CN105449976A - Permanent-magnet linear motor drive device and control method - Google Patents
Permanent-magnet linear motor drive device and control method Download PDFInfo
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- CN105449976A CN105449976A CN201410429462.5A CN201410429462A CN105449976A CN 105449976 A CN105449976 A CN 105449976A CN 201410429462 A CN201410429462 A CN 201410429462A CN 105449976 A CN105449976 A CN 105449976A
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Abstract
The invention discloses a permanent-magnet linear motor drive device which is characterized in that the permanent-magnet linear motor comprises a stator and a rotor, and the rotor is composed of a core-free double-three-phase winding; one three-phase winding of the permanent-magnet linear motor is connected with a first inverter, and the other three-phase winding is connected with a second inverter; and the core-free double-three-phase winding is a double-Y winding.
Description
Technical field
The present invention relates to a kind of integrated circuit equipment manufacturing field, particularly relate to a kind of drive unit and control method of permanent-magnetism linear motor.
Background technology
In current lithographic equipment, by controlling work stage, large-area photoetching is realized to silicon chip multiexposure, multiple exposure, the basic function of work stage high speed, high accuracy, high frequency response, large stroke be unable to do without permanent-magnetism linear motor technology, can determine according to the version of precision workpiece stage during embody rule, micrometric displacement short stroke high accuracy should be met drive, realize Long travel high speed again and repeat running fix, realize the Key performance targets of high-resolution, high alignment precision, high yield, low maintenance rate.
For improving workpiece table system precision, realize work stage and do straight line cycle movement within the specific limits, various types of linear electric motors are adopted to drive, mainly contain: 1. brushless linear servomotor, 2. voice coil motor, 3. ultrasound piezoelectric ceramic motor, 4. Lorentz motors, its transmission mechanism eliminates tooth bar, leading screw, the intermediate mechanical conversion links such as chain, be called as " zero drives " or " Direct driver " technology, compared with indirect drive unit, there is following advantage: first, owing to not being mechanically connected between stator and mover, because this eliminating wearing and tearing, heat radiation, stuck problem, motion is more flexibly level and smooth, the feature such as the second, highlight high accuracy, high speed, high acceleration, response is fast, height of contour is low, three, both can meet the rectilinear motion of length range demands, moment of inertia in indirect drive unit can be solved again large, cause the problem of system dynamic characteristic difference.But the electric machine used by it all likely breaks down and causes lithographic equipment to be shut down, and causes very large economic loss.Therefore the choose reasonable of work stage drive motors and the optimal design of control program in mask aligner, has direct impact to raising work stage kinematic accuracy and reliability, should meet the requirement of property indices, meets the reliable and stable of motion again.
Motor driver technology used in current lithographic equipment, see on the whole, its efficiency, reliability all have larger deficiency, seriously govern further application.
Summary of the invention
In order to overcome defect of the prior art, the invention provides drive unit and control method that a kind of mover coil adopts the permanent-magnetism linear motor of two three-phase windings structural redundancy form.
In order to realize foregoing invention object, the present invention discloses a kind of drive unit of permanent-magnetism linear motor, it is characterized in that, this permanent-magnetism linear motor comprises stator and mover, this mover is made up of the two three-phase windings of non iron-core, three line winding switching first inverters of this permanent-magnetism linear motor, another three lines winding switching second inverter; The two three-phase windings of this non iron-core is double-Y shaped winding.
Further, this stator is made up of back iron and Ha Er Bake (Halbach) permanent magnet array.
The present invention also provides a kind of control system of permanent-magnetism linear motor, it is characterized in that, comprising: a location/velocity measuring system, for obtaining a set-point; One motor driver, for the permanent-magnetism linear motor be somebody's turn to do as claim 1 to 5 any one according to the output valve driving of this location/velocity measuring system; One interface system, for realizing mould/number between this location/velocity measuring system and this motor driver or D/A switch.
Further, this motor driver comprises a position transducer, and this position transducer is for obtaining the position of this permanent-magnetism linear motor.
Further, this location/velocity measuring system comprises a digital servo controller, as the input of this digital servo controller after this position transducer is added with this set-point.
Further, this motor driver also comprises a speed or current controller, for controlling speed or the position of this permanent-magnetism linear motor.
The present invention discloses a kind of control method of permanent-magnetism linear motor simultaneously, comprising: step one, board power distribution cabinet power on;
After step 2, board workstation startup, start initialization; Step 3, drive circuit Intelligent self-checking; If step 4 drive circuit Intelligent self-checking has detected and has only had a set of inverter circuit pipe to break down; After step 5, attendant's inquiry error information, when only there is a fault of converter location, carries out troubleshooting, get back to step one; If step 6 drive circuit Intelligent self-checking has detected two cover inverter circuits and all broken down, carry out Fault Pre process; Step 7, attendant receive under two cover inverter circuits all have failure condition, carry out troubleshooting, get back to step one; Step 8, drive circuit Intelligent self-checking complete normally, implement performer motor self-inspection; If the self-inspection of step 9 performer motor, detects and only have a winding failure, after uploading fault message, automatically switch to fault-free motor winding, carry out the rich ancestral of list under this operating mode and run; After step 10, attendant check performer motor fault message, location only has single around ancestral's fault message, carries out troubleshooting, gets back to step one; If the self-inspection of step 11 performer motor, has detected double winding fault, perform step 6; After step 12, performer motor self-inspection complete, implement sensor feedback self-inspection; If step 13 implements sensor feedback Autonomous test must have abnormal conditions, carry out Fault Pre process; After step 14, attendant check sensor fault information, carry out troubleshooting, get back to step one; Step 15, sensor feedback self-inspection complete normally, enter overall init state; After step 10 six, overall initialization success, closed loop plays servo;
After this step 4, if attendant does not process, then next step performs this step 8.
After this step 9, if attendant does not process, then next step performs this step 12.
This step 10 six, comprising:
(1) if this drive circuit is normal, this permanent-magnetism linear motor is started;
(2) an electric limiting switch is started during normal operation;
(3) detect current value, if current value is abnormal, turn off this drive circuit; Detect the temperature of this permanent-magnetism linear motor, if temperature is higher than set point, start a water cooling equipment;
(4) judge whether master control borad sends stop signal, if there is stop signal, then this inverter circuit is set as zero;
(5) if phase current sensing is to fault, then closing fault winding;
(6) according to the relation of grating scale signal sequence, calculate the positional information of mover relative to stator, and then calculate electrical degree information, draw suitable PWM control switch pipe, export controlled three-phase alternating current.
Compared with prior art, mover of the present invention is two three-phase windings non iron-core structures, stator adopts Ha Er Bake (Halbach) permanent magnet array, back iron design is very thin, uniform symmetry is fixed on mover both sides, can solve the technical problem that traditional permanent-magnetism linear motor device reliability is not high.The control method of the drive unit of permanent-magnetism linear motor provided by the invention, for the defect of prior art, analysis is raised the efficiency, the concrete measure of reliability, with the straight motor of double three-phase permanent-magnetic for research object, the automatic collection of analysis-driven circuit design, fault point, the principle of failover, raising Reliability Measures are Control for Dependability schemes more more practicable than prior art.
Accompanying drawing explanation
Can be further understood by following detailed Description Of The Invention and institute's accompanying drawings about the advantages and spirit of the present invention.
Fig. 1 is the vertical view of permanent-magnetism linear motor involved in the present invention;
Fig. 2 is the electric circuit inspection schematic diagram of permanent-magnetism linear motor involved in the present invention;
Fig. 3 is the control system schematic diagram of permanent-magnetism linear motor involved in the present invention;
Fig. 4 is the reliability control system overhaul flow chart of permanent-magnetism linear motor involved in the present invention;
Fig. 5 is the common three-phase linear Principle of Electric Engine figure of driving of permanent-magnetism linear motor involved in the present invention.
Embodiment
Specific embodiments of the invention are described in detail below in conjunction with accompanying drawing.
The drive unit of a kind of permanent-magnetism linear motor of the present invention and control method, it is the defect for prior art, analysis is raised the efficiency, the concrete measure of reliability, with the straight motor of a kind of double three-phase permanent-magnetic for research object, the automatic collection of analysis-driven circuit design, fault point, the principle of failover, raising Reliability Measures, detail a kind of practicable Control for Dependability scheme.
Described motor is characterized in that mover is two three-phase windings non iron-core structures, stator adopts Ha Er Bake (Halbach) permanent magnet array, back iron design is very thin, and uniform symmetry is fixed on mover both sides, solves the problem that traditional permanent-magnetism linear motor drive unit reliability is not high.
Technical problem solved by the invention can realize by the following technical solutions:
In device of the present invention, motor body structure vertical view as shown in Figure 1, mainly comprise two large divisions: stator and mover, back iron 1 and Ha Er Bake (Halbach) permanent magnet array 2 form stationary part jointly, and the two three-phase windings 3 of non iron-core is called subpart; Have structure simple, contactless operation, efficiency is high, high reliability, and response is fast, and precision is high, is widely used in the fields such as microelectronics equipment, communications and transportation, electromagnetic emission.
The main circuit topology of described device as shown in Figure 2, comprises described permanent-magnetism linear motor 4, two groups of three-phase bridge voltage source inverters 9 and 10.Double three-phase machine armature winding is double-Y shaped winding, and wherein armature winding A1B1C1 can be powered by the inverter circuit 9 of topological circuit as shown in the figure; Armature winding A2B2C2 is powered by inverter circuit 10.
For described electric machine, analyze the method improving system reliability, as shown in Figure 3, primarily of master control borad, location/velocity measuring system 30, motor driver 10, and interface system 20 forms its control system principle.Wherein location/velocity measuring system 30 comprises acquisition set-point 301, according to sensor interface 303 Data Control digital servo controller 302.Driver interface 302 carries out D/A converter 201 and changes rear speed or Current Control 101 motor 102.Carry out A/D converter 202 after position transducer 103 obtains motor position information change and be sent to sensor interface 303.Servo control circuit is the Double Loop Control System of a speed ring and position ring composition, and speed ring is completed by laser measurement system, and position ring is master control ring; realized by PID adjuster, be specifically described automatic detecting drive circuit, automatic detecting sensory feedback loop; automatic detection actuator; precognition failure problems, fault point gathers automatically, uploads fault-signal; fault is excised automatically; take preventive measures, realize safeguard protection, meet the performance index of photoetching high reliability, productive rate, precision.
In order to achieve the above object, the invention provides a kind of embodiment, this control method specifically comprises:
(1) motor body of described device: mover winding is provided with guiding rail, subpart and guiding rail are rigidly connected, guide rail is air-float guide rail or Magnetically suspended guide rail, raise the efficiency for reducing friction, increase reliability, the present invention adopts air supporting to add magnetic and floats mode as guide rail, subpart is mainly the two three-phase windings coil of non iron-core, armature winding is arranged in order into along stator electrical degree of being separated by, the electric current of displacement successively in phase place is passed into respectively in winding, have A1B1C1 with A2B2C2 to form Y type to be respectively connected, form two cover three-phase windings, the vector spatially displacement electrical degree each other of two three-phase windings, often overlap the inside winding spatially mutual deviation electrical degree that Y type connects, double three-phase permanent-magnetic linear electric motors eliminate leading screw, the mechanical intermediate link such as belt, contactless operation, dynamic response is fast, efficiency is high, high accuracy, the low-power device that can realize more low-voltage standard drives powerful load, 5 times, the 7 inferior harmonic waves compared with high order eliminate effectively, and motor force oscillation obviously reduces, and harmonic loss reduces, and pushing force density increases.The back iron that stator design is very thin or employing non iron-core technology, as can be seen from formula, along with the speed goes of object is fast, the iron loss problem of the linear electric motors of cored structure is more outstanding, when motor pole span is certain, the higher iron loss of frequency of motor is larger, and therefore non iron-core linear electric motors are without iron loss, still can keep higher operational efficiency in high regime; Described permanent-magnetism linear motor stator adopts Ha Er Bake (Halbach) permanent magnet array, does is the air gap flux density that this array produces conventional permanent magnet? doubly, therefore obtain higher power density, after motor miniaturization, still can produce larger actuating force.Stationary part symmetry be fixed on subpart both sides, be designed to bilateral double three-phase permanent-magnetic linear electric motors, effectively suppress the normal direction attraction of bearing in mover motion process, reduce mechanical strength, improve payload.
(2) after board main distribution unit powers on, if master control borad PPC, MCD mourn in silence, damage or crash, do not send out signal any and come, PAC does not receive any signal, and the value that now PWM receives is zero, forbidding comparator, timer, close all IGBT/MOSFET, give the green light;
After board workstation startup, initialization is just called and is started IGBT/MOSFET drive circuit self-check program, just to the quality of PA drive circuit IGBT/MOSFET self-inspection after self-inspection starts, the short circuit characteristic of test I GBT/MOSFET, check whether that pipe is breakdown, test pipe on state characteristic, whether can normally, check that whether the switching characteristic of pipe is enough precipitous if testing respectively; If recorded abnormal conditions, regardless of which kind of situation, record trouble point, red light ceaselessly glimmers, and fault message is issued host computer, by corresponding registers position 1, then can judge which damaged tubular according to corresponding positions, complete self-inspection, according to self-detection result, turn off that cover inverse changing driving circuit at defective pipes place, now the value that PWM receives is set to zero, another set of inverter normally runs; If do not receive the enabling signal of main frame, also carry out poll self-inspection start-up circuit;
(3) after board workstation startup, startup grating scale is just called in initialization, interferometer, limit switch, the self-check program of the sensor feedback circuit such as air pressure, the quality of self-inspection transducer, and assembling defect, electrically whether can normally, if recorded abnormal conditions, regardless of which kind of situation, record trouble point, red light ceaselessly glimmers, and fault message is issued host computer, by corresponding registers position 1, then quality and the type of error in respective feedback loop can be judged according to corresponding positions, complete self-inspection, for malfunction elimination provides strong support, prerequisite is provided for closed loop plays servo, if do not receive the enabling signal of main frame, also carry out poll self-inspection sensory feedback circuit,
(4) if drive closed loop circuit normal, and sensor-feedback loops normal after, just can carry out host computer control interface transmitting order to lower levels, the drive singal that motion control board MCD board Receiving Host is sent, after initialization success, then MCD board is converted to enable command notice PAC board, makes corresponding PA carry out enable preparation, motor is in and starts preparation; If start successfully, then return 1; Start unsuccessfully, then return zero, if failure, again have a look at and whether have extraneous signal, if there is extraneous signal, again attempt starting;
(5) start successfully; during normal operation; if a certain link of system is lacked of proper care or when breaking down, hypervelocity likely occurs work stage or out of control causing hits platform, for guaranteeing the work that work stage is reliable and stable; the electric limiting switch in extreme limit of travel Position Design; when arriving spacing, limit switch cuts off input signal and the output current of driving amplifier immediately, makes motor be in brake application stoping state; mechanical edge position is provided with bumper guard, and machine loss will be made to drop to minimum unlikely damage.
(6) in normal operation, constantly go to detect electric current, if electric current exceedes set point just illustrate there is problem, upload fault, turn off all IGBT/MOSFET, red light indicator light glimmers; Constantly go to detect motor temperature, if motor temperature exceedes set point just illustrate there is problem, upload temperature information, motor temperature indicator light glimmers, and starts water cooling recirculated water accelerating cooling;
(7) during normal operation, double winding all puts into operation, if when phase current sensing transducer 5,6 detects fault, now send interrupt signal, forbid that inverter circuit 9 exports PWM, turn off inverter circuit 9, this cover winding is out of service, and arrangement personnel are put into operation after overhauling recovery; If phase current sensing transducer 7,8 when detecting fault, now send interrupt signal, forbid that inverter circuit 10 exports PWM, turn off inverter circuit 10, this cover winding is out of service, arrangement personnel are put into operation after overhauling recovery, break down maintenance time, two three-phase operations or single three-phase operation artificially can be set by contactor, substantially increase the reliability of equipment.
The present invention specifically provides a kind of drive unit and control program of permanent-magnetism linear motor, analyzes a kind of reliability testing process scheme of described device, as shown in Figure 4, comprising:
101, after board power distribution cabinet powers on, motion control cabinet (MOCR) interior master control borad does not receive orders, without any signal, the value that pulse-width modulation (PWM) receives is zero, forbidding comparator, timer, turn off all igbts (IGBT)/metal-oxide layer semiconductcor field effect transistor (MOSFET);
102, after board workstation startup, start initialization, chosen axis parameter, reads machine constant, and obtain drive circuit state, actuator state, closed-loop measuring system mode, has prepared the flow processs such as servo, for motion control arranges initial condition.
103, after drive circuit Intelligent self-checking initialization success, just call and start IGBT/MOSFET self-check program, just to the quality of PA drive circuit IGBT/MOSFET self-inspection after self-inspection starts, the short circuit characteristic of test I GBT/MOSFET, whether checked whether that pipe is breakdown, test pipe on state characteristic, testing respectively can normally, check that whether the switching characteristic of pipe is enough precipitous, complete self-inspection; After completing self-inspection, if detected and only had a set of inverter circuit pipe to break down, record trouble point, red light ceaselessly glimmers, and fault message is issued host computer, by corresponding registers position 1, then which damaged tubular can be judged according to corresponding positions, automatically shut down that cover inverse changing driving circuit at defective pipes place, normal inverter circuit continues to run, and the equipment that do not affect runs;
104, after attendant's inquiry error information, location only has a fault of converter to enter 106.106, carry out repair and replacement according to the electronic devices and components life-span, also repair and replacement can not make it to enter actuator sensor circuitry self test program, normal inverter circuit is run; If do not receive the enabling signal of main frame, also carry out poll self-inspection start-up circuit.
All break down if 105 detect two cover inverter circuits, record trouble point, reports host computer, and the relevant position 1 of corresponding registers, reports PA fault; 107, attendant receives under two cover inverter circuits all have failure condition, now must carry out power-off repair and replacement, if do not receive the enabling signal of main frame, also carry out poll self-inspection start-up circuit;
108, drive circuit Intelligent self-checking completes normally, implements performer motor self-inspection.Logical one fixing voltage survey current signal, if electric current exceedes set point just illustrate there is motor short circuit in winding problem, if no signal current just illustrates motor winding open circuit problem, after self-inspection completes, if detect two three groups of faults, upload fault, turn off corresponding IGBT/MOSFET, red light indicator light glimmers, and must carry out repair and replacement under this operating mode;
If after 109 self-inspections complete, detect and only have a winding failure, after uploading fault message, automatically switch to fault-free motor winding, carry out the rich ancestral of list under this operating mode and run;
110, after attendant checks fault message, only there is single rich ancestral's fault message location, carries out repair and replacement according to the performer motor life-span, or ignores and make it to be in the normal non-fault list ancestral that haves mercy on and run, and enters sensor feedback self-inspection;
Technician receives under double winding all has failure condition, carries out 105 process, now must carry out power-off and change standby redundancy, then carry out the maintenance of fault winding;
111, after performer motor self-inspection completes, implement sensor feedback self-inspection: start to call the self-check program starting the sensor feedback circuit such as grating scale, interferometer, limit switch, air pressure, the quality of self-inspection transducer, and assembling defect, electrically whether can normally;
If 112 implement sensor feedback Autonomous test must have abnormal conditions, regardless of which kind of situation, record trouble point, red light ceaselessly glimmers, and fault message is issued host computer, by corresponding registers position 1, complete self-inspection, there is provided prerequisite for closed loop plays servo, this link is once break down, and after Failure elimination, the overall initialization of ability is successful; If do not receive the enabling signal of main frame, also carry out poll self-inspection sensory feedback circuit;
113, after attendant receives fault message, quality and the type of error in respective feedback loop can be judged according to corresponding positions, by inquiry fault message, rapid localizing faults reason, and solution of adopting an effective measure;
114, sensor feedback self-inspection completes normally, if the self-inspection of initialization success step drive circuit completes pass through, performer motor self-inspection completes to be passed through, and sensor-feedback loops self-inspection is passed through, just can enter overall init state, make six weeks closed loops be in initial condition, each road atmospheric pressure value is in initial value, is the ready condition of motion control;
115, after overall initialization success, obtain motion command, closed loop plays servo, calculates movable information and setting motion state.
(115.1) if drive circuit is normal, main frame just issues an enable signal by MCD, then notifies that PAC is that starter motor is prepared, if start successfully, then returns 1; Start unsuccessfully, then return zero, if failure, again have a look at and whether have extraneous signal, if there is extraneous signal, attempt restarting; If start successfully, open green light, enable comparator interrupts, and commutation service routine has gone automatically;
(115.2) after electric motor starting success, during normal operation, for guaranteeing the work that work stage is reliable and stable, the electric limiting switch in extreme limit of travel Position Design, when arriving spacing, limit switch cuts off input signal and the output current of driving amplifier immediately, makes motor be in brake application stoping state, mechanical edge position is provided with bumper guard, and machine loss will be made to drop to minimum unlikely damage;
(115.3) in normal operation, constantly go to detect electric current, if electric current exceedes set point just illustrate there is problem, upload fault, turn off corresponding IGBT/MOSFET, red light indicator light glimmers; Constantly go to detect motor temperature, if motor temperature exceedes set point just illustrate there is problem, upload temperature information, motor temperature indicator light glimmers, and starts water cooling recirculated water accelerating cooling
(115.4), during motor runs well, if master control borad provides stall signal, PWM will be set to zero, and motor loses driving voltage, can slow down at once, after time delay 300ms, motor be turned off;
(115.5) if when phase current sensing transducer 5,6 detects fault, now send interrupt signal, forbid that inverter circuit 9 exports PWM, turn off inverter circuit 9, this cover winding is out of service; If when phase current sensing transducer 7,8 detects fault, now send interrupt signal, forbid that inverter circuit 10 exports PWM, turn off inverter circuit 10, this cover winding is out of service; If two three-phase windings all has fault, then need maintenance outage to change standby redundancy, fault is resumed operation after solving; If recorded abnormal conditions, regardless of which kind of situation, record trouble point, red light has ceaselessly glimmered, and fault message is issued host computer, by corresponding registers position 1, completes self-inspection; Break down maintenance time, two three-phase operations or single three-phase operation artificially can be set by contactor, substantially increase the reliability of equipment; By inquiry fault message, rapid localizing faults reason, and solution of adopting an effective measure;
(114.6) described position transducer is grating scale, the 3rd of grating scale signal exports I or Z and provides mechanical position information, need to search mechanical zero before first time electrifying startup, then do not need in motion afterwards, unless power-off or break down again, according to the relation of grating scale signal sequence, calculate the positional information of mover relative to stator, and then calculate electrical degree information, draw suitable PWM control switch pipe, export controlled three-phase alternating current, final control rate, positional information, reach accurate positioning control.
In described device, motor is for being Halbach permanent magnet array symmetrical structure, i.e. moving-magnet linear electric motors, also can be designed to armature winding and be symmetrically distributed in stator both sides, be i.e. moving-wire ring type linear electric motors; If stator, mover are arranged to special shape stroke, as circular, arc, the multifreedom motions such as Rz, Rx, Ry can be realized; In device, motor is double three-phase permanent-magnetic linear electric motors, and controlled device also can be 9 phases, 12 phases, 15 equal polyphase linear motors; Or polyphase rotating machine; In device, motor suitably increases a set of winding generation suspending power in its structure, and originally two three-phase windings produces thrust, can transform magnetic suspension motor as;
Device described in Fig. 5 drives common three-phase linear motor, one group of inverter work is only had during normal operation, after this group inverter breaks down, record trouble point, red light ceaselessly glimmers, and fault message is issued host computer, by corresponding registers position 1, complete self-inspection, according to self-detection result, automatically shut down that cover inverse changing driving circuit at defective pipes place, now the value that PWM receives is set to zero, then automatically switch to another non-faulty inverter and continue to run.This device can be used for the fields such as track traffic, microelectronics equipment, precise numerical control machine, naval vessel propelling, seawave power generation, Aero-Space.This control method portable is in all kinetic control systems.
Compared with prior art, mover of the present invention is two three-phase windings non iron-core structures, stator adopts Ha Er Bake (Halbach) permanent magnet array, back iron design is very thin, uniform symmetry is fixed on mover both sides, can solve the technical problem that traditional permanent-magnetism linear motor device reliability is not high.The control method of the drive unit of permanent-magnetism linear motor provided by the invention, for the defect of prior art, analysis is raised the efficiency, the concrete measure of reliability, with the straight motor of double three-phase permanent-magnetic for research object, the automatic collection of analysis-driven circuit design, fault point, the principle of failover, raising Reliability Measures are Control for Dependability schemes more more practicable than prior art.
Just preferred embodiment of the present invention described in this specification, above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art, all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (12)
1. a permanent-magnetism linear motor, described permanent-magnetism linear motor comprises stator and mover, and described mover is made up of two three-phase windings, it is characterized in that, three line winding switching first inverters of described pair of three-phase windings, another three lines winding switching second inverter of described pair of three-phase windings.
2. permanent-magnetism linear motor as claimed in claim 1, is characterized in that, described mover is made up of the two three-phase windings of non iron-core.
3. permanent-magnetism linear motor as claimed in claim 2, is characterized in that, the two three-phase windings of described non iron-core is double-Y shaped winding.
4. permanent-magnetism linear motor as claimed in claim 1, it is characterized in that, described stator is made up of back iron and Ha Er Bake permanent magnet array.
5. a control system for permanent-magnetism linear motor, is characterized in that, comprising: a location/velocity measuring system, for obtaining a set-point; One motor driver, for driving the permanent-magnetism linear motor as described in claim 1 to 5 any one according to the output valve of described location/velocity measuring system; One interface system, for realizing mould/number between described location/velocity measuring system and described motor driver or D/A switch.
6. the control system of permanent-magnetism linear motor as claimed in claim 5, it is characterized in that, described motor driver comprises a position transducer, and described position transducer is for obtaining the position of described permanent-magnetism linear motor.
7. the control system of permanent-magnetism linear motor as claimed in claim 5, it is characterized in that, described location/velocity measuring system comprises a digital servo controller, as the input of described digital servo controller after described position transducer is added with described set-point.
8. the control system of permanent-magnetism linear motor as claimed in claim 5, it is characterized in that, described motor driver also comprises a speed or current controller, for controlling speed or the position of described permanent-magnetism linear motor.
9. a control method for permanent-magnetism linear motor, is characterized in that, comprising:
Step one, board power distribution cabinet power on;
After step 2, board workstation startup, start initialization;
Step 3, drive circuit Intelligent self-checking;
If step 4 drive circuit Intelligent self-checking has detected and has only had a set of inverter circuit pipe to break down;
After step 5, attendant's inquiry error information, when only there is a fault of converter location, carries out troubleshooting, get back to step one;
If step 6 drive circuit Intelligent self-checking has detected two cover inverter circuits and all broken down, carry out Fault Pre process;
Step 7, attendant receive under two cover inverter circuits all have failure condition, carry out troubleshooting, get back to step one;
Step 8, drive circuit Intelligent self-checking complete normally, implement performer motor self-inspection;
If the self-inspection of step 9 performer motor, detects and only have a winding failure, after uploading fault message, automatically switch to fault-free motor winding, carry out the rich ancestral of list under this operating mode and run;
After step 10, attendant check performer motor fault message, only there is simplex winding fault message location, carries out troubleshooting, gets back to step one;
If the self-inspection of step 11 performer motor, has detected double winding fault, perform step 6;
After step 12, performer motor self-inspection complete, implement sensor feedback self-inspection;
If step 13 implements sensor feedback Autonomous test must have abnormal conditions, carry out Fault Pre process;
After step 14, attendant check sensor fault information, carry out troubleshooting, get back to step one;
Step 15, sensor feedback self-inspection complete normally, enter overall init state;
After step 10 six, overall initialization success, closed loop plays servo.
10. control method as claimed in claim 9, it is characterized in that, after described step 4, if attendant does not process, then next step performs described step 8.
11. control methods as claimed in claim 9, it is characterized in that, after described step 9, if attendant does not process, then next step performs described step 12.
12. control methods as claimed in claim 9, it is characterized in that, described step 10 six, comprising:
(1) if described drive circuit is normal, described permanent-magnetism linear motor is started;
(2) an electric limiting switch is started during normal operation;
(3) detect current value, if current value is abnormal, turn off described drive circuit; Detect the temperature of described permanent-magnetism linear motor, if temperature is higher than set point, start a water cooling equipment;
(4) judge whether master control borad sends stop signal, if there is stop signal, then described inverter circuit is set as zero;
(5) if phase current sensing is to fault, then closing fault winding;
(6) according to the relation of grating scale signal sequence, calculate the positional information of mover relative to stator, and then calculate electrical degree information, draw suitable PWM control switch pipe, export controlled three-phase alternating current.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410429462.5A CN105449976B (en) | 2014-08-28 | 2014-08-28 | The driving device and control method of a kind of permanent-magnetism linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410429462.5A CN105449976B (en) | 2014-08-28 | 2014-08-28 | The driving device and control method of a kind of permanent-magnetism linear motor |
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| Publication Number | Publication Date |
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| CN105449976A true CN105449976A (en) | 2016-03-30 |
| CN105449976B CN105449976B (en) | 2018-06-01 |
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| CN201410429462.5A Active CN105449976B (en) | 2014-08-28 | 2014-08-28 | The driving device and control method of a kind of permanent-magnetism linear motor |
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| CN108155851A (en) * | 2018-01-29 | 2018-06-12 | 深圳市德诚泰电气技术有限公司 | A kind of redundant actuation system based on permanent magnetism air compressor machine |
| CN108768129A (en) * | 2018-06-08 | 2018-11-06 | 浙江大学 | High thrust double three-phase permanent-magnetic linear synchronized motor for cordless elevator lifting system |
| WO2019024712A1 (en) * | 2017-07-31 | 2019-02-07 | 上海蔚来汽车有限公司 | Motor drive system of electric vehicle |
| CN112953351A (en) * | 2021-02-18 | 2021-06-11 | 中国第一汽车股份有限公司 | Inverter system |
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