CN105452832B - 全光压力传感器 - Google Patents

全光压力传感器 Download PDF

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Publication number
CN105452832B
CN105452832B CN201480045404.0A CN201480045404A CN105452832B CN 105452832 B CN105452832 B CN 105452832B CN 201480045404 A CN201480045404 A CN 201480045404A CN 105452832 B CN105452832 B CN 105452832B
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CN
China
Prior art keywords
pressure sensor
core
waveguide
optical pressure
optical
Prior art date
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Active
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CN201480045404.0A
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English (en)
Chinese (zh)
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CN105452832A (zh
Inventor
K·雷克
C·厄斯特高
O·汉森
E·V·汤姆森
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Danmarks Tekniske Universitet
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Danmarks Tekniske Universitet
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Publication of CN105452832A publication Critical patent/CN105452832A/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/16—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by photoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/008—Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Measuring Fluid Pressure (AREA)
  • Optical Integrated Circuits (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN201480045404.0A 2013-06-06 2014-06-04 全光压力传感器 Active CN105452832B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
EP13170867 2013-06-06
EP13170867.9 2013-06-06
EP13196824.0 2013-12-12
EP13196824 2013-12-12
PCT/EP2014/061625 WO2014195372A1 (en) 2013-06-06 2014-06-04 All-optical pressure sensor

Publications (2)

Publication Number Publication Date
CN105452832A CN105452832A (zh) 2016-03-30
CN105452832B true CN105452832B (zh) 2018-11-30

Family

ID=50896299

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480045404.0A Active CN105452832B (zh) 2013-06-06 2014-06-04 全光压力传感器

Country Status (7)

Country Link
US (1) US9658123B2 (enExample)
EP (1) EP3004829B1 (enExample)
CN (1) CN105452832B (enExample)
DK (1) DK3004829T3 (enExample)
ES (1) ES2665144T3 (enExample)
NO (1) NO3004829T3 (enExample)
WO (1) WO2014195372A1 (enExample)

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US11291377B2 (en) * 2015-03-31 2022-04-05 California Institute Of Technology Biocompatible packaging for long term implantable sensors and electronics
US10106398B2 (en) * 2015-05-28 2018-10-23 Infineon Technologies Ag Micromechanical structure comprising carbon material and method for fabricating the same
CN105004414B (zh) * 2015-07-20 2017-12-29 武汉理工光科股份有限公司 基于光纤光栅的声音传感器
US11122975B2 (en) 2017-05-12 2021-09-21 California Institute Of Technology Implantable extracompartmental pressure sensor
DE102017119406A1 (de) * 2017-08-24 2019-02-28 Samson Aktiengesellschaft Kommunikationsverfahren für ein Stellgerät
WO2019126967A1 (zh) * 2017-12-25 2019-07-04 深圳市得道健康管理有限公司 表面应变检测装置及其表面应变传感器
EP3557211A1 (en) 2018-04-16 2019-10-23 ams International AG Photonic device, method for operating a photonic device and method for manufacturing a photonic device
CN108989919B (zh) * 2018-07-13 2020-09-22 潍坊歌尔微电子有限公司 一种传感器
EP3629598A1 (en) 2018-09-26 2020-04-01 ams AG Integrated optical transducer and method for fabricating an integrated optical transducer
WO2020214108A1 (en) * 2019-04-18 2020-10-22 Orta Dogu Teknik Universitesi Fiber optic mems microphone
US11131595B2 (en) * 2019-07-26 2021-09-28 Raytheon Technologies Corporation Pressure sensing device and method for using the same
CN112449295A (zh) * 2019-08-30 2021-03-05 华为技术有限公司 麦克风芯片、麦克风及终端设备
CN110531513B (zh) * 2019-09-03 2022-02-15 山东大学 一种mems换能结构及其应用
US11067749B2 (en) * 2019-11-21 2021-07-20 Globalfoundries U.S. Inc. Waveguides with cladding layers of gradated refractive index
FR3105824B1 (fr) 2019-12-27 2022-02-18 Commissariat Energie Atomique Dispositif optique de détection d'une onde acoustique
CN111157149A (zh) * 2020-01-03 2020-05-15 天津大学 一种基于微悬臂梁共振激发的光压力值测量装置及方法
US11701504B2 (en) 2020-01-17 2023-07-18 California Institute Of Technology Implantable intracranial pressure sensor
CN111263283A (zh) * 2020-02-17 2020-06-09 瑞声声学科技(深圳)有限公司 光学麦克风
CN111464927A (zh) * 2020-04-07 2020-07-28 中国电子科技集团公司第三研究所 一种光纤传声器及其敏感结构及制备方法
CN114136529B (zh) * 2021-11-30 2022-11-25 山东大学 一种基于集成光学的可快速定制的压力传感器及定制方法

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
US4523474A (en) 1983-08-12 1985-06-18 Borg-Warner Corporation Capacitive pressure sensor
FR2638471B1 (fr) * 1988-11-02 1993-02-19 Ingenierie Genie Civil Sarl Dispositif de mesure de pression pour le betonnage de trous fores
DE19754910C2 (de) * 1997-12-10 1999-12-02 Geoforschungszentrum Potsdam Wellenlängendetektion an Faser-Bragg-Gitter-Sensoren
AU756444B2 (en) * 1998-12-04 2003-01-16 Weatherford Technology Holdings, Llc Bragg grating pressure sensor
US6581436B2 (en) * 2001-05-16 2003-06-24 Esec Trading Sa Pressure sensor with means for re-calibration
AU2003216841A1 (en) * 2002-03-21 2003-10-08 Transense Technologies Plc Pressure monitor incorporating saw device
CN2783292Y (zh) * 2004-12-14 2006-05-24 武汉理工大学 高精度光纤布喇格光栅微型压力传感器
CN100465601C (zh) * 2007-04-19 2009-03-04 山东科技大学 光纤光栅压力测量装置
WO2011008559A1 (en) * 2009-06-29 2011-01-20 University Of Massachusetts Lowell Optical fiber pressure sensor with uniform diaphragm and method of fabricating same
US8490495B2 (en) * 2010-05-05 2013-07-23 Consensic, Inc. Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same
CN102116692A (zh) * 2011-01-30 2011-07-06 宁波杉工结构监测与控制工程中心有限公司 一种光纤布拉格光栅压力传感器及其相应的测量方法
WO2013182643A1 (en) 2012-06-06 2013-12-12 Technical University Of Denmark Mems optical sensor
GB2544923B (en) * 2012-06-27 2017-09-20 Oxsensis Ltd Optical sensor
ITMI20130138A1 (it) * 2013-01-31 2014-08-01 Laser Point S R L Sensore ottico per misure di pressione senza contatto.

Also Published As

Publication number Publication date
ES2665144T3 (es) 2018-04-24
CN105452832A (zh) 2016-03-30
WO2014195372A1 (en) 2014-12-11
DK3004829T3 (en) 2018-04-30
EP3004829B1 (en) 2018-02-28
NO3004829T3 (enExample) 2018-07-28
EP3004829A1 (en) 2016-04-13
US20160123829A1 (en) 2016-05-05
US9658123B2 (en) 2017-05-23

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