, described determining unit comprises:
Detecting unit, for detecting the gray-scale value of each pixel of described material image;
Construction unit, selects described gray-scale value to be greater than the pixel of default gray-scale value, to form described boundary shape feature.
Preferably, in above-mentioned crystal growth solid-liquid Conversion years determining device, described determining unit comprises:
Detecting unit, for detecting the gray-scale value of each pixel of described material image;
Second computing unit, for calculating the difference of the gray-scale value of all adjacent two pixels;
Selection unit, selects the absolute value of the difference of described gray-scale value to be greater than the pixel that in default gray value differences, gray-scale value is larger, as boundary pixel point;
Construction unit, using the region that all described boundary pixel point are formed as described boundary shape feature.
Preferably, in above-mentioned crystal growth solid-liquid Conversion years determining device, described crystal growth solid-liquid Conversion years determining device also comprises:
Fix relative to the camera lens of described image acquisition unit, and for regulating the spectral filter entering into described camera lens light ray energy.
The present invention also provides a kind of crystal growth system, and described crystal growth system has the crystal growth solid-liquid Conversion years determining device described in above-mentioned any one.
In crystal growth solid-liquid Conversion years defining method provided by the invention, by material image in Real-time Obtaining crucible, then determine the boundary shape feature that adjacent two material images are corresponding, fisrt feature area and second feature area difference absolute value be greater than set(ting)value time get more late shooting a material image corresponding to shooting time point as solid-liquid Conversion years.The real solid-liquid Conversion years defining method provided of the present invention adopts Real-time Obtaining material image, then carries out analysis to determine solid-liquid Conversion years to material image.Compared to background technology, scheme provided by the invention can avoid artificial participation, and then the judgement of material change in crucible can be avoided to be limited to artificial experience, can ensure to judge that precision is consistent, also can avoid manually climbing to table carries out observing easily causes melt to rock, and then the situation of disturbance crystal growth interface occurs, finally can improve the quality of crystal growth and obtain the efficiency of solid-liquid Conversion years.And, such scheme real-time image acquisition, can solve staff interval observe existing for the easily failed problem of observation.Need the solid-liquid Conversion years of manual confirmation in background technology, this programme can confirm automatically, and then can realize the full-automation growth of crystal.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the embodiment of the present invention, below the accompanying drawing used required in describing embodiment is briefly described, apparently, for those of ordinary skills, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is that a kind of typical case adopts heat-exchanging method to carry out the crystal growth system schematic diagram of crystal growth;
Fig. 2 is the schematic flow sheet of the crystal growth solid-liquid Conversion years defining method that the embodiment of the present invention one provides;
Fig. 3 is the schematic flow sheet of the crystal growth solid-liquid Conversion years defining method that the embodiment of the present invention two provides;
Fig. 4 is the schematic flow sheet of the crystal growth solid-liquid Conversion years defining method that the embodiment of the present invention three provides;
Fig. 5 is the structural representation of the crystal growth solid-liquid Conversion years determining device that the embodiment of the present invention four provides;
Fig. 6 is the structural representation of the crystal growth solid-liquid Conversion years determining device that the embodiment of the present invention five provides;
Fig. 7 is the structural representation of the crystal growth solid-liquid Conversion years determining device that the embodiment of the present invention six provides.
In upper Fig. 1:
Body of heater 1, upper thermal insulation layer 2, heating element 3, side thermal insulation layer 4, lower thermal insulation layer 5, heat exchange tube 6, crucible 7, observation through hole 8, viewing window 9, induction trunk 61, outlet passageway 62.
Embodiment
Embodiments provide a kind of crystal growth solid-liquid Conversion years defining method, determine that the determination precision existing for solid-liquid Conversion years is limited to experience, causes melt to rock and easily observes failed problem to solve in background technology by artificially observing, and the full-automation of crystal growth can be realized.
Technical scheme in the embodiment of the present invention is understood better in order to make those skilled in the art person, and enable the above-mentioned purpose of the embodiment of the present invention, feature and advantage become apparent more, below in conjunction with accompanying drawing, the technical scheme in the embodiment of the present invention is described in further detail.
Embodiment one
Please refer to the flow process that accompanying drawing 2, Fig. 2 shows the crystal growth solid-liquid Conversion years defining method that the embodiment of the present invention one provides.The crystal growth solid-liquid Conversion years defining method that the embodiment of the present invention one provides is applicable to heat-exchanging method growing method.Solid-liquid Conversion years refers in crystal growth cycles, and solid materials starts time point when fusing or the beginning crystallization of liquid raw material surface.Certainly, this time point is the time point in crystal growth cycles.
Flow process shown in Fig. 2, comprising:
Material image in S101, Real-time Obtaining crucible.
Step S101 is completed by photographic camera, ccd image sensor or video recorder usually.Accuracy of detection is different, and the precision of the corresponding material image obtained also can be different, such as can according to 5 frames/minute speed Real-time Obtaining material image, also can according to 1 frame/minute speed Real-time Obtaining material image.In step S101, in Real-time Obtaining crucible, material image refers in same crystal growth cycles, material image in Real-time Obtaining crucible.
In order to improve the acquisition precision of subsequent step to information in material image further, in preferred scheme, also comprise between step S101 and follow-up step S102 and noise reduction process and/or smoothing processing are implemented, to improve the identifiability of boundary shape feature in material image to material image.
S102, determine the boundary shape feature that two adjacent material images are corresponding.
In the process of crystal growth, when material in crucible is in fusing time point, in crucible, solid material starts to be molten into liquid raw material gradually, so the outer boundary shape of raw material is in the state of change, the center of border gradually towards raw material of block raw material is progressive, reaction is on the macroshape of overall raw material, and the profile of raw material is diminishing, and now boundary shape feature can be arrived by material Image Acquisition.When material in crucible be in solidify time point time, fluid surface raw material in crucible starts to crystallize into crystal, in long brilliant process, the outer boundary shape of crystal is in the state of change, the border of crystal is expanded towards the direction deviating from germ nucleus gradually, reaction is on the macroshape of bulk crystal, the profile of crystal is large in change, and now the boundary shape feature of crystal can be arrived by material Image Acquisition.Boundary shape feature in this step S102 refers to the character zone with shape facility that the outer edges of solid materials in crucible surrounds.Certainly, the area of boundary shape feature is the region area that its border surrounds.The boundary shape feature that two adjacent material images are corresponding is determined, in order to the areal calculation of the follow-up boundary shape feature to being in gradual change state is prepared in step S102.
S103, calculate the area of the boundary shape feature of two adjacent material images.
In this step, calculate the area of the boundary shape feature of two adjacent material images.The area of the boundary shape feature that two adjacent material images are corresponding can be designated as fisrt feature area and second feature area respectively.Usually the area of computation bound shape facility can be carried out by the product of the quantity of computation bound shape facility region interior pixel and single elemental area.
S104, judge whether the absolute value of fisrt feature area and second feature area difference is greater than set(ting)value.
Fisrt feature area a represents, second feature area b represents, step S104 judges whether the absolute value of a and b difference is greater than set(ting)value.It should be noted that, set(ting)value herein refers to the value that can characterize two adjacent width image generation noticeable changes, and those skilled in the art can consider according to each influence factor in crystal growing process the size determining set(ting)value.The size of the embodiment of the present invention one not limit setting value.
Again it should be noted that, the absolute value of the difference in step S104 refers to the absolute value of a and b difference, and set(ting)value is positive number.When the judged result of step S104 is for being, enter step S105, otherwise, end operation.
S105, get the shooting time point corresponding to a material image of more late shooting in two adjacent material images as solid-liquid Conversion years.
In step S105, the absolute value of fisrt feature area and second feature area difference be greater than be set to time, get the shooting time point corresponding to a material image of more late shooting in adjacent two material images as solid-liquid Conversion years.In a complete crystal growth cycles, in multiple material images of captured in real-time, have after first having when adjacent two material images are taken in this crystal growth cycles, namely comparatively early, one more late for shooting time point one.Draw according to the judgement of step S104 is known, the material image of more late shooting is compared to the material image comparatively early taken, its absolute value of fisrt feature area and second feature area difference that changes greatly and then make occurred is greater than set(ting)value, therefore should using the shooting time point corresponding to of a more late shooting material image as solid-liquid Conversion years.
In the defining method of the crystal growth solid-liquid Conversion years that the embodiment of the present invention one provides, by the material image in Real-time Obtaining crucible, then determine the boundary shape feature that two adjacent material images are corresponding, get the shooting time point corresponding to a kind of material image of more late shooting when the absolute value of fisrt feature area and second feature area difference is greater than set(ting)value as solid-liquid Conversion years.The solid-liquid Conversion years defining method that the embodiment of the present invention one provides adopts Real-time Obtaining material image, then carries out analysis to determine solid-liquid Conversion years to material image.Compared to background technology, the scheme that the embodiment of the present invention one provides can avoid artificial participation, and then the judgement of material change in crucible can be avoided to be limited to artificial experience, can ensure to judge that precision is consistent, also can avoid manually climbing to table carries out observing easily causes melt to rock, and then the situation of disturbance crystal growth interface occurs, finally can improve the quality of crystal growth and obtain the efficiency of solid-liquid Conversion years.And, such scheme real-time image acquisition, can solve staff interval observe existing for the easily failed problem of observation.Need the solid-liquid Conversion years of manual confirmation in background technology, this programme can confirm automatically, and then can realize the full-automation growth of crystal.
Embodiment two
Please refer to the flow process that accompanying drawing 3, Fig. 3 shows the crystal growth solid-liquid Conversion years defining method that the embodiment of the present invention two provides.
In flow process shown in Fig. 3, determine that the corresponding boundary shape feature of two adjacent material images comprises the following steps:
The gray-scale value of S202, each pixel of detection material image.
By detecting the gray scale of pixel each in material image in step S202, calculate the gray-scale value of each pixel.
S203, selection gray-scale value are greater than the pixel of default gray-scale value, to form boundary shape feature.
Temperature in crystal growing process in body of heater is very high, in stove, material starts in the process melted, the border of block stock reduces gradually, the temperature of block stock itself will lower than the liquid material temperature formed by melting, so the part that raw material is not melted is darker, the gray-scale value feeding back to this part on material image is comparatively large, can think that region corresponding to this gray-scale value is not melted when gray-scale value is greater than some default gray-scale values.Equally, in stove, material starts in the process of crystallization, and crystal expands crystallization from the liquid level center in crucible to surrounding, and the portion temperature of crystallization declines, lower than around uncrystallized part.The gray-scale value feeding back to the part of crystallization on material image is larger, the region crystallization that this gray-scale value is corresponding can be thought when gray-scale value is greater than some default gray-scale values, by being greater than the pixel extraction of default gray-scale value in material image to all gray-scale values, to form boundary shape feature.
The embodiment of the present invention two provides a kind of method of the concrete corresponding boundary shape feature of two material images of phasing neighbour really, the gray-scale value of pixel each in material image can directly compare with default gray-scale value by this scheme determines boundary shape feature, project plan comparison is simple, convenient, and the border of boundary shape feature is determined more quick.It should be noted that, in the embodiment of the present invention two, default gray-scale value is the lowest gray value that the material rule of thumb determined keeps solid-state, and the factor such as kind, thermal field environment with material is relevant.Those skilled in the art rule of thumb can determine default gray-scale value, and the embodiment of the present invention two does not limit the concrete numerical value of default gray-scale value.
Again it should be noted that, in the embodiment of the present invention two, step S201, S204, S205 and S206 respectively with the step S101 in the embodiment of the present invention one, S103-S105 one_to_one corresponding, and content is identical, therefore not describing part in the embodiment of the present invention two can with reference to the description of part corresponding in the embodiment of the present invention one, and this does not repeat.
Embodiment three
Please refer to the flow process that accompanying drawing 4, Fig. 4 shows the crystal growth solid-liquid Conversion years defining method that the embodiment of the present invention three provides.
In flow process shown in Fig. 4, determine that the corresponding boundary shape feature of two adjacent material images comprises the following steps:
The gray-scale value of each pixel in S302, detection material image.
By detecting the gray scale of pixel each in material image in step S302, calculate the gray-scale value of each pixel.
S303, calculate the difference of the gray-scale value of all two adjacent pixels.
The difference of the gray-scale value of all two adjacent pixels is calculated according to the gray-scale value of each pixel obtained in step S302.Temperature in the process of crystal growth in body of heater is very high, in stove, material starts in the process melted, the border of block raw material reduces gradually, the temperature of block raw material itself will lower than the temperature of the liquid material formed by melting, now can form obvious border in solid-liquid intersection, be reacted on material image, the side gray-scale value on border is comparatively large, and the gray-scale value of the opposite side on border is less.Equally, in stove, liquid material starts in the process of crystallization, crystal crystallization from the liquid level center in crucible, and the temperature of crystallising part declines, lower than around uncrystallized liquid part.At the boundary member of crystal plane, the temperature of the side on border crystallising part is higher, and the gray-scale value being reacted to this part on material image is less, and the temperature of the opposite side liquid material part on border is lower, and the gray-scale value being reacted to this part on material image is larger.
S304, the difference of described gray-scale value is selected to be greater than the pixel that in two pixels of default gray value differences, gray-scale value is larger, as boundary pixel point.
The difference of getting gray-scale value after step S303 calculates is greater than in adjacent two pixels of default gray-scale value, and the larger pixel of gray-scale value is as boundary pixel point.
S305, using the region that all boundary pixel point are formed as boundary shape feature.
In step S305, using the region that boundary pixel point is formed as boundary shape feature.
In the embodiment of the present invention three, by calculating the difference of the gray-scale value of all two adjacent pixels in material image, the difference of then getting gray-scale value is greater than larger one of gray-scale value in two pixels of default gray value differences as boundary pixel point, then forms boundary shape feature with boundary pixel point.It should be noted that, in the embodiment of the present invention three, default gray value differences is the empirical value that those skilled in the art determine according to the solid liquid phase transition process of crystal, presets gray value differences relevant with the factor such as kind, thermal field environment of material.Those skilled in the art can rule of thumb determine default gray value differences, and the embodiment of the present invention three does not limit the concrete numerical value of default gray value differences.
It should be noted that, in Fig. 4 step S301, S306, S307 and S308 respectively with step S101, S103-S105 one_to_one corresponding in the embodiment of the present invention one, and content is identical, therefore not describing part in the embodiment of the present invention three can with reference to the description of part corresponding in the embodiment of the present invention one, and this does not repeat.
In the crystal growth solid-liquid Conversion years defining method that the embodiment of the present invention one-three provides, also comprise after determining solid-liquid Conversion years and detect in-furnace temperature corresponding to solid-liquid Conversion years, think that follow-up crystal growth technique coaches.
The embodiment of the present invention also provides a kind of growing method, and described growing method adopts crystal growth solid-liquid Conversion years defining method in above-described embodiment one-three described in any one to determine solid-liquid Conversion years.
Embodiment four
Please refer to the structure that accompanying drawing 5, Fig. 5 shows the crystal growth solid-liquid Conversion years determining device that the embodiment of the present invention four provides.The crystal growth solid-liquid Conversion years determining device that the embodiment of the present invention four provides is applicable to heat-exchanging method crystal growth system.Solid-liquid Conversion years refers in crystal growth cycles, and solid materials starts time point when fusing or the beginning crystallization of liquid raw material surface.Certainly, this time point is the time point in crystal growth cycles.
Structure shown in Fig. 5, comprising:
Image acquisition unit 401, for material image in Real-time Obtaining crucible.Image acquisition unit is completed by photographic camera, ccd image sensor or video recorder usually.Accuracy of detection is different, and the precision of the corresponding material image obtained also can be different, such as can according to 5 frames/minute speed Real-time Obtaining material image, also can according to 1 frame/minute speed Real-time Obtaining material image.In image acquisition unit 401 Real-time Obtaining crucible, material image refers in same crystal growth cycles, material image in Real-time Obtaining crucible.
In order to improve the acquisition precision of subsequent step to information in material image further, in preferred scheme, the crystal growth solid-liquid Conversion years determining device that the embodiment of the present invention four provides also comprises the pretreatment unit for implementing noise reduction process and/or smoothing processing to material image, to improve the identifiability of boundary shape feature in material image.
In the process of Image Acquisition, the higher light intensity entered in image acquisition unit 401 of in-furnace temperature causes more greatly image excessively bright, is unfavorable for the determination of follow-up boundary shape feature.For this reason, the crystal growth solid-liquid dress that the embodiment of the present invention four provides changes time point determining device and also comprises for fixing relative to the camera lens of image acquisition unit 401, and for regulating the spectral filter entering into camera lens light ray energy.
Determining unit 402, for determining the boundary shape feature that two adjacent material images are corresponding.In the process of crystal growth, when material in crucible is in fusing time point, in crucible, solid material starts to be molten into liquid raw material gradually, so the outer boundary shape of raw material is in the state of change, the center of border gradually towards raw material of block raw material is progressive, reaction is on the macroshape of overall raw material, and the profile of raw material is diminishing, and now boundary shape feature can be arrived by material Image Acquisition.When material in crucible be in solidify time point time, fluid surface raw material in crucible starts to crystallize into crystal, in long brilliant process, the outer boundary shape of crystal is in the state of change, the border of crystal is expanded towards the direction deviating from germ nucleus gradually, reaction is on the macroshape of bulk crystal, the profile of crystal is large in change, and now the boundary shape feature of crystal can be arrived by material Image Acquisition.Boundary shape feature refers to the character zone with shape facility that the outer edges of solid materials in crucible surrounds.Certainly, the area of boundary shape feature is the region area that its border surrounds.Determining unit 402 determines the boundary shape feature that two adjacent material images are corresponding, in order to the areal calculation of the follow-up boundary shape feature to being in gradual change state is prepared.
First computing unit 403, for calculating the area of the boundary shape feature of two adjacent material images.The area of the boundary shape feature that two adjacent material images are corresponding can be designated as fisrt feature area and second feature area respectively.Usually the area of computation bound shape facility can be carried out by the product of the quantity of computation bound shape facility region interior pixel and single elemental area.
Judging unit 404, for judging whether the absolute value of fisrt feature area and second feature area difference is greater than set(ting)value.Fisrt feature area a represents, second feature area b represents, judges whether the absolute value of a and b difference is greater than set(ting)value.It should be noted that, set(ting)value herein refers to the value that can characterize two adjacent width image generation noticeable changes, and those skilled in the art can consider according to each influence factor in crystal growing process the size determining set(ting)value.The size of the embodiment of the present invention four not limit setting value.
Again it should be noted that, the absolute value of above-mentioned difference refers to the absolute value of a and b difference, and set(ting)value is positive number.When judging unit 404 judged result is for being, start value unit 405, otherwise end operation.
Value unit 405, when the absolute value of described difference is greater than set(ting)value, get the shooting time point corresponding to a material image of more late shooting in two adjacent material images as solid-liquid Conversion years.The absolute value of fisrt feature area and second feature area difference be greater than be set to time, get the shooting time point corresponding to a material image of more late shooting in two adjacent material images as solid-liquid Conversion years.In a complete crystal growth cycles, in multiple material images of captured in real-time, have after first having when two adjacent material images are taken in this crystal growth cycles, namely comparatively early, one more late for shooting time point one.Draw according to the judgement of judging unit 404 is known, the material image of more late shooting is compared to the material image comparatively early taken, its absolute value of fisrt feature area and second feature area difference that changes greatly and then make occurred is greater than set(ting)value, therefore should using the shooting time point corresponding to of a more late shooting material image as solid-liquid Conversion years.
In the determining device of the crystal growth solid-liquid Conversion years that the embodiment of the present invention four provides, by the material image in Real-time Obtaining crucible, then determine the boundary shape feature that two adjacent material images are corresponding, get the shooting time point corresponding to a kind of material image of more late shooting when the absolute value of fisrt feature area and second feature area difference is greater than set(ting)value as solid-liquid Conversion years.The solid-liquid Conversion years that the embodiment of the present invention four provides is determined to adopt Real-time Obtaining material image, then carries out analysis to determine solid-liquid Conversion years to material image.Compared to background technology, the scheme that the embodiment of the present invention four provides can avoid artificial participation, and then the judgement of material change in crucible can be avoided to be limited to artificial experience, can ensure to judge that precision is consistent, also can avoid manually climbing to table carries out observing easily causes melt to rock, and then the situation of disturbance crystal growth interface occurs, finally can improve the quality of crystal growth and obtain the efficiency of solid-liquid Conversion years.And, such scheme real-time image acquisition, can solve staff interval observe existing for the easily failed problem of observation.Need the solid-liquid Conversion years of manual confirmation in background technology, this programme can confirm automatically, and then can realize the full-automation growth of crystal.
Embodiment five
Please refer to the structure that accompanying drawing 6, Fig. 6 shows the crystal growth solid-liquid time point determining device that the embodiment of the present invention five provides.
In structure shown in Fig. 6, determining unit comprises:
Detecting unit 502, for detecting the gray-scale value of each pixel of material image.
Construction unit 503, pixel for selecting gray-scale value to be greater than default gray-scale value, to form boundary shape feature.
Temperature in crystal growing process in body of heater is very high, in stove, material starts in the process melted, the border of block stock reduces gradually, the temperature of block stock itself will lower than the liquid material temperature formed by melting, so the part that raw material is not melted is darker, the gray-scale value feeding back to this part on material image is comparatively large, can think that region corresponding to this gray-scale value is not melted when gray-scale value is greater than some default gray-scale values.Equally, in stove, material starts in the process of crystallization, and crystal expands crystallization from the liquid level center in crucible to surrounding, and the portion temperature of crystallization declines, lower than around uncrystallized part.The gray-scale value feeding back to the part of crystallization on material image is larger, the region crystallization that this gray-scale value is corresponding can be thought when gray-scale value is greater than some default gray-scale values, by being greater than the pixel extraction of default gray-scale value in material image to all gray-scale values, to form boundary shape feature.
The embodiment of the present invention five provides a kind of determining unit of the concrete corresponding boundary shape feature of two material images of phasing neighbour really, the gray-scale value of pixel each in material image can directly compare with default gray-scale value by this scheme determines boundary shape feature, project plan comparison is simple, convenient, and the border of boundary shape feature is determined more quick.It should be noted that, in the embodiment of the present invention five, default gray-scale value is the lowest gray value that the material rule of thumb determined keeps solid-state, and the factor such as kind, thermal field environment with material is relevant.Those skilled in the art rule of thumb can determine default gray-scale value, and the embodiment of the present invention five does not limit the concrete numerical value of default gray-scale value.
It should be noted that, in Fig. 6, image acquisition unit 501, first computing unit 504, judging unit 505 and value unit 506 respectively with image acquisition unit 401, first computing unit 403, judging unit 404 and value unit 405 one_to_one corresponding shown in Fig. 5, and function is identical, specifically please refer in the embodiment of the present invention four and describe accordingly, this does not repeat.
Embodiment six
Please refer to the structure that accompanying drawing 7, Fig. 7 shows the crystal growth solid-liquid Conversion years determining device that the embodiment of the present invention six provides.
In structure shown in Fig. 7, determining unit comprises:
Detecting unit 602, for detecting the gray-scale value of each pixel in material image.
Second computing unit 603, for calculating the difference of the gray-scale value of all two adjacent pixels.
The gray-scale value of each pixel that the second computing unit 603 detects according to detecting unit calculates the difference of the gray-scale value of all adjacent two pixels.Temperature in crystal growing process in body of heater is very high, in stove, material starts in the process melted, the border of block raw material reduces gradually, the temperature of block raw material itself will lower than the temperature of the liquid material formed by melting, now can form obvious border in solid-liquid intersection, be reacted on material image, the side gray-scale value on border is comparatively large, and the gray-scale value of the opposite side on border is less.Equally, in stove, liquid material starts in the process of crystallization, crystal crystallization from the liquid level center in crucible, and the temperature of crystallising part declines, lower than around uncrystallized liquid part.At the boundary member of crystal plane, the temperature of the side on border crystallising part is higher, and the gray-scale value being reacted to this part on material image is less, and the temperature of the opposite side liquid material part on border is lower, and the gray-scale value being reacted to this part on material image is larger.
Selection unit 604, is greater than the pixel that in two pixels of default gray value differences, gray-scale value is larger, as boundary pixel point for selecting the difference of described gray-scale value.
The difference of getting gray-scale value after the second computing unit 603 calculates is greater than in adjacent two pixels of default gray-scale value, and the larger pixel of gray-scale value is as boundary pixel point.
Construction unit 605, using the region that all boundary pixel point are formed as boundary shape feature.
In the embodiment of the present invention six, by calculating the difference of the gray-scale value of all two adjacent pixels in material image, the difference of then getting gray-scale value is greater than larger one of gray-scale value in two pixels of default gray value differences as boundary pixel point, then forms boundary shape feature with boundary pixel point.It should be noted that, in the embodiment of the present invention six, default gray value differences is the empirical value that those skilled in the art determine according to the solid liquid phase transition process of crystal, presets gray value differences relevant with the factor such as kind, thermal field environment of material.Those skilled in the art can rule of thumb determine default gray value differences, and the embodiment of the present invention six does not limit the concrete numerical value of default gray value differences.
It should be noted that, image acquisition unit 601, first computing unit 606, judging unit 607 and value unit 608 shown in Fig. 7 respectively with image acquisition unit 401, first computing unit 403, judging unit 404 and value unit 405 one_to_one corresponding shown in Fig. 5, and function is identical, specifically please refer to description corresponding in the embodiment of the present invention four, this does not repeat.
The crystal growth solid-liquid Conversion years determining device that the embodiment of the present invention four-six provides can also comprise temperature detecting unit, for detecting in-furnace temperature corresponding to solid-liquid Conversion years, thinks that follow-up crystal growth technique coaches.
Based on the crystal growth solid-liquid Conversion years determining device that the embodiment of the present invention four-six provides, the embodiment of the invention also discloses a kind of crystal growth system, described crystal growth system has the crystal growth solid-liquid Conversion years determining device in above-described embodiment four-embodiment six described in any one.
Each embodiment in this specification sheets all adopts the mode of going forward one by one to describe, between each embodiment identical similar part mutually see, what each embodiment stressed is the difference with other embodiments.
Above-described embodiment of the present invention, does not form limiting the scope of the present invention.Any amendment done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. crystal growth solid-liquid Conversion years defining method, is characterized in that, comprise the following steps:
11) material image in Real-time Obtaining crucible;
12) the boundary shape feature that two adjacent described material images are corresponding is determined;
13) calculate the area of adjacent two described material image boundary shape facilities, be respectively fisrt feature area and second feature area;
14) judge whether the absolute value of described fisrt feature area and described second feature area difference is greater than set(ting)value;
15) when the absolute value of described difference is greater than set(ting)value, the shooting time point corresponding to a described material image of more late shooting in two adjacent described material images is got as described solid-liquid Conversion years.
2. crystal growth solid-liquid Conversion years defining method according to claim 1, is characterized in that, step 12) comprising:
21) gray-scale value of each pixel of described material image is detected;
22) described gray-scale value is selected to be greater than the pixel of default gray-scale value, to form described boundary shape feature.
3. crystal growth solid-liquid Conversion years defining method according to claim 1, is characterized in that, step 12) comprising:
31) gray-scale value of each pixel of described material image is detected;
32) difference of the gray-scale value of all adjacent two pixels is calculated;
33) absolute value getting the difference of described gray-scale value is greater than the pixel that in default gray value differences, gray-scale value is larger, as boundary pixel point;
34) using the region that all described boundary pixel point are formed as described boundary shape feature.
4., according to the crystal growth solid-liquid Conversion years defining method in claim 1-3 described in any one, it is characterized in that, step 11) and step 12) between also comprise:
Noise reduction process and/or smoothing processing are implemented to described material image.
5. crystal growth solid-liquid Conversion years defining method according to claim 1, is characterized in that, step 15) also comprise afterwards:
Detect the in-furnace temperature that described solid-liquid Conversion years is corresponding.
6. growing method, is characterized in that, adopts the crystal growth solid-liquid Conversion years defining method determination solid-liquid Conversion years described in any one in claim 1-5.
7. crystal growth solid-liquid Conversion years determining device, for crystal growth system, is characterized in that, comprising:
Image acquisition unit, for material image in the crucible of crystal growth system described in Real-time Obtaining;
Determining unit, for determining the boundary shape feature that two adjacent described material images are corresponding;
First computing unit, for calculating the area of adjacent two described material image boundary shape facilities, the area of adjacent two described material image boundary shape facilities is respectively fisrt feature area and second feature area;
Judging unit, for judging whether the absolute value of described fisrt feature area and described second feature area difference is greater than set(ting)value;
Value unit, for when the absolute value of described difference is greater than set(ting)value, gets the shooting time point corresponding to a described material image of more late shooting in adjacent two described material images as described solid-liquid Conversion years.
8. crystal growth solid-liquid Conversion years determining device according to claim 7, it is characterized in that, described determining unit comprises:
Detecting unit, for detecting the gray-scale value of each pixel of described material image;
Construction unit, selects described gray-scale value to be greater than the pixel of default gray-scale value, to form described boundary shape feature; Or,
Described determining unit comprises:
Detecting unit, for detecting the gray-scale value of each pixel of described material image;
Second computing unit, for calculating the difference of the gray-scale value of all adjacent two pixels;
Selection unit, selects the absolute value of the difference of described gray-scale value to be greater than the pixel that in default gray value differences, gray-scale value is larger, as boundary pixel point;
Construction unit, using the region that all described boundary pixel point are formed as described boundary shape feature.
9. crystal growth solid-liquid Conversion years determining device according to claim 7, is characterized in that, described crystal growth solid-liquid Conversion years determining device also comprises:
Fix relative to the camera lens of described image acquisition unit, and for regulating the spectral filter entering into described camera lens light ray energy.
10. crystal growth system, is characterized in that, described crystal growth system has the crystal growth solid-liquid Conversion years determining device in claim 7-9 described in any one.
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