CN105449976B - The driving device and control method of a kind of permanent-magnetism linear motor - Google Patents
The driving device and control method of a kind of permanent-magnetism linear motor Download PDFInfo
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- CN105449976B CN105449976B CN201410429462.5A CN201410429462A CN105449976B CN 105449976 B CN105449976 B CN 105449976B CN 201410429462 A CN201410429462 A CN 201410429462A CN 105449976 B CN105449976 B CN 105449976B
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Abstract
The present invention discloses a kind of driving device of permanent-magnetism linear motor, it is characterized in that, the permanent-magnetism linear motor includes stator and mover, which is made of the double three-phase windings of non iron-core, one three line winding of the permanent-magnetism linear motor connect the first inverter, another three line winding connects the second inverter；The double three-phase windings of the non iron-core are double-Y shaped winding.
Description
Technical field
The present invention relates to a kind of integrated circuit equipment manufacturing fields, more particularly to a kind of driving device of permanent-magnetism linear motor
And control method.
Background technology
In current lithographic equipment, by the way that work stage is controlled to realize the photoetching of large area, workpiece to silicon chip multiexposure, multiple exposure
Platform high speed, high-precision, the basic function of high frequency response, large stroke be unable to do without permanent-magnetism linear motor technology, and when concrete application can be according to essence
Depending on the structure type of close work stage, micro-displacement short stroke high-precision should be met and driven, realize long stroke weight at high speed again
Multiple running fix, realizes high-resolution, high alignment precision, high yield, the Key performance targets of low maintenance rate.
To improve workpiece table system precision, realize that work stage does straight line cycle movement within the specific limits, use is various
The linear motor of type is driven, and is mainly had：1. brushless linear servomotor, 2. voice coil motor, 3. ultrasound piezoelectric
Ceramic motor, 4. Lorentz motors, transmission mechanism eliminate the intermediate mechanicals conversion links such as rack, leading screw, chain, are referred to as
" zero driving " or " directly driving " technology, compared with indirect driving device, have the advantage that：Firstth, due to stator and mover it
Between be not mechanically connected, it is thus eliminated that abrasion, heat dissipation, stuck problem, movement more it is smooth flexibly；Secondth, highlight high-precision
The features such as degree, high speed, high acceleration, response are soon, height of contour is low；3rd, the straight line fortune of length range demands can both have been met
It is dynamic, but can solve the problem of in indirect driving device that rotary inertia is big causes system dynamic characteristic poor.But the motor used in it
Device, which is likely to occur failure, causes lithographic equipment to be shut down, and causes very big economic loss.Therefore work stage is driven in litho machine
The reasonable selection of dynamic motor and the optimization design of control program have direct shadow to improving work stage kinematic accuracy and reliability
It rings, the requirement of property indices should be met, meet the reliable and stable of movement again.
Motor driver technology used in lithographic equipment at present, sees on the whole, efficiency, reliability have compared with
Big deficiency seriously restricts further application.
The content of the invention
In order to overcome the defects of the prior art, the present invention provides a kind of mover coil using double three-phase windings structural redundancies
The driving device and control method of the permanent-magnetism linear motor of form.
In order to realize foregoing invention purpose, the present invention discloses a kind of driving device of permanent-magnetism linear motor, which is characterized in that
The permanent-magnetism linear motor includes stator and mover, which is made of the double three-phase windings of non iron-core, and the one of the permanent-magnetism linear motor
A three line winding connects the first inverter, another three line winding connects the second inverter；The double three-phase windings of the non iron-core are double Y
Type winding.
Further, which is made of back iron and Ha Er Bakes (Halbach) permanent magnet array.
The present invention also provides a kind of control systems of permanent-magnetism linear motor, which is characterized in that including：One location/velocity is surveyed
Amount system, for obtaining a set-point；One motor driver, for being driven according to the output valve of the location/velocity measuring system
The permanent-magnetism linear motor being somebody's turn to do such as claim 1 to 5 any one；One interface system is used to implement the location/velocity measuring system
Analog or D/A switch between the motor driver.
Further, which includes a position sensor, and the position sensor is straight for obtaining the permanent magnetism
The position of line motor.
Further, which includes a digital servo controller, which sets with this
Put the input terminal as the digital servo controller after being added.
Further, which further includes a speed or current controller, for controlling the permanent-magnet linear electric
The speed of machine or position.
Present invention simultaneously discloses a kind of control method of permanent-magnetism linear motor, including：Step 1: board power distribution cabinet powers on；
Step 2: after board workstation startup, start to initialize；Step 3: driving circuit Intelligent self-checking；If Step 4:
The detection of driving circuit Intelligent self-checking has and only a set of inverter circuit pipe breaks down；Step 5: maintenance personnel's inquiry error
After information, when positioning only has a fault of converter, troubleshooting is carried out, returns to step 1；Step 6: if driving circuit intelligence is certainly
Inspection detection has two sets of inverter circuits to break down, and carries out failure pretreatment；Step 7: maintenance personnel receives two sets of inverter circuits
In the case of faulty, troubleshooting is carried out, returns to step 1；Step 8: after driving circuit Intelligent self-checking is completed normally, implement
Performer motor self-test；Step 9: if performer motor self-test, detects and only has a winding failure, after upload fault message automatically
Fault-free machine winding is switched to, single rich ancestral's operation is carried out under this operating mode；Step 10: maintenance personnel checks performer motor failure
After information, positioning only has list around ancestral's fault message, carries out troubleshooting, returns to step 1；Step 11: if performer motor is certainly
Inspection, detection have double winding failure, perform step 6；Step 12: after the completion of performer motor self-test, it is anti-to implement sensor
Present self-test；Step 13: if abnormal conditions must be had by implementing sensor feedback self-test, failure pretreatment is carried out；Step 14:
After maintenance personnel checks sensor fault information, troubleshooting is carried out, returns to step 1；Step 15: sensor feedback self-test
After completing normally, into global init state；Step 16: after the overall situation initializes successfully, closed loop plays servo；
After the step 4, if maintenance personnel is not handled, the step 8 is performed in next step.
After the step 9, if maintenance personnel is not handled, the step 12 is performed in next step.
The step 10 six, including：
（One）If the driving circuit is normal, start the permanent-magnetism linear motor；
（Two）Start an electric limiting switch during normal operation；
（Three）Current value is detected, if current value is abnormal, turns off the driving circuit；The temperature of the permanent-magnetism linear motor is detected,
Start a water cooling equipment if temperature is higher than setting value；
（Four）Judge whether master control borad sends stop signal, if there is stop signal, which is set as zero；
（Five）If phase current sensing is to failure, closing fault winding；
（Six）According to the relation of grating scale signal sequence, location information of the mover compared with stator is calculated, and then is calculated
Electrical angle information draws suitable PWM controls switching tube, exports controllable three-phase alternating current.
Compared with prior art, mover of the invention is double three-phase windings iron-free core structures, and stator uses Ha Er Bakes
(Halbach) permanent magnet array, back iron design is very thin, uniformly distributed to be symmetrically fixed on mover both sides, can solve traditional permanent-magnet linear electricity
The technical issues of machine device reliability is not high.The control method of the driving device of permanent-magnetism linear motor provided by the invention, for
The defects of prior art, analysis improves efficiency, the concrete measure of reliability, using the straight motor of double three-phase permanent-magnetic as research object, point
It analyses driving circuit design, the automatic collection of trouble point, the principle of failover, improve Reliability Measures, be than the prior art more
For practicable Control for Dependability scheme.
Description of the drawings
It can be obtained further by following detailed description of the invention and institute's accompanying drawings on the advantages and spirit of the present invention
Solution.
Fig. 1 is the top view of permanent-magnetism linear motor according to the present invention；
Fig. 2 is the circuit detection principle diagram of permanent-magnetism linear motor according to the present invention；
Fig. 3 is the control system schematic diagram of permanent-magnetism linear motor according to the present invention；
Fig. 4 is the reliability control system overhaul flow chart of permanent-magnetism linear motor according to the present invention；
Fig. 5 is the common three-phase linear Principle of Electric Engine figure of driving of permanent-magnetism linear motor according to the present invention.
Specific embodiment
The specific embodiment that the invention will now be described in detail with reference to the accompanying drawings.
The driving device and control method of a kind of permanent-magnetism linear motor of the present invention are lacking for the prior art
It falling into, analysis improves efficiency, the concrete measure of reliability, using a kind of straight motor of double three-phase permanent-magnetic as research object, analysis-driven electricity
Road design, the automatic collection of trouble point, the principle of failover improve Reliability Measures, detail it is a kind of it is practicable can
By property control program.
The motor is characterized in that mover is double three-phase windings iron-free core structures, and stator uses Ha Er Bakes
(Halbach) permanent magnet array, back iron design is very thin, uniformly distributed to be symmetrically fixed on mover both sides, solves traditional permanent-magnetism linear motor
The problem of driving device reliability is not high.
Following technical scheme may be employed to realize in technical problem solved by the invention：
Motor body structure top view in device of the present invention is as shown in Figure 1, mainly include two large divisions：Stator and dynamic
Son, back iron 1 and Ha Er Bakes (Halbach) permanent magnet array 2 collectively constitute stationary part, and the double three-phase windings 3 of non iron-core are known as dynamic
Subdivision；With simple in structure, contactless operation, efficient, high reliability, response is fast, and precision is high, is widely used in microelectronics
The fields such as equipment, communications and transportation, Electromagnetic Launching.
The main circuit topology of described device is as shown in Fig. 2, including the permanent-magnetism linear motor 4, two groups of three-phase bridge voltages
Source type inverter 9 and 10.Double three-phase machine armature winding is double-Y shaped winding, and wherein armature winding A1B1C1 can be by as shown in the figure
The inverter circuit 9 of topological circuit power；Armature winding A2B2C2 is powered by inverter circuit 10.
For the electric machine, the method for improving system reliability, control system principle such as Fig. 3 institutes are analyzed
Show, be mainly made of master control borad, location/velocity measuring system 30, motor driver 10 and interface system 20.Wherein position/
Velocity measuring system 30 includes obtaining set-point 301, and digital servo controller 302 is controlled according to 303 data of sensor interface.It drives
Dynamic device interface 302 carries out 101 motor 102 of speed or current control after D/A converter 201 is converted.Position sensor 103 obtains
A/D converter 202 is carried out after motor position information to convert and be sent to sensor interface 303.Servo control circuit is one
The Double Loop Control System of speed ring and position ring composition, speed ring are completed by laser measurement system, and position ring is main control ring, by
PID regulator is realized, specifically describes automatic detecting driving circuit, and actuator is detected in automatic detecting sensory feedback circuit automatically,
Failure problems are predicted, trouble point automatic collection uploads fault-signal, and failure cuts off, takes preventive measures automatically, realizes that safety is protected
Shield meets the performance indicator of photoetching high reliability, yield, precision.
In order to achieve the above object, the present invention provides a kind of embodiment, which specifically includes：
（1）The motor body of described device：Mover winding is provided with guiding rail, and subpart rigidly connects with guiding rail
It connects, guide rail is air-float guide rail or Magnetically suspended guide rail, improves efficiency, increase reliability to reduce to rub, the present invention adds magnetic using air supporting
For floating mode as guide rail, subpart is mainly non iron-core pair three-phase windings coils, armature winding along stator be separated by electrical angle according to
It is secondary to be arranged in, the electric current of displacement successively is each led into phase in winding, has A1B1C1 and A2B2C2 to respectively constitute Y types company
It connects, forms two sets three-phase windings, the vectors of double three-phase windings spatially displacement electrical angle each other often covers the inside that Y types connect
Spatially mutual deviation electrical angle, double three-phase permanent-magnetic linear motor eliminate the mechanical intermediate link such as leading screw, belt to winding, and nothing connects
Operation is touched, dynamic response is fast, efficient, high-precision；It can realize that the low-power device driving of more low-voltage standard is powerful
Load, 5 times, the 7 inferior harmonic waves compared with high order effectively eliminate, motor force oscillation is substantially reduced, and harmonic loss is reduced, and thrust is close
Degree increases.The very thin back iron of stator design uses non iron-core technology, more next with the speed of object it can be seen from formula
Faster, the iron loss problem of the linear motor of cored structure is than more prominent, in the case where motor pole span is certain, the frequency of motor
Higher iron loss is bigger, therefore non iron-core linear motor remains to keep higher operational efficiency without iron loss in high regime；It is described forever
Magnetic linear motor stator electric uses Ha Er Bakes (Halbach) permanent magnet array, and air gap flux density caused by the array is traditional permanent magnetism
BodyTimes, therefore higher power density is obtained, it remains to generate larger driving force after motor miniaturization.Stationary part pair
What is claimed is fixed on subpart both sides, is designed to bilateral double three-phase permanent-magnetic linear motor, effectively inhibits institute in mover motion process
The normal direction attraction born reduces mechanical strength, improves payload.
（2）Board main distribution unit after the power is turned on, if master control borad PPC, MCD are silent, damage or crash, does not send out signal any
Come over, PAC does not receive any signal, and the value that PWM is received at this time is zero, and disabling comparator, timer close all IGBT/
MOSFET gives the green light；
After board workstation startup, initialization, which is just called, starts IGBT/MOSFET driving circuit self-check programs, and self-test starts
Just is tested by the short circuit curve of IGBT/MOSFET, checks whether there is pipe for the quality of PA driving circuit IGBT/MOSFET self-tests afterwards
Son it is breakdown, test pipe on state characteristic, test whether respectively can normally, check pipe switching characteristic whether foot
It is enough precipitous；If having measured abnormal conditions, no matter which kind of situation, trouble point is recorded, red light ceaselessly flickers, and by fault message
Host computer is issued, by corresponding registers position 1, which damaged tubular then can be judged according to corresponding positions, completes self-test, according to certainly
Inspection is as a result, turn off that set inverse changing driving circuit where defective pipes, and the value at this time receiving PWM is set to zero, another set of inversion
Device normal operation；If not receiving the enabling signal of host, self-test start-up circuit is also polled；
（3）After board workstation startup, initialization, which is just called, starts the sensings such as grating scale, interferometer, limit switch, air pressure
The self-check program of device feedback circuit, the quality of self-test sensor and assembling defect, it is electrical whether can normally, if
Abnormal conditions have been measured, no matter which kind of situation, records trouble point, red light ceaselessly flickers, and fault message is issued host computer,
By corresponding registers position 1, the quality and type of error in respective feedback circuit then can be judged according to corresponding positions, is completed certainly
Inspection, strong support is provided for malfunction elimination, and playing servo for closed loop provides prerequisite；If the startup letter of host is not received
Number, also it is polled self-test sensory feedback circuit；
（4）After if driving closed loop circuit is normal, and sensor-feedback loops are normal, it can just carry out host computer control interface and issue
Order, the drive signal that motion control board MCD board receiving hosts are sent, after initializing successfully, then MCD boards are converted to enabled
Order notice PAC boards, make corresponding PA carry out enabled preparation, are in motor and start preparation；If started successfully, 1 is returned；
Start failure, then return to zero, if failure, has a look at either with or without extraneous signal, if there is extraneous signal, reattempt to startup again；
（5）After starting successfully, during normal operation, if a certain link imbalance of system or when breaking down, work stage has can
Can occur hypervelocity or it is out of control cause to hit platform, it is electrical in extreme limit of travel Position Design to ensure the reliable and stable work of work stage
Limit switch, when reaching /V, limit switch cuts off the input signal and output current of driving amplifier immediately, is in motor
Brake application stoping state, mechanical edge position are provided with bumper guard, machine loss will be made to be minimized to damage.
（6）In normal operation, detection electric current is constantly removed, if electric current just illustrates problematic, upload event more than setting value
Barrier turns off all IGBT/MOSFET, the flicker of red light indicator light；Detection motor temperature is constantly removed, if motor temperature is more than setting
Value just illustrates problematic, upload temperature information, and the flicker of motor temperature indicator light starts water cooling recirculated water and accelerates cooling；
（7）Double winding puts into operation during normal operation, if phase current sensing sensor 5,6 detects failure, this
When send interrupt signal, forbid inverter circuit 9 export PWM, turn off inverter circuit 9, this set winding is out of service, arrange personnel inspection
It puts into operation after repairing recovery；If phase current sensing sensor 7,8 detects failure, interrupt signal is sent at this time, forbids inversion
Circuit 10 exports PWM, turns off inverter circuit 10, this set winding is out of service, and arrangement personnel are put into operation after overhauling recovery, occurs
During trouble hunting, the reliable of equipment can be substantially increased taking human as double three-phase operations or single three-phase operation is set by contactor
Property.
The present invention specifically provides the driving device and control program of a kind of permanent-magnetism linear motor, analyzes the one of described device
Kind reliability testing process scheme, as shown in figure 4, including:
101st, board power distribution cabinet after the power is turned on, motion control cabinet（MOCR）Interior master control borad does not receive order, without any letter
Number, pulsewidth modulation（PWM）The value received is zero, and disabling comparator, timer turn off all igbts
（IGBT）/ metal oxide layer semiconductcor field effect transisto（MOSFET）；
102nd, after board workstation startup, start to initialize, chosen axis parameter, read machine constant, obtain driving circuit shape
State, actuator state, closed-loop measuring system mode have prepared the flows such as servo, and original state is set for motion control.
103rd, after driving circuit Intelligent self-checking initializes successfully, just call and start IGBT/MOSFET self-check programs, self-test
Just is tested by the short circuit curve of IGBT/MOSFET, is checked whether for the quality of PA driving circuit IGBT/MOSFET self-tests after beginning
Have that pipe is breakdown, test pipe on state characteristic, test whether respectively can normally, checking the switching characteristic of pipe is
It is no precipitous enough, complete self-test；After completing self-test, if detection has and only a set of inverter circuit pipe breaks down, record event
Hinder point, red light ceaselessly flickers, and fault message is issued host computer, then can be according to corresponding positions by corresponding registers position 1
Which damaged tubular judged, automatically shuts down that set inverse changing driving circuit where defective pipes, normal inverter circuit continues to run with,
Equipment operation is not influenced；
104th, after maintenance personnel's inquiry error information, positioning only has a fault of converter and enters 106.106th, according to electronics member
Device lifetime carries out repair and replacement, and repair also can not be changed and feed them into actuator sensor circuitry self test program, makes normal inverse
Become circuit operation；If not receiving the enabling signal of host, self-test start-up circuit is also polled.
If the 105, detecting two sets of inverter circuits to break down, trouble point is recorded, reports host computer, the phase of corresponding registers
Position 1 is answered, reports PA failures；107th, maintenance personnel receive two sets of inverter circuits it is faulty in the case of, must be powered off at this time
Repair and replacement if not receiving the enabling signal of host, are also polled self-test start-up circuit；
108th, after driving circuit Intelligent self-checking is completed normally, performer motor self-test is implemented.A logical fixed voltage surveys electricity
Signal is flowed, if electric current just illustrates there is machine winding short circuit problem more than setting value, if no signal current just illustrates there is machine winding
Open circuit problem after the completion of self-test, if the double three groups of failures of detection, upload failure, turns off corresponding IGBT/MOSFET, red light instruction
Lamp flickers, and repair and replacement must be carried out under this operating mode；
If the 109, after the completion of self-test, detection only has a winding failure, fault-free electricity is automatically switched to after uploading fault message
Machine winding carries out single rich ancestral's operation under this operating mode；
110th, after maintenance personnel checks fault message, positioning only has single rich ancestral's fault message, according to the performer motor service life
It carries out repair and replacement or ignore to be allowed to run in the normal non-fault list ancestral that haves mercy on, into sensor feedback self-test；
Technician receive double winding it is faulty in the case of, carry out 105 processing, must carrying out power-off at this time, to replace spare unit standby
Then part carries out failure winding repair；
111st, after the completion of performer motor self-test, sensor feedback self-test is implemented：Start to call and start grating scale, interference
It is the self-check program of the sensor feedbacks circuit such as instrument, limit switch, air pressure, the quality of self-test sensor and assembling defect, electrical
Whether being capable of normally；
If abnormal conditions must be had by the 112, implementing sensor feedback self-test, no matter which kind of situation, records trouble point, red light
It ceaselessly flickers, and fault message is issued into host computer, by corresponding registers position 1, complete self-test, playing servo for closed loop provides
Prerequisite, this link global could initialize successfully once breaking down after Failure elimination；If the startup of host is not received
Signal is also polled self-test sensory feedback circuit；
113rd, after maintenance personnel receives fault message, the quality and mistake in respective feedback circuit can be judged according to corresponding positions
Type by inquiring about fault message, positions rapidly failure cause, and solution of adopting an effective measure；
114th, after sensor feedback self-test is completed normally, pass through if initializing successfully step driving circuit self-test completion, hold
Row device motor self-test completion passes through, and sensor-feedback loops self-test is by can just enter global init state, make six weeks
Closed loop is in original state, and each road atmospheric pressure value is in initial value, and condition is ready for motion control；
115th, after the overall situation initializes successfully, motion command is obtained, closed loop plays servo, calculates movable information and sets movement shape
State.
（115.1）If driving circuit is normal, host can just issue an enable signal by MCD, then notify that PAC is
Start motor to prepare, if started successfully, return to 1；Start failure, then return to zero, if failure, have a look at again either with or without
Extraneous signal if there is extraneous signal, attempts restarting；If starting successfully, green light is opened, comparator is enabled and interrupts, commutation clothes
Business program goes to complete automatically；
（115.2）After electric motor starting success, during normal operation, to ensure the reliable and stable work of work stage, in stroke pole
Extreme position devises electric limiting switch, and when reaching /V, limit switch cuts off the input signal of driving amplifier and defeated immediately
Go out electric current, motor is made to be in brake application stoping state, mechanical edge position is provided with bumper guard, will be minimized machine loss
It will not damage；
（115.3）In normal operation, constantly go detection electric current, if electric current just illustrate more than setting value it is problematic, on
Failure is passed, turns off corresponding IGBT/MOSFET, the flicker of red light indicator light；Detection motor temperature is constantly removed, if motor temperature surpasses
It crosses setting value and just illustrates problematic, upload temperature information, the flicker of motor temperature indicator light starts water cooling recirculated water and accelerates cooling
（115.4）During motor runs well, if master control borad provides stalling signal, PWM will be set to zero, and motor loses
Driving voltage can slow down at once, and motor is turned off after the 300ms that is delayed；
（115.5）If phase current sensing sensor 5,6 detects failure, interrupt signal is sent at this time, forbids inversion electric
Road 9 exports PWM, turns off inverter circuit 9, this set winding is out of service；If phase current sensing sensor 7,8 detects failure,
Interrupt signal is sent at this time, inverter circuit 10 is forbidden to export PWM, turns off inverter circuit 10, this set winding is out of service；If double three
Phase winding is faulty, then maintenance outage is needed to replace standby redundancy, and failure is resumed operation after solving；If abnormal feelings are measured
Condition, no matter which kind of situation, records trouble point, red light ceaselessly flickers, and fault message is issued host computer, by corresponding registers
Self-test is completed in position 1；Break down maintenance when, can be taking human as double three-phase operations or single three-phase operation be set, greatly by contactor
The big reliability for improving equipment；By inquiring about fault message, failure cause is positioned rapidly, and solution of adopting an effective measure；
（114.6）The position sensor is grating scale, and the 3rd output I or Z of grating scale signal provides mechanical location
Information needs to search mechanical zero before startup is first powered on, and is then not required in movement afterwards, unless powering off or sending out again
Raw failure according to the relation of grating scale signal sequence, calculates location information of the mover compared with stator, and then calculates electrical angle
Information draws suitable PWM controls switching tube, exports controllable three-phase alternating current, finally control speed, location information, reach essence
Close location control.
Motor is Halbach permanent magnet array symmetrical structures, i.e. moving-magnet linear motor in described device, can also be set
It counts into armature winding and is symmetrically distributed in stator both sides, i.e. moving-wire ring type linear motor；If stator, mover are arranged to special shape row
Journey, such as circular, arc is, it can be achieved that Rz, Rx, Ry multifreedom motion；In device motor be double three-phase permanent-magnetic linear motor, quilt
Control object is alternatively 9 phases, 12 phases, 15 equal polyphase linear motors；Or polyphase rotating machine；Motor is fitted in its structure in device
Suspending power is generated when increasing a set of winding, originally double three-phase windings generate thrust, can transform magnetic suspension motor as；
Fig. 5 described devices drive common three-phase linear motor, only one group of inverter work during normal operation, when the group is inverse
After becoming device failure, trouble point is recorded, red light ceaselessly flickers, and fault message is issued host computer, by corresponding registers
Position 1 completes self-test, according to self-detection result, that set inverse changing driving circuit where defective pipes is automatically shut down, at this time by PWM
The value received is set to zero, then automatically switches to another non-faulty inverter and continues to run with.The device can be used for track traffic, micro-
The fields such as electronics, precise numerical control machine, naval vessel propulsion, seawave power generation, aerospace.The control method may migrate to all
In kinetic control system.
Compared with prior art, mover of the invention is double three-phase windings iron-free core structures, and stator uses Ha Er Bakes
(Halbach) permanent magnet array, back iron design is very thin, uniformly distributed to be symmetrically fixed on mover both sides, can solve traditional permanent-magnet linear electricity
The technical issues of machine device reliability is not high.The control method of the driving device of permanent-magnetism linear motor provided by the invention, for
The defects of prior art, analysis improves efficiency, the concrete measure of reliability, using the straight motor of double three-phase permanent-magnetic as research object, point
It analyses driving circuit design, the automatic collection of trouble point, the principle of failover, improve Reliability Measures, be than the prior art more
For practicable Control for Dependability scheme.
The preferred embodiment of the simply present invention described in this specification, above example are only to illustrate the present invention
Technical solution rather than limitation of the present invention.All those skilled in the art pass through logic analysis, reasoning under this invention's idea
Or the limited available technical solution of experiment, it all should be within the scope of the present invention.
Claims (4)
1. a kind of control method of permanent-magnetism linear motor, which is characterized in that including：
Step 1: board power distribution cabinet powers on；
Step 2: after board workstation startup, start to initialize；
Step 3: driving circuit Intelligent self-checking；
Step 4: if the detection of driving circuit Intelligent self-checking has and only a set of inverter circuit pipe breaks down；
Step 5: after maintenance personnel's inquiry error information, when positioning only has a fault of converter, troubleshooting is carried out, returns to step
Rapid one；
Step 6: if the detection of driving circuit Intelligent self-checking there are two sets of inverter circuits to break down, failure pretreatment is carried out；
Step 7: maintenance personnel receive two sets of inverter circuits it is faulty in the case of, carry out troubleshooting, return to step 1；
Step 8: after driving circuit Intelligent self-checking is completed normally, implement performer motor self-test；
If Step 9: performer motor self-test, detection only has a winding failure, and fault-free is automatically switched to after uploading fault message
Machine winding carries out single rich ancestral's operation under this operating mode；
Step 10: after maintenance personnel checks performer motor fault message, positioning only has simplex winding fault message, carries out at failure
Reason, returns to step 1；
If Step 11: performer motor self-test, detection has double winding failure, performs step 6；
Step 12: after the completion of performer motor self-test, implement sensor feedback self-test；
Step 13: if abnormal conditions must be had by implementing sensor feedback self-test, failure pretreatment is carried out；
Step 14: after maintenance personnel checks sensor fault information, troubleshooting is carried out, returns to step 1；
Step 15: after sensor feedback self-test is completed normally, into global init state；
Step 16: after the overall situation initializes successfully, closed loop plays servo.
2. control method as described in claim 1, which is characterized in that after the step 4, if maintenance personnel is not handled,
Perform the step 8 in next step.
3. control method as described in claim 1, which is characterized in that after the step 9, if maintenance personnel is not handled,
Perform the step 12 in next step.
4. control method as described in claim 1, which is characterized in that the step 10 six, including：
(1) if the driving circuit is normal, the permanent-magnetism linear motor is started；
(2) electric limiting switch is started during normal operation；
(3) current value is detected, if current value is abnormal, turns off the driving circuit；The temperature of the permanent-magnetism linear motor is detected,
Start a water cooling equipment if temperature is higher than setting value；
(4) judge whether master control borad sends stop signal, if there is stop signal, the inverter circuit is set as zero；
(5) if phase current sensing is to failure, closing fault winding；
(6) according to the relation of grating scale signal sequence, location information of the mover compared with stator is calculated, and then calculates electric angle
Information is spent, suitable PWM controls switching tube is drawn, exports controllable three-phase alternating current.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410429462.5A CN105449976B (en) | 2014-08-28 | 2014-08-28 | The driving device and control method of a kind of permanent-magnetism linear motor |
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| CN109318722A (en) * | 2017-07-31 | 2019-02-12 | 上海蔚来汽车有限公司 | The motor driven systems of electric car |
| CN108155851A (en) * | 2018-01-29 | 2018-06-12 | 深圳市德诚泰电气技术有限公司 | A kind of redundant actuation system based on permanent magnetism air compressor machine |
| CN108768129A (en) * | 2018-06-08 | 2018-11-06 | 浙江大学 | High thrust double three-phase permanent-magnetic linear synchronized motor for cordless elevator lifting system |
| CN112953351B (en) * | 2021-02-18 | 2023-04-18 | 中国第一汽车股份有限公司 | Inverter system |
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